Abstract: Dimensions of a disk resonator gyroscope along the radial line of a resonator can be varied to engineer radial stiffness. An apparatus may comprise: a resonator comprising a plurality of concentric circumferential segments and a plurality of slots formed between the concentric circumferential segments; and at least one support supporting the resonator, wherein a width, in a radial direction, of each of the concentric circumferential segments is varied depending on a distance from the at least one support to the each of the concentric circumferential segments. The apparatus may further comprise radial segments connecting between the concentric circumferential segments. The concentric circumferential segments may have a ring shape.

Abstract: A vibration type angular velocity sensor includes a substrate having a surface; a plurality of fixation parts, a plurality of weights, two linear drive beams, a plurality of supporting members, a drive part and a detection part. The two linear drive beams are disposed on opposite sides of the weights in one direction so as to be connected to each other through the weights. The supporting members join the fixation parts to the drive beams. The drive part drives the drive beams to vibrate. The detection part generates an electric output according to displacement of the weights caused by an angular velocity applied thereto while the drive beams are being driven to vibrate. The fixation parts are disposed between the two linear drive beams.

Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.

Abstract: A vibrator device includes a base, a first relay substrate mounted on the base, a second relay substrate mounted on the first relay substrate, and a vibrator element mounted on the second relay substrate, in which the second relay substrate is disposed between the first relay substrate and the vibrator, and the second relay substrate includes a terminal that is electrically coupled to the vibrator element and is positioned in a region overlapping with the first relay substrate and not overlapping the vibrator element in a plan view. The vibrator device being configured to reduce a mounting stress applied to a vibrator element and to reduce frequency variation of the vibrator element due to the mounting stress, in a case of mounting on a package after adjusting a frequency of the vibrator element.

Abstract: An electronic device includes a top panel configured to have an operation surface; a detection circuit configured to detect a position of an operation input on the operation surface; a vibrating circuit configured to be attached to the top panel to generate vibration on the operation surface; a control circuit configured to drive the vibrating circuit by a driving signal for generating natural vibration of an ultrasonic wave band on the operation surface, in which the driving of the vibrating circuit is performed such that an intensity of the natural vibration changes in accordance with the position of the operation input to the operation surface and a temporal change degree of the position; and a damping member configured to abut against a position that corresponds to a node of a standing wave generated by the natural vibration on a surface opposite to the operation surface of the top panel.

Abstract: An oscillator includes a resonator, sustaining circuit and detector circuit. The sustaining circuit receives a sense signal indicative of mechanically resonant motion of the resonator generates an amplified output signal in response. The detector circuit asserts, at a predetermined phase of the amplified output signal, one or more control signals that enable an offset-reducing operation with respect to the sustaining amplifier circuit.

Abstract: A MEMS gyroscope can include a supporting structure and a mobile mass elastically suspended from the supporting structure in a driving direction and in a sensing direction, mutually perpendicular. A driving structure is coupled to the mobile mass for controlling a driving movement of the mobile mass in the driving direction at a driving frequency. A driving-frequency tuning electrode, distinct from the driving structure, faces the mobile mass. A driving-frequency tuner electrically coupled to the driving-frequency tuning electrode for supplying a tuning voltage to the driving-frequency tuning electrode.

Abstract: A sensor structure and a method for operating a vibrating sensor of angular velocity comprising a rotor mass and two linearly moving masses is disclosed. The sensor structure and method comprises a rotor mass, two linearly moving masses, and two T-shaped levers each coupled with the two linearly moving masses and to the rotor mass. The T-shaped levers enable the rotor mass and the two linearly moving masses to be excited into an anti-phase primary mode, where the direction of angular momentum of the rotor mass is opposite to the direction of angular momenta of the linearly moving masses. Angular momenta of the rotor mass and the linearly moving masses cancel each other to a high extent, so that the total sum of angular momentum of the structure is very small. Nominal frequency of the anti-phase primary mode is distinctively low as compared to nominal frequencies of other possible primary modes, such as a parallel phase primary mode.

