Patents Examined by Monica D. Harrison
  • Patent number: 11646341
    Abstract: A light-receiving device of an embodiment of the present disclosure includes a photoelectric conversion layer that includes a first compound semiconductor with a first conductivity type and absorbs a wavelength of an infrared region, a first semiconductor layer formed on the photoelectric conversion layer, and an insulation layer formed to surround the photoelectric conversion layer and the first semiconductor layer, the first semiconductor layer having a second conductivity-type region at a middle region excluding a periphery facing the photoelectric conversion layer.
    Type: Grant
    Filed: October 6, 2017
    Date of Patent: May 9, 2023
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventors: Yoshifumi Zaizen, Shunsuke Maruyama
  • Patent number: 11640980
    Abstract: A field-effect transistor includes a gate structure comprising a structure in which a first insulating layer, a first gate electrode, and a second insulating layer are sequentially stacked on a first conductive layer, the gate structure surrounding a first hole through the first insulating layer and exposing a part of the first conductive layer; a second conductive layer on the second insulating layer and surrounding a second hole connected to the first hole and exposing a part of the first conductive layer; a first gate insulating layer covering an inner wall of the gate structure exposed by the first hole; a semiconductor layer covering a part of the first conductive layer exposed through the first hole and the second hole, the first gate insulating layer, and the second conductive layer; a second gate insulating layer covering the semiconductor layer; and a second gate electrode filling the first and second holes.
    Type: Grant
    Filed: August 11, 2021
    Date of Patent: May 2, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kwanghee Lee, Sangwook Kim
  • Patent number: 11640978
    Abstract: Embodiments of the present disclosure relate to a method of forming a low-k dielectric material, for example, a low-k gate spacer layer in a FinFET device. The low-k dielectric material may be formed using a precursor having a general chemical structure comprising at least one carbon atom bonded between two silicon atoms. A target k-value of the dielectric material may be achieved by controlling carbon concentration in the dielectric material.
    Type: Grant
    Filed: April 5, 2021
    Date of Patent: May 2, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wan-Yi Kao, Chung-Chi Ko
  • Patent number: 11637097
    Abstract: A method of manufacturing a package structure includes: forming a backside RDL structure on a carrier; forming TIVs on the backside RDL structure; mounting at least one passive device on the backside RDL structure, so that the at least one passive device is disposed between the TIVs; placing a die on the at least one passive device, so that the at least one passive device is vertically sandwiched between the die and the backside RDL structure; forming an encapsulant laterally encapsulating the die, the TIVs, and the at least one passive device; forming a front side RDL structure on a front side of the die, the TIVs, and the encapsulant; releasing the backside RDL structure from the carrier; and mounting a package on the backside RDL structure, wherein the package is electrically connected to the at least one passive device by conductive connectors and solders.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: April 25, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Ya Huang, Chung-Hao Tsai, Chen-Hua Yu, Chuei-Tang Wang
  • Patent number: 11637011
    Abstract: A method for forming a silicon oxide film on a step formed on a substrate includes: (a) designing a topology of a final silicon oxide film by preselecting a target portion of an initial silicon nitride film to be selectively deposited or removed or reformed with reference to a non-target portion of the initial silicon nitride film resulting in the final silicon oxide film; and (b) forming the initial silicon nitride film and the final silicon oxide film on the surfaces of the step according to the topology designed in process (a), wherein the initial silicon nitride film is deposited by ALD using a silicon-containing precursor containing halogen, and the initial silicon nitride film is converted to the final silicon oxide film by oxidizing the initial silicon nitride film without further depositing a film wherein a Si—N bond in the initial silicon nitride film is converted to a Si—O bond.
    Type: Grant
    Filed: October 12, 2020
    Date of Patent: April 25, 2023
    Assignee: ASM IP Holding B.V.
    Inventors: Atsuki Fukazawa, Masaru Zaitsu, Pei-Chia Chen
  • Patent number: 11637210
    Abstract: A Schottky diode comprises: a first electrode; a second electrode; and a body of semiconductive material connected to the first electrode at a first interface and connected to the second electrode at a second interface, wherein the first interface comprises a first planar region lying in a first plane and the first electrode has a first projection onto the first plane in a first direction normal to the first plane, the second interface comprises a second planar region lying in a second plane and the second electrode has a second projection onto the first plane in said first direction, at least a portion of the second projection lies outside the first projection, said second planar region is offset from the first planar region in said first direction, and one of the first interface and the second interface provides a Schottky contact.
    Type: Grant
    Filed: December 11, 2018
    Date of Patent: April 25, 2023
    Assignee: PRAGMATIC PRINTING LTD
    Inventors: Feras Alkhalil, Richard Price, Brian Cobb
  • Patent number: 11631748
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a semiconductor substrate and a gate electrode over the semiconductor substrate. The semiconductor device structure also includes a source/drain structure adjacent to the gate electrode. The semiconductor device structure further includes a spacer element over a sidewall of the gate electrode, and the spacer element has an upper portion having a first exterior surface and a lower portion having a second exterior surface. Lateral distances between the first exterior surface and the sidewall of the gate electrode are substantially the same. Lateral distances between the second exterior surface and the sidewall of the gate electrode increase along a direction from a top of the lower portion towards the semiconductor substrate.
