Patents Assigned to Hitachi High-Technologies Corporation
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Patent number: 10294525Abstract: To introduce a biomolecule into a nanopore without the need to check the position of the nanopore in a thin film. In addition, displacement stability is ensured and stable acquisition of blocking signals is realized. An immobilization member 107 having a larger size than a thin film 113 with a nanopore 112 is used, and biomolecules are immobilized on the biomolecule immobilization member 107 at a density that allows at least one biomolecule 108 to enter an electric field region around the nanopore when the biomolecule immobilization member 107 has moved close to a nanopore device 101.Type: GrantFiled: October 28, 2015Date of Patent: May 21, 2019Assignee: Hitachi High-Technologies CorporationInventors: Rena Akahori, Itaru Yanagi, Kenichi Takeda
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Patent number: 10295339Abstract: A pattern measurement method and measurement apparatus are provided that appropriately evaluate the deformation of a pattern occurring due to a micro loading effect. In order to achieve the above-mentioned object, there are provided pattern measurement method and apparatus that measure a dimension of a pattern formed on a sample. In the pattern measurement method and apparatus, distances between a reference pattern and a plurality of adjacent patterns adjacent to the reference pattern or inner diameters of the reference pattern in a plurality of directions are measured, and the measurement results of the plurality of distances between the reference pattern and the adjacent patterns or the measurement results of the inner diameters of the reference pattern in the plurality of directions are classified according to distances between the reference pattern and the adjacent patterns or directions of the patterns adjacent to the reference pattern.Type: GrantFiled: July 21, 2016Date of Patent: May 21, 2019Assignee: Hitachi High-Technologies CorporationInventors: Kazuhisa Hasumi, Masami Ikota
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Patent number: 10297021Abstract: To quantify the degree of a defect, and provide information useful for yield management. Disclosed is a defect quantification method wherein: a defect image is classified; a measurement region and a measurement area are set to each of the defect image and a reference image on the basis of defect image classification results, said reference image corresponding to the defect image; and an evaluation value of a defect is calculated using each of the measurement values obtained from each of the measurement areas of the defect image and the reference image, and the defect is quantified.Type: GrantFiled: June 26, 2015Date of Patent: May 21, 2019Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Yohei Minekawa, Yuji Takagi, Takehiro Hirai
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Patent number: 10294519Abstract: A convenient method for nucleic acid analysis is provided, which enables 1000 or more types of nucleic acid to be analyzed collectively with high comprehensiveness and with a dynamic range of at least four digits. In particular, provided is a very effective analytical method especially for untranslated RNAs and microRNAs, of which the types of target nucleic acids is 10000 or lower. Nucleic acids can be analyzed conveniently and rapidly with high comprehensiveness and quantitative performance at single-molecule sensitivity and resolution by following the steps of: preparing a group of target nucleic acid fragments one molecule at a time and hybridizing the nucleic acid molecules, which have known base sequences and have been labeled with the fluorescence substances, with the group of the target nucleic acid fragments to detect the fluorescence substances labeling the hybridized nucleic acid molecules.Type: GrantFiled: May 16, 2012Date of Patent: May 21, 2019Assignee: Hitachi High-Technologies CorporationInventors: Toshiro Saito, Koshin Hamasaki, Satoshi Takahashi, Muneo Maeshima, Kyoko Imai, Kazumichi Imai, Ryuji Tao
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Patent number: 10295555Abstract: A signal reference value (SLocal) is set at which a blood coagulation reaction time (T) of a blood coagulation time reference sample measured on the basis of the result of comparing a signal value (amount of transmitted light, amount of scattered light, amount of fluorescence, or turbidity) pertaining to blood coagulation time that varies temporally according to the mixing and reaction of the blood coagulation time reference sample and a reagent and a signal reference value (S) corresponds to an expected value (Te) for the blood coagulation reaction time that has been set beforehand so as to correspond to the blood coagulation time reference sample. As a result, it is possible to use the blood coagulation time reference sample to determine the state of the reagent and enhance the reliability of measurement results by setting a unique signal reference value for each reagent container.Type: GrantFiled: December 8, 2014Date of Patent: May 21, 2019Assignee: Hitachi High-Technologies CorporationInventors: Chie Yabutani, Akihisa Makino, Shigeki Matsubara
