Patents Examined by Michael Trinh
  • Patent number: 9721904
    Abstract: A method for manufacturing a semiconductor package and the semiconductor package are provided. The method for manufacturing a semiconductor package may include arranging a conductive elastic plate over a package substrate including through slits disposed along edges of a chip mounting region and a conductive guard rails providing a concave trench shape, and bending the conductive elastic plate. Edge portions of the conductive elastic plate may be inserted into the trenches of the conductive guard rails and supported by the conductive guard rails by a force trying to stretch by the elastic restoring force of the wing portions of the conductive elastic plate.
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: August 1, 2017
    Assignee: SK hynix Inc.
    Inventors: Seung Ho Kim, Soo Won Kang, Jung Tae Jeong
  • Patent number: 9722042
    Abstract: The present invention discloses a group-III nitride semiconductor device, which comprises a substrate, a buffer layer, a semiconductor stack structure, and a passivation film. The buffer layer is disposed on the substrate. The semiconductor stack structure is disposed on the buffer layer and comprises a gate, a source, and a drain. In addition, a gate insulating layer is disposed between the gate and the semiconductor stack structure for forming a HEMT. The passivation film covers the HEMT and includes a plurality of openings corresponding to the gate, the source, and the drain, respectively. The material of the passivation film is silicon oxynitride.
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: August 1, 2017
    Inventor: Wen-Jang Jiang
  • Patent number: 9722213
    Abstract: When a coating film 4 is formed on a substrate 1, on which elements 3 are formed, by an ALD film forming method or the like, the coating film 4 is partially removed in a simple step. A method for manufacturing an electronic device includes a step of coating the substrate 1 partially with a partially coating member 2, a step of forming the elements 3 on the substrate 1, a step of forming the coating film 4 on the substrate 1 to cover the elements 3 and the partially coating member 2, and a step of forming a crack 4A in the coating film 4 on the partially coating member 2.
    Type: Grant
    Filed: March 27, 2012
    Date of Patent: August 1, 2017
    Assignees: PIONEER CORPORATION, TOHOKU PIONEER CORPORATION
    Inventors: Jun Sugahara, Hidetaka Ohazama, Shinsuke Tanaka, Hiromu Nara, Hiroki Tan
  • Patent number: 9716159
    Abstract: After a trench is formed, a deposition film is formed on the front surface of a base material and an inner wall of the trench such that a thickness of a portion of the deposition film covering the front surface of the base material is greater than a thickness of a portion of the deposition film covering the inner wall of the trench. The total thickness of the deposition film is then reduced until the inner wall of the trench is exposed, leaving only the portion of the deposition film covering the front surface of the base material. By performing sacrificial oxidation in this state, the thermal oxide film caused by thermal oxidation barely grows at the interface of the front surface of the base material and the deposition film, and thus the thickness of an n+ source region is mostly maintained.
    Type: Grant
    Filed: December 9, 2016
    Date of Patent: July 25, 2017
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Manabu Takei
  • Patent number: 9711647
    Abstract: A thin-sheet non-planar circuit device such as a FinFET and a method for forming the device is disclosed. In some exemplary embodiments, the device includes a substrate having a top surface and a feature disposed on the substrate that extends above the top surface. A material layer disposed on the feature. The material layer includes a plurality of source/drain regions and a channel region disposed between the source/drain regions. A gate stack is disposed on the channel region of the material layer. In some such embodiments, the feature includes a plurality of side surfaces, and the material layer is disposed on each of the side surface surfaces. In some such embodiments, the feature also includes a top surface and the material layer is further disposed on the top surface. In some embodiments, the top surface of the feature is free of the material layer.
    Type: Grant
    Filed: June 13, 2014
    Date of Patent: July 18, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Mark van Dal, Martin Christopher Holland, Matthias Passlack
  • Patent number: 9711585
    Abstract: An organic light emitting diode display according to an example embodiment of the present invention includes: a substrate; a scan line and a data line that are insulated from one another and crossing each other on the substrate; a first transistor on the substrate and connected to the scan line and the data line; a second transistor connected to the first transistor; a first electrode connected to the second transistor and having a cutout; an organic emission layer on the first electrode; and a second electrode on the organic emission layer, wherein the cutout is at a position corresponding to the data line.
    Type: Grant
    Filed: September 30, 2015
    Date of Patent: July 18, 2017
    Assignee: Samsung Display Co., Ltd.
