Patents Examined by Alexander G. Ghyka
  • Patent number: 11482600
    Abstract: A gallium oxide field effect transistor that is built on a base layer. A doped gallium oxide channel layer is disposed on top of the base layer, and a dielectric barrier layer is disposed on top of the gallium oxide channel layer. Source contacts and drain contacts are disposed on top of the dielectric barrier layer, with one each of the drain contacts disposed in an interdigitated manner between one each of the source contacts. The interdigitated source contacts and drain contacts thereby define channels between them, where alternating ones of the channels are defined as odd channels, with even channels disposed therebetween. Gate contacts are disposed on top of the dielectric barrier layer in only one of the odd channels and the even channels.
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: October 25, 2022
    Assignee: United States of America as represented by Wright-Patterson the Secretary of the Air Force
    Inventor: Eric Heller
  • Patent number: 11476191
    Abstract: The present disclosure describes an interconnect structure and a method forming the same. The interconnect structure can include a substrate, a layer of conductive material over the substrate, a metallic capping layer over the layer of conductive material, a layer of insulating material over top and side surfaces of the metallic capping layer, and a layer of trench conductor formed in the layer of insulating material and the metallic capping layer.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: October 18, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jason Huang, Liang-Chor Chung, Cheng-Yuan Li
  • Patent number: 11476116
    Abstract: Disclosed is a method of manufacturing a gallium oxide thin film for a power semiconductor using a dopant activation technology that maximizes dopant activation effect and rearrangement effect of lattice in a grown epitaxial at the same time by performing in-situ annealing in a growth condition of a nitrogen atmosphere at the same time as the growth of a doped layer is finished.
    Type: Grant
    Filed: June 25, 2021
    Date of Patent: October 18, 2022
    Assignee: KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGY
    Inventors: Dae-Woo Jeon, Ji-Hyeon Park
  • Patent number: 11469174
    Abstract: A semiconductor device includes a substrate having a first region, a second region, a first buffer region, and a second buffer region. A plurality of conductive lines is disposed on the first region of the substrate. An inductor is disposed on the second region of the substrate, and a dummy pattern is disposed on the first buffer region of the substrate. The first buffer region is provided between the first region and the second region. The second buffer region is provided between the first buffer region and the second region.
    Type: Grant
    Filed: April 15, 2021
    Date of Patent: October 11, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Joon-Nyung Lee, Jeong Hoon Ahn
  • Patent number: 11469139
    Abstract: A method includes etching a dielectric layer to form a trench in the dielectric layer, depositing a metal layer extending into the trench, performing a nitridation process on the metal layer to convert a portion of the metal layer into a metal nitride layer, performing an oxidation process on the metal nitride layer to form a metal oxynitride layer, removing the metal oxynitride layer, and filling a metallic material into the trench using a bottom-up deposition process to form a contact plug.
    Type: Grant
    Filed: January 9, 2020
    Date of Patent: October 11, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yen-Yu Chen, Chung-Liang Cheng
  • Patent number: 11462403
    Abstract: The present disclosure provides a semiconductor structure and a method for manufacturing the same. The method at least includes: applying a first wet etching to remove a Ti metal seed layer to expose a dielectric layer; performing a first pretreatment on the dielectric layer; forming a first groove in the dielectric layer to expose an interfacial Ti metal seed layer in the dielectric layer; applying a second wet etching to remove the interfacial Ti metal seed layer; and performing a second pretreatment on the dielectric layer to form a second groove with a depth greater than that of the interfacial Ti metal seed layer, which can effectively remove the interfacial Ti metal seed layer, and results in a depth difference between the bottom of the second groove and the interfacial Ti metal seed layer, thereby avoiding short circuits caused by the interfacial Ti metal seed layer, and improving device reliability.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: October 4, 2022
    Assignee: SJ SEMICONDUCTOR (JIANGYIN) CORPORATION
    Inventors: Jiashan Yin, Zuyuan Zhou, Chengtar Wu, Chengchung Lin
  • Patent number: 11454847
    Abstract: A display system comprises light sources configured to emit first light with a first spectral power distribution; light regeneration layers configured to be stimulated by the first light and to convert at least a portion of the first light and recycled light into second light, the second light comprising (a) primary spectral components that correspond to primary colors and (b) secondary spectral components that do not correspond to the primary colors; and notch filter layers configured to receive a portion of the second light and to filter out the secondary spectral components from the portion of the second light. The portion of the second light can be directed to a viewer of the display system and configured to render images viewable to the viewer.
