Abstract: A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity: in a first method step, an access opening, connecting the first cavity to surroundings of the micromechanical component, being formed in the substrate or in the cap; in a second method step, the first pressure and/or the first chemical composition being adjusted in the first cavity; in a third method step, the access opening being sealed by introducing energy and heat into an absorbing part of the substrate or the cap with the aid of a laser; in a fourth method step, a recess being formed, and/or an elevation being formed, and/or a reflection area being formed, and/or an absorption area being formed.

Abstract: A micromechanical component includes a substrate that extends along a main extension plane of the micromechanical component, the micromechanical component including a drive mass which is suspended on the substrate via a drive spring of the micromechanical component so as to be able to move relative to the substrate, the micromechanical component including a test mass that is movably suspended relative to the drive mass, the drive spring being disposed in such a way that the drive mass and/or the test mass surround(s) the drive spring at least in part essentially parallel to the main extension plane.

Abstract: Multiple-axis resonant accelerometers are based on detection of resonance frequency changes of one or more electrostatically-driven resonator masses due to electrostatic gap changes under acceleration. Specifically, one or more resonator masses are configured to resonate simultaneously in different directions associated with different axes of sensitivity (e.g., X, Y, and/or Z axes). The motion of each resonator mass is monitored through one or more electrostatically-coupled sense electrodes. An acceleration along a particular axis of sensitivity causes a small change in the electrostatic gap(s) between the corresponding resonator mass(es) and the sense electrode(s) associated with that axis of sensitivity, and this electrostatic gap change manifests as a small change in the resonance frequency of the resonator from which an accelerometer output signal can be produced.

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

Abstract: A MEMS device includes at least one proof mass, the at least one proof mass is capable of moving to contact at least one target structure. The MEMS device further includes at least one elastic bump stop coupled to the proof mass and situated at a first distance from the target structure. The MEMS device additionally includes at least one secondary bump stop situated at a second distance from the target structure, wherein the second distance is greater than the first distance, and further wherein the at least one elastic bump stop moves to reduce the first distance when a shock is applied.

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition.

Abstract: According to one aspect, embodiments herein provide a whole angle gyroscope comprising a central point, at least one mass arranged symmetrically about the central point, a plurality of transducers, each configured to perform at least one of driving and sensing motion of the at least one mass, and a processor coupled to the plurality of transducers, the processor configured to operate the plurality of transducers to drive the at least one mass in at least a first vibratory mode and a second vibratory mode, identify a rate dead zone of the whole angle gyroscope, and operate the plurality of transducers to apply a force to the at least one mass to reduce the identified rate dead zone of the whole angle gyroscope.

Abstract: A gyro sensor apparatus includes a driving section that supplies a driving signal, which is for vibrating a sensing element of a vibration-type gyro sensor in a drive axis direction, to the sensing element, and a processing unit that receives a first vibration signal having an amplitude proportional to a driving vibration amplitude, which is an amplitude of vibration in the drive axis direction of the sensing element and a second vibration signal having an amplitude proportional to Coriolis force generated in the sensing element due to an angular velocity of the sensing element. The processing unit is configured to calculate a ratio of Coriolis force to the driving vibration amplitude based on the first vibration signal and the second vibration signal and output a result of the calculation as a result of detection of the angular velocity of the sensing element.

Abstract: Various methods and systems are provided for multifunctional denture systems. In one example, among others, a multifunctional oral prosthetic system includes an oral prosthetic device that may be located in an oral cavity. The oral prosthetic device includes a plurality of sensors and an internal module in communication with the plurality of sensors. The internal module is configured to provide sensor data corresponding to at least one of the plurality of sensors to an external processing unit when located in an oral cavity.

