Patents Examined by Hsin-Yi Hsieh
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Patent number: 10319734Abstract: According to one embodiment, a semiconductor device includes a substrate, a stacked body, a second air gap, a first insulating film, a semiconductor film, and a stacked film. The stacked body is provided above the substrate and includes a plurality of electrode films stacked via a first air gap. The second air gap extends in a stacking direction of the stacked body. The second air gap separates the stacked body in a first direction crossing the stacking direction. The first insulating film is provided above the stacked body and covers an upper end of the second air gap. The stacked film is provided between a side surface of the electrode film and a side surface of the semiconductor film opposed to the side surface of the electrode film. The stacked film is in contact with the side surface of the electrode film and the side surface of the semiconductor film.Type: GrantFiled: January 20, 2016Date of Patent: June 11, 2019Assignee: Toshiba Memory CorporationInventors: Yasuhito Yoshimizu, Akifumi Gawase, Kei Watanabe, Shinya Arai
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Patent number: 10297692Abstract: The invention provides a manufacturing method of TFT substrate and a TFT substrate. The method provides a dual-gate structure symmetrically disposed on both sides of active layer, which prevents TFT threshold voltage from changing and improve TFT conduction state switching; by first manufacturing the active layer before the gate insulating layer to make the insulating layer directly grow on active layer, the contact interface between the gate insulating layer and active layer is improved, leading to further improving TFT conduction state switching. The TFT substrate makes the gate located between the source and the pixel electrode in vertical direction, and the dual-gate is symmetrically disposed on both sides of active layer to prevent TFT threshold voltage from changing and improve TFT conduction state switching, as well as improve the contact interface between the gate insulating layer and active layer, leading to further improving TFT conduction state switching.Type: GrantFiled: June 23, 2016Date of Patent: May 21, 2019Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventors: Zhichao Zhou, Hui Xia
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Patent number: 10290773Abstract: A light-emitting device is disclosed and comprises: a substrate; a light-emitting stack comprising a first conductivity type semiconductor layer, an active layer over the first conductivity type semiconductor layer, and a second conductivity type semiconductor layer over the active layer; a transparent conductive layer over the a light-emitting stack; a first trench dividing the transparent conductive layer into a first block and a second block; a connecting layer electrically connecting the two blocks of the transparent conductive layer; a first conductivity type contact layer between the substrate and the first conductivity type semiconductor layer, wherein the conductivity of the first conductivity type contact layer is greater than the conductivity of the first conductivity type semiconductor layer.Type: GrantFiled: September 13, 2012Date of Patent: May 14, 2019Assignee: EPISTAR CORPORATIONInventors: Chen Ou, Liang Sheng Chi, Chun Wei Chang, Chih-Wei Wu
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Patent number: 10283673Abstract: A light emitting device is provided. The light emitting device includes a first semiconductor layer, an active layer including a plurality of well layers and a plurality of barrier layers on the first semiconductor layer, a second semiconductor layer on the active layer, and an electrode layer on the second semiconductor layer. A top surface of a first barrier layer adjacent to the second semiconductor layer includes an uneven surface and has a larger area than an area of a top surface of a second barrier layer, wherein the first barrier layer has a thickness thicker than a thickness of the second barrier layer.Type: GrantFiled: June 26, 2014Date of Patent: May 7, 2019Assignee: LG Innotek Co., Ltd.Inventors: Oh Min Kwon, Jong Pil Jeong
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Patent number: 10269791Abstract: A transistor that is formed with a transition metal dichalcogenide material is provided. The transition metal dichalcogenide material is formed using a direct deposition process and patterned into one or more fins. A gate dielectric and a gate electrode are formed over the one or more fins. Alternatively, the transition metal dichalcogenide material may be formed using a deposition of a non-transition metal dichalcogenide material followed by a treatment to form a transition metal dichalcogenide material. Additionally, fins that utilized the transition metal dichalcogenide material may be formed with sidewalls that are either perpendicular to a substrate or else are sloped relative to the substrate.Type: GrantFiled: January 20, 2016Date of Patent: April 23, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yee-Chia Yeo, Ling-Yen Yeh, Yuan-Chen Sun
