Abstract: A method of exposing a wafer to a charged-particle beam by directing to the wafer the charged-particle beam deflected by a deflector includes the steps of arranging a plurality of first marks at different heights, focusing the charged-particle beam on each of the first marks by using a focus coil provided above the deflector, obtaining a focus distance for each of the first marks, obtaining deflection-efficiency-correction coefficients for each of the first marks, and using linear functions of the focus distance for approximating the deflection-efficiency-correction coefficients to obtain the deflection-efficiency-correction coefficients for an arbitrary value of the focus distance. A device for carrying out the method is also set forth.

Abstract: A compound semiconductor device includes a low resistance source and drain region covered by a protective layer of a compound semiconductor device carrying thereon a source electrode or a drain electrode. Further, a low resistance source and drain region formed by a regrowth process of a compound semiconductor material is disclosed.

Abstract: Each of common electrode teeth 76-1, 76-2 and 76-3, and each of individual electrode teeth 77-1 and 77-2 are alternately arranged in the X1-X2 direction at predetermined intervals g. When a positive voltage is applied to the individual electrode teeth 77-1 and 77-2, an electric field 83-1 indicated by a line of electric force 82-1 is produced in a piezoelectric plate member 65 between the individual electrode tooth 77-1 and the common electrode tooth 76-1 and an electric field 83-2 indicated by a line of electric force 82-2 is produced between the individual electrode tooth 77-1 and the common electrode tooth 76-2. Likewise, an electric field 83-3 indicated by a line of electric force 82-3 is produced between the individual electrode tooth 77-2 and the common electrode tooth 76-2 and an electric field 83-4 indicated by a line of electric force 82-4 is produced between the individual electrode tooth 77-2 and the common electrode tooth 76-3.

Abstract: An image processing method and apparatus includes a controller for an electronic apparatus which displays image data stored in a image memory on a display unit. The controller includes an output unit outputting the image data to be displayed and stored in the image memory to the display unit, a storing controller storing an image data received from an image input device to the image memory, and a transfer unit transferring the image data stored in the image data by the storing controller to a second memory.

Abstract: Disclosed is a liquid-crystal drive circuit having a simple configuration and being not susceptible to the characteristic of a device. The liquid-crystal drive circuit includes an auxiliary capacitor, applies a first voltage to a driving buffer, temporarily accumulates an output voltage of the driving buffer in the auxiliary capacitor, applies a voltage produced by subtracting the potential at the auxiliary capacitor from a second voltage to the driving buffer, and applies an output of the driving buffer onto a data bus.

Abstract: A plasma display panel of a matrix display type, having a first electrode and a second electrode which constitute a main electrode pair, the first electrode and the second electrode being covered with an insulating layer against a discharge gas, wherein the insulating layer comprises a magnesium oxide film formed at least as a surface layer thereof which is in contact with the discharge gas, the magnesium oxide film having an impedance in the range of 230 to 330 k&OHgr;/cm2 at a frequency of 100 Hz.

Abstract: The semiconductor device according to the present invention comprises: a semiconductor substrate 10 of a first conductivity type; a well 28 of a second conductivity type different from the first conductivity type formed in a region 18 surrounding a region 20 of the semiconductor substrate 10; a diffused layer 42 of the second conductivity type formed, buried in the semiconductor substrate 10 in the region 20 and connected to the well 28 on a side thereof; and a well 44 of the first conductivity type formed in the semiconductor substrate 10 in the region 20 on the side of a surface thereof and electrically isolated from a rest region of the semiconductor substrate 10 by the well 28 and the diffused layer 42.

Abstract: A data caching apparatus, data caching method and medium recorded with data caching program in client/server distributed systems, wherein, when there is a request from a client for reference to a database, duplicate of reference request data retained in a cache file is preferentially sent back to the client, and the duplicate data retained in the cache file is updated in the server background.

Abstract: In the present invention, the process of forming the dielectric layer is carried out by laminating a dielectric thin film sheet on a substrate. Alternatively, it is carried out by sealing together a dielectric thin film sheet and the rear-side substrate whilst leaving a discharge gap therebetween. In particular, by using a dielectric thin film sheet to constitute the dielectric layer formed onto the display-side substrate, which must be transparent, the conventional processes of printing and anneling become unnecessary. For this dielectric thin film sheet, a micro-sheet comprising borosilicate glass or soda-lime glass as a principal component is used. This micro-sheet may have a thickness of 5 &mgr;m or less, and it is suitable as a dielectric layer for a plasma display panel.

Abstract: A magnetic head slider has a plurality of rail planes to generate a floating force by using an air flow passing through a region between a group of the rail planes and a magnetic disk rotated at a constant rotating speed, and the slider floats up into the air according to the floating force. Also, the slider has a first pad arranged near an air inflow end of one rail plane and a second pad arranged near an air outflow end of the same or another rail plane, and a height of the first pad and a height of the second pad respectively range from 20 to 50 nm. Therefore, a coefficient of a friction between the pads and the magnetic disk can be reduced, and the wear of the pads can be prevented. Also, the contact of an electro-magnetic transducing device attached to the air outflow end of the rail plane with the magnetic disk can be prevented.