Abstract: A capacitive force sensor that is inexpensive but highly sensitive, and hardly affected by temperature changes and in-phase noise in the use environment is provided. a capacitive force sensor that is inexpensive but highly sensitive, and is hardly affected by temperature changes and in-phase noise in the use environment. A force sensor includes: a deformable body having a force receiving portion and a fixed portion; a displacement body that is connected to the deformable body, and is displaced by elastic deformation caused in the deformable body; and a detection circuit that detects an applied force, in accordance with the displacement caused in the displacement body. The deformable body includes a tilting portion that has a longitudinal direction and is disposed between the force receiving portion and the fixed portion. The displacement body includes displacement portions that are connected to the tilting portion and are displaced by tilting movement of the tilting portion.

Abstract: According to one embodiment, a vibration device is disclosed. The device includes a mass unit including a mass unit, a catch and release mechanism to catch and release the mass unit and including an electrode unit, and a control unit to control catching and releasing of the mass unit by a voltage to be applied between the mass unit and the electrode unit. The control unit controls the voltage such that a voltage greater than a steady voltage is to be applied between the mass and electrode units before the steady voltage is applied between the mass and electrode units. The voltage greater than the steady voltage is to be applied in at least part of a period during which the mass unit is vibrating after the mass unit is released from the catch and release mechanism.

Abstract: A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.

Abstract: Embodiments of the present disclosure can include a method of operating a vibratory gyroscope, the gyroscope comprising a plurality of excitation and readout electrodes, and defined by a first vibratory mode and a second vibratory mode, and the method comprising: introducing an input signal to a first pair of excitation electrodes; multiplying the input signal by scaling coefficients; applying these scaled input signals to a first pair of excitation electrodes; measuring output signals at the first and second pair of readout electrodes that correspond to the first and second vibratory modes respectively; multiplying the output signals by readout scaling coefficients to form scaled output signals, the sums of which provide first and second vibratory mode readout signals; and adjusting the scaling coefficients to maximize the first and minimize the second vibratory mode readout signals.

Abstract: A system and/or method for utilizing quadrature signals, for example in a MEMS gyroscope, to control drive signal characteristics (e.g., amplitude, etc.). As a non-limiting example, a quadrature signal in a MEMS gyroscope may be isolated and/or processed to generate a drive signal that is used to drive a proof mass. Such a quadrature signal may, for example, be obtained passively as part of general Coriolis signal processing. Also for example, such a quadrature signal may be actively created and/or obtained through the use of electrical and/or mechanical features.

Abstract: A continuous or distributed resonator geometry is defined such that the fabrication process used to form a spring mechanism also forms an effective mass of the resonator structure. Proportional design of the spring mechanism and/or mass element geometries in relation to the fabrication process allows for compensation of process-tolerance-induced fabrication variances. As a result, a resonator having increased frequency accuracy is achieved.

Abstract: A vibrating-mass gyroscope system includes a substantially planar vibrating-mass including opposite first and second surfaces and electrodes that extend longitudinally in a periodic pattern across the first and/or second surfaces. The electrodes include sets of drive and sense electrodes that are capacitively coupled to respective matching sets of drive and sense electrodes associated with a housing and which are separated from and facing the respective first and second surfaces. A gyroscope controller generates a drive signal provided to one of the array of drive electrodes and the substantially matching array of drive electrodes to provide for in-plane periodic oscillatory motion of the vibrating-mass, and generates a force-rebalance signal that is provided to one of the array of sense electrodes and the substantially matching array of sense electrodes to calculate rotation of the vibrating-mass gyroscope system about an input axis.

Abstract: A microelectromechanical system (MEMS) sensor includes a MEMS layer that includes fixed and movable electrodes. In response to an in-plane linear acceleration, the movable electrodes move with respect to the fixed electrodes, and acceleration is determined based on the resulting change in capacitance. A plurality of auxiliary electrodes are located on a substrate of the MEMS sensor and below the MEMS layer, such that a capacitance between the MEMS layer and the auxiliary loads changes in response to an out-of-plane movement of the MEMS layer or a portion thereof. The MEMS sensor compensates for the acceleration value based on the capacitance sensed by the auxiliary electrodes.

