Patents Examined by Hsin-Yi Hsieh
  • Patent number: 10319734
    Abstract: According to one embodiment, a semiconductor device includes a substrate, a stacked body, a second air gap, a first insulating film, a semiconductor film, and a stacked film. The stacked body is provided above the substrate and includes a plurality of electrode films stacked via a first air gap. The second air gap extends in a stacking direction of the stacked body. The second air gap separates the stacked body in a first direction crossing the stacking direction. The first insulating film is provided above the stacked body and covers an upper end of the second air gap. The stacked film is provided between a side surface of the electrode film and a side surface of the semiconductor film opposed to the side surface of the electrode film. The stacked film is in contact with the side surface of the electrode film and the side surface of the semiconductor film.
    Type: Grant
    Filed: January 20, 2016
    Date of Patent: June 11, 2019
    Assignee: Toshiba Memory Corporation
    Inventors: Yasuhito Yoshimizu, Akifumi Gawase, Kei Watanabe, Shinya Arai
  • Patent number: 10297692
    Abstract: The invention provides a manufacturing method of TFT substrate and a TFT substrate. The method provides a dual-gate structure symmetrically disposed on both sides of active layer, which prevents TFT threshold voltage from changing and improve TFT conduction state switching; by first manufacturing the active layer before the gate insulating layer to make the insulating layer directly grow on active layer, the contact interface between the gate insulating layer and active layer is improved, leading to further improving TFT conduction state switching. The TFT substrate makes the gate located between the source and the pixel electrode in vertical direction, and the dual-gate is symmetrically disposed on both sides of active layer to prevent TFT threshold voltage from changing and improve TFT conduction state switching, as well as improve the contact interface between the gate insulating layer and active layer, leading to further improving TFT conduction state switching.
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: May 21, 2019
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Zhichao Zhou, Hui Xia
  • Patent number: 10290773
    Abstract: A light-emitting device is disclosed and comprises: a substrate; a light-emitting stack comprising a first conductivity type semiconductor layer, an active layer over the first conductivity type semiconductor layer, and a second conductivity type semiconductor layer over the active layer; a transparent conductive layer over the a light-emitting stack; a first trench dividing the transparent conductive layer into a first block and a second block; a connecting layer electrically connecting the two blocks of the transparent conductive layer; a first conductivity type contact layer between the substrate and the first conductivity type semiconductor layer, wherein the conductivity of the first conductivity type contact layer is greater than the conductivity of the first conductivity type semiconductor layer.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: May 14, 2019
    Assignee: EPISTAR CORPORATION
    Inventors: Chen Ou, Liang Sheng Chi, Chun Wei Chang, Chih-Wei Wu
  • Patent number: 10283673
    Abstract: A light emitting device is provided. The light emitting device includes a first semiconductor layer, an active layer including a plurality of well layers and a plurality of barrier layers on the first semiconductor layer, a second semiconductor layer on the active layer, and an electrode layer on the second semiconductor layer. A top surface of a first barrier layer adjacent to the second semiconductor layer includes an uneven surface and has a larger area than an area of a top surface of a second barrier layer, wherein the first barrier layer has a thickness thicker than a thickness of the second barrier layer.
    Type: Grant
    Filed: June 26, 2014
    Date of Patent: May 7, 2019
    Assignee: LG Innotek Co., Ltd.
    Inventors: Oh Min Kwon, Jong Pil Jeong
  • Patent number: 10269791
    Abstract: A transistor that is formed with a transition metal dichalcogenide material is provided. The transition metal dichalcogenide material is formed using a direct deposition process and patterned into one or more fins. A gate dielectric and a gate electrode are formed over the one or more fins. Alternatively, the transition metal dichalcogenide material may be formed using a deposition of a non-transition metal dichalcogenide material followed by a treatment to form a transition metal dichalcogenide material. Additionally, fins that utilized the transition metal dichalcogenide material may be formed with sidewalls that are either perpendicular to a substrate or else are sloped relative to the substrate.
