Abstract: A micromechanical structure including a substrate having a main plane of extension, and including a first seismic mass, the first seismic mass including a grid structure made of intersecting first mass lines and the first seismic mass being flexibly secured with the aid of first bending-spring elements, and moreover, a first line width of the first mass lines parallel to the main plane of extension being between 20 and 50 percent of a further first line width of the first bending-spring elements parallel to the main plane of extension.

Abstract: A bulk micromachined vibratory gyro in which a proof mass has a bulk substrate thickness for a large mass and high inertial sensitivity. In embodiments, optical displacement transduction is with multi-layer sub-wavelength gratings for high sensitivity and low cross-talk with non-optical drive elements. In embodiments, the vibratory gyro includes a plurality of multi-layer sub-wavelength gratings and a plurality of drive electrodes to measure motion of the proof mass induced by drive forces and/or moments and induced by the Coriolis Effect when the gyro experiences a rotation. In embodiments, phase is varied across the plurality gratings and a multi-layer grating having the best performance is selected from the plurality.

Abstract: The purpose of the present invention is to achieve accurate angular velocity detection even when an angular velocity detection sensor is set in an environment in which oscillation and electromagnetic noise have significant influence. Provided is an angular velocity detection device which has an oscillating body displaceable in first and second directions that are perpendicular to each other, and which detects, as an angular velocity, a displacement of the oscillating body in the second direction while the oscillating body is being oscillated in the first direction, wherein in accordance with a frequency change in a drive signal for oscillating the oscillating body in the first direction, the frequency of a servo signal for detecting the angular velocity from the quantity of displacement in the second direction is changed (see FIG. 1).

Abstract: A gyroscope and a method of detecting rotation are provided. The gyroscope includes a structure configured to be driven to move about a drive axis. The structure is further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis. The structure further includes at least one first torsional spring extending generally along the drive axis and at least one second torsional spring extending generally along the sense axis. The gyroscope further includes an optical sensor system configured to optically measure movement of the structure about the sense axis.

Abstract: A microelectromechanical gyroscope includes a body and a driving mass, which is movable with respect to the body according to a driving axis and is capacitively coupled to the body. The gyroscope moreover includes a driving device, which forms a microelectromechanical control loop with the body and the driving mass and is configured for supplying to the driving mass driving signals having a common-mode component and respective differential components so as to maintaining the driving mass in oscillation according to the driving axis. The driving device is provided with an actuation stage configured for inverting in a controlled way the sign of the differential components of the driving signals.

Abstract: An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

Abstract: Micromechanical structure, in particular a yaw rate sensor having a substrate including a main plane of extent for detecting a first yaw rate about a first direction perpendicular to the main plane, a second yaw rate about a second direction parallel to the main plane, and a third yaw rate about a third direction parallel to the main plane and perpendicular to the second direction, includes a rotational oscillating element driven to rotational oscillation about a rotational axis parallel to the first direction. The micromechanical structure includes a yaw rate sensor configuration for detecting the first yaw rate that is completely surrounded by the rotational oscillating element in a plane parallel to the main plane. The micromechanical structure includes at least one first connection of the yaw rate sensor configuration on the rotational oscillating element, and at least one second connection of the yaw rate sensor configuration on the substrate.

Abstract: An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

Abstract: A structure having a first movable portion displaced perpendicular to a substrate surface and a second movable portion displaced parallel to the substrate surface is realized by a laminated structure employing a nested structure for the first portion and the second portion. The laminated structure is provided with inner and outer movable portions. A y spring is connected to the outer portion, and the outer portion is supported in a y-axis direction by the y spring at a height apart from an outer substrate. A z spring is connected to the inner portion, and the inner portion is supported in a z-axis direction by the z spring at a height apart from the outer substrate. The outer portion and the z spring are at different heights from the substrate, and the z spring overpasses across the outer portion at a height apart from the outer movable portion.

Abstract: The transduction scale factor for a MEMS gyroscope is calibrated without moving the MEMS device based on measurements of the resonator resonance frequency and the accelerometer resonance frequency as well as a distance value that may be a fixed distance value or a measured distance value. The measured distance value may be obtained by measuring the quality factor of the resonator or accelerometer and deriving the measured distance value from the quality factor measurement.