    Inventors: Yong Chul Kim, Dong-Yoon So, Tae Gon Kim
  • Patent number: 9705029
    Abstract: The present disclosure provides a method for manufacturing a light-emitting device, comprising: providing a first substrate; providing a semiconductor stack on the first substrate, the semiconductor stack comprising a first conductive type semiconductor layer, a light-emitting layer on the first conductive type semiconductor layer, and a second conductive type semiconductor layer on the light-emitting layer, wherein the semiconductor stack is patterned and comprises a plurality of blocks of semiconductor stack separated from each other, and wherein the plurality of blocks of semiconductor stack comprise a first block of semiconductor stack and a second block of semiconductor stack; performing a separating step to separate the first block of semiconductor stack from the first substrate, and the second block of semiconductor stack remained on the first substrate; providing a permanent substrate comprising a first surface, a second surface, and a third block of semiconductor stack on the first surface; and bondi
    Type: Grant
    Filed: June 26, 2013
    Date of Patent: July 11, 2017
    Assignee: EPISTAR CORPORATION
    Inventors: Chien-Fu Huang, Chih-Chiang Lu, Chun-Yu Lin, Hsin-Chih Chiu
  • Patent number: 9685418
    Abstract: A high-frequency package has: a resin substrate; a high-frequency device mounted on a side of a first surface of the resin substrate; a ground surface conductor of a ground potential formed on a second surface of the resin substrate on an opposite side to the first surface; a transmission line for a high-frequency signal formed in an inner layer of the resin substrate; and a ground via of a ground potential formed within the resin substrate. A through hole is formed in the ground surface conductor. The ground via is placed between the transmission line and the through hole.
    Type: Grant
    Filed: March 11, 2014
    Date of Patent: June 20, 2017
    Assignee: Mitsubishi Electric Corporation
    Inventor: Kosuke Yasooka
  • Patent number: 9663854
    Abstract: A high throughput system for warming a wafer to a desired temperature after undergoing a low-temperature implantation process includes an implantation chamber, a wafer warming chamber configured to uniformly warm a single wafer, and a plurality of robotic arms to transfer wafers throughout the system. At each stage in the fabrication process, the robotic arms simultaneously work with multiple wafers and, therefore, the system provides a high throughput process. Also, the warming chamber may be a vacuum environment, thus eliminating the mist-condensation problem that results in wafer spotting.
    Type: Grant
    Filed: March 11, 2014
    Date of Patent: May 30, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsun-Jen Chan, Cheng-Hung Hu, Yi-Hann Chen, Kang Hua Chang, Ming-Te Chen
  • Patent number: 9666746
    Abstract: Provided are: a conductive base for forming a wiring pattern of a collector sheet for solar cells, which has good rust inhibiting properties and solderability without using an organic rust inhibitor that may harm a solar cell element; and a method for producing a collector sheet for solar cells, said method using the conductive base. A conductive base for forming a wiring pattern of a collector sheet for solar cells, which is a conductive base (30) wherein a zinc layer (320) composed of zinc is formed on the surface of a copper foil (310), is used. The conductive base for forming a wiring pattern of a collector sheet for solar cells is characterized in that the zinc layer (320) does not contain chromium and the amount of zinc therein is more than 20 mg/m2 but 40 mg/m2 or less.
    Type: Grant
    Filed: June 14, 2012
    Date of Patent: May 30, 2017
    Assignee: Dai Nippon Printing Co., Ltd.
    Inventors: Takayuki Komai, Satoshi Emoto
  • Patent number: 9663356
    Abstract: A method of making a microelectromechanical systems (MEMS) device includes etching away a sacrificial material layer to release a mechanical element of the MEMS device. The MEMS device is formed at least partially on the sacrificial material layer, and the etching leaves a residue in proximity to the mechanical element. The residue is exposed to an anhydrous solution to remove the residue. The residue may be an ammonium fluorosilicate-based residue, and the anhydrous solution may include acetic acid, isopropyl alcohol, acetone, or any anhydrous solution that can effectively dissolve the ammonium fluorosilicate-based residue.
    Type: Grant
    Filed: June 18, 2014
    Date of Patent: May 30, 2017
    Assignee: NXP USA, Inc.
    Inventors: Srivatsa G. Kundalgurki, Ruben B. Montez, Gary Pfeffer
  • Patent number: 9647171
    Abstract: Described herein are printable structures and methods for making, assembling and arranging electronic devices. A number of the methods described herein are useful for assembling electronic devices where one or more device components are embedded in a polymer which is patterned during the embedding process with trenches for electrical interconnects between device components. Some methods described herein are useful for assembling electronic devices by printing methods, such as by dry transfer contact printing methods. Also described herein are GaN light emitting diodes and methods for making and arranging GaN light emitting diodes, for example for display or lighting systems.
    Type: Grant
    Filed: September 5, 2014
    Date of Patent: May 9, 2017
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: John A. Rogers, Ralph Nuzzo, Hoon-sik Kim, Eric Brueckner, Sang Il Park, Rak Hwan Kim
  • Patent number: 9633838
    Abstract: Disclosed are methods of depositing silicon-containing films on one or more substrates via vapor deposition processes using penta-substituted disilanes, such as pentahalodisilane or pentakis(dimethylamino)disilane.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: April 25, 2017
    Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Jean-Marc Girard, Changhee Ko, Ivan Oshchepkov, Kazutaka Yanagita, Shingo Okubo, Naoto Noda, Julien Gatineau
  • Patent number: 9627318
    Abstract: In some embodiments, an interconnect structure includes a base layer, a plurality of dielectric layers and a conductive structure. The base layer includes a conductive region. The plurality of dielectric layers are formed over the base layer. The plurality of dielectric layers includes a first dielectric layer and an etch stop layer under the first dielectric layer. The conductive structure includes a plug. The plug includes a central region and one or more footing regions. The footing regions are formed around the central region and formed at least partially in the first etch stop layer. A total width of the central region and one or more footing regions at a bottom level of the plurality of dielectric layers is at least about 5% more than a width of the central region at the bottom level of the plurality of dielectric layers.