    Type: Grant
    Filed: January 20, 2016
    Date of Patent: April 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yee-Chia Yeo, Ling-Yen Yeh, Yuan-Chen Sun
  • Patent number: 10269821
    Abstract: A semiconductor memory device includes first and second electrode films, an interlayer insulating film, a semiconductor pillar, and a first insulating film. The first electrode film extends in a first direction. The second electrode film is provided separately from the first electrode film in a second direction and extends in the first direction. The interlayer insulating film is provided between the first and the second electrode films. The first insulating film includes first and second insulating regions. A concentration of nitrogen in the first position of the second insulating region is higher than a concentration of nitrogen in the second position between the first position and the semiconductor pillar. A concentration of nitrogen in the first insulating region is lower than the concentration of the nitrogen in the first position.
    Type: Grant
    Filed: February 17, 2016
    Date of Patent: April 23, 2019
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Masao Shingu, Katsuyuki Sekine, Hirokazu Ishigaki, Makoto Fujiwara
  • Patent number: 10249734
    Abstract: A poly-silicon thin film transistor and its manufacturing method, an array substrate and its manufacturing method, and a display device are provided. The method for manufacturing a poly-silicon thin film transistor includes forming a poly-silicon layer on a base substrate so that the poly-silicon layer includes a first poly-silicon area, second poly-silicon areas located at the both sides of the first poly-silicon area and third poly-silicon areas located at a side of the second poly-silicon areas away from the first poly-silicon area; forming a barrier layer between a gate electrode and a gate insulation layer by a dry etching method so that the barrier layer corresponds to the first poly-silicon area; and with the barrier layer as a mask doping the second poly-silicon areas to form lightly doped areas. By this method, the lightly doped areas may have the same length, and thus the problem of excessive leakage current is avoided.
    Type: Grant
    Filed: August 21, 2014
    Date of Patent: April 2, 2019
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Xiaohui Jiang, Jiaxiang Zhang
  • Patent number: 10217641
    Abstract: A GaN device is formed on a semiconductor substrate having a plurality of recessed regions formed in a surface thereof. A seed layer, optional buffer layer, and gallium nitride layer such as a carbon-doped gallium nitride layer are successively deposited within the recessed regions. Improved current collapse response of the GaN device is attributed to maximum length and width dimensions of the multilayer stack.
    Type: Grant
    Filed: January 20, 2016
    Date of Patent: February 26, 2019
    Assignees: International Business Machines Corporation, MASSACHUSETTS INSTITUTE OF TECHNOLOGY
    Inventors: William J. Gallagher, Marinus Johannes Petrus Hopstaken, Ko-Tao Lee, Tomas Palacios, Daniel Piedra, Devendra K. Sadana
  • Patent number: 10199253
    Abstract: A method of manufacturing a semiconductor device includes disposing a peel-off layer on the second surface of the first substrate, wherein the second surface of the first substrate comprises semiconductor integrated circuits, and the peel-off layer does not extend to an outer peripheral portion of the first substrate, bonding a second substrate to the peel-off layer via a bonding layer, attaching a tape onto the first surface of the first substrate, wherein the tape comprises an adhesive agent having an adhesive strength capable of being lowered by UV irradiation, irradiating a portion of the adhesive agent provided at the outer peripheral portion with UV rays directed toward the first surface, and separating the first substrate from the second substrate at the adhesive agent portion and the peel-off layer portion.
    Type: Grant
    Filed: March 2, 2015
    Date of Patent: February 5, 2019
    Assignee: Toshiba Memory Corporation
    Inventors: Masaya Shima, Kenji Takahashi
  • Patent number: 10186547
    Abstract: Provided are a solid-state imaging element which can be simply manufactured and can control movement of electric charges in an accumulation region with a high degree of accuracy, and a method of manufacturing the same. A solid-state imaging element (1a) includes a substrate (11) having a first conductivity type; an accumulation region (12) having a second conductivity type and provided in the substrate (11); a read-out region (13) for receiving the transferred electric charges accumulated in the accumulation region (12); and a transfer section (14) for transferring the electric charges from the accumulation region (12) to the read-out region (13). An impurity concentration modulation region 121 having a locally high concentration of an impurity having the second conductivity type, or having a locally low concentration of an impurity having the first conductivity type is formed in a part of the accumulation region (12).