Abstract: An interlayer insulation film is deposited on a substrate in which a semiconductor element has been formed. A wiring groove is formed in the interlayer insulation film. A barrier layer, made of a material which prevents the diffusion of Cu atoms, is formed on at least the inner surface of the wring groove and the upper surface of the interlayer insulation film. A seed layer, made of Cu which contains an impurity, -is deposited on the barrier layer. By way of plating, a conductive layer made of Cu is deposited on the seed layer so as to fill the wiring groove. The substrate is heated to precipitate the impurity, contained in the seed layer, on at least an interface between the seed layer and the barrier layer. The conductive layer, the seed layer and the barrier layer are removed until the upper surface of the interlayer insulation film appears, thus performing surface planarization.

Abstract: A voltage boost circuit (111) for a memory (100) includes a boosting circuit (110) which is coupled to a boosted node (120) to boost a word line voltage for accessing a core cell of the memory. The voltage boost circuit further includes a reset circuit (112) coupled to the boosted node and including a switchable zero-threshold transistor (202) for resetting the boosted node to a reset voltage (VCC).

Abstract: A plasma display panel has a first substrate, a plurality of address electrodes disposed on the first substrate, a first dielectric layer disposed on the first substrate in covering relation to the address electrodes, a second substrate, a plurality of scan electrodes disposed on the second substrate in a direction transverse to the address electrodes, a second dielectric layer disposed on the second substrate in covering relation to the scan electrodes. The first substrate and the second substrate are disposed in confronting relation to each other with discharge spaces defined therebetween. The first dielectric layer contains electrically conductive particles mixed therewith. The electrically conductive particles make the first dielectric layer electrically conductive in its transverse direction to allow charges stored on the first dielectric layer to leak to the address electrodes for thereby reducing the frequency of random discharges.

Abstract: Disclosed is a magnetic disk apparatus constructed to reduce a track positional deviation of a magnetic head. This magnetic disk apparatus includes a rotary mechanism for rotating the magnetic disk and a rotary type actuator, provided with the magnetic head at its front end, which magnetic head has a write head and a read head, for moving the magnetic head in such a direction as to traverse tracks of the magnetic disk by making rotations about a rotary shaft. A distance A from the center of rotation of the rotary type actuator to the magnetic head is set equal to or larger than a distance B from the center of rotation of the rotary type actuator to the center of rotation of the magnetic disk. Even when separating a write element and a read element, the track positional deviation of the magnetic head can be reduced.

Abstract: The invention provides an optical wavelength multiplex transmission method wherein a band in the proximity of a zero dispersion wavelength of an optical fiber is used and optical signals are disposed at efficient channel spacings taking an influence of the band, the wavelength dispersion and the four wave mixing into consideration to realize an optical communication system of an increased capacity which is not influenced by crosstalk by FWM. When optical signals of a plurality of channels having different wavelengths are to be multiplexed and transmitted using an optical fiber, a four wave mixing suppressing guard band of a predetermined bandwidth including the zero-dispersion wavelength &lgr;&thgr; of the optical fiber is set, and signal light waves of the plurality of channels to be multiplexed are arranged on one of the shorter wavelength side and the longer wavelength side outside the guard band.

Abstract: A method of forming a nitride film by a reactive sputtering process includes the steps of (A) sputtering a first nitride film on a substrate by using a target of a refractory metal element under a first sputtering condition set such that a deposition of a nitride of the refractory metal element occurs on the substrate as a result of the sputtering, and (B) sputtering, after the step (A), a second nitride film on the first nitride film by using the target used in the step (A) under a second sputtering condition, wherein the second sputtering condition is set such that no deposition of the nitride occurs on the first nitride film.

Abstract: A mobile communication system involves a mobile space defined in, for example, a train, and mobile terminals available in the market. When the mobile terminals are used in the mobile space, the system provides them with value-added services exclusive to the mobile space. The system also includes existing base stations each controlling a fixed radio zone that covers a predetermined area, and a mobile base station for controlling a mobile radio zone allocated to the mobile space where the mobile terminals are used. The mobile base station serves as a mobile base station to communicate with the existing base stations, and as a fixed base station to communicate with the mobile terminals when the mobile terminals are in the mobile radio zone. Also provided is a method of controlling such a system.

Abstract: An internal shelled connector, mounted on electric equipment having a grounded chassis panel, for mating with an external cable connector. The connector is encapsulated by a conducting shell for electrostatic shield, except at an opening for receiving the external connector through a corresponding window of the panel. A contact, formed on the shell maintains pressure on a back surface of the panel to ground the shell. The contact may be a flange formed at a tip of a blade spring formed integrally continuous with the conducting shell. The flange maintains a persistent electric contact with the panel, even if the panel and the mounted shelled connector are partially separated due to mechanical stress, when plugging in or pulling out the external cable connector.

Abstract: A sector mark detecting circuit for detecting a sector mark on an optical storage medium includes a binarizing circuit which binarizes a reading signal of an optical head in accordance with a predetermined detection parameter and is capable of changing the detection parameter. A recognizing circuit is adapted to recognize a sector mark from an output of the binarizing circuit, and a control circuit is adapted to measure an optimal value of the detection parameter of the binarizing circuit and control the detection parameter of the binarizing circuit to the optimal value. A sector mark detection rate is thereby enhanced.