Abstract: A resonating measurement system having at least a microelectromechanical system (MEMS) and/or nanoelectromechanical system (NEMS) is provided, including an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr, and at least one optical element having an optical index sensitive to displacement of the at least one resonating elementl; excitation circuitry configured to excite the at least one resonating element at at least at one operating frequency of fm; an injection device configured to inject a light beam, having an intensity modulated at frequency of f1=fm+?f, in the optomechanical device; and a photodetection device configured to measure an intensity of a light beam transmitted from the optomechanical device, the intensity having at least one component at frequency of ?f.

Abstract: A self-test method by rotating the proof mass at a high frequency enables testing the functionality of both the drive and sense systems at the same time. In this method, the proof mass is rotated at a drive frequency. An input force which is substantially two times the drive frequency is applied to the actuation structures to rotate the proof mass of the gyroscope around the sensitive axis orthogonal to the drive axis. An output response of the gyroscope at the drive frequency is detected by a circuitry and a self-test response is obtained.

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Abstract: An angular velocity acquisition device includes a movable body, a drive electrode to which a drive voltage is applied to vibrate the movable body in a first direction, at least one stopper that stops the movable body at a predetermined position, a hold electrode which receives a hold voltage to hold the movable body at the predetermined position, a detection unit that detects a predetermined physical quantity depending on an amplitude of the vibration of the movable body in a second direction based on a Coriolis force acting on the movable body that vibrates in the first direction, and an angular velocity calculation unit that calculates an angular velocity of the movable body based on the predetermined physical quantity detected by the detection unit.

Abstract: A voltage sensor includes an oscillator that has a circular or roughly circular shape and is supported by a mechanical support member, a fixed electrode that has a predetermined gap between the oscillator and the fixed electrode, and a drive electrode that is placed at a position different from the fixed electrode across the oscillator, and to which an AC drive voltage is applied to make the oscillator oscillate. In the voltage sensor, an electrostatic attractive force acts on the oscillator by applying a voltage to the fixed electrode, and a resonance frequency of the oscillator changes.

Abstract: A microelectromechanical device comprising a mass, an electromechanical transducer configured to convert, after damping the mass during a first damping period, displacement of the mass in the first and second directions into corresponding first and second electrical signals during corresponding first and second conversion time periods, a derivative unit configured to generate first and second control signals indicative of the velocity of the mass in the first and second direction, and a controller for providing the first and second control signals to respective first and second one or more electrodes of the electromechanical transducer for simultaneously damping the mass in the first and second directions with a first and second damping forces corresponding to the first and second velocity during the damping time period.

Abstract: An integrated MEMS inertial sensing device can include a MEMS inertial sensor with a drive loop configuration overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS inertial sensor. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. This incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.

Abstract: At a processor of a camera-equipped electronic device, a first data set generated at a sensor incorporated within a camera module is obtained, and a second data set generated at one or more sensors external to the camera module is obtained. Based on the first set and second data sets, a first set of control signals is transmitted to the camera module. At a disturbance rejection controller integrated within the camera module, a second set of control signals is generated, based on the first set of control signals and on a third set of data obtained from the sensor incorporated within the camera module. The second set of control signals is transmitted to an actuator, which causes a displacement of a camera lens.

Abstract: A compact Inertial Wave Angle Gyroscope (IWAG) is disclosed without zero rate drift due to residual asymmetry comprises antisymmetric velocity feedback of sufficient magnitude to produce a continual self-precession of its vibration pattern to overcome any rate threshold and average the effects of its residual asymmetry on zero rate drift to zero over each revolution of the precession pattern in the case. The inertial rotation input is determined from the measured total precession rate by removing the computed self-precession rate.

Abstract: A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.

