Abstract: Disclosed is a fabrication method of a metal nanoplate using metal, metal halide or a mixture thereof as a precursor. The single crystalline metal nanoplate is fabricated on a single crystalline substrate by performing heat treatment on a precursor including metal, metal halide or a mixture thereof and placed at a front portion of a reactor and the single crystalline substrate placed at a rear portion of the reactor under an inert gas flowing condition. A noble metal nanoplate of several micrometers in size can be fabricated using a vapor-phase transport process without any catalyst. The fabricated nanoplate is a single crystalline metal nanoplate having high crystallinity, high purity and not having a two-dimensional defect. Morphology and orientation of the metal nanoplate with respect to the substrate can be controlled by controlling a surface direction of the single crystalline substrate. The metal nanoplate of several micrometer size is mass-producible.

Abstract: A method and apparatus are provided for formation of a composite material on a substrate. The composite material includes carbon nanotubes and/or nanofibers, and composite intrinsic and doped silicon structures. In one embodiment, the substrates are in the form of an elongated sheet or web of material, and the apparatus includes supply and take-up rolls to support the web prior to and after formation of the composite materials. The web is guided through various processing chambers to form the composite materials. In another embodiment, the large scale substrates comprise discrete substrates. The discrete substrates are supported on a conveyor system or, alternatively, are handled by robots that route the substrates through the processing chambers to form the composite materials on the substrates. The composite materials are useful in the formation of energy storage devices and/or photovoltaic devices.

Abstract: An apparatus for manufacturing a carbon nanostructure and a method for manufacturing a carbon nanostructure that can achieve an increase in length and shape stabilization of the carbon nanostructure can be obtained. A manufacturing apparatus for a carbon nanostructure includes a catalyst member on which a carbon nanostructure is grown, a source gas supply unit and a source gas supply pipe, a coil, and a heater. The source gas supply unit and the source gas supply pipe supply the catalyst member with carbon for forming the carbon nanotube. The coil applies a gradient magnetic field (e.g., a cusped magnetic field indicated by magnetic flux line whose magnetic field strength gradually increases from one surface of the catalyst member to the other surface opposite to the one surface. The heater heats the catalyst member.

Abstract: The invention relates to a method for deposition of nanoparticles made of an insulating, semi-conductive, or conductive material onto predetermined areas, made of a conductive or semi-conductive material, located on a substrate. The invention also relates to a method for manufacturing electrodes.

Abstract: The present invention relates to a method for manufacturing a fuel cell electrode (E) by depositing a catalytic layer (2) on a diffusion layer (3), characterized in that said catalyst is deposited on the diffusion layer (3) by ionized physical vapor deposition (IPVD) in a vacuum chamber. The invention also relates to a method for manufacturing a fuel cell half-core comprising an ionic membrane (1), a catalytic layer (2) and a diffusion layer (3) by depositing the catalytic layer (2) on a support (1; 3), characterized in that said catalyst is deposited on the support (1; 3) by ionized physical vapor deposition (IPVD) in a vacuum chamber.

Abstract: Coatings, devices and methods are provided, wherein the contacting surface of a medical device with at least one contacting surface for contacting a bodily fluid or tissue, wherein long-lasting and durable bioactive agents or functional groups are deposited on the contacting surface through a unique two-step plasma coating process with deposition of a thin layer of plasma coating using a silicon-containing monomer in the first step and plasma surface modification using a mixture of nitrogen-containing molecules and oxygen-containing molecules in the second step. The two-step plasma coating process enables the implantable medical device to prevent both restenosis and thrombosis under clinical conditions. The invention also relates to surface treatment of metallic and polymeric biomaterials used for making of medical devices with significantly improved clinical performance and durability.

Abstract: A coated article includes a substrate, and a plurality of aluminum nitride layers and a plurality of titanium boride layers formed on the substrate. Each aluminum nitride layer interleaves with one titanium boride layer. One of the aluminum nitride layers is directly formed on the substrate. A method for making the coated article is also described.

Abstract: The invention relates to a method and an apparatus for applying metallic, ceramic or composite thin film coatings onto parts, components and tools (e.g. gas turbine engine compressor blades or cutting tools) by a cathodic arc deposition technique. The method and the apparatus allows for a continually changing structure of the applied film by nanoimplanting atoms, molecules, compounds or other chemical species and structures of different materials thus coating a substrate during a single process. Furthermore, during the same process it allows for creating a coating with specific parameters as required. For instance: hardness, smoothness, corrosion resistance, erosion resistance.