Abstract: A navigation system includes a Coriolis vibratory gyroscope, a voltage input supply, and a controller. The voltage input supply is configured to supply a first voltage input to the Coriolis vibratory gyroscope at a first bias voltage, and supply a second voltage input to the Coriolis vibratory gyroscope at a second bias voltage, the second bias voltage being different than the first bias voltage. The controller is configured to detect a difference in responses of the Coriolis vibratory gyroscope to the first bias voltage and the second bias voltage, and determine a gyro rate of the Coriolis vibratory gyroscope as a function of the difference in responses and a correction term.

Abstract: A sensor device including: a sensor portion; a casing portion housing the sensor portion; an elastic portion that is provided in contact with the casing portion between the sensor portion and the casing portion and has a material having smaller elastic modulus than elastic modulus of the casing portion; and an adhesive that is provided between the sensor portion and the casing portion is provided. The adhesive may have an interface between the elastic portion and the adhesive. The elastic portion may have the same material as the adhesive. The elastic portion may have smaller elastic modulus than the adhesive.

Abstract: A circuit comprising a microelectromechanical (MEMS) gyroscope and a gain circuit coupled with the MEMS gyroscope. The gain circuit is configured to receive a digitized drive signal based at least in part on a digitized drive voltage amplitude of the MEMS gyroscope. The gain circuit is also configured to determine a percentage change in quality factor of the MEMS gyroscope based at least in part on the digitized drive signal and a stored trim value of the MEMS gyroscope. The gain circuit is also configured to compensate for an effect of a change in the quality factor of the MEMS gyroscope based at least in part on the percentage change in quality factor.

Abstract: In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements. In further embodiments, a dynamically balanced 3-axis gyroscope architecture is provided.

Abstract: A micromechanical z-inertial sensor, having a movable MEMS structure developed in a micromechanical function layer; a torsion spring connected to the movable MEMS structure; and a spring device connected to the torsion spring, the spring device being developed to hamper a deflection of the torsion spring orthogonal to a sensing direction of the MEMS structure in a defined manner.

Abstract: A micromechanical rotational rate sensor system includes a first rotational rate sensor device that can be driven rotationally about a first axis in oscillating fashion for acquiring a first external rate of rotation about a second axis and a second external rate of rotation about a third axis, the first, second, and third axes being perpendicular to one another; and a second rotational rate sensor device, capable of being driven in linearly oscillating fashion along the second axis, for acquiring a third external rate of rotation about the first axis. The first rotational rate sensor device is connected to the second rotational rate sensor device via a drive frame device. The drive frame device has a first drive frame and a second drive frame that are capable of being driven in oscillating fashion by the drive device with opposite phase along the third axis.

Abstract: A sensing structure for an accelerometer includes a support and a proof mass mounted thereto by flexible legs. The proof mass has moveable electrode fingers perpendicular to the sensing direction and at least four fixed capacitor electrodes, with fixed capacitor electrode fingers perpendicular to the sensing direction. The fixed capacitor electrode fingers interdigitate with the movable electrode fingers and the proof mass is mounted to the support by an anchor on a centre line of the proof mass. The proof mass has an outer frame surrounding the fixed capacitor electrodes and the flexible legs extend laterally inwardly from the proof mass to the anchor. The fixed capacitor electrodes comprise two inner electrodes, one on each side of the proof mass centre line, and two outer electrodes, one on each side of the proof mass centre line.

Abstract: A device includes a proof mass of a sensor, capacitive elements, an electrode circuitry, a time multiplexing circuitry, a sense circuitry, and a force feedback circuitry. The proof mass moves from a first position to a second position responsive to an external actuation. The capacitive elements change capacitive charge in response thereto. The electrode circuitry coupled to the capacitive elements generates a charge signal. The time multiplexing circuitry pass the charge signal during a sensing time period and prevents the charge signal from passing through during a forcing time period. The sense circuitry generates a sensed signal from the charge signal. The force feedback circuitry applies a charge associated with the sensed signal to the electrode circuitry during the forcing time period. The electrode circuitry applies the charge received from the force feedback circuitry to the capacitive elements, moving the proof mass from the second position to another position.