Abstract: An angular velocity detection apparatus includes a vibrator that generates a signal that includes an angular velocity component and a vibration leakage component, a driver section that generates the drive signal, and supplies the drive signal to the vibrator, an angular velocity signal generation section that extracts the angular velocity component from the signal generated by the vibrator, and generates an angular velocity signal corresponding to the magnitude of the angular velocity component, a vibration leakage signal generation section that extracts the vibration leakage component from the signal generated by the vibrator, and generates a vibration leakage signal corresponding to the magnitude of the vibration leakage component, and an adder-subtractor section that adds the vibration leakage signal to the angular velocity signal, or subtracts the vibration leakage signal from the angular velocity signal, in a given ratio to correct temperature characteristics of the angular velocity signal.

Abstract: A rotational rate sensor is provided having a substrate and a Coriolis element, the rotational rate sensor having a drive means for exciting the Coriolis element to a Coriolis oscillation, and the rotational rate sensor having a detection device for producing a sensor signal as a function of a deflection of the Coriolis element relative to the substrate on the basis of a Coriolis force acting on the Coriolis element, and in addition the rotational rate sensor being configured to carry out a self-calibration when a rotational acceleration signal produced as a function of the sensor signal falls below a specified threshold value.

Abstract: The invention relates to gyroscope equipment.

Abstract: The disclosure relates to a micro-electromechanical system (MEMS) device having an electrical insulating structure. The MEMS device includes at least one moving part, at least one anchor, at least one spring and an insulating layer. The spring is connected to the anchor and to the moving part. The insulating layer is disposed in the moving part and the anchor. Each of the moving part and the anchor is divided into two conductive portions by the insulating layer. Whereby, the electrical signals of different moving parts are transmitted through the insulated electrical paths which are not electrically connected.

Abstract: In order to be able to perform redundant measurements of rotation rates particularly economically, disclosed herein is a sensor device which includes a dual-axis, first rotation rate sensor element with which rotation rates of rotating motions of the sensor device about a first and a second rotation rate measurement axis can be detected, wherein the first and the second rotation rate measurement axes are oriented orthogonally in relation to one another. The sensor device is defined by the fact that the sensor device includes at least one other rotation rate sensor element with which a rotation rate of a rotating motion of the sensor device about a rotation rate measurement axis, which lies in a plane together with the first and the second rotation rate measurement axes, can be deselected.

Abstract: A yaw rate sensor includes a substrate having a substrate surface, a first movable element, which is disposed above the substrate surface and has a drive frame and a first detection mass, a first electrode, which is disposed at a distance underneath the first detection mass and connected to the substrate surface, and a second electrode which is disposed at a distance above the first detection mass and connected to the substrate surface. The drive frame is connected to the substrate via at least one drive spring, the detection mass is connected to the drive frame via at least one detection spring, and the first movable element is excitable to a drive oscillation parallel to the substrate surface, and the first detection mass is deflectable perpendicular to the substrate surface.

Abstract: A gyroscope comprising: a multi-layer substrate, comprising drive spring and sense spring layers; a rigid support structure formed from the substrate; a plurality of drive springs formed in each drive spring layer wherein each drive spring is operatively coupled to the support structure; a drive mass formed from at least one layer of the substrate, wherein the drive mass is coupled to the support structure via the drive springs; a drive mass driver operatively coupled to the drive mass and configured to cause movement of the drive mass with respect to the support structure; a plurality of sense springs formed in each sense spring layer, wherein each sense spring is operatively coupled to the drive mass; and a sense mass formed from at least one layer, wherein the sense mass is coupled to the drive mass via the sense springs.

Abstract: A detecting element for an inertial force sensor includes a mass section, an excitation section, and a detecting section. The excitation section excites the mass section along a third direction among a first direction, a second direction, and the third direction that are perpendicular to each other. The detecting section outputs a signal corresponding to displacement of the mass section along at least one of the first direction and the second direction. Resonance frequencies of the first direction and the second direction are set greater than a resonance frequency of the third direction.

Abstract: A micro-electromechanical systems (MEMS) transducer (400) is adapted to use lateral axis vibration of the drive mass (210) to generate non-planar oscillations of a coupling mass (220) in response to Coriolis forces created from in-plane rotation, which in turn generate non-planar motions of a symmetric teeter-totter sense mass (230) which are detected as a capacitive difference signal by capacitive electrodes (403, 404) formed on the substrate (402) below the sense mass (230).

Abstract: An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.

Abstract: A vibrator in a vibrating gyroscope includes a circular annular portion, a rectangular annular portion, and joining portions. The rectangular annular portion is disposed adjacent to an outer side of the circular annular portion. The joining portions join the circular annular portion and the rectangular annular portion. The rectangular annular portion includes linear beam portions. The joining portions join the circular annular portion and the center portions of the beam portions to each other.