Abstract: The present invention provides a carbon nanomaterial production apparatus 1 that includes a reaction tube 2 into which raw material gas and carrier gas are supplied and accordingly in which carbon nanomaterial is grown, a connection tube 4 that is connected to the reaction tube 2 and through which an aerosol-like mixture of the carbon nanomaterial and the carrier gas passes, and a collection tube 3 that is connected to the connection tube 4 and collects the carbon nanomaterial from the mixture. The collection tube 3 includes a discharge section 32 that is located above a junction 33 with the connection tube 4 and discharges the carrier gas contained in the mixture to outside, and a trapping section 31 that is located below the junction 33 with the connection tube 4 and traps the carbon nanomaterial that is separated from the mixture by gravitational sedimentation.

Abstract: An apparatus for producing metal oxide nanofibers includes a jetting unit, a mixing unit, a heating unit, and a cooling unit. The jetting unit jets particles made of a metal. The mixing unit prepares a mixture by mixing the metal particles and a gas containing an oxidizing component that includes oxygen in molecules of the component. The heating unit heats the mixture to raise the temperature of the mixture up to a temperature at which the metal evaporates. The cooling unit cools the product thus-produced in the heating unit.

Abstract: The invention relates to a method for the carbon coating of metallic nanoparticles. The metallic nanoparticles, which are produced using the metal-salt hydrogen-reduction method, can be coated with carbon by adding a hydrocarbon (for example, ethylene, ethane, or acetylene) to the hydrogen using in the synthesis. The carbon layer protects the metallic particles from oxidation, which greatly facilitates the handling and further processing of the particles. By altering the concentration of the hydrocarbon, it is possible, in addition, to influence the size of the metallic particles created, because the coating takes place simultaneously with the creation of the particles, thus stopping the growth process. A carbon coating at most two graphene layers thick behaves like a semiconductor. As a thicker layer, the coating is a conductor. If the hydrocarbon concentration is further increased, a metal-CNT composite material is formed in the process.

Abstract: A semiconductor device and a method of forming it are disclosed in which at least two adjacent conductors have an air-gap insulator between them which is covered by nanoparticles of insulating material being a size which prevent the nanoparticles from substantially entering into the air-gap.

Abstract: This invention utilizes atomic layer deposition (ALD) to deposit a layer of a material (e.g., aluminum oxide) as a passivation and adhesion enhancement layer on a piezoelectric layer and an interdigitated transducer(s) (IDT(s)) of a surface acoustic wave (SAW) filter and also utilizes a photosensitive polymer layer (e.g., epoxy dry film) for photodefining a cavity for SAW filter fabrication. The ALD layer serves to protect the IDTs from possible corrosion caused by either the polymer layer and/or moisture and at same time provide for stable operation of the SAW filter without a signal shift occurring by protection of the piezoelectric layer. The cavity, having walls formed by the photosensitive polymer, provides for a SAW fabrication process that is simple and cost effective.

Abstract: A method of growing carbon nanomaterials on a substrate wherein the substrate is exposed to an oxidizing gas; a seed material is deposited on the substrate to form a receptor for a catalyst on the surface of said substrate; a catalyst is deposited on the seed material by exposing the receptor on the surface of the substrate to a vapor of the catalyst; and substrate is subjected to chemical vapor deposition in a carbon containing gas to grow carbon nanomaterial on the substrate.

Abstract: A plurality of nanowires is grown on a first substrate in a first direction perpendicular to the first substrate. An insulation layer covering the nanowires is formed on the first substrate to define a nanowire block including the nanowires and the insulation layer. The nanowire block is moved so that each of the nanowires is arranged in a second direction parallel to the first substrate. The insulation layer is partially removed to partially expose the nanowires. A gate line covering the exposed nanowires is formed. Impurities are implanted into portions of the nanowires adjacent to the gate line.

Abstract: The present invention relates to a method of fabricating a nanostructure, comprising the following steps: prestructuring a substrate (1) adapted to receive the nanostructure to form a nanorelief (2) on the substrate, the nanorelief having flanks (4) extending from a bottom (1a) of the substrate and a top face (3) extending from said flanks, and then depositing on the substrate pre-structured in this way a single layer or multilayer coating intended to form the nanostructure; and further comprising: adding to the prestructured substrate or to the coating a separation layer adapted to enable separation of the coating and the substrate by external action of mechanical, thermomechanical or vibratory type; and exerting this external action on the substrate and/or the coating to recover selectively a top portion of the coating by separating it from the top face of the nanorelief so that this top portion constitutes some or all of the nanostructure.