    Type: Grant
    Filed: February 21, 2013
    Date of Patent: January 22, 2019
    Assignee: SHARP KABUSHIKI KAISHA
    Inventor: Takeo Ushinaga
  • Patent number: 10163698
    Abstract: A method for manufacturing a semiconductor comprises: providing a substrate; forming an opening in a dielectric layer disposed over the substrate; providing a target with a first type atoms; ionizing the first type atoms provided from the target; providing a bias to the substrate for controlling the moving paths of the ionized first type atoms thereby directing the ionized first type atoms in the opening; and forming a first conductive structure from bottom of the opening with the ionized first type atoms under a pre-determined frequency and a pre-determined pressure.
    Type: Grant
    Filed: May 7, 2014
    Date of Patent: December 25, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Ching-Fu Yeh, Ming-Han Lee
  • Patent number: 10163856
    Abstract: A semiconductor device, and a method of forming the device, are provided. The semiconductor device includes a first die having a first plurality of contact pads and a second die having a second plurality of contact pads. A substrate is bonded to a first contact pad of the first plurality of contact pads and a first contact pad of the second plurality of contact pads in a face-to-face orientation with the first die and the second die. A first through via extends through the substrate. Molding material is interposed between the first die, the second die and the substrate, the molding material extending along sidewalls of the first die, the second die, and the substrate. A second through via is positioned over a second contact pad of the first plurality of contact pads, the second through via extending through the molding material.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: December 25, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Ming Chen, Hsien-Pin Hu, Shang-Yun Hou, Wen Hsin Wei
  • Patent number: 10147843
    Abstract: A device includes a semiconductor structure comprising a light emitting layer disposed between an n-type region and a p-type region. The semiconductor structure is disposed between a window layer and a light-directing structure. The light-directing structure is configured to direct light toward the window layer; examples of suitable light-directing structures include a porous semiconductor layer and a photonic crystal. An n-contact is electrically connected to the n-type region and a p-contact is electrically connected to the p-type region. The p-contact is disposed in an opening formed in the semiconductor structure.
    Type: Grant
    Filed: July 24, 2008
    Date of Patent: December 4, 2018
    Assignee: LUMILEDS LLC
    Inventors: John Epler, James G. Neff, Oleg B. Shchekin
  • Patent number: 10134985
    Abstract: Non-crystalline silicon non-volatile resistive switching devices include a metal electrode, a non-crystalline silicon layer and a planar doped silicon electrode. An electrical signal applied to the metal electrode drives metal ions from the metal electrode into the non-crystalline silicon layer to form a conducting filament from the metal electrode to the planar doped silicon electrode to alter a resistance of the non-crystalline silicon layer. Another electrical signal applied to the metal electrode removes at least some of the metal ions forming the conducting filament from the non-crystalline silicon layer to further alter the resistance of the non-crystalline silicon layer.
    Type: Grant
    Filed: October 19, 2007
    Date of Patent: November 20, 2018
    Assignee: The Regents of the University of Michigan
    Inventors: Wei Lu, Sung Hyun Jo
  • Patent number: 10128188
    Abstract: A low resistance middle-of-line interconnect structure is formed without liner layers. A contact metal layer is deposited on source/drain regions of field-effect transistors and directly on the surfaces of trenches within a dielectric layer using plasma enhancement. Contact metal fill is subsequently provided by thermal chemical vapor deposition. The use of low-resistivity metal contact materials such as ruthenium is facilitated by the process. The process further facilitates the formation of metal silicide regions on the source/drain regions.