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Patent number: 10297419Abstract: The present invention has an object to provide a scanning electron microscope which suppresses a potential gradient produced by preliminary charge without changing lens conditions of an electron microscope. As an aspect to achieve the above object, there is proposed a scanning electron microscope in which a scanning deflector is controlled so that a second beam is scanned to detect electrons released from a sample after scanning a first beam on the sample to charge the surface of the sample and the first beam is scanned so that charge density in a surrounding part within a scanned area by the first beam is increased relatively as compared with a center part within the scanned area by the first beam.Type: GrantFiled: January 25, 2012Date of Patent: May 21, 2019Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Shahedul Hoque, Hajime Kawano
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Publication number: 20190145997Abstract: The purpose of the present invention is to constantly keep a state in a flow cell steady by filling a detection flow channel with a liquid. The configuration of the present invention for solving the aforementioned problem is as follows. Specifically, the present invention is an automatic analysis apparatus provided with a detection unit including a flow cell that accommodates a liquid serving as an analysis subject; a suction nozzle that is positioned upstream of the flow cell and that sucks the liquid to be introduced into the flow cell; a pump that is positioned downstream of the flow cell and that supplies the liquid to the flow cell; flow channels that connect the flow cell, the suction nozzle, and the pump; a power source; and a power-cutting instructing unit that gives an instruction to cut the power supply at least to the pump.Type: ApplicationFiled: January 19, 2017Publication date: May 16, 2019Applicant: Hitachi High-Technologies CorporationInventors: Yoshihiro KABE, Yukinori SAKASHITA, Katsuhiro KAMBARA, Taku SAKAZUME, Tatsuya FUKUGAKI
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Patent number: 10290522Abstract: An object of the present invention is to provide a charged particle beam device that suppresses the influence of an external electromagnetic wave, even when a shielding member, such as a vacuum valve, is in the open state. To achieve the above object, a charged particle beam device including a vacuum chamber (111) having an opening (104) that surrounds a sample delivery path is proposed. The charged particle beam device includes a conductive material (118) surrounding the opening (104) for conduction between the vacuum chamber (111) and a conductive member (106) disposed on the atmosphere side. According to an embodiment of the present invention, it is possible to restrict an electromagnetic wave (117) from reaching the sample chamber via the delivery path.Type: GrantFiled: March 19, 2014Date of Patent: May 14, 2019Assignee: Hitachi High-Technologies CorporationInventors: Masashi Fujita, Masahiro Tsunoda, Katsunori Onuki, Katsuya Aibara, Seiichi Shindo, Takaaki Nishimori
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Patent number: 10290472Abstract: In a vacuum processing apparatus including: a vacuum container including a processing chamber therein; a plasma formation chamber; plate members being arranged between the processing chamber and the plasma formation chamber; and a lamp and a window member being arranged around the plate members, in order that a wafer and the plate members are heated by electromagnetic waves from the lamp, a bottom surface and a side surface of the window member is formed of a member transmitting the electromagnetic waves therethrough.Type: GrantFiled: March 17, 2016Date of Patent: May 14, 2019Assignee: Hitachi High-Technologies CorporationInventors: Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma, Satoshi Sakai, Masaru Izawa
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Patent number: 10290464Abstract: The present invention provides a charged particle beam device capable of predicting the three-dimensional structure of a sample, without affecting the charge of the sample. The present invention provides a charged particle beam device characterized in that a first distance between the peak and the bottom of a first signal waveform obtained on the basis of irradiation with a charged particle beam having a first landing energy, and a second distance between the peak and the bottom of a second signal waveform obtained on the basis of irradiation with a charged particle beam having a second landing energy different from the first landing energy are obtained, and the distance between the peak and the bottom at a landing energy (zero, for instance) different from the first and second landing energies is obtained on the basis of the extrapolation of the first distance and the second distance.Type: GrantFiled: August 15, 2016Date of Patent: May 14, 2019Assignee: Hitachi High-Technologies CorporationInventors: Toshiyuki Yokosuka, Chahn Lee, Hideyuki Kazumi, Manabu Hasegawa