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Patent number: 10269821Abstract: A semiconductor memory device includes first and second electrode films, an interlayer insulating film, a semiconductor pillar, and a first insulating film. The first electrode film extends in a first direction. The second electrode film is provided separately from the first electrode film in a second direction and extends in the first direction. The interlayer insulating film is provided between the first and the second electrode films. The first insulating film includes first and second insulating regions. A concentration of nitrogen in the first position of the second insulating region is higher than a concentration of nitrogen in the second position between the first position and the semiconductor pillar. A concentration of nitrogen in the first insulating region is lower than the concentration of the nitrogen in the first position.Type: GrantFiled: February 17, 2016Date of Patent: April 23, 2019Assignee: TOSHIBA MEMORY CORPORATIONInventors: Masao Shingu, Katsuyuki Sekine, Hirokazu Ishigaki, Makoto Fujiwara
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Patent number: 10249734Abstract: A poly-silicon thin film transistor and its manufacturing method, an array substrate and its manufacturing method, and a display device are provided. The method for manufacturing a poly-silicon thin film transistor includes forming a poly-silicon layer on a base substrate so that the poly-silicon layer includes a first poly-silicon area, second poly-silicon areas located at the both sides of the first poly-silicon area and third poly-silicon areas located at a side of the second poly-silicon areas away from the first poly-silicon area; forming a barrier layer between a gate electrode and a gate insulation layer by a dry etching method so that the barrier layer corresponds to the first poly-silicon area; and with the barrier layer as a mask doping the second poly-silicon areas to form lightly doped areas. By this method, the lightly doped areas may have the same length, and thus the problem of excessive leakage current is avoided.Type: GrantFiled: August 21, 2014Date of Patent: April 2, 2019Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventors: Xiaohui Jiang, Jiaxiang Zhang
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Patent number: 10217641Abstract: A GaN device is formed on a semiconductor substrate having a plurality of recessed regions formed in a surface thereof. A seed layer, optional buffer layer, and gallium nitride layer such as a carbon-doped gallium nitride layer are successively deposited within the recessed regions. Improved current collapse response of the GaN device is attributed to maximum length and width dimensions of the multilayer stack.Type: GrantFiled: January 20, 2016Date of Patent: February 26, 2019Assignees: International Business Machines Corporation, MASSACHUSETTS INSTITUTE OF TECHNOLOGYInventors: William J. Gallagher, Marinus Johannes Petrus Hopstaken, Ko-Tao Lee, Tomas Palacios, Daniel Piedra, Devendra K. Sadana
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Patent number: 10199253Abstract: A method of manufacturing a semiconductor device includes disposing a peel-off layer on the second surface of the first substrate, wherein the second surface of the first substrate comprises semiconductor integrated circuits, and the peel-off layer does not extend to an outer peripheral portion of the first substrate, bonding a second substrate to the peel-off layer via a bonding layer, attaching a tape onto the first surface of the first substrate, wherein the tape comprises an adhesive agent having an adhesive strength capable of being lowered by UV irradiation, irradiating a portion of the adhesive agent provided at the outer peripheral portion with UV rays directed toward the first surface, and separating the first substrate from the second substrate at the adhesive agent portion and the peel-off layer portion.Type: GrantFiled: March 2, 2015Date of Patent: February 5, 2019Assignee: Toshiba Memory CorporationInventors: Masaya Shima, Kenji Takahashi
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Patent number: 10186547Abstract: Provided are a solid-state imaging element which can be simply manufactured and can control movement of electric charges in an accumulation region with a high degree of accuracy, and a method of manufacturing the same. A solid-state imaging element (1a) includes a substrate (11) having a first conductivity type; an accumulation region (12) having a second conductivity type and provided in the substrate (11); a read-out region (13) for receiving the transferred electric charges accumulated in the accumulation region (12); and a transfer section (14) for transferring the electric charges from the accumulation region (12) to the read-out region (13). An impurity concentration modulation region 121 having a locally high concentration of an impurity having the second conductivity type, or having a locally low concentration of an impurity having the first conductivity type is formed in a part of the accumulation region (12).Type: GrantFiled: February 21, 2013Date of Patent: January 22, 2019Assignee: SHARP KABUSHIKI KAISHAInventor: Takeo Ushinaga