Abstract: An oscillation apparatus comprising: a frame; a first proof mass coupled to the frame via a spring; a driving circuit operatively coupled to the first proof mass and the frame, wherein the driving circuit is configured to induce oscillatory motion of the first proof mass relative to the frame at a resonant frequency in a first direction; a first electron-tunneling position switch operatively coupled to the first proof mass such that the first position switch is configured to pass through a closed state during each oscillation of the proof mass, wherein the position switch comprises first and second single-atom-thick tunneling electrodes; and a sensing circuit coupled to the position switch, the sensing circuit configured to output a signal whenever the position switch passes through the closed state.

Abstract: The current invention is a novel gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides increased bandwidth with minimized sacrifice in gain regardless of the selected frequency of operation. The gyroscope has a single degree-of-freedom (DOF) drive-mode and a 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be selected arbitrarily in the proposed design, relaxing the tradeoff between the gain, die size, and detection capacitance. The symmetry of the structure ensures the optimal location of the drive-mode resonance relative to the sense-mode operational region, even in presence of fabrication imperfections.

Abstract: The apparatus of the invention is characterized by executing first integration operation for time-integrating the first acceleration to calculate a first velocity, second integration operation for time-integrating the first velocity to calculate an amount of movement in the first axial direction, estimation operation for calculating an estimated first velocity in the first axial direction based on a first velocity change found by time integration of the first acceleration from a first timing at which the third angular velocity becomes zero to a second timing at which the third angular velocity again becomes zero, the second angular velocity at the first timing, and the second angular velocity at the second timing, and update operation for updating the first velocity calculated in the first integration operation to the estimated first velocity estimated in the estimation operation.

Abstract: Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing modulated error signals in the accelerometer that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources.

Abstract: Disclosed are methods and a sensor architecture that utilizes the residual quadrature error in a gyroscope to achieve and maintain perfect mode-matching, i.e., ˜0 Hz split between the drive and sense mode frequencies, and to electronically control sensor bandwidth. In a reduced-to-practice embodiment, a 6 mW, 3V CMOS ASIC and control algorithm are interfaced to a mode-matched MEMS tuning fork gyroscope to implement an angular rate sensor with bias drift as low as 0.15°/hr and angle random walk of 0.003°/?hr, which is the lowest recorded to date for a silicon MEMS gyroscope. The system bandwidth can be configured between 0.1 Hz and 1 kHz.

Abstract: An angular velocity detection circuit is connected to a resonator for making excited vibration on the basis of a drive signal and detects an angular velocity. The angular velocity detection circuit includes: a self-vibration component extraction unit that receives, from the resonator, a detection signal including an angular velocity component based on a Coriolis force and a self-vibration component based on the excited vibration and extracts the self-vibration component from the detection signal; a direct-current conversion unit including an integration unit that integrates an output signal of the self-vibration component extraction unit; and a temperature characteristic compensation unit that compensates for a variation due to a temperature in an output signal of the direct-current conversion unit.

Abstract: An angular velocity detection circuit is connected to a resonator for making excited vibration on the basis of a drive signal and detects an angular velocity. The angular velocity detection circuit includes: a self-vibration component extraction unit that receives, from the resonator, a detection signal including an angular velocity component based on a Coriolis force and a self-vibration component based on the excited vibration of the resonator and extracts the self-vibration component from the detection signal; a direct-current conversion unit including an integration unit that integrates an output signal of the self-vibration component extraction unit; and an offset addition unit that adds an offset value to an output signal of the direct-current conversion unit.

Abstract: An electronic device includes a capacitive component with variable capacitance coupled to a control stage that controls the capacitance, based on a reference signal, with a reference frequency, and an excitation signal, that is a multiple of the reference frequency. The capacitive component includes a variable capacitive network having a plurality of switched capacitors, each being switchable between a first configuration, where it is connected between connection terminals of the capacitive component, and a second configuration, where it is connected at most to one of the connection terminals. The control stage includes a logic module, coupled to the variable capacitive network for switching periodically each capacitor between the first configuration and the second configuration. A sign circuit, coupled to the capacitive component supplies a control signal having edges concordant with the excitation signal in one half-period of each cycle of the reference signal and discordant edges in the other half-period.