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Patent number: 10288637Abstract: A pressure signal process unit acquires data under a predetermined condition and a statistic distance between the acquired data and determination-purpose reference data stored in a storage unit is calculated. It is determined whether or not dispensing is abnormal and whether the determination-purpose reference data is suitable for an abnormality detection function to be properly fulfilled. If the determination-purpose reference data is not suitable for an abnormality detection function to be properly fulfilled, temporary determination-purpose reference data is prepared so as to be compared with the previously acquired data under a predetermined condition. If a difference therebetween is greater than a predetermined threshold value, a possibility that an automatic analyzer may have an abnormal component or that a failure may occur in the automatic analyzer is determined, and the result is transmitted to cause a display device to display an alarm.Type: GrantFiled: April 22, 2015Date of Patent: May 14, 2019Assignee: Hitachi High-Technologies CorporationInventors: Hideto Tamezane, Isao Yamazaki, Masaharu Nishida, Kumiko Kamihara
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Publication number: 20190139210Abstract: Provided is a defect classification apparatus classifying images of defects of a sample included in images obtained by capturing the sample, the apparatus including an image storage unit for storing the images of the sample acquired by an external image acquisition unit, a defect class storage unit for storing types of defects included in the images of the sample, an image processing unit for extracting images of defects from the images from the sample, processing the extracted images of defects and generating a plurality of defect images, a classifier learning unit for learning a defect classifier using the images of defects of the sample extracted by the image processing unit and data of the plurality of generated defect images, and a defect classification unit for processing the images of the sample by using the classifier learned by the classifier learning unit, to classify the images of defects of the sample.Type: ApplicationFiled: May 24, 2016Publication date: May 9, 2019Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Naoaki KONDO, Takehiro HIRAI, Minoru HARADA, Yuji TAKAGI
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Patent number: 10281439Abstract: In the present invention, differences in liquid feed properties between liquid chromatographic devices are determined, a liquid feed time table that takes these differences into account is acquired by way of system changes, and flow control is performed by a pump. Furthermore, the liquid feed time table after the system changes is divided into a plurality of intervals, and instructions are sent to the pump after approximate calculations are performed. Thus, by efficiently performing system change processes, the same measurement results can be obtained in a plurality of different liquid chromatograph devices, regardless of the differences in liquid feed properties.Type: GrantFiled: November 11, 2013Date of Patent: May 7, 2019Assignee: Hitachi High-Technologies CorporationInventors: Toshimichi Aota, Satoshi Mitsuyama, Masahito Ito, Chihiro Yoshioka, Takaaki Suzuki
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Patent number: 10274506Abstract: In the past, when centering the center of a liquid surface and fixation thereof proved difficult during mounting a container into an automatic analytical apparatus, there was sometimes the possibility that the accuracy of checking the liquid surface conditions and the pipetting precision could not be ensured. When this problem occurred, there was the possibility that the reliability of the analysis results would be diminished. Accordingly, an automatic analytical apparatus is provided with a probe for suctioning a liquid to be used in analysis, wherein the apparatus is provided with a transport apparatus for transporting a container accommodating the liquid, and a container-clamping apparatus for clamping the container transported by the transport apparatus. The container-clamping apparatus has a vibration suppression mechanism for retaining the clamped container with an elastic body, and a centering retention mechanism with which centering of the container center can be fixed.Type: GrantFiled: January 19, 2015Date of Patent: April 30, 2019Assignee: Hitachi High-Technologies CorporationInventors: Kazuhiro Noda, Yoichiro Suzuki