Abstract: A method is proposed for controlling the precession of a gyroscope (1) comprising a support (2) and a resonator (3), the support (2) being mobile in a platform coordinate system and stationary in a measurement coordinate system, the method comprising the generation (101) of a first control signal suitable for rotating the resonator (3) with respect to the support (2) in two opposite directions of rotation during a first period, the method being characterized by the following steps: reception (104) of data (Tpm) on relative positioning between the measurement coordinate system and the platform coordinate system, calculation (105) of a second control signal to be generated during a second period on the basis of the first control signal and the relative-positioning data, the second control signal being chosen in such a way as to minimize an average of accumulated angular errors in the angular measurements acquired by the gyroscope during the entirety of the first and second period, the angular errors being ex

Abstract: The invention relates to a device for maintaining the attitude of a carrier, the device comprising three primary gyroscopes (1, 2, 3) that are arranged to measure primary speeds of rotation (Rbc) of a carrier about three primary axes, a secondary gyroscope (4) that is arranged to measure a secondary speed of rotation (Rhp) of the carrier about a secondary axis that is different from each of the primary axes, a video camera (5) having an optical axis that is different from each of the primary axes, and a data processing module (6) that is configured to estimate scale-factor and drill errors that corrupt the primary speeds of rotation (Rbc) using data issued from the secondary speed of rotation (Rhp) and images acquired by the video camera (5), and to correct the primary speeds of rotation with said estimated errors.

Abstract: A MEMS device includes a first inertial mass system having first drive and sense masses elastically coupled to one another and a second inertial mass system having second drive and sense masses elastically coupled to one another. The first and second drive masses undergo antiphase drive motion along a first axis parallel to the surface of the substrate. First and second sense springs anchor and suspend first and second sense masses spaced apart from the surface of the substrate. The first and second sense springs enable antiphase sense motion of the first and second sense masses along a second axis parallel to the surface in response to an angular rotation about a third axis perpendicular to the surface. The first and second sense springs further enable in-phase sense motion of the first and second sense masses along the second axis in response to a linear acceleration along the second axis.

Abstract: An annular resonator for a vibrating structure angular rate sensor comprises a planar annular member that lies in the X-Y plane and one or more supporting structures arranged to flexibly support the annular member in the X-Y plane. The one or more supporting structures each comprise a radial portion, extending radially from the annular member and having a first thickness in the X-Y plane, and a circumferential portion, extending circumferentially from the radial portion and having a second thickness in the X-Y plane, wherein the first thickness is greater than the second thickness.

Abstract: A yaw rate sensor having a drive for exciting an oscillation of an oscillatory mass, the drive having at least one drive amplifier circuit, and having a detector for detecting a displacement of the oscillatory mass, the detector having at least one detector amplifier circuit, either a low bias current being able to be set for operating the drive amplifier circuit and/or the detector amplifier circuit in an energy-saver mode, or a higher bias current being able to be set for operating the drive amplifier circuit and/or the detector amplifier circuit in a normal mode.

Abstract: A single axis inertial sensor includes a proof mass spaced apart from a surface of a substrate. The proof mass has first, second, third, and fourth sections. The third section diagonally opposes the first section relative to a center point of the proof mass and the fourth section diagonally opposes the second section relative to the center point. A first mass of the first and third sections is greater than a second mass of the second and fourth sections. A first lever structure is connected to the first and second sections, a second lever structure is connected to the second and third sections, a third lever structure is connected to the third and fourth sections, and a fourth lever structure is connected to the fourth and first sections. The lever structures enable translational motion of the proof mass in response to Z-axis linear acceleration forces imposed on the sensor.

Abstract: A vibratory meter (5), and methods of manufacturing the same are provided. The vibratory meter includes a pickoff (170l), a driver (180), and a flow tube (400) comprising a tube perimeter wall with: a first substantially planar section (406a), a second substantially planar section (406b) coupled to the first substantially planar section to form a first angle ?1 (404), and a first curved section (406c).

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

Abstract: In a vibrating structure angular rate sensor, a signal generator generates a phase change suppressing signal in which a phase change according to an amplitude of a rectangular wave signal generated by at least one of a first modulator and a second modulator is suppressed.