    Type: Grant
    Filed: June 16, 2014
    Date of Patent: April 18, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Ling Mei Lin, Chun Li Wu, Yu-Pin Chang
  • Patent number: 9620415
    Abstract: A wafer formed from an SiC substrate having a first surface and a second surface is divided into individual device chips. A division start point formed by a cutting blade has a depth corresponding to the finished thickness of each device chip along division lines formed on the first surface. A separation start point is formed by a laser beam having a focal point set inside the SiC substrate at a predetermined depth from the second surface, and the laser beam is applied to the second surface while relatively moving the focal point and the SiC substrate to thereby form a modified layer parallel to the first surface and cracks extending from the modified layer along a c-plane. An external force is applied to the wafer, thereby separating the wafer into a first wafer having the first surface and a second wafer having the second surface.
    Type: Grant
    Filed: August 15, 2016
    Date of Patent: April 11, 2017
    Assignee: Disco Corporation
    Inventors: Kazuya Hirata, Yoko Nishino
  • Patent number: 9620499
    Abstract: A semiconductor device for restraining snapback is provided. The semiconductor device includes IGBT and diode regions. In a view of n-type impurity concentration distribution along a direction from a front surface to a rear surface, a local minimum value of an n-type impurity concentration is located at a border between cathode and buffer regions. A local maximum value of n-type impurity concentration is located in the buffer region. At least one of the buffer and cathode regions includes a crystal defect region having crystal defects in a higher concentration than a region therearound. A peak of a crystal defect concentration in a view of crystal defect concentration distribution along the direction from the front surface to the rear surface is located in a region on the rear surface side with respect to a specific position having the n-type impurity concentration which is a half of the local maximum value.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: April 11, 2017
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Yasuhiro Hirabayashi, Satoru Machida, Yusuke Yamashita
  • Patent number: 9613945
    Abstract: A diffusion diode including a p+ diffusion region, a p-type diffusion region, and an n+ diffusion region is formed in the front surface of a semiconductor substrate. A polysilicon diode including a p+ layer and an n+ layer is formed on top of a local insulating film formed on the front surface of the semiconductor substrate and faces the diffusion diode in the depth direction. The diffusion diode and the polysilicon diode are reverse-connected by electrically connecting the n+ diffusion region to the n+ layer, thereby forming a lateral protection device. The p+ layer and p+ diffusion region are respectively electrically connected to a high voltage first terminal and a low voltage second terminal of the lateral protection device. The polysilicon diode blocks a forward current generated in the diffusion diode when the electric potential of the first terminal becomes lower than the electric potential of the second terminal.
    Type: Grant
    Filed: August 9, 2016
    Date of Patent: April 4, 2017
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Yoshiaki Toyoda
  • Patent number: 9614192
    Abstract: A method for forming a thin film for fabricating an organic light-emitting diode (OLED) display is disclosed. In one aspect, the method includes forming a plurality of shadow masks on a substrate. The substrate is then bent to form a predetermined curvature in the substrate. A deposition source is placed at a position having an equal angle with respect to central and peripheral portions of the substrate. The method also includes depositing a deposition material from the deposition source on the substrate and the shadow masks to form a thin film.
    Type: Grant
    Filed: September 16, 2014
    Date of Patent: April 4, 2017
    Assignee: Samsung Display Co., Ltd.
    Inventors: Leonid Kaplan, Valeriy Prushinskiy, Won-Baek Lee, Ji-Ryun Park, Hee-Sang Park
  • Patent number: 9595479
    Abstract: A method for fabricating a three-dimensional integrated circuit device includes providing a first substrate having a first crystal orientation, forming at least one or more PMOS devices overlying the first substrate, and forming a first dielectric layer overlying the one or more PMOS devices. The method also includes providing a second substrate having a second crystal orientation, forming at least one or more NMOS devices overlying the second substrate, and forming a second dielectric layer overlying the one or more NMOS devices. The method further includes coupling the first dielectric layer to the second dielectric layer to form a hybrid structure including the first substrate overlying the second substrate.
    Type: Grant
    Filed: March 18, 2014
    Date of Patent: March 14, 2017
    Assignee: mCube Inc.
    Inventor: Xiao (Charles) Yang
  • Patent number: 9589827
    Abstract: A method of manufacturing a semiconductor device that involves etching a trench in a semiconductor substrate, epitaxially growing a crystalline structure in the trench and forming semiconductor structures on either side of the crystalline structure. Crystalline oxides may include rare earth oxides, aluminum oxides or Perovskites.
    Type: Grant
    Filed: June 16, 2014
    Date of Patent: March 7, 2017
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Pouya Hashemi, Ali Khakifirooz, Alexander Reznicek, Charan V. V. S. Surisetty