Abstract: A method of bonding a metal to a substrate is disclosed herein. The method involves forming a nano-brush on a surface of the substrate, where the nano-brush includes a plurality of nano-wires extending above the substrate surface. In a molten state, the metal is introduced onto the substrate surface, and the metal surrounds the nano-wires. Upon cooling, the metal surrounding the nano-wires solidifies, and during the solidifying, at least a mechanical interlock is formed between the metal and the substrate.

Abstract: The present disclosure relates to a method for making a graphene/carbon nanotube composite structure. In the method, at least one graphene film is located on a substrate. At least one carbon nanotube layer is combined with the at least one graphene film located on the substrate to form a substrate/graphene/carbon nanotube composite structure. The at least one graphene film is in contact with the at least one carbon nanotube layer in the substrate/graphene/carbon nanotube composite structure. The substrate is removed from the substrate/graphene/carbon nanotube composite structure, thereby forming a graphene/carbon nanotube composite structure.

Abstract: A method of bonding a metal to a substrate involves forming an oxide layer on a surface of the substrate, and in a molten state, over-casting the metal on the substrate surface. The over-casting drives a reaction at an interface between the over-cast metal and the oxide layer to form another oxide. The other oxide binds the metal to the substrate surface upon solidification of the over-cast metal.

Abstract: A method for making a graphene/carbon nanotube composite structure includes providing a metal substrate including a first surface and a second surface opposite to the first surface, growing a graphene film on the first surface of the metal substrate by a CVD method, providing at least one carbon nanotube film structure on the graphene film, and combining the at least one carbon nanotube film structure with the graphene film, and combining the polymer layer with the at least one carbon nanotube film structure and the graphene film, and forming a plurality of stripped electrodes by etching the metal substrate from the second surface.

Abstract: A process for producing nanocomposite materials for use in batteries includes electroactive materials are incorporated within a nanosheet host material. The process may include treatment at high temperatures and doping to obtain desirable properties.

Abstract: A plasma treatment has been used to modify the surface of BNNTs. In one example, the surface of the BNNT has been modified using ammonia plasma to include amine functional groups. Amine functionalization allows BNNTs to be soluble in chloroform, which had not been possible previously. Further functionalization of amine-functionalized BNNTs with thiol-terminated organic molecules has also been demonstrated. Gold nanoparticles have been self-assembled at the surface of both amine- and thiol-functionalized boron nitride Nanotubes (BNNTs) in solution. This approach constitutes a basis for the preparation of highly functionalized BNNTs and for their utilization as nanoscale templates for assembly and integration with other nanoscale materials.

Abstract: Kinked nanowires are used for measuring electrical potentials inside simple cells. An improved intracellular entrance is achieved by modifying the kinked nanowires with phospholipids.

Abstract: Plasma deposited microporous analyte detection layers, method of forming analyte detection layers, and analyte sensors including the same are disclosed. An analyte sensor includes a substrate and a microporous amorphous random covalent network layer. The microporous amorphous random covalent network layer includes silicon, carbon, hydrogen and oxygen with a mean pore size in a range from 0.5 to 10 nanometers and an optical thickness in a range from 0.2 to 2 micrometers.

Abstract: Processes for forming quantum well structures which are characterized by controllable nitride content are provided, as well as superlattice structures, optical devices and optical communication systems based thereon.

Abstract: The present invention relates to a method of making an anti-reflective coating to an optical surface of a mold. In one embodiment, the method includes the steps of: providing a lens mold having an optical surface; forming a layer of a first hydrophobic material with a monolayer thickness over the optical surface; forming a layer of a second hydrophobic material with a thickness of about 10 to 50 nm over the layer of a first hydrophobic material, wherein the first and second hydrophobic materials are different; forming an anti-reflective coating layered structure over the layer of a second hydrophobic material; and forming a layer of a coupling agent that is deposited using vapor deposition and with a thickness of about 1 to 10 nm over the anti-reflective coating layered structure.

Abstract: A method of depositing silicon on carbon nanomaterials such as vapor grown carbon nanofibers, nanomats, or nanofiber powder is provided. The method includes flowing a silicon-containing precursor gas in contact with the carbon nanomaterial such that silicon is deposited on the exterior surface and within the hollow core of the carbon nanomaterials. A protective carbon coating may be deposited on the silicon-coated nanomaterials. The resulting nanocomposite materials may be used as anodes in lithium ion batteries.