Abstract: According to one embodiment, a gyro sensor system including a gyro sensor unit is disclosed. The unit includes a movable body, a spring mechanism, a detector, an adjuster, and a rotation angle acquisition unit. The spring mechanism vibrates the movable body. A detector detects an amplitude of vibration of the movable body due to Coriolis force. The adjuster adjusts a first resonance frequency of vibration of the movable body in free vibration and a second resonance frequency of vibration of the movable body due to Coriolis force on the movable body so that the first and second resonance frequencies are to coincide with each other based on the amplitude of the vibration due to Coriolis force. The rotation angle acquisition unit acquires a rotation angle of the movable body, based on the amplitude of the vibration due to Coriolis force.

Abstract: A MEMS tri-axial accelerometer is provided with a sensing structure having: a single inertial mass, with a main extension in a horizontal plane defined by a first horizontal axis and a second horizontal axis and internally defining a first window that traverses it throughout a thickness thereof along a vertical axis orthogonal to the horizontal plane; and a suspension structure, arranged within the window for elastically coupling the inertial mass to a single anchorage element, which is fixed with respect to a substrate and arranged within the window, so that the inertial mass is suspended above the substrate and is able to carry out, by the inertial effect, a first sensing movement, a second sensing movement, and a third sensing movement in respective sensing directions parallel to the first, second, and third horizontal axes following upon detection of a respective acceleration component.

Abstract: A sensor element, for detecting angular velocity about a detection axis perpendicular to a plane of the sensor element, comprises two primary masses and two Coriolis masses, and two sensing cells. Two coupling levers are each coupled to the two primary masses by first springs and to one of the two Coriolis masses by second springs. The coupling levers enable the primary masses and Coriolis masses to be excited into a combined primary motion in the plane of the planar sensor element. In the primary motion, a direction of angular momenta of linear primary oscillation motions of the primary masses and angular momenta of rotational primary motions of the coupling levers with respect to the geometrical centroid of the sensor element is opposite to the direction of the angular momenta of linear primary oscillation motions of the Coriolis masses with respect to the geometrical centroid of the sensor element.

Abstract: According to one embodiment, a sensor device includes a movable body capable of vibrating, and a catch-and-release mechanism capable of catching the vibrating movable body and capable of releasing the caught movable body. The catch-and-release mechanism includes a stopper portion capable of stopping vibration of the movable body when the movable body contacts the stopper portion, and an elastic member configured to reduce a force acting between the movable body and the stopper portion.

Abstract: A MEMS device includes first, second, third, and fourth sense masses spaced apart from a surface of a substrate. A first drive coupler interconnects the first sense mass with a first actuator, a second drive coupler interconnects the second sense mass with a second actuator, a third drive coupler interconnects the third sense mass with a third actuator, and a fourth drive coupler interconnects the fourth sense mass with a fourth actuator. Each of the drive couplers includes a torsion bar having a length aligned parallel to an outer sidewall of an adjacent sense mass and first and second coupling links coupled to opposing first and second ends of the torsion bar. The first and second coupling links couple an adjacent one of the first, second, third, and fourth sense masses with a corresponding one of the first, second, third, and fourth actuators.

Abstract: A MEMS sensor device comprises a support substrate, a proof mass movably connected to the support substrate, a first drive comb fixedly connected to the support substrate in a first orientation and adjacent to the proof mass, and a second drive comb fixedly connected to the support substrate in a second orientation and adjacent to the proof mass. The second orientation is opposite of the first orientation such that the first and second drive combs face toward each other. A parallel plate sense electrode is located under the proof mass on the support substrate. The drive combs and the parallel plate sense electrode are each electrically charged and configured with respect to the proof mass such that a combination of a levitation force and a parallel plate force produces a linear out-of-plane actuation that depends only on an applied voltage.

Abstract: There is provided a method of sensing a rotation rate using a vibrating structure gyroscope, said gyroscope comprising an electronic control system comprising one or more control loops, wherein at least one of said control loops comprises a filter having a variable time constant, said method comprising the steps of: determining or estimating a characteristic of the vibrating structure of said gyroscope; and adapting or varying said time constant of said filter with the determined or estimated characteristic of said vibrating structure.

Abstract: A physical quantity measurement device includes a sensor element having a coupling capacitance formed between a drive electrode and a detection electrode, and a circuit device having a drive circuit adapted to supply a drive signal to the drive electrode, a detection circuit adapted to detect physical quantity information corresponding to a physical quantity based on a detection signal from the detection electrode, and a fault diagnosis circuit, and the fault diagnosis circuit has an electrostatic leakage component extraction circuit adapted to extract an electrostatic leakage component due to the coupling capacitance from one of the detection signal and an amplified signal of the detection signal, and performs a fault diagnosis based on the electrostatic leakage component extracted.