    Type: Grant
    Filed: October 8, 2020
    Date of Patent: April 18, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Bo-Feng Young, Che-Cheng Chang, Mu-Tsang Lin, Tung-Wen Cheng, Zhe-Hao Zhang
  • Patent number: 11631732
    Abstract: A flexible display apparatus includes a panel that includes a display area that displays images and a fan-out portion in which a plurality of wirings connected to the display area are located, and a driving chip connected to the fan-out portion and connected to the display area via the plurality of wirings. The plurality of wirings arranged in the fan-out portion may include first wirings at a first layer on the panel and second wirings at a second layer that is different from the first layer. The first wirings and the second wirings may be in an overlapping relationship above and below each other.
    Type: Grant
    Filed: June 3, 2021
    Date of Patent: April 18, 2023
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Heerim Song, Gyungsoon Park, Mukyung Jeon
  • Patent number: 11631725
    Abstract: The present disclosure provided an organic light-emitting display device comprising: a substrate where a first direction and a second direction intersecting each other are defined, the substrate on which sub-pixels arranged along the first direction and the second direction; first electrodes of organic light-emitting diodes allocated respectively to the sub-pixels; a first bank having first openings exposing the first electrodes; and a second bank having second openings exposing the first electrode on the first bank, wherein in at least one region, the second opening simultaneously exposes at least two first electrodes neighboring in the third direction.
    Type: Grant
    Filed: November 19, 2019
    Date of Patent: April 18, 2023
    Assignee: LG Display Co., Ltd.
    Inventors: Dojoong Kim, Daeil Kang, Soojin Kim, Samjong Lee, Saehoon Oh, Hyungi Hong
  • Patent number: 11631670
    Abstract: A semiconductor device including a substrate; a first active pattern on the substrate and extending in a first direction, an upper portion of the first active pattern including a first channel pattern; first source/drain patterns in recesses in an upper portion of the first channel pattern; and a gate electrode on the first active pattern and extending in a second direction crossing the first direction, the gate electrode being on a top surface and on a side surface of the at least one first channel pattern, wherein each of the first source/drain patterns includes a first, second, and third semiconductor layer, which are sequentially provided in the recesses, each of the first channel pattern and the third semiconductor layers includes silicon-germanium (SiGe), and the first semiconductor layer has a germanium concentration higher than those of the first channel pattern and the second semiconductor layer.
    Type: Grant
    Filed: October 25, 2021
    Date of Patent: April 18, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyojin Kim, Jihye Lee, Sangmoon Lee, Seung Hun Lee
  • Patent number: 11626499
    Abstract: A semiconductor device includes a substrate having an active pattern therein, a gate electrode extending across the active pattern and a source/drain region on the active pattern laterally adjacent the gate electrode. The device further includes a contact structure including a first contact on the source/drain region, a second contact on the first contact and a spacer on sidewalls of the first and second contacts.
    Type: Grant
    Filed: November 11, 2021
    Date of Patent: April 11, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Wonkeun Chung, Heonbok Lee, Chunghwan Shin, Youngsuk Chai, Sangjin Hyun
  • Patent number: 11626478
    Abstract: There is disclosed a structure in a wide band gap material such as silicon carbide wherein there is a buried grid and shields covering at least one middle point between two adjacent parts of the buried grid, when viewed from above. Advantages of the invention include easy manufacture without extra lithographic steps compared with standard manufacturing process, an improved trade-off between the current conduction and voltage blocking characteristics of a JBSD comprising the structure.
    Type: Grant
    Filed: May 22, 2019
    Date of Patent: April 11, 2023
    Assignee: II-VI DELAWARE INC.
    Inventor: Hossein Elahipanah
  • Patent number: 11626315
    Abstract: A planarization method includes forming a dielectric layer over a polish stop layer. The dielectric layer is polished until reaching the polish stop layer, and the polished dielectric layer has a concave top surface. A compensation layer is formed over the concave top surface. The compensation layer is polished.
    Type: Grant
    Filed: February 22, 2017
    Date of Patent: April 11, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Jung Huang, Hsu-Shui Liu, Han-Wen Liao, Yu-Yao Huang, Hsiao-Wei Chen, Yung-Lin Hsu, Kuang-Huan Hsu
  • Patent number: 11626463
    Abstract: A display device includes a driving transistor and an organic EL element. The driving transistor includes an oxide semiconductor layer; a first gate electrode that includes a region overlapping the oxide semiconductor layer; a first insulating layer between the first gate electrode and the oxide semiconductor layer; a second gate electrode that includes a region overlapping the oxide semiconductor layer and the first gate electrode; a second insulating layer between the second gate electrode and the oxide semiconductor layer; and a first and a second transparent conductive layer that are provided between the oxide semiconductor layer and the first insulating layer and each include a region contacting the oxide semiconductor layer. The organic EL element includes a first electrode; a second electrode; a light emitting layer between the first electrode and the second electrode; and an electron transfer layer between the light emitting layer and the first electrode.