    Type: Grant
    Filed: September 11, 2019
    Date of Patent: September 27, 2022
    Assignee: DOLBY LABORATORIES LICENSING CORPORATION
    Inventors: Ajit Ninan, Chun Chi Wan, Timo Kunkel, Michael Eugene Miller
  • Patent number: 11450759
    Abstract: Described is a method of manufacturing a gate-all-around electronic device. The method includes forming a thermal oxide layer though an enhanced in situ steam generation process in combination with atomic layer deposition of a low-? layer. The thin thermal oxide layer passivates the interface between the silicon layer and the dielectric layer of the GAA. A passivation process after the deposition of the low-? layer reduces the bulk trap and enhances the breakdown performance of the GAA transistor.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: September 20, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Steven C. H. Hung, Benjamin Colombeau, Andy Lo, Byeong Chan Lee, Johanes F. Swenberg, Theresa Kramer Guarini, Malcolm J. Bevan
  • Patent number: 11444075
    Abstract: An integrated circuit (IC) includes a semiconductor substrate in which a plurality of spaced-apart deep trench (DT) structures are formed. The IC further includes a plurality of DEEPN diffusion regions, each DEEPN diffusion region surrounding a corresponding one of the DT structures. Each of the DEEPN diffusion regions merges with at least one neighboring DEEPN diffusion region that surrounds at least one neighboring DT structure. The merged DEEPN diffusion regions may partially isolate two electronic devices, e.g. ESD devices.
    Type: Grant
    Filed: October 29, 2019
    Date of Patent: September 13, 2022
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Henry Litzmann Edwards, Akram A. Salman, Binghua Hu
  • Patent number: 11444041
    Abstract: A method for producing an individualisation area includes providing at least a first level of the electrical tracks. The method includes depositing a dielectric layer and a deformable layer on the interconnection level. The method includes producing, in an area of the deformable layer, recessed patterns, by penetrating an imprint mould into the deformable layer, the production of the patterns being configured so that the patterns have a randomness in the deformable layer, thus forming random patterns. The method includes transferring the random patterns into the dielectric layer to form transferred random patterns therein and exposing the vias located in line with the transferred random patterns. The method includes filling the transferred random patterns with an electrically conductive material so as to form electrical connections between vias. The method includes producing a second level of the electrical tracks on the vias and the electrical connections.
    Type: Grant
    Filed: March 30, 2021
    Date of Patent: September 13, 2022
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Hubert Teyssedre, Stefan Landis, Michael May
  • Patent number: 11437412
    Abstract: A substrate including a gate line and a first electrode disposed on the substrate, an oxide semiconductor layer pattern overlapping the first electrode, an insulating layer disposed between the first electrode and the oxide semiconductor layer pattern, a data line intersecting the gate line, a second electrode electrically connected to the oxide semiconductor layer pattern, a third electrode electrically connected to the oxide semiconductor layer, the third electrode spaced apart from the second electrode, and an insulating pattern including a first portion which is disposed between the gate line and the data line and at least partially overlaps with both of the gate line and the data line.
    Type: Grant
    Filed: December 17, 2020
    Date of Patent: September 6, 2022
    Assignee: Samsung Display Co., Ltd.
    Inventors: Young-Wook Lee, Woo-Geun Lee, Ki-Won Kim, Hyun-Jung Lee, Ji-Soo Oh
  • Patent number: 11437390
    Abstract: Provided herein may be a semiconductor device. The semiconductor device may include a stack. The semiconductor device may include channel layers including channel patterns passing through the stack, dummy channel patterns passing through the stack, and a coupling pattern which may be disposed below the stack and couples the channel patterns with the dummy channel patterns. The semiconductor device may include a bit line which is disposed on the stack and coupled with the channel patterns. The semiconductor device may include a well pick-up line which is disposed on the stack and coupled with the dummy channel patterns.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: September 6, 2022
    Assignee: SK hynix Inc.
    Inventor: Kang Sik Choi
  • Patent number: 11437493
    Abstract: The present disclosure relates to a semiconductor device including a substrate having a top surface and a gate stack. The gate stack includes a gate dielectric layer on the substrate and a gate electrode on the gate dielectric layer. The semiconductor device also includes a multi-spacer structure. The multi-spacer includes a first spacer formed on a sidewall of the gate stack, a second spacer, and a third spacer. The second spacer includes a first portion formed on a sidewall of the first spacer and a second portion formed on the top surface of the substrate. The second portion of the second spacer has a thickness in a first direction that gradually decreases. The third spacer is formed on the second portion of the second spacer and on the top surface of the substrate. The semiconductor device further includes a source/drain region formed in the substrate, and a portion of the third spacer abuts the source/drain region and the second portion of the second spacer.
    Type: Grant
    Filed: November 20, 2019
    Date of Patent: September 6, 2022
    Inventors: Chun Hsiung Tsai, Clement Hsingjen Wann, Kuo-Feng Yu, Ming-Hsi Yeh, Shahaji B. More, Yu-Ming Lin
  • Patent number: 11437231
    Abstract: A method for manufacturing a semiconductor device includes forming a trench in a semiconductor wafer; and forming a first insulating film by thermally oxidizing the semiconductor wafer. The first insulating film covers an inner surface of the trench so that a first space remains in the trench. The first insulating film has a recessed portion at the bottom of the trench. The method further includes forming a semiconductor layer on the first insulating film, the semiconductor layer filling the first space and the recessed portion; forming a second space in the trench by selectively removing the semiconductor layer so that a portion of the semiconductor layer remains in the recessed portion; forming a second insulating film in the recessed portion by thermally oxidizing the portion of the semiconductor layer; and forming a first conductive body in the trench, the first conductive body filling the second space.