Abstract: A multi-stage MEMS accelerometer is disclosed that includes a MEMS sensor that has two suspended structures (proof masses) suspended by suspension members. The suspended structures move together in response to input acceleration when less the acceleration is less than a threshold value. When the input acceleration is greater than the threshold value, one of the suspended structures makes contact with a mechanical stop while the other suspended structure continues to move with increased stiffness due to the combined stiffness of the suspension members. The contact with the mechanical stop contributes a nonlinear mechanical stiffening effect that counteracts the nonlinear capacitive effect inherent in capacitive based MEMS accelerometers. In some embodiments, more than two suspended structures can be used to allow for optimization of sensitivity for multiple full-scale ranges, and for higher fidelity tuning of mechanical sensitivity with nonlinear capacitance.

Abstract: A micromechanical sensor includes a first functional layer, a second functional layer, and a third functional layer The second functional layer is situated between the first and third functional layers. The second and third functional layers are connected to each other by a connecting area of the third functional layer. The second functional layer is underneath the connecting area at a defined distance from the first functional layer. The first functional layer is underneath the connecting area on an oxide that is situated on a substrate.

Abstract: This invention relates to an electromechanical actuator comprising a support and a deformable element comprising a portion anchored to at least one anchoring zone of the support and mobile portion, the deformable element comprising an electro-active layer, a reference electrode arranged on a first face of the electro-active layer an actuating electrode arranged on a second face, opposite the first face, of the electro-active layer comprises a capacitive device for measuring the deformation of the deformable element, said device being at least partially formed by a capacitive stack comprising a measuring electrode on the second face of the electro-active layer, a measuring portion of the reference electrode located facing the measuring electrode, and a portion of the electro-active layer inserted between the measuring electrode.

Abstract: A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

Abstract: A sensor element includes a base portion, a drive arm that extends from the base portion or a portion which is connected to the base portion, and a detection arm that extends from the base portion. The drive arm includes a drive arm portion that extends from the base portion or a portion which is connected to the base portion, and a drive weight portion that is provided on a front end side with respect to the drive arm portion and has a larger width than the drive arm portion. When a length of the drive weight portion in an extending direction of the drive arm is referred to as DHL and a width of the drive weight portion in a direction orthogonal to the extending direction in a planar view is referred to as DHW, a relationship of 1.5?DHL/DHW is satisfied.

Abstract: A physical quantity detector according to the invention includes a substrate section including a base section, a movable part connected to the base section, a support section extending from the base section, an extending part extending from the support section, and a physical quantity detection element fixed to the base section and the movable part, and a weight fixed to the movable part, and the extending part and the weight overlap each other in a planar view from the thickness direction of the extending part.

Abstract: The present invention relates to a circuit arrangement and a method for reading a capacitive vibratory gyroscope with an at least primary mass and at least one secondary mass that is connected to the primary mass, wherein the primary mass is excited to a primary vibration during operation, and wherein the secondary mass is deflected out of a resting position in a direction that is transversal to the primary vibration when the vibratory gyroscope rotates around a sensitive axis.

Abstract: A resonator is provided that suppresses a shift in resonant frequency. The resonator includes a vibration member including vibration arms extending therefrom with two or more of the vibration arms performing out-of-plane bend with different phases. Moreover, the resonator includes a base having a front end connected to the vibration arms and a rear end opposing the front end and structured to bend in a direction of the out-of-plane bend when the vibration arms perform the out-of-plane bend. Moreover, a frame surrounds a periphery of the vibration member and one or more holding arms are positioned between the vibration member and the frame. One end of each holding arm is connected to the base and the other end of the holding arm is connected to the frame. The holding arms bend in the direction of the out-of-plane bend when the base bends.

Abstract: A circuit device adapted to perform detection of angular velocity observed by a capacitance type angular velocity transducer includes a drive device, a detection device, a vibration frequency controller adapted to variably control at least one of a detection frequency and a drive frequency of the capacitance type angular velocity transducer, and a storage adapted to store a correction parameter group adapted to correct a sensor characteristic of the capacitance type angular velocity transducer due to a variation of at least one of the detection frequency and the drive frequency.