    Type: Grant
    Filed: March 28, 2016
    Date of Patent: November 13, 2018
    Assignee: International Business Machines Corporation
    Inventors: Praneet Adusumilli, Alexander Reznicek, Oscar van der Straten, Chih-Chao Yang
  • Patent number: 10096673
    Abstract: Field effect transistors and methods of forming the same include forming a stack of nanowires of alternating layers of channel material and sacrificial material. A layer of sacrificial material forms a top layer of the stack. A dummy gate is formed over the stack. Stack material outside of a region covered by the dummy gate is removed. The sacrificial material is etched to form recesses in the sacrificial material layers. Spacers are formed in the recesses in the sacrificial material layers. At least one pair of spacers is formed in recesses above an uppermost layer of channel material. The dummy gates are etched away. The top layer of sacrificial material protects an uppermost layer of channel material from damage from the anisotropic etch. The sacrificial material is etched away to expose the layers of channel material. A gate stack is formed over, around, and between the layers of channel material.
    Type: Grant
    Filed: February 17, 2016
    Date of Patent: October 9, 2018
    Assignee: International Business Machines Corporation
    Inventors: Josephine B. Chang, Bruce B. Doris, Michael A. Guillorn, Isaac Lauer, Xin Miao
  • Patent number: 10090463
    Abstract: Non-crystalline silicon non-volatile resistive switching devices include a metal electrode, a non-crystalline silicon layer and a planar doped silicon electrode. An electrical signal applied to the metal electrode drives metal ions from the metal electrode into the non-crystalline silicon layer to form a conducting filament from the metal electrode to the planar doped silicon electrode to alter a resistance of the non-crystalline silicon layer. Another electrical signal applied to the metal electrode removes at least some of the metal ions forming the conducting filament from the non-crystalline silicon layer to further alter the resistance of the non-crystalline silicon layer.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: October 2, 2018
    Assignee: The Regents of the University of Michigan
    Inventors: Wei Lu, Sung Hyun Jo
  • Patent number: 10079191
    Abstract: In embodiments described herein, an integrated circuit (IC) package is provided. The IC package may include a substrate, an IC die, and a heat spreader. The IC die may have opposing first and second surfaces, where the first surface of the IC die is coupled to a surface of the substrate. The heat spreader may have a surface coupled to the second surface of the IC die by a thermal interface (TI) material. The surface of the heat spreader may have a micro-recess which may include a micro-channel or a micro-dent to direct a flow of TI material towards or away from a predetermined area of the second surface of the IC die based on temperatures of the substrate, the IC die, and/or the heat spreader.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: September 18, 2018
    Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
    Inventors: Sam Ziqun Zhao, Rezaur Rahman Khan
  • Patent number: 10079147
    Abstract: A method of forming interconnects for semiconductor devices includes forming a lower insulating layer and a lower interconnect on a semiconductor substrate, forming an insulating pattern layer on the lower interconnect through self-assembly, forming an interlayer insulating layer and a trench mask on the insulating pattern layer, forming a preparatory via hole allowing the insulating pattern layer to be exposed by removing a portion of the interlayer insulating layer, forming a trench by etching the interlayer insulating layer using the trench mask, forming a via hole allowing the lower interconnect to be exposed by selectively etching the insulating pattern layer within the preparatory via hole, and filling the trench and the via hole with an conductive material.
    Type: Grant
    Filed: March 28, 2016
    Date of Patent: September 18, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yong Kong Siew, Sung Yup Jung
  • Patent number: 10074683
    Abstract: Imaging systems may include camera modules that include multiple image sensor pixel arrays. A transparent lens substrate may be formed over the image pixel arrays. Lenses may be formed in the lens substrate such that each lens transmits light to a corresponding image sensor pixel array. Total internal reflection mitigation structures such as groove structures may be formed in one or more surfaces of the lens substrate between each of the lenses. The groove structures may include concentric ring shaped grooves in a surface of the lens substrate so that each lens is surrounded by a respective group of concentric ring shaped grooves. The groove structures may have a depth, angle, shape, and spacing that prevents total internal reflection of image light between the lenses so that high incident angle image light incident on a given pixel array is not captured by an adjacent pixel array.
    Type: Grant
    Filed: August 14, 2014
    Date of Patent: September 11, 2018
    Assignee: Semiconductor Components Industries, LLC
    Inventor: Robert A. Black