    Type: Grant
    Filed: December 7, 2021
    Date of Patent: April 11, 2023
    Assignee: MIKUNI ELECTRON CORPORATION
    Inventor: Sakae Tanaka
  • Patent number: 11626448
    Abstract: Methods of manufacture are described. A method includes forming a first cavity in a substrate and placing a backplane in the first cavity. At least one layer of dielectric material is formed over the substrate and the backplane. A second cavity is formed in the at least one layer of the dielectric material to expose at least a portion of a surface of the backplane. A heat conductive material is placed in the second cavity and in contact with the at least the portion of the surface of the backplane.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: April 11, 2023
    Assignee: Lumileds LLC
    Inventors: Tze Yang Hin, Qing Xue
  • Patent number: 11621162
    Abstract: Semiconductor processing methods are described for forming UV-treated, low-? dielectric films. The methods may include flowing deposition precursors into a substrate processing region of a semiconductor processing chamber. The deposition precursors may include a silicon-and-carbon-containing precursor. The methods may further include generating a deposition plasma from the deposition precursors within the substrate processing region, and depositing a silicon-and-carbon-containing material on the substrate from plasma effluents of the deposition plasma. The as-deposited silicon-and-carbon-containing material may be characterized by greater than or about 5% hydrocarbon groups. The methods may still further include exposing the deposited silicon-and-carbon-containing material to ultraviolet light. The exposed silicon-and-carbon-containing material may be characterized by less than or about 2% hydrocarbon groups.
    Type: Grant
    Filed: October 5, 2020
    Date of Patent: April 4, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Bo Xie, Ruitong Xiong, Sure Ngo, Kang Sub Yim, Yijun Liu, Li-Qun Xia
  • Patent number: 11616130
    Abstract: Techniques and mechanisms to provide electrical insulation between a gate and a channel region of a non-planar circuit device. In an embodiment, the gate structure, and insulation spacers at opposite respective sides of the gate structure, each extend over a semiconductor fin structure. In a region between the insulation spacers, a first dielectric layer extends conformally over the fin, and a second dielectric layer adjoins and extends conformally over the first dielectric layer. A third dielectric layer, adjoining the second dielectric layer and the insulation spacers, extends under the gate structure. Of the first, second and third dielectric layers, the third dielectric layer is conformal to respective sidewalls of the insulation spacers. In another embodiment, the second dielectric layer is of dielectric constant which is greater than that of the first dielectric layer, and equal to or less than that of the third dielectric layer.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: March 28, 2023
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Jack Kavalieros, Ian Young, Matthew Metz, Uygar Avci, Devin Merrill, Ashish Verma Penumatcha, Chia-Ching Lin, Owen Loh
  • Patent number: 11616093
    Abstract: A first light receiving element according to an embodiment of the present disclosure includes a plurality of pixels, a photoelectric converter that is provided as a layer common to the plurality of pixels, and contains a compound semiconductor material, and a first electrode layer that is provided between the plurality of pixels on light incident surface side of the photoelectric converter, and has a light-shielding property.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: March 28, 2023
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventors: Shuji Manda, Ryosuke Matsumoto, Suguru Saito, Shigehiro Ikehara, Tetsuji Yamaguchi, Shunsuke Maruyama
  • Patent number: 11610975
    Abstract: Semiconductor devices are provided. A semiconductor device includes a first active pattern on a first region of a substrate, a pair of first source/drain patterns on the first active pattern, a first channel pattern between the pair of first source/drain patterns, and a gate electrode that extends across the first channel pattern. The gate electrode is on an uppermost surface and at least one sidewall of the first channel pattern. The gate electrode includes a first metal pattern including a p-type work function metal, a second metal pattern on the first metal pattern and including an n-type work function metal, a first barrier pattern on the second metal pattern and including an amorphous metal layer that includes tungsten (W), carbon (C), and nitrogen (N), and a second barrier pattern on the first barrier pattern. The second barrier pattern includes the p-type work function metal.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: March 21, 2023
    Inventors: Jongho Park, Byounghoon Lee, Seungkeun Cha, Wandon Kim
  • Patent number: 11610863
    Abstract: The present disclosure relates to a radio frequency device that includes a transfer device die and a multilayer redistribution structure underneath the transfer device die. The transfer device die includes a device region with a back-end-of-line (BEOL) portion and a front-end-of-line (FEOL) portion over the BEOL portion and a transfer substrate. The FEOL portion includes isolation sections and an active layer surrounded by the isolation sections. A top surface of the device region is planarized. The transfer substrate including a porous silicon (PSi) region resides over the top surface of the device region. Herein, the PSi region has a porosity between 1% and 80%. The multilayer redistribution structure includes a number of bump structures, which are at a bottom of the multilayer redistribution structure and electrically coupled to the FEOL portion of the transfer device die.
    Type: Grant
    Filed: November 8, 2019
    Date of Patent: March 21, 2023
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Michael Carroll