Abstract: A gyroscope includes four drive masses and four sense masses. Each drive mass is adjacent to two other drive masses and opposite the fourth drive mass, and each sense mass is adjacent to two other sense masses and opposite the fourth sense mass. Each drive mass may oscillate in a manner that is perpendicular to its adjacent drive mass and parallel and anti-phase to its opposite mass. The sense motion of the each sense mass may be coupled in a manner that prevents motion due to linear acceleration or angular acceleration.

Abstract: A MEMS accelerometer incorporating a metrology element to directly measure minute changes in measurement baseline. In particular, the MEMS accelerometer incorporates a metrology bar (MB). Embodiments also relate to stress isolation into the sensor design to isolate the sensitive areas of the chip (i.e., the metrology baseline and the proof mass mounting points) from outside stress.

Abstract: A gyroscope includes: a support frame; a circular oscillator; a flexible support structure supporting by suspension the circular oscillator to the support frame; a drive mechanism configured to induce the circular oscillator into a two-dimensional driving oscillation; a plurality of movable sections disposed at a perimeter of the circular oscillator; a plurality of digital proximity switches, each disposed near a respective movable section and around the perimeter of the circular oscillator; and a processor. The two-dimensional driving oscillation is modified responsive to an angular rotation of the support frame and the circular oscillator. The processor is operable to determine the position of each movable section, to determine the plurality of variable oscillation parameters for each oscillation of the modified drive oscillation and to determine the angular rotation of the support frame and the circular oscillator via a parametric system identification method.

Abstract: An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

Abstract: An angular rate sensor includes four Coriolis masses, configured such that the Coriolis masses move along perpendicular drive and sense axes, and a lever mechanism having first and second sets of levers. The first set of levers is coupled outside a boundary of the Coriolis masses, and the second set of levers is coupled within a boundary of the first set of levers and between the Coriolis masses. The second set of levers is configured to produce an anti-phase drive mode motion of the Coriolis masses along the drive axis. The first set of levers is configured to allow an anti-phase sense mode motion of the Coriolis masses along the sense axis responsive to the angular rate sensor rotating around an input axis that is perpendicular to the drive and sense axes. The first and second sets of levers are configured to constrain an in-phase motion of the Coriolis masses.

Abstract: According to one embodiment, an angular velocity acquisition device includes a movable body that vibrates in a first direction and in a second direction that is based on Coriolis force and includes a movable electrode portion extending in the second direction, a hold electrode that extends in the second direction and includes a fixed electrode portion opposite to the movable electrode portion across a gap, and a stopper that is provided between the fixed electrode portion and the movable electrode portion and includes an end portion closer to the movable electrode portion than a surface of the fixed electrode portion facing the movable electrode portion.

Abstract: The present invention is related to a triaxial micro-electromechanical gyroscope, comprising: a ring-shaped detection capacitor located at the center; two sets of driving capacitors located at outer sides of the ring-shaped detection capacitor and symmetrically distributed at two sides of an origin along a y-axis; two sets of second detection capacitors located at the outer sides of the ring-shaped detection capacitor respectively and symmetrically distributed at the two sides of the origin along an x-axis; and a linkage part connected with movable polar plates of the driving capacitors, movable polar plates of the second detection capacitors, and an outer edge of ring-shaped upper polar plates of the ring-shaped detection capacitor, respectively. The triaxial micro-electromechanical gyroscope provided by the present invention adopts a single structure design, and integrates capacitive electrostatic driving and differential capacitive detection.

Abstract: According to one aspect, embodiments herein provide a gyroscope comprising an axially symmetric structure, and a plurality of transducers, each configured to perform at least one of driving and sensing motion of the axially symmetric structure, wherein the plurality of transducers is configured to drive the axially symmetric structure in at least a first vibratory mode and a second vibratory mode, and wherein the gyroscope is implemented on a hexagonal crystal-based substrate.