    Type: Grant
    Filed: March 9, 2020
    Date of Patent: September 6, 2022
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventor: Tatsuya Shiraishi
  • Patent number: 11430794
    Abstract: A method for fabricating a semiconductor device includes providing a substrate including a cell region and a core/peripheral region around the cell region, forming a gate insulating film on the substrate of the core/peripheral region, forming a first conductive film of a first conductive type on the gate insulating film, forming a diffusion blocking film within the first conductive film, the diffusion blocking film being spaced apart from the gate insulating film in a vertical direction, after forming the diffusion blocking film, forming an impurity pattern including impurities within the first conductive film, diffusing the impurities through a heat treatment process to form a second conductive film of a second conductive type and forming a metal gate electrode on the second conductive film, wherein the diffusion blocking film includes helium (He) and/or argon (Ar).
    Type: Grant
    Filed: April 28, 2021
    Date of Patent: August 30, 2022
    Inventors: Ho Kyun An, Bumsoo Kim
  • Patent number: 11430825
    Abstract: An image capturing assembly includes an encapsulation layer, embedded with functional components. The top surface and bottom surface of the encapsulation layer expose the functional components. A through hole is formed in the encapsulation layer; and the functional components have soldering pads facing away from a bottom of the encapsulation layer. A photosensitive unit including a photosensitive chip and an optical filter is mounted on the photosensitive chip. The photosensitive chip is embedded in the through hole; the optical filter is outside the through hole; the top surface and bottom surface of the encapsulation layer expose the photosensitive chip; and the photosensitive chip includes soldering pads facing away from the bottom of the encapsulation layer. A redistribution layer structure is on the top side of the encapsulation layer and electrically connects the soldering pads of the photosensitive chip with the soldering pads of the functional components.
    Type: Grant
    Filed: November 12, 2020
    Date of Patent: August 30, 2022
    Assignee: Ningbo Semiconductor International Corporation
    Inventors: Da Chen, Mengbin Liu
  • Patent number: 11424121
    Abstract: A method for forming a layer by cycled epitaxy includes at least one sequence of steps each having a first epitaxial deposition forming a first growth layer portion having a first thickness on a first monocrystalline pattern and a second growth layer portion having a second thickness on a second non-monocrystalline pattern, the second thickness being greater than the first thickness, and a second epitaxial deposition forming a first sacrificial layer portion having a third thickness on the first growth layer portion and a second sacrificial layer portion having a fourth thickness on the second growth layer portion. The first and second growth layer portions have an additional element content, greater than the additional element content present in the first and second sacrificial layer portions. The sequence also includes etching the whole of the third and fourth thicknesses and stopping before having consumed the whole of the first thickness.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: August 23, 2022
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Vincent Mazzocchi, Sylvain Maitrejean
  • Patent number: 11410956
    Abstract: A chip package structure is provided. The chip package structure includes a redistribution structure and a first chip structure over the redistribution structure. The chip package structure also includes a first solder bump between the redistribution structure and the first chip structure and a first molding layer surrounding the first chip structure. The chip package structure further includes a second chip structure over the first chip structure and a second molding layer surrounding the second chip structure. In addition, the chip package structure includes a third molding layer surrounding the first molding layer, the second molding layer, and the first solder bump. A portion of the third molding layer is between the first molding layer and the redistribution structure.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: August 9, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wei-Yu Chen, Li-Hsien Huang, An-Jhih Su, Hsien-Wei Chen
  • Patent number: 11410849
    Abstract: The present invention designs a measurement scheme for the longitudinal temperature of the film during nitride epitaxial growth, belongs to the field of semiconductor measurement technology. Epitaxial growth technology is one of the most effective methods for preparing nitride materials. The temperature during the growth process restricts the performance of the device. The non-contact temperature measurement method is generally used to measure the temperature of the graphite disk as the base, which can't obtain the longitudinal temperature.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: August 9, 2022
    Assignee: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA
    Inventors: Chao Wang, Ying Duan, Jing Jiang, Jun Hu, Zezhan Zhang, Yang Yang, Xueke Gou, Congjun Wu
  • Patent number: 11404262
    Abstract: A method includes: in a semiconductor wafer including a first semiconductor layer and a second semiconductor layer adjoining the first semiconductor layer, forming a porous region extending from a first surface into the first semiconductor layer; and removing the porous region by an etching process, wherein a doping concentration of the second semiconductor layer is less than 10?2 times a doping concentration of the first semiconductor layer and/or a doping type of the second semiconductor layer is complementary to a doping type of the first semiconductor layer.
    Type: Grant
    Filed: November 8, 2019
    Date of Patent: August 2, 2022
    Assignee: Infineon Technologies AG
    Inventors: Sophia Friedler, Bernhard Goller, Iris Moder, Ingo Muri