Patents Examined by Sheikh Maruf
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Patent number: 11664476Abstract: A laser light is used to modify the surface of the gallium semiconductor layer of an LED. The parameters of the laser are selected so that the laser interacts with the gallium semiconductor layer in a desired manner to yield the desired surface properties. For example, if a particular surface roughness is desired, the power of the laser light is selected so that the laser light penetrates the gallium semiconductor layer to a depth matching the desired surface roughness. The same principles can also be applied in a process that creates features such as trenches, pits, lenses, and mirrors on the gallium semiconductor layer of an LED. The laser projector is operated to irradiate a region of the gallium semiconductor layer to create a region of metallic gallium. The desired surface roughness and the different features can advantageously improve the beam collimation, light extraction, and other properties of the LED.Type: GrantFiled: March 2, 2022Date of Patent: May 30, 2023Assignee: Meta Platforms Technologies, LLCInventors: Allan Pourchet, Vincent Brennan
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Patent number: 11652141Abstract: Transistor structures and methods of forming transistor structures are provided. The transistor structures include alternating layers of a first epitaxial material and a second epitaxial material. In some embodiments, one of the first epitaxial material and the second epitaxial material may be removed for one of an n-type or p-type transistor. A bottommost layer of the first epitaxial material and the second epitaxial material may be be removed, and sidewalls of one of the first epitaxial material and the second epitaxial material may be indented or recessed.Type: GrantFiled: March 24, 2022Date of Patent: May 16, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Cheng-Yi Peng, Hung-Li Chiang, Yu-Lin Yang, Chih Chieh Yeh, Yee-Chia Yeo, Chi-Wen Liu
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Patent number: 11646376Abstract: A semiconductor device includes a semiconductor substrate, a first dielectric film, a conductive film, at least one ferroelectric film, a second dielectric film, a memory gate electrode, a third dielectric film and a control gate electrode. The semiconductor substrate includes a source region and a drain region. The semiconductor substrate includes a first region and a second region between the source region and the drain region. The first dielectric film is formed on the first region. The conductive film is formed on the first dielectric film. The at least one ferroelectric film is formed on one hart of the conductive film. The second dielectric film is formed on the other part of the conductive film. The memory gate electrode is formed on the ferroelectric film. The third dielectric film is formed on the second region. The control gate electrode is formed on the third dielectric film.Type: GrantFiled: September 20, 2021Date of Patent: May 9, 2023Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Eiji Tsukuda, Katsumi Eikyu
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Patent number: 11637175Abstract: A vertical transistor comprises a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region. The top source/drain region and the channel region have a top interface and the bottom source/drain region and the channel region have a bottom interface. The channel region is crystalline and has an average crystal grain size of its crystal grains that is less than 20 nanometers. The channel region at the top interface or at the bottom interface has greater horizontal texture than volume of the crystal grains in the channel region that is vertically between the crystal grains that are at the top and bottom interfaces. Other embodiments and aspects are disclosed.Type: GrantFiled: December 9, 2020Date of Patent: April 25, 2023Assignee: Micron Technology, Inc.Inventors: Yi Fang Lee, Hung-Wei Liu, Ning Lu, Anish A. Khandekar, Jeffery B. Hull, Silvia Borsari
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Patent number: 11638374Abstract: Apparatuses and methods to provide a patterned substrate are described. A plurality of patterned and spaced first lines and carbon material lines and formed on the substrate surface by selectively depositing and etching films extending in a first direction and films extending in a second direction that crosses the first direction to pattern the underlying structures.Type: GrantFiled: April 14, 2022Date of Patent: April 25, 2023Assignee: Applied Materials, Inc.Inventors: Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung, Eswaranand Venkatasubramanian, Ho-yung David Hwang, Samuel E. Gottheim
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Patent number: 11630344Abstract: Provided is a light-emitting device that makes it possible to emit, with high efficiency, light having higher uniformity. The light-emitting device includes a light source, a wavelength conversion unit, and a wall member. The light source is disposed on a substrate. The wavelength conversion unit includes a wavelength conversion member and a transparent member that contains the wavelength conversion member therein. The wavelength conversion member is disposed to face the light source in a thickness direction and converts first wavelength light from the light source to second wavelength light. The wall member is provided on a substrate and surrounds the light source in a plane that is orthogonal to the thickness direction. A region occupied by the wavelength conversion member is wider than a region surrounded by the wall member, and entirety overlaps with the region surrounded by the wall member in the thickness direction.Type: GrantFiled: February 23, 2022Date of Patent: April 18, 2023Assignee: SATURN LICENSING LLCInventor: Tomoharu Nakamura