Abstract: A circuit comprising a microelectromechanical (MEMS) gyroscope and a gain circuit coupled with the MEMS gyroscope. The gain circuit is configured to receive a digitized drive signal based at least in part on a digitized drive voltage amplitude of the MEMS gyroscope. The gain circuit is also configured to determine a percentage change in quality factor of the MEMS gyroscope based at least in part on the digitized drive signal and a stored trim value of the MEMS gyroscope. The gain circuit is also configured to compensate for an effect of a change in the quality factor of the MEMS gyroscope based at least in part on the percentage change in quality factor.

Abstract: A microelectromechanical device structure comprises a supporting structure wafer. A cavity electrode is formed within a cavity in the supporting structure wafer. The cavity electrode forms a protruding structure from a base of the cavity towards the functional layer, and the cavity electrode is connected to a defined electrical potential. The cavity electrode comprises a silicon column within the cavity in the supporting structure wafer, which is partially or entirely surrounded by a cavity. One or more cavity electrodes may be utilized for adjusting a frequency of an oscillation occurring within the functional layer.

Abstract: A microelectromechanical system (MEMS) accelerometer is described. The MEMS accelerometer is arranged to limit distortions in the detection signal caused by displacement of the anchor(s) connecting the MEMS accelerometer to the underlying substrate. The MEMS accelerometer may include masses arranged to move in opposite directions in response to an acceleration of the MEMS accelerometer, and to move in the same direction in response to displacement of the anchor(s). The masses may, for example, be hingedly coupled to a beam in a teeter-totter configuration. Motion of the masses in response to acceleration and anchor displacement may be detected using capacitive sensors.

Abstract: A method for optimizing the switch-on time of a Coriolis gyroscope (1) having a mass system (100) which can be excited to an excitation oscillation of the Coriolis gyroscope (1) parallel to a first axis (x), wherein a deflection of the mass system on account of a Coriolis force along a second axis (y) which is provided perpendicular to the first axis (x) can be verified using an output signal from the Coriolis gyroscope, comprises determining the amplitude (A) of the excitation oscillation of the Coriolis gyroscope at a defined time, determining the output signal (S) from the Coriolis gyroscope at the defined time, and generating a normalized output signal (S0) from the Coriolis gyroscope by multiplying the determined output signal (S) by the quotient of the amplitude (A0) of the excitation oscillation of the Coriolis gyroscope in the steady state and the determined amplitude (A).

Abstract: A physical sensor comprising a substrate, a movable mass, said mass being able to be moved by an external force, a first optical resonator, a light wave guide for measurement and a light wave guide for detection, a rigid plate which are able to modify the optical resonance frequency of said optical resonator by moving closer and away the same, a lever arm rotatably hinged to the substrate by a pivot connection and the mass being movably integral with the transmitting means, the rigid plate being disposed relative to the mass and to the pivot connection such that the lever arm transmits to the rigid plate, in an amplified manner, the displacement of the mass.

Abstract: Systems and techniques are described for matching the resonance frequencies of multiple resonators. In some embodiments, a resonator generates an output signal reflecting the resonator's response to an input drive signal and an input noise signal. The output signal is then compared to the noise signal to derive a signal representative of the resonance frequency of the resonator. Comparing that signal to the output signal of a second resonator gives an indication of whether there is a difference between the resonance frequencies of the two resonators. If there is, one or both of the resonators may be adjusted. In this manner, the resonance frequencies of resonators may be matched during normal operation of the resonators.

Abstract: A gyroscope includes a vibratory structure, and a control mechanism including at least a first electrode, and at least a second electrode adjacent the first electrode, wherein the vibratory structure is separated from the control mechanism by a gap, wherein to drive a vibration in the vibratory structure, the control mechanism is configured to apply an alternating electrical voltage between the first electrode and the second electrode, and wherein to sense motion in the vibratory structure, the control mechanism is configured to apply a direct current voltage bias between the first electrode and the second electrode.