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Patent number: 10267816Abstract: An automatic analysis device has a structure that allows the operator to add or replace a reagent. A reagent container loading portion has an opening through which a reagent container is adapted to be introduced into the device. A reagent container transport tool has a plurality of reagent container insertion slots and is movable up and down. A refrigerator to cool a plurality of reagent containers has an opening that allows the reagent container transport tool to pass therethrough. An elevating and lowering mechanism is configured to elevate or lower the reagent container transport tool. A reagent container loading portion has a plurality of guide grooves arranged radially on its lower surface in front of the opening that are adapted to guide a reagent container. The guide grooves communicate with the respective reagent container insertion slots arranged radially on the reagent container transport tool at an elevated position.Type: GrantFiled: September 2, 2015Date of Patent: April 23, 2019Assignee: Hitachi High-Technologies CorporationInventors: Mitsuru Oonuma, Hiroyuki Noda, Katsuhiro Kambara, Hiroaki Sakai
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Defect detection method and defect detection device and defect observation device provided with same
Patent number: 10267745Abstract: The disclosed device, which, using an electron microscope or the like, minutely observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, can reliably insert a defect to be observed into the field of an electron microscope or the like, and can be a device of smaller scale. The electron microscope, which observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, has a configuration incorporating an optimal microscope that re-detects defects, and a spatial filter and a distribution polarization element are inserted at the pupil plane when making dark-field observations using this optical microscope.Type: GrantFiled: August 10, 2017Date of Patent: April 23, 2019Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Yuko Otani, Takehiro Tachizaki, Masahiro Watanabe, Shunichi Matsumoto -
Patent number: 10267817Abstract: Provided is an automatic analysis apparatus for inspecting blood coagulation, which is capable of miniaturizing device configuration and reducing device costs. The automatic analysis apparatus includes: a reaction container in which a specimen and a reagent are mixed with each other and the mixed solution is reacted; a sample dispensing mechanism which dispenses the specimen into the reaction container; a blood coagulation time measuring unit in which the reaction container is mounted to measure a coagulation time of the mixed solution within the reaction container; a reaction container accommodating unit which accommodates a plurality of reaction containers provided to the blood coagulation measuring unit; a reaction container transfer mechanism which grasps the reaction container and transfers the reaction container to the blood coagulation measuring unit; and a control unit which controls the reaction container transfer mechanism.Type: GrantFiled: June 10, 2015Date of Patent: April 23, 2019Assignee: Hitachi High-Technologies CorporationInventors: Tatsuya Sakai, Akihisa Makino, Minoru Sano, Chie Yabutani
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Patent number: 10269533Abstract: In conventional structures, a space between a dual cooling tank is vacuum insulated, and a cooling part is cooled via a highly thermally conductive material connected to an inner container. Such structures are affected by heat infiltrating into the highly thermally conductive material and the cooling part. For instance, in cases when liquid nitrogen is used as a coolant, it takes approximately 30 minutes for the temperature to reach ?120° C. Even in cases when a significant amount of time has been spent, the temperature only reaches approximately ?150° C., and thus falls significantly short of the temperature of liquid nitrogen, namely ?196° C.Type: GrantFiled: September 18, 2014Date of Patent: April 23, 2019Assignee: Hitachi High-Technologies CorporationInventors: Takashi Mizuo, Yusuke Tamba, Haruhiko Hatano, Kazutaka Nimura
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Patent number: 10266801Abstract: According to the present invention, a simple structure can be used to achieve reliable liquid delivery with no residual air, and simple attachment/detachment of a culture vessel, and thus a closed-system cell culture device exhibiting high reliability can be constructed at low cost. In the present invention, a liquid is supplied or discharged while a culture vessel is in an inclined state. The culture vessel is provided with two flow paths, namely an intake flow path and a discharge flow path, which connect a culture chamber and a connection member. Points where the flow paths join with the culture chamber are respectively configured as an intake port and a discharge port. The discharge port is provided in the position nearest to the axis of inclination of the culture vessel. The intake port is provided in a plane projected from a vertical plane including the aforementioned axis of inclination.Type: GrantFiled: December 24, 2014Date of Patent: April 23, 2019Assignee: Hitachi High-Technologies CorporationInventors: Akihiro Shimase, Kazumichi Imai, Eiichiro Takada, Sadamitsu Aso
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Patent number: D847237Type: GrantFiled: June 7, 2017Date of Patent: April 30, 2019Assignee: Hitachi High-Technologies CorporationInventors: Yusaku Sakka, Hiromichi Kawasaki