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Patent number: 10163698Abstract: A method for manufacturing a semiconductor comprises: providing a substrate; forming an opening in a dielectric layer disposed over the substrate; providing a target with a first type atoms; ionizing the first type atoms provided from the target; providing a bias to the substrate for controlling the moving paths of the ionized first type atoms thereby directing the ionized first type atoms in the opening; and forming a first conductive structure from bottom of the opening with the ionized first type atoms under a pre-determined frequency and a pre-determined pressure.Type: GrantFiled: May 7, 2014Date of Patent: December 25, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Ching-Fu Yeh, Ming-Han Lee
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Patent number: 10163856Abstract: A semiconductor device, and a method of forming the device, are provided. The semiconductor device includes a first die having a first plurality of contact pads and a second die having a second plurality of contact pads. A substrate is bonded to a first contact pad of the first plurality of contact pads and a first contact pad of the second plurality of contact pads in a face-to-face orientation with the first die and the second die. A first through via extends through the substrate. Molding material is interposed between the first die, the second die and the substrate, the molding material extending along sidewalls of the first die, the second die, and the substrate. A second through via is positioned over a second contact pad of the first plurality of contact pads, the second through via extending through the molding material.Type: GrantFiled: October 30, 2015Date of Patent: December 25, 2018Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wei-Ming Chen, Hsien-Pin Hu, Shang-Yun Hou, Wen Hsin Wei
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Patent number: 10147843Abstract: A device includes a semiconductor structure comprising a light emitting layer disposed between an n-type region and a p-type region. The semiconductor structure is disposed between a window layer and a light-directing structure. The light-directing structure is configured to direct light toward the window layer; examples of suitable light-directing structures include a porous semiconductor layer and a photonic crystal. An n-contact is electrically connected to the n-type region and a p-contact is electrically connected to the p-type region. The p-contact is disposed in an opening formed in the semiconductor structure.Type: GrantFiled: July 24, 2008Date of Patent: December 4, 2018Assignee: LUMILEDS LLCInventors: John Epler, James G. Neff, Oleg B. Shchekin
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Patent number: 10134985Abstract: Non-crystalline silicon non-volatile resistive switching devices include a metal electrode, a non-crystalline silicon layer and a planar doped silicon electrode. An electrical signal applied to the metal electrode drives metal ions from the metal electrode into the non-crystalline silicon layer to form a conducting filament from the metal electrode to the planar doped silicon electrode to alter a resistance of the non-crystalline silicon layer. Another electrical signal applied to the metal electrode removes at least some of the metal ions forming the conducting filament from the non-crystalline silicon layer to further alter the resistance of the non-crystalline silicon layer.Type: GrantFiled: October 19, 2007Date of Patent: November 20, 2018Assignee: The Regents of the University of MichiganInventors: Wei Lu, Sung Hyun Jo
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Patent number: 10128188Abstract: A low resistance middle-of-line interconnect structure is formed without liner layers. A contact metal layer is deposited on source/drain regions of field-effect transistors and directly on the surfaces of trenches within a dielectric layer using plasma enhancement. Contact metal fill is subsequently provided by thermal chemical vapor deposition. The use of low-resistivity metal contact materials such as ruthenium is facilitated by the process. The process further facilitates the formation of metal silicide regions on the source/drain regions.Type: GrantFiled: March 28, 2016Date of Patent: November 13, 2018Assignee: International Business Machines CorporationInventors: Praneet Adusumilli, Alexander Reznicek, Oscar van der Straten, Chih-Chao Yang