Abstract: An improved method and system for varying an amount of mechanical coupling in a speakerphone is disclosed. Solutions and implementations provided vary the amount of mechanical coupling between one or more speakers and one or more microphones of the speakerphone to generate high-quality sounds. Implementations include receiving a signal for a first speaker, transforming the signal to send to a second speaker or actuator to generate either complementary or opposing vibration forces to those generated by the first speaker, and an accelerometer to measure the amount of vibration caused by the speaker and adjust the transformation applied to the signal to increase or decrease the amount of mechanical coupling, as needed.

Abstract: A physical quantity sensor includes: a base; an IC disposed on the base; an angular rate sensor and an acceleration sensor disposed on the IC; a first stress buffer layer disposed between the IC and the angular rate sensor; and a second stress buffer layer disposed between the IC and the acceleration sensor. The first and second stress buffer layers are disposed spaced apart from each other.

Abstract: A gyro sensor includes: a substrate; a first drive section; and a first detection section and a second detection section that detect angular velocity. The first detection section includes a first movable body including a first movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a first fixed electrode fixed to the substrate and facing the first movable electrode. The second detection section includes a second movable body including a second movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a second fixed electrode fixed to the substrate and facing the second movable electrode. The first movable body and the second movable body are coupled together by a first coupling section.

Abstract: A MEMS electrostatic piston-tube actuator that provides 4 degrees of freedom (4-DOF) motion is disclosed. The actuator comprises of an inner and an outer MEMS structure. The inner MEMS structure comprises of an inner moving stage (rotor) and an inner fixed frame (stator). The inner rotor comprises of a central load stage, a plurality of rotary comb drive electrodes surrounding the central rotor. The outer MEMS structure comprises of an outer moving stage (outer rotor) and outer stator frame. The outer rotor holds the entire inner MEMS structure and is rigidly attached to it through a fixed periphery of the inner MEMS structure. The outer rotor comprises of a plurality of through openings (tubes) and attached to a fixed outer periphery through a plurality of mechanical springs. A load set on the central stage can be controlled in 4-DOF comprising of translational and rotational motions of roll, yaw, pitch, and z-axis translation.

Abstract: A resonator array comprises substantially paralleled first and second resonant layers having resonating masses. A first set of lateral drive electrodes cause the first resonating mass to vibrate along an axis in a first geometric plane. A second set of lateral drive electrodes cause the second resonating mass to vibrate along an axis in a second geometric plane in an opposite direction of the first resonating mass by about 180 degrees. Rotation in the system causes the masses to vibrate out-of-plane in opposite directions. The opposite vibrational directions of the first and second resonating masses produces a balanced system with small motion in a bonding area between the stacked resonators. As a result, there is minimal propagation of mechanical waves from the balanced system to a substrate resulting in lower anchor loss and a high Q-factor.

Abstract: Sensors, devices, systems, devices, and methods for providing wireless modular self-contained units with battery power supply that can use radar, ultrasonic, and IR measuring techniques and sensors for directional detection of impeding objects, persons, or moving targets, and can be used with mobile smart phones and the like. The modular sensor units can be used as a displacement and motion measurement sensor for point of reference measurement applications. The displacement sensing method can use radar, ultrasonic, and IR measuring techniques for directional detection of impeding objects, persons, or moving targets. Upon the detection of the said target, algorithms make use of the direction, angle of ascent, and speed to provide real time position data represented in discrete format.

Abstract: Circuits and methods for compensating microelectromechanical system (MEMS) gyroscopes for quality factor variations are described. Quality factor variations arise when mechanical losses are introduced in the gyroscope's resonator, for example due to thermoelastic damping or squeeze-film damping, which may hinder the gyroscope's ability to accurately sense angular velocity. Quality factor compensation may be performed by generating a compensation signal having a time decay rate that depends on the quality factor of resonator. In this way, artifacts that may otherwise arise in gyroscope's output are limited. Additionally, or alternatively, quality factor compensation may be performed by controlling the force with which the gyroscope's resonator is driven. This may be achieved, for example, by controlling the average value of the drive signal.