Abstract: The present disclosure provides a method of producing high purity SiOx nanoparticles with excellent volatility and an apparatus for producing the same, which enables mass production of SiOx nanoparticles by melting silicon through induction heating and injecting gas to a surface of the molten silicon. The apparatus includes a vacuum chamber, a graphite crucible into which raw silicon is charged, the graphite crucible being mounted inside the vacuum chamber, an induction melting part which forms molten silicon by induction heating of the silicon material received in the graphite crucible, a gas injector which injects a gas into the graphite crucible to be brought into direct contact with a surface of the molten silicon, and a collector disposed above the graphite crucible and collecting SiOx vapor produced by reaction between the molten silicon and the injected gas.

Abstract: A graphene pattern is fabricated by forming a pattern of passivation material on a growth substrate. The pattern of passivation material defines an inverse pattern of exposed surface on the growth substrate. A carbon-containing gas is supplied to the inverse pattern of the exposed surface of the growth substrate, and patterned graphene is formed from the carbon. The passivation material does not facilitate graphene growth, and the inverse pattern of exposed surface of the growth substrate facilitates graphene growth on the exposed surface of the growth substrate.

Abstract: An arrangement of elongated nanowires that include titanium silicide or tungsten silicide may be grown on the exterior surfaces of many individual electrically conductive microfibers of much larger diameter. Each of the nanowires is structurally defined by an elongated, centralized titanium silicide or tungsten silicide nanocore that terminates in a distally spaced gold particle and which is co-axially surrounded by a removable amorphous nanoshell. A gold-directed catalytic growth mechanism initiated during a low pressure chemical vapor deposition process is used to grow the nanowires uniformly along the entire length and circumference of the electrically conductive microfibers where growth is intended. The titanium silicide- or tungsten silicide-based nanowires can be used in a variety electrical, electrochemical, and semiconductor applications.

Abstract: In a method for processing a nanotube, a vapor is condensed to a solid condensate layer on a surface of the nanotube and then at least one selected region of the condensate layer is locally removed by directing a beam of energy at the selected region. The nanotube can be processed with at least a portion of the solid condensate layer maintained on the nanotube surface and thereafter the solid condensate layer removed. Nanotube processing can include, e.g., depositing a material layer on an exposed nanotube surface region where the condensate layer was removed. After forming a solid condensate layer, an electron beam can be directed at a selected region along a nanotube length corresponding to a location for cutting the nanotube, to locally remove the condensate layer at the region, and an ion beam can be directed at the selected region to cut the nanotube at the selected region.

Abstract: This invention provides novel fuel cell electrodes and catalysts comprising a series of catalytically active thin-film metal alloys with low platinum concentration supported on nanostructured materials (nanoparticles). Processing of the electrodes and catalysts can include electrodeposition methods, and high-pressure coating techniques. In certain embodiments, an integrated gas-diffusion/electrode/catalyst layer can be prepared by processing catalyst thin films and nanoparticles into gas-diffusion media such as Toray or SGL carbon fiber papers. The catalysts can be placed in contact with an electrolyte membrane for PEM fuel cell applications.

Abstract: Disclosed is a structure having a superhydrophobic and amphiphilic(oleophilic) surface and a fabrication method thereof. A polymer surface body disclosed herein may include high aspect ratio nanostructures on a surface thereof, wherein an aspect ration of the high aspect ratio nanostructure is 1 to 100, and may include a hydrophobic thin film on the high aspect ratio nanostructure. A method of fabricating a polymer surface body disclosed herein may include performing a surface modification treatment on a polymer to form a high aspect ratio nanostructure having an aspect ration of 1 to 100, and forming a hydrophobic thin film on a surface containing the nanostructures.

Abstract: This invention relates to a method for producing a core-shell nanophosphor for use in radiation storage comprising: a) preparing a nanoscale metal halide core; b) coating the nanoscale metal halide core with at least one shell which is activated by a rare earth metal; and c) forming a core-shell nanophosphor. This invention also relates to a core-shell nanophosphor comprising a substrate core and at least one shell that is sensitive to ionizing radiation, neutrons, electrons or UV radiation. This invention also relates to a radiation image storage panel, a radiation monitoring apparatus and a use of the core-shell nanophosphor according to this invention.