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Patent number: 11621322Abstract: A transistor amplifier package includes a base, one or more transistor dies on the base, first and second leads coupled to the one or more transistor dies and defining respective radio frequency (RF) signal paths, and an isolation structure on the base between the respective RF signal paths. The isolation structure includes first and second wire bonds. The first and second wire bonds may have a crossed configuration defining at least one cross point therebetween. Related wire bond-based isolation structures are also discussed.Type: GrantFiled: July 30, 2020Date of Patent: April 4, 2023Assignee: Wolfspeed, Inc.Inventors: Lei Zhao, Fabian Radulescu
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Patent number: 11594531Abstract: Three-dimensional (3D) memory devices are provided. An exemplary 3D memory device includes a first semiconductor structure including a peripheral circuit, a data processing circuit, and a first bonding layer including a plurality of first bonding contacts. The peripheral circuit and the data processing circuit are stacked over one another vertically on different planes. The 3D memory device also includes a second semiconductor structure including an array of 3D NAND memory strings and a second bonding layer including a plurality of second bonding contacts. In addition, the 3D memory device includes a bonding interface between the first bonding layer and the second bonding layer. The first bonding contacts are in contact with the second bonding contacts at the bonding interface.Type: GrantFiled: July 5, 2021Date of Patent: February 28, 2023Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Shengwei Yang, Zhongyi Xia, Kun Han
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Patent number: 11594496Abstract: A device area and a marking area neighboring the device area over a dielectric stack are determined. The dielectric stack includes insulating material layers and sacrificial material layers arranged alternatingly over a substrate. The device area and the marking area are patterned using a same etching process to form a marking pattern having a central marking structure in a marking area and a staircase pattern in the device area. The marking pattern and the staircase pattern have a same thickness equal to a thickness of at least one insulating material layer and one sacrificial material layer, and the central marking structure divides the marking area into a first marking sub-area farther from the device area and a second marking sub-area closer to the device area. A first pattern density of the first marking sub-area is greater than or equal to a second pattern density of the second marking sub-area.Type: GrantFiled: November 23, 2021Date of Patent: February 28, 2023Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Lin Chen, Yunfei Liu, Meng Wang
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Patent number: 11587827Abstract: Conformal hermetic dielectric films suitable as dielectric diffusion barriers over 3D topography. In embodiments, the dielectric diffusion barrier includes a dielectric layer, such as a metal oxide, which can be deposited by atomic layer deposition (ALD) techniques with a conformality and density greater than can be achieved in a conventional silicon dioxide-based film deposited by a PECVD process for a thinner contiguous hermetic diffusion barrier. In further embodiments, the diffusion barrier is a multi-layered film including a high-k dielectric layer and a low-k or intermediate-k dielectric layer (e.g., a bi-layer) to reduce the dielectric constant of the diffusion barrier. In other embodiments a silicate of a high-k dielectric layer (e.g., a metal silicate) is formed to lower the k-value of the diffusion barrier by adjusting the silicon content of the silicate while maintaining high film conformality and density.Type: GrantFiled: January 3, 2022Date of Patent: February 21, 2023Assignee: Intel CorporationInventors: Sean King, Hui Jae Yoo, Sreenivas Kosaraju, Timothy Glassman
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Patent number: 11587782Abstract: A method for fabricating a semiconductor arrangement is provided. The method includes forming a first dielectric layer and forming a first semiconductive layer over the first dielectric layer. The first semiconductive layer is patterned to form a patterned first semiconductive layer. The first dielectric layer is patterned using the patterned first semiconductive layer to form a patterned first dielectric layer. A second semiconductive layer is formed over the patterned first dielectric layer and the patterned first semiconductive layer.Type: GrantFiled: November 20, 2019Date of Patent: February 21, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Yi-Shan Chen, Hao-Heng Liu
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Patent number: 11588019Abstract: A semiconductor device includes a bipolar junction transistor having a collector, a base, and an emitter. The collector includes a current collection region, a constriction region laterally adjacent to the current collection region, and a contact region laterally adjacent to the constriction region, located opposite from the current collection region. The current collection region, the constriction region laterally, and the contact region all have the same conductivity type. The base includes a current transmission region contacting the current collection region and a constricting well laterally adjacent to, and contacting, the current transmission region and contacting the constriction region. The current transmission region and the constricting well have an opposite conductivity type than the current collection region, the constriction region laterally, and the contact region.Type: GrantFiled: December 2, 2021Date of Patent: February 21, 2023Assignee: Texas Instruments IncorporatedInventors: Alexei Sadovnikov, Natalia Lavrovskaya
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Patent number: 11588043Abstract: Aspects of the disclosure provide a bipolar transistor structure with an elevated extrinsic base, and related methods to form the same. A bipolar transistor according to the disclosure may include a collector on a substrate, and a base film on the collector. The base film includes a crystalline region on the collector and a non-crystalline region adjacent the crystalline region. An emitter is on a first portion of the crystalline region of the base film. An elevated extrinsic base is on a second portion of the crystalline region of the base film, and adjacent the emitter.Type: GrantFiled: April 14, 2021Date of Patent: February 21, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Viorel C. Ontalus, Judson R. Holt