Abstract: A device for measuring yaw rate, having a mechanical yaw rate sensor, which has an inert mass that can be set into a primary vibration along a primary axis by means of an excitation device and can be deflected along a secondary axis extending transversely with respect to the primary axis so that when a yaw rate occurs about a sensitive axis extending transversely with respect to the primary and to the secondary axis, said device carries out a secondary vibration excited by the Coriolis force. A sensor element detects an amplitude-modulated signal for the secondary vibration. A sigma-delta modulator has a low pass filter connected to the sensor element, a quantizer and a secondary actuator disposed in a feedback path for applying a force which counteracts the Coriolis force.

Abstract: An apparatus and/or method that corrects for tuning errors in vibrating structure gyroscopes that are configured to be driven along a plurality of axes without the need for dedicated torque elements. The correction is accomplished by introducing a phase offset in the drive signal of one or more of the drive elements relative to other drive elements to minimize or reduce the quadrature signal. The tuning may be accomplished as a one time “set and forget” adjustment, as a manual adjustment performed at the discretion of the user, or as a closed loop active correction system. The technique improves the tuning of the resonator assembly, rather than merely compensating for the mistuning. Accordingly, for various embodiments of the invention, the destructive interference between the plurality of drive axes is reduced. Conservation of vibrational energy present in the resonator is thus enhanced, with less vibrational energy transferred to the support structure.

Abstract: A method of making a handheld, electromechanical device useful in mammalian body-care includes the steps of: a) forming a one-piece housing having a single opening defined by a rim; b) assembling a unitary insert; c) inserting the unitary insert through the single opening of the housing; d) removably applying a cover having an exterior surface to close the opening of the one-piece housing; and e) attaching the unitary insert to at least one of the one-piece housing and the removable cover. The rim of the one-piece housing circumscribes a rim area, and the one-piece housing has a projected area that is substantially larger than the rim area. The unitary insert is dimensioned to be insertable through the opening defined by the rim, and it has a frame having disposed thereon electromechanical elements interconnected in an electrical circuit. The cover closes off the opening of the one-piece housing.

Abstract: An integrated microelectromechanical structure is provided with: a driving mass, anchored to a substrate via elastic anchorage elements and moved in a plane with a driving movement; and a first sensing mass, suspended inside, and coupled to, the driving mass via elastic supporting elements so as to be fixed with respect to the driving mass in the driving movement and to perform a detection movement of rotation out of the plane in response to a first angular velocity; the elastic anchorage elements and the elastic supporting elements cause the detection movement to be decoupled from the driving movement. The elastic supporting elements are coupled to the first sensing mass at an end portion thereof, and the axis of rotation of the detection movement extends, within the first sensing mass, only through the end portion.

Abstract: An apparatus is described that includes a substrate having a first plate and a second plate. The first plate and the second plate collectively have a first mode when excited by a drive signal and have a second mode when excited by a gyroscopic effect. The first and second plates each include a temperature-compensated stack having first and third layers that have a stiffness that increases with increasing temperature over a temperature range with a second layer between the first and third layers, where the second layer is formed from a different material than the first and third layers.

Abstract: A physical quantity sensor includes a sensor portion, a casing, and a vibration isolator. The casing includes a supporting portion with a supporting surface that is located to face an end surface of the sensor portion. The vibration isolator is located between the end surface of the sensor portion and the supporting surface of the casing to join the sensor portion to the casing. The vibration isolator reduces a relative vibration between the sensor portion and the casing.

Abstract: The current invention is a novel gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides increased bandwidth with minimized sacrifice in gain regardless of the selected frequency of operation. The gyroscope has a single degree-of-freedom (DOF) drive-mode and a 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be selected arbitrarily in the proposed design, relaxing the tradeoff between the gain, die size, and detection capacitance. The symmetry of the structure ensures the optimal location of the drive-mode resonance relative to the sense-mode operational region, even in presence of fabrication imperfections.

Abstract: Disclosed herein is a vibratory gyro-sensor including a vibratory section, a synchronous detector which synchronously detects a detected signal from the vibratory section in timed relation to a timing signal for synchronous detection, and a timing signal output section which outputs the timing signal for synchronous detection. The timing signal output section has a low-pass filter, a comparator, and a first phase shifter. The vibration monitor signal as converted into the binary signal by the comparator and shifted in phase by the first phase shifter is used as the timing signal for synchronous detection.

Abstract: Provided is a technology capable of preventing arithmetic operation accuracy from deteriorating even when a bipolar transistor used to form a Gilbert multiplier core has poor characteristics. A correction current generating circuit (3) uses a constant current source (301) to feed a constant current I0 to an emitter of a bipolar transistor (Q7) being a first replica transistor having the same current gain ? as bipolar transistors (Q1 to Q4) that form the Gilbert multiplier core (101), to generate a current of ?·I0 on a collector side thereof. The current is output as a correction current ?·I0, and is added to each of one of input signals (±K1·Vy) of the Gilbert multiplier core (101) as a bias current, to thereby eliminate influence of the current gain ? on an output signal being a multiplication result.