Abstract: The embodiments disclosed herein relate to hetero-nano structure materials for use in energy-storage devices, and more particularly to the fabrication of hetero-nanostructure materials and the use of the hetero-nano structure materials as battery electrodes. In an embodiment, a Si/TiSi2 electrode 1000 of the present disclosure includes a plurality of Si/TiSi2 nanonets 1001 formed on a surface of a supporting substrate 1100, wherein each of the Si/TiSi2 nanonets 1001 includes a plurality of connected and spaced-apart nanobeams linked together at an about 90-degree angle, wherein the nanobeams are composed of a conductive silicide core having a silicon particulate coating.

Abstract: Layers of a passivating material and/or containing luminescent centers are deposited on phosphor particles or particles that contain a host material that is capable of capturing an excitation energy and transferring it to a luminescent center or layer. The layers are formed in an ALD process. The ALD process permits the formation of very thin layers. Coated phosphors have good resistance to ambient moisture and oxygen, and/or can be designed to emit a distribution of desired light wavelengths.

Abstract: A catalyst-coated support including a sheetlike support, a primer layer applied thereto and composed of nanoparticles composed of silicon oxide-comprising material, and at least one catalyst layer applied to the primer layer. The layers applied are notable for a particularly good adhesive bond strength and can be used particularly efficiently in heterogeneously catalyzed gas phase reactions, especially in microreactors.

Abstract: The present invention discloses a ceramic member and a manufacturing method thereof. The ceramic member comprises a ceramic substrate and an intermediate layer. Wherein, the intermediate layer is disposed on the ceramic substrate by vacuum depositing, and the intermediate layer is a carbonized metal (MxCy), an oxidized metal (MxOy) or a nitride metal (MxNy). Preferably, the intermediate layer could have a concentration gradient or a thickness gradient to further increase the adhesion between the metal layer deposited on the ceramic substrate.

Abstract: Problem To provide a carbon film and a laminate having optical characteristics of retaining high transparency, having high refraction index and less double refractivity, being excellent in electric insulating property, being capable of being coated at good adhesion to various substrates, and being capable of being formed at a low temperature, and applications thereof. Means for Solving the Problem The invention relates to a carbon film which has an approximate spectrum curve obtainable by superimposing, on a peak fitting curve A at a Bragg's angle (2?±0.3°) of 43.9°, a peak fitting curve B at 41.7° and a base line in an X-ray diffraction spectrum by a CuKa1 ray, and has a film thickness of from 2 mm to 100 ?m. The intensity of the fitting curve B relative to the intensity of the fitting curve A is preferably from 5 to 90% in the approximated spectrum described above.

Abstract: An apparatus for the production of nanoparticles comprises a chamber, a magnetron located within the chamber and comprising a cylindrical target having at least an outer face of the material to be deposited and a hollow interior, a source of magnetic flux within the hollow interior arranged to present magnetic poles in a direction that is radially outward with respect to the cylindrical target, and a drive arrangement for imparting a relative motion in an axial direction to the target and the source of magnetic flux, the chamber having at least one aperture and being located within a volume of relatively lower gas pressure compared to the interior of the chamber. The chamber is preferably substantially cylindrical, and is ideally substantially co-axial with the target so as to offer a symmetrical arrangement.

Abstract: Suppression or enhancement of various properties of a liquid fluid is aimed by improving uniform dispersion of nanoparticles by means of making a state in which no oxidized film exists on the surfaces of the nanoparticles to be dispersed in the liquid fluid. The location of the liquid fluid is confirmed with ease by enhancing the brightness of light emission of the fluid through uniform dispersion of the nanoparticles in the liquid fluid containing a material having a flame reaction. In this way, as to liquid fluids utilized in various industries, it is possible to offer a technology to desirably enhance or suppress a property desired to be enhanced and a property desired to be suppressed among various properties that its constituents have.

Abstract: Disclosed is a carbonaceous nanocomposite including: a substrate; a graphene sheet formed on a top surface of the substrate in parallel with the substrate; and a carbonaceous nanomaterial provided on another surface of the graphene sheet, the nanomaterial having an aspect ratio of 2 to 75,000 to make a predetermined angle with the graphene sheet. The carbonaceous nanocomposite according to the present disclosure has excellent adhesivity to the substrate and can be attached to the substrate without undergoing a pasting process. Since a two-directional current flow is generated, the electrical resistance of the graphene and carbon nanotube is considerably reduced. In addition, the graphene allows the carbon nanotube to have a high current density and a high specific surface area, thereby accelerating a redox reaction. The excellent heat-radiating property of the graphene sheet allows fast transfer of heat generated in the carbon nanotube to outside, thereby avoiding degradation of the carbon nanotube.

Abstract: An efficient deposition process is provided for fabricating reliable RF MEMS capacitive switches with multilayer ultrananocrystalline (UNCD) films for more rapid recovery, charging and discharging that is effective for more than a billion cycles of operation. Significantly, the deposition process is compatible for integration with CMOS electronics and thereby can provide monolithically integrated RF MEMS capacitive switches for use with CMOS electronic devices, such as for insertion into phase array antennas for radars and other RF communication systems.

Abstract: A unique family of nanoparticles characterized by their nanometric size and cage-like shapes (hollow structures), capable of holding in their hollow cavity a variety of materials is disclosed herein.

Abstract: The subject of the invention is a process for obtaining a substrate coated on at least part of its surface with at least one film of oxide of a metal M the physical thickness of which is 30 nm or less, said oxide film not being part of a multilayer comprising at least one silver film, said process comprising the following steps: at least one intermediate film of a material chosen from the metal M, a nitride of the metal M, a carbide of the metal M and an oxygen-substoichiometric oxide of the metal M is deposited by sputtering, said intermediate film not being deposited above or beneath a titanium-oxide-based film, the physical thickness of said intermediate film being 30 nm or less; and at least part of the surface of said intermediate film is oxidized using a heat treatment, during which said intermediate film is in direct contact with an oxidizing atmosphere, especially air, the temperature of said substrate during said heat treatment not exceeding 150° C.

Abstract: The invention relates to a continuous process for preparing carbon-coated lithium-iron-phosphate particles, wherein the carbon-coated lithium-iron-phosphate particles have a mean (d50) particle size of 10 to 150 nm, and wherein the carbon-coating is an acetylene-black coating, comprising performing in a reactor a flame-spray pyrolysis step (i) in a particle formation zone of the reactor, and a carbon-coating step (ii) in a carbon-coating zone of the reactor, wherein in (i) a combustible organic solution containing a mixture of lithium or a lithium compound; iron or an iron compound; and phosphorus or a phosphorous compound in an organic solvent, is fed through at least one nozzle where said organic solution is dispersed, ignited and combusted, to give a flame spray thereby forming an aerosol of lithium iron phosphate particles; (ii) acetylene gas is injected into said aerosol thereby forming an acetylene-black coating on the lithium iron phosphate particles; (iii) the coated particles are cooled by an iner

Abstract: A method for forming a novel composite of carbon nanofibers grown on a nickel foam is described wherein the composite, when used in a capacitor exhibits superior change retention and discharge capacities. Once the composite material has been obtained, it may be formed into electrodes which can be used to form supercapacitors of large per area capacitances in the order of 1.2 F/cm2.

Abstract: A method for manufacturing metal nanostructure which can manufacture a metal nanostructure which has the structure and properties different from the structure and properties of a conventional material and can be properly used in various applications is provided. The method for manufacturing metal nanostructure includes the steps of: preparing metal-coated organic nanofibers in which surfaces of the organic nanofibers are coated with metal; and preparing a metal nanostructure having the structure where the organic nanofibers are used as a template by removing organic components from the metal-coated organic nanofibers by heating the metal-coated organic nanofibers at a temperature ranging from 250° C. to 600° C.

Abstract: A method of producing compound nanorods and thin films under a controlled growth mode is described. The method involves ablating compound targets using an ultrafast pulsed laser and depositing the ablated materials onto a substrate. When producing compound nanorods, external catalysts such as pre-deposited metal nanoparticles are not involved. Instead, at the beginning of deposition, simply by varying the fluence at the focal spot on the target, a self-formed seed layer can be introduced for nanorods growth. This provides a simple method of producing high purity nanorods and controlling the growth mode. Three growth modes are covered by the present invention, including nanorod growth, thin film growth, and nano-porous film growth.

Abstract: A plurality of nanowires is grown on a first substrate in a first direction perpendicular to the first substrate. An insulation layer covering the nanowires is formed on the first substrate to define a nanowire block including the nanowires and the insulation layer. The nanowire block is moved so that each of the nanowires is arranged in a second direction parallel to the first substrate. The insulation layer is partially removed to partially expose the nanowires. A gate line covering the exposed nanowires is formed. Impurities are implanted into portions of the nanowires adjacent to the gate line.