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Ferroelectric tunnel junction devices with metal-FE interface layer and methods for forming the same
Patent number: 11581335Abstract: A memory device, transistor, and methods of making the same, the memory device including a memory device including: a ferroelectric (FE) structure including: a dielectric layer, an FE layer disposed on the dielectric layer, and an interface metal layer disposed on the FE layer, in which the interface metal layer comprises W, Mo, Ru, TaN, or a combination thereof to induce the FE layer to have an orthorhombic phase; and a top electrode layer disposed on the interface metal.Type: GrantFiled: April 12, 2021Date of Patent: February 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Han-Jong Chia, Mauricio Manfrini -
Patent number: 11581334Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a gate electrode arranged over a substrate. A gate dielectric layer is arranged over the gate electrode, and an active structure is arranged over the gate dielectric layer. A source contact and a drain contact are arranged over the active structure. The active structure includes a stack of cocktail layers alternating with first active layers. The cocktail layers include a mixture of a first material and a second material. The first active layers include a third material that is different than the first and second materials. The bottommost layer of the active structure is one of the cocktail layers.Type: GrantFiled: February 5, 2021Date of Patent: February 14, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Rainer Yen-Chieh Huang, Hai-Ching Chen, Chung-Te Lin
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Patent number: 11575035Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a plurality of gates disposed on the quantum well stack; and a top gate at least partially disposed on the plurality of gates such that the plurality of gates are at least partially disposed between the top gate and the quantum well stack.Type: GrantFiled: September 22, 2021Date of Patent: February 7, 2023Assignee: Intel CorporationInventors: Jeanette M. Roberts, James S. Clarke, Ravi Pillarisetty, David J. Michalak, Zachary R. Yoscovits
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Patent number: 11575043Abstract: A semiconductor device includes a transistor. The transistor includes a gate electrode, a channel layer, a gate dielectric layer, a first source/drain region and a second source/drain region and a dielectric pattern. The channel layer is disposed on the gate electrode. The gate dielectric layer is located between the channel layer and the gate electrode. The first source/drain region and the second source/drain region are disposed on the channel layer at opposite sides of the gate electrode. The dielectric pattern is disposed on the channel layer. The first source/drain region covers a first sidewall and a first surface of the dielectric pattern, and a second sidewall opposite to the first sidewall of the dielectric pattern is protruded from a sidewall of the first source/drain region.Type: GrantFiled: July 23, 2021Date of Patent: February 7, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Feng Yin, Chia-Jung Yu, Pin-Cheng Hsu, Chung-Te Lin
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Patent number: 11574927Abstract: A semiconductor device includes a gate electrode, a channel layer, and a ferroelectric layer. The ferroelectric layer includes a monocrystalline region located between the gate electrode and the channel layer to serve as a gate dielectric, and a polycrystalline region located at an edge of the gate electrode. A method for manufacturing the semiconductor device is also disclosed.Type: GrantFiled: April 16, 2021Date of Patent: February 7, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Marcus Johannes Henricus Van Dal, Georgios Vellianitis, Gerben Doornbos
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Patent number: 11569370Abstract: An integrated circuit structure comprises a semiconductor fin protruding through a trench isolation region above a substrate. A gate structure is over the semiconductor fin. A plurality of vertically stacked nanowires is through the gate structure, wherein the plurality of vertically stacked nanowires includes a top nanowire adjacent to a top of the gate structure, and a bottom nanowire adjacent to a top of the semiconductor fin. A dielectric material covers only a portion of the plurality of vertically stacked nanowires outside the gate structure, such that one or more one of the plurality of vertically stacked nanowires starting with the top nanowire is exposed from the dielectric material. Source and drain regions are on opposite sides of the gate structure connected to the exposed ones of the plurality of vertically stacked nanowires.Type: GrantFiled: June 27, 2019Date of Patent: January 31, 2023Assignee: Intel CorporationInventors: Leonard P. Guler, Vivek Thirtha, Shu Zhou, Nitesh Kumar, Biswajeet Guha, William Hsu, Dax Crum, Oleg Golonzka, Tahir Ghani, Christopher Kenyon
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Patent number: 11569388Abstract: A multi-gate FinFET including a negative capacitor connected to one of its gates, a method of manufacturing the same, and an electronic device comprising the same are disclosed. In one aspect, the FinFET includes a fin extending in a first direction on a substrate, a first gate extending in a second direction crossing the first direction on the substrate on a first side of the fin to intersect the fin, a second gate opposite to the first gate and extending in the second direction on the substrate on a second side of the fin opposite to the first side to intersect the fin, a metallization stack provided on the substrate and above the fin and the first and second gates, and a negative capacitor formed in the metallization stack and connected to the second gate.Type: GrantFiled: August 27, 2020Date of Patent: January 31, 2023Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Huilong Zhu, Zhengyong Zhu