Abstract: An angular acceleration detection device includes a rotating weight, a fixed portion, a support beam, and a detection portion. The rotating weight is rotatable about a Z-axis with respect to the fixed portion by action of an inertial force generated by an angular acceleration about the Z-axis. The fixed portion is disposed at a position spaced from the rotating weight. The support beam is disposed in an X-Y plane between the fixed portion and the rotating weight, the support beam elastically supporting the rotating weight with respect to the fixed portion. The detection portion outputs a detection signal corresponding to stress generated in the support beam. A gravity center position of the rotating weight is aligned with the support beam when viewed in a Z-axis direction.

Abstract: A time-domain inertial sensor comprising: a support structure having an electrode plane parallel to an x-y plane of an x-y-z mutually orthogonal coordinate system, wherein the support structure's largest dimension lies within the x-y plane; a proof mass having a first surface parallel to the x-y plane; wherein the proof mass is springedly coupled to the support structure such that the first surface is separated from the electrode plane by a gap; a driver configured to drive the proof mass to oscillate with respect to the support structure in approximately only the x-direction such that, while oscillating, the gap does not vary significantly; and a first, time-domain, proximity switch disposed to switch from an open state to a closed state each time the proof mass is in a first reference position with respect to the support structure.

Abstract: A gyroscope comprising: a support structure; a drive mass springedly coupled to the support structure such that movement of the drive mass with respect to the support structure is substantially restricted to movement in a first direction; a driver configured to cause the drive mass to oscillate with respect to the support structure in the first direction; a sense mass springedly coupled to the drive mass such that movement of the sense mass with respect to the drive mass is substantially restricted to movement in a second direction, which is orthogonal to the first direction; and a digital trigger comprising a proximity switch coupled between the drive mass and the sense mass, wherein the switch is configured to switch from an open state to a closed state each time the sense mass is in a reference position with respect to the drive mass.

Abstract: A rotation-rate sensor includes a substrate having a surface, a movable element situated above the surface, which is deflectable based on a Coriolis force along a first axis that runs perpendicular to the surface, a driving device which is prepared to activate the movable element along a second axis that runs parallel to the surface, a compensation device, in order to generate an electrostatic force along the first axis, including electrodes corresponding to one another, developed on the substrate and on the movable element; a relative degree of covering of the electrodes in the direction of the first axis being a function of the deflection of the movable element along the second axis; and the electrode developed on the movable element runs around an insulating region of the movable element.

Abstract: An inertial sensor includes oscillating-type angular velocity sensing element, IC for processing signals supplied from angular velocity sensing element, capacitor for processing signals, and package for accommodating angular velocity sensing element, IC, capacitor. Element and IC are housed in package via a vibration isolator, which is formed of TAB tape, plate on which IC is placed, where angular velocity sensing element is layered on IC, and outer frame placed outside and separately from plate and yet coupled to plate via wiring pattern.

Abstract: The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.

Abstract: In order to provide a non-lead piezoelectric film having high crystalline orientation, low dielectric loss, high polarization-disappear temperature, and high piezoelectric constant, the present invention is a piezoelectric film comprising: a NaxM1-x layer 13 having a (001) orientation only; and a (1-?) (Bi, Na, Ba) TiO3-?BiQO3 layer 15 having a (001) orientation only. The (1-?) (Bi, Na, Ba) TiO3-?BiQO3 layer 15 is formed on the NaxM1-x layer 13. M represents Pt, Ir, or PtIr. Q represents Fe, Co, Zn0.5Ti0.5, or Mg0.5Ti0.5. x represents a value of not less than 0.002 and not more than 0.02. ? represents a value of not less than 0.20 and not more than 0.50.

Abstract: A vibrating element includes: a first support portion and a second support portion; a first vibrating arm which extends along a first axis, one end of the first vibrating arm being connected to the first support portion; a second vibrating arm which extends along the first axis, one end of the second vibrating arm being connected to the second support portion; an oscillating member which is sandwiched between the other ends of the first vibrating arm and the second vibrating arm, and has openings; and detection arms which extend along a second axis perpendicular to the first axis from the inner walls of the openings of the oscillating member in plan view.

Abstract: MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.

Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.

Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.

Abstract: A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured.