Patents Examined by Ratisha Mehta
  • Patent number: 10971443
    Abstract: A method includes forming a plurality of dielectric layers, forming a plurality of redistribution lines in the plurality of dielectric layers, forming stacked vias in the plurality of dielectric layers with the stacked vias forming a continuous electrical connection penetrating through the plurality of dielectric layers, forming a dielectric layer over the stacked vias and the plurality of dielectric layers, forming a plurality of bond pads in the dielectric layer, and bonding a device die to the dielectric layer and a first portion of the plurality of bond pads through hybrid bonding.
    Type: Grant
    Filed: June 15, 2020
    Date of Patent: April 6, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Sung-Feng Yeh, Ming-Fa Chen, Hsien-Wei Chen
  • Patent number: 10957821
    Abstract: In some embodiments of the invention, a device includes a semiconductor light emitting device having a first light extraction surface, a wavelength converting element, and a second light extraction surface. A majority of light extracted from the semiconductor light emitting device is extracted from the first light extraction surface. The first light extraction surface has a first area. The second light extraction surface is disposed over the first light extraction surface and has a second area. The first area is larger than the second area.
    Type: Grant
    Filed: February 11, 2019
    Date of Patent: March 23, 2021
    Assignee: Lumileds LLC
    Inventors: Kenneth Vampola, Floris Crompvoets
  • Patent number: 10950433
    Abstract: Methods of improved selectively for SAM-based selective depositions are described. Some of the methods include forming a SAM on a second surface and a carbonized layer on the first surface. The substrate is exposed to an oxygenating agent to remove the carbonized layer from the first surface, and a film is deposited on the first surface over the protected second surface. Some of the methods include overdosing a SAM molecule to form a SAM layer and SAM agglomerates, depositing a film, removing the agglomerates, reforming the SAM layer and redepositing the film.
    Type: Grant
    Filed: November 16, 2018
    Date of Patent: March 16, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Chang Ke, Michael S. Jackson, Liqi Wu, Lei Zhou, Shuyi Zhang, David Thompson, Paul F. Ma, Biao Liu, Cheng Pan
  • Patent number: 10943913
    Abstract: Various embodiments of the present application are directed towards an integrated memory chip comprising a memory array with a strap-cell architecture that reduces the number of distinct strap-cell types and that reduces strap-line density. In some embodiments, the memory array is limited to three distinct types of strap cells: a source line/erase gate (SLEG) strap cell; a control gate/word line (CGWL) strap cell; and a word-line strap cell. The small number of distinct strap-cell types simplifies design of the memory array and further simplifies design of a corresponding interconnect structure. Further, in some embodiments, the three distinct strap-cell types electrically couple word lines, erase gates, and control gates to corresponding strap lines in different metallization layers of an interconnect structure. By spreading the strap lines amongst different metallization layers, strap-line density is reduced.
    Type: Grant
    Filed: March 26, 2019
    Date of Patent: March 9, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Tuo Huang, Ping-Cheng Li, Hung-Ling Shih, Po-Wei Liu, Yu-Ling Hsu, Yong-Shiuan Tsair, Chia-Sheng Lin, Shih Kuang Yang
  • Patent number: 10930566
    Abstract: An electrical device that includes a p-type semiconductor device having a p-type work function gate structure including a first high-k gate dielectric, a first metal containing buffer layer, a first titanium nitride layer having a first thickness present on the metal containing buffer layer, and a first gate conductor contact. A mid gap semiconductor device having a mid gap gate structure including a second high-k gate dielectric, a second metal containing buffer layer, a second titanium nitride layer having a second thickness that is less than the first thickness present, and a second gate conductor contact. An n-type semiconductor device having an n-type work function gate structure including a third high-k gate dielectric present on a channel region of the n-type semiconductor device, a third metal containing buffer layer on the third high-k gate dielectric and a third gate conductor fill present atop the third metal containing buffer layer.
    Type: Grant
    Filed: January 2, 2020
    Date of Patent: February 23, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Lisa F. Edge, Hemanth Jagannathan, Paul C. Jamison, Vamsi K. Paruchuri
  • Patent number: 10923668
    Abstract: An electroluminescent device, a method of manufacturing the same