Abstract: A charged hadron therapy system for delivering charged hadron radiation to a target is provided. The system comprises a target positioning couch for supporting the target being moveable along a translation direction and a beam delivery system comprising a beam scanning means for scanning a hadron pencil beam over said target in a first scanning direction and a second scanning direction being substantially parallel with the translation direction. The beam scanning means is limited for providing a maximum scanning amplitude AY in the second scanning direction. The system comprises an irradiation controller configured for simultaneously and synchronously performing the moving of the couch and the scanning, so as to deliver charged hadron radiation to a target over a target size being larger in the Y direction than the maximum scanning amplitude AY.

Abstract: A processing system includes a plasma source chamber to generate a plasma; an extraction assembly adjacent the plasma source chamber having an extraction plate and a beam modifier, the extraction plate defining an extraction plate plane and an aperture to extract ions from the plasma source chamber into an ion beam, the beam modifier adjacent to the extraction plate and operative to adjust an ion beam trajectory angle of the ion beam with respect to a perpendicular to the extraction plate plane; and a neutralizer to receive the ion beam extracted by the extraction assembly, convert the ion beam to a neutral beam and direct the neutral beam towards a substrate, the neutralizer having one or more neutralizer plates arranged at a neutralizer plate angle, the extraction assembly and the neutralizer interoperative to provide an ion beam incident angle of the ion beam with respect to the neutralizer plates.

Abstract: Provided is a charged particle beam device that is capable of suppressing an field-of-view deviation occurring when observing a tilted image or a left-right parallax-angle image acquired by irradiating a tilted beam on a sample while continuously compensating a focus. By means of an aligner for compensating field-of-view (54) installed between an objective lens (7) that focuses a primary charged particle beam on a surface of the sample (10), and a deflector for controlling tilt angle (53) that tilts the primary charged particle beam, the field-of-view deviation occurring during tilting of the primary charged particle beam is suppressed based on an amount of compensation required by a tilt angle of the deflector for controlling tilt angle (53), lens conditions, and a distance between the objective lens (7) and the sample (10), in conjunction with a focus compensation of the objective lens (7).

Abstract: An apparatus for controlling the temperature of an ion source is disclosed. The ion source includes a plurality of walls defining a chamber in which ions are generated. To control the temperature of the ion source, one or more heat shields is disposed exterior to the chamber. The heat shields are made of high temperature and/or refractory material designed to reflect heat back toward the ion source. In a first position, these heat shields are disposed to reflect a first amount of heat back toward the ion source. In a second position, these heat shields are disposed to reflect a lesser second amount of heat back toward the ion source. In some embodiments, the heat shields may be disposed in one or more intermediate positions, located between the first and second positions.

Abstract: Systems and methods disclosed provide for methods of managing polarity switching in an ion mobility spectrometer, and provide for management of the repelling grid voltage, the gating grid voltage, and the fixed grid voltage during polarity switching. Systems and methods also provide for the management of the effect of dielectric relaxation in an insulator proximal to the collector, and provide for a preamplifier coupled to the collector including a switch, and a method of managing the collector output including the switch. Systems and methods consistent with the current disclosure further provide for a method of normalizing ion mobility data by determining fitting coefficients associated with a plurality of measurement data sets, and subtracting the curves determined by the fitting coefficients from the data acquired by the ion mobility spectrometer.

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract: A method for atom probe tomography (APT) sample preparation from a three-dimensional (3D) field effect transistor device formed within a semiconductor structure is provided. The method may include measuring a capacitance-voltage (C-V) characteristic for the 3D field effect transistor device and identifying, based on the measured capacitance-voltage (C-V) characteristic, a Fin structure corresponding to the 3D field effect transistor device. The identified Fin structure is detached from the 3D field effect transistor device using a nanomanipulator probe tip. The detached Fin is then welded to the nanomanipulator probe tip using an incident focused ion beam having a voltage of less than about 1000 eV. The incident focused ion beam having a voltage of less than about 1000 eV is applied to a tip of the Fin that is welded to the nanomanipulator probe tip.

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the present invention also provide an in-line process for S/TEM based metrology on objects such as integrated circuits or other structures fabricated on semiconductor wafer by providing methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.

Abstract: A method is disclosed for determining bone mineral density values of an object. In an embodiment, the method includes acquisition of first two-dimensional projection overview image data of the object to be examined in an image detail with a first X-ray energy; acquisition of at least second two-dimensional projection overview image data of the object to be examined in an image detail with at least one different second X-ray energy; determining a bone overview image data record using the first and second projection overview image data; determining at least one specific evaluation region of the image detail using the bone overview image data record; and determining a bone mineral density value for the specific evaluation region of the image detail using the image data of the bone overview image data record in the specific evaluation region. A computerized tomography system for implementing a method is also disclosed.

Abstract: Two flow passages are provided for allowing the passage of air sent out from a blower in the same direction individually and discharging the air to outside. An ion generation unit for generating positive ions by only corona discharge is arranged at one flow passage, and an ion generation unit for generating electrostatic atomized water particles with negative polarity by electrostatic atomizing phenomenon is arranged at the other flow passage. A throttle is provided at the one flow passage for making the wind speed of air flowing through the one flow passage faster than the wind speed of air flowing through the other flow passage. Since positive ions having shorter lifetime are emitted more than electrostatic atomized water particles with negative polarity having longer lifetime, the balance between positive and negative polarities in the air can be sustained over a long period of time.

Abstract: A mass spectrometer is disclosed comprising a time of flight mass analyser. The time of flight mass analyser comprises an ion guide comprising a plurality of electrodes which are interconnected by a series of resistors forming a potential divider. Ions are confined radially within the ion guide by the application of a two-phase RF voltage to the electrodes. A single phase additional RF voltage is applied across the potential divider so that an inhomogeneous pseudo-potential force is maintained along the length of the ion guide.

Abstract: Certain embodiments described herein are directed to devices that can be used to align the components of a source assembly in a source housing. In some examples, a terminal lens configured to couple to the housing through respective alignment features can be used to retain the source components in a source housing to provide a source assembly.

Abstract: This invention describes an apparatus and method with a combined primary electrospray and secondary electrospray ionization source used to enhance ionization efficiency. The solid phase as well as liquid phase sampling, ionization, and detection is described.

Abstract: Provided is an electron beam scanning method for forming an electric field for appropriately guiding electrons emitted from a pattern to the outside of the pattern, and also provided is a scanning electron microscope. When an electron beam for forming charge is irradiated to a sample, a first electron beam is irradiated to a first position (1) and a second position (2) having the center (104) of a pattern formed on the sample as a symmetrical point, and is then additionally irradiated to two central positions (3, 4) between the first and second irradiation position, the two central positions (3, 4) being on the same radius centered on the symmetrical point as are the first and second positions. Further, after that, the irradiation of the first electron beam to the central positions between existing scanning positions on the radius is repeated.

Abstract: In a charged particle beam device that performs observation of a sample under a gas environment in atmospheric pressure or pressure substantially equal to the atmospheric pressure, a diaphragm that separates an atmospheric pressure space, in which the sample is placed, and a vacuum space in an interior of an electron optical lens barrel is made very thin in order to allow an electron beam to transmit therethrough and damaged with a high possibility. Although at the time of replacing the diaphragm, it is necessary to adjust a position of a diaphragm, it is impossible to easily perform the adjustment of the position of the diaphragm by a conventional method.

Abstract: Embodiments of the disclosure relate to electron emitters for use in conjunction with X-ray devices. In one embodiment, the emitter features a round emission area capable of emitting electrons when heated, wherein the round emission area comprises at least one of a gap, a channel, or a combination thereof that separates a first portion of the round emission area from a second portion of the round emission area and permits thermal expansion of the first portion and the second portion within the at least one gap or channel without permitting the first portion and the second portion to touch one another. The two electrically conductive legs coupled to the surface at respective locations outside the round emission area and that are capable of supplying current to the round emission area.

Abstract: According to one embodiment, there is provided a laser ion source. The laser ion source includes a vacuum chamber which is vacuum-exhausted and in which a target is transported and set, a valve which is opened when the target is transported into the vacuum chamber and is closed except for the transportation, a target supply chamber which holds the target to be movable, and a transportation unit which transports to the vacuum chamber the target held on the target supply chamber while opening the valve after the target supply chamber is vacuum-exhausted while closing the valve.

Abstract: A miniature electrode apparatus is disclosed for trapping charged particles, the apparatus including, along a longitudinal direction: a first end cap electrode; a central electrode having an aperture; and a second end cap electrode. The aperture is elongated in the lateral plane and extends through the central electrode along the longitudinal direction and the central electrode surrounds the aperture in a lateral plane perpendicular to the longitudinal direction to define a transverse cavity for trapping charged particles.

Abstract: An imaging apparatus has an emission device to emit X-rays and a detection device to detect X-rays. A detector collimator is located between the patient space and the detection device. The emission device and detection device operate while translating along a displacement axis, to take a plurality of acquisitions. The imaging apparatus has a setting device to modify a dimension of a collimator slit.

Abstract: The present invention is directed to methods for the synthesis of products via mechanosynthesis, including bootstrap means to go from atomically-imprecise to atomically-precise tools, methods for determining reaction sequences for workpieces, and methods for creating new reactions, reaction sequences and tips.