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Patent number: 10096673Abstract: Field effect transistors and methods of forming the same include forming a stack of nanowires of alternating layers of channel material and sacrificial material. A layer of sacrificial material forms a top layer of the stack. A dummy gate is formed over the stack. Stack material outside of a region covered by the dummy gate is removed. The sacrificial material is etched to form recesses in the sacrificial material layers. Spacers are formed in the recesses in the sacrificial material layers. At least one pair of spacers is formed in recesses above an uppermost layer of channel material. The dummy gates are etched away. The top layer of sacrificial material protects an uppermost layer of channel material from damage from the anisotropic etch. The sacrificial material is etched away to expose the layers of channel material. A gate stack is formed over, around, and between the layers of channel material.Type: GrantFiled: February 17, 2016Date of Patent: October 9, 2018Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Bruce B. Doris, Michael A. Guillorn, Isaac Lauer, Xin Miao
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Patent number: 10090463Abstract: Non-crystalline silicon non-volatile resistive switching devices include a metal electrode, a non-crystalline silicon layer and a planar doped silicon electrode. An electrical signal applied to the metal electrode drives metal ions from the metal electrode into the non-crystalline silicon layer to form a conducting filament from the metal electrode to the planar doped silicon electrode to alter a resistance of the non-crystalline silicon layer. Another electrical signal applied to the metal electrode removes at least some of the metal ions forming the conducting filament from the non-crystalline silicon layer to further alter the resistance of the non-crystalline silicon layer.Type: GrantFiled: August 9, 2013Date of Patent: October 2, 2018Assignee: The Regents of the University of MichiganInventors: Wei Lu, Sung Hyun Jo
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Patent number: 10079191Abstract: In embodiments described herein, an integrated circuit (IC) package is provided. The IC package may include a substrate, an IC die, and a heat spreader. The IC die may have opposing first and second surfaces, where the first surface of the IC die is coupled to a surface of the substrate. The heat spreader may have a surface coupled to the second surface of the IC die by a thermal interface (TI) material. The surface of the heat spreader may have a micro-recess which may include a micro-channel or a micro-dent to direct a flow of TI material towards or away from a predetermined area of the second surface of the IC die based on temperatures of the substrate, the IC die, and/or the heat spreader.Type: GrantFiled: October 30, 2015Date of Patent: September 18, 2018Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.Inventors: Sam Ziqun Zhao, Rezaur Rahman Khan
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Patent number: 10079147Abstract: A method of forming interconnects for semiconductor devices includes forming a lower insulating layer and a lower interconnect on a semiconductor substrate, forming an insulating pattern layer on the lower interconnect through self-assembly, forming an interlayer insulating layer and a trench mask on the insulating pattern layer, forming a preparatory via hole allowing the insulating pattern layer to be exposed by removing a portion of the interlayer insulating layer, forming a trench by etching the interlayer insulating layer using the trench mask, forming a via hole allowing the lower interconnect to be exposed by selectively etching the insulating pattern layer within the preparatory via hole, and filling the trench and the via hole with an conductive material.Type: GrantFiled: March 28, 2016Date of Patent: September 18, 2018Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Yong Kong Siew, Sung Yup Jung
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Patent number: 10074683Abstract: Imaging systems may include camera modules that include multiple image sensor pixel arrays. A transparent lens substrate may be formed over the image pixel arrays. Lenses may be formed in the lens substrate such that each lens transmits light to a corresponding image sensor pixel array. Total internal reflection mitigation structures such as groove structures may be formed in one or more surfaces of the lens substrate between each of the lenses. The groove structures may include concentric ring shaped grooves in a surface of the lens substrate so that each lens is surrounded by a respective group of concentric ring shaped grooves. The groove structures may have a depth, angle, shape, and spacing that prevents total internal reflection of image light between the lenses so that high incident angle image light incident on a given pixel array is not captured by an adjacent pixel array.Type: GrantFiled: August 14, 2014Date of Patent: September 11, 2018Assignee: Semiconductor Components Industries, LLCInventor: Robert A. Black