Abstract: A micromechanical structure for an acceleration sensor, including a seismic mass that is constituted definedly asymmetrically with reference to the rotational Z axis of the structure of the acceleration sensor, spring elements that are fastened on the seismic mass and on at least one fastening element, a rotational motion of the seismic mass being generatable by way of the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted substantially orthogonally to the rotational Z axis.

Abstract: An inertial sensor includes a substantially planar, rotationally symmetric proof mass, a capacitive pick-off circuit connected to the proof mass, an electrical drive circuit connected to the four pairs of electrodes. The drive circuit is arranged to apply first in-phase and anti-phase pulse width modulation (PWM) drive signals with a first frequency to the first and third electrode pairs, such that one electrode in each pair is provided with in-phase PWM drive signals and the other electrode in each pair is provided with anti-phase PWM drive signals and to apply second in-phase and anti-phase PWM drive signals with a second frequency, different to the first frequency, to the second and fourth electrode pairs, such that one electrode in each pair is provided with in-phase PWM drive signals and the other electrode in each pair is provided with anti-phase PWM drive signals.

Abstract: A microelectromechanical system (MEMS) gyroscope device includes a substrate having a surface parallel to a plane; first and second proof masses driven to slide back and forth past one another in a first directional axis of the plane, where the first and second proof masses respectively have a first and second recess in a respective side closest to the other proof mass; a pivot structure coupled to the first proof mass within the first recess and to the second proof mass within the second recess; an anchor between the first and second recesses and coupled to a mid-point of the pivot structure; and third and fourth proof masses driven to move toward and away from one another in a second directional axis of the plane that is perpendicular to the first directional axis; where the proof masses move in response to angular velocity in one or more directional axes.

Abstract: A dual-mode actuation and sensing circuit actuates both modes of an axisymmetric gyroscope and senses both outputs thereof. The sum of the two outputs provides a self-sustaining closed-loop oscillation signal, while the difference of the two mode outputs is used for extracting differential rate information while rejecting the common-mode bias terms of the gyroscope to provide online bias calibration. The proposed system and method facilitates scale factor calibration of an axisymmetric gyroscope. Furthermore, the difference output of the dual-mode gyroscope can provide a mode-split indicator signal which can be used to automatically match the gyroscope modes.

Abstract: A toroidal ring gyroscope with a robust outer perimeter anchor and a distributed suspension system. The vibrational energy in the design is concentrated towards the innermost ring, and the device is anchored at the outer perimeter. The distributed support structure prevents vibrational motion propagating to the outer anchor, which helps trap the vibrational energy within the gyroscope and provides a Q-factor of >100,000 at a compact size of 1760 ?m. Due to the parametric pumping effect, energy added to each mode is proportional to the existing amplitude of the respective mode. As a result, errors associated with finding the orientation of the standing wave and x-y drive gain drift are bypassed. The toroidal ring gyroscope can be fabricated using any standard silicon on insulator process. Due to the high Q-factor and robust support structure, the device can potentially be instrumented in high-g environments that require high angular rate sensitivity.

Abstract: One aspect of the present invention increases or reduces an amplitude or amplitudes of a steering angle sensor output signal and/or a motor rotational angle signal, and outputs a motor instruction signal based on a substitute signal for a torque sensor output signal that is calculated based on at least one of the steering angle sensor output signal and the motor rotational angle signal that is subjected to the adjustment of the amplitude thereof, and the other of the steering angle sensor output signal and the motor rotational angle signal, when an abnormality is detected in the torque sensor output signal.

Abstract: An electronic device includes: a base; a support unit that includes first and second attaching portions disposed to be separated from each other in a first direction via a middle portion having a conductive pattern formed from a conductive member and is attached to the base in the first and second attaching portions; and a functional element that is supported by the support unit. The conductive pattern includes a broad width portion having a width W1 in a second direction orthogonal to the first direction and a narrow width portion having a width W2 narrower than the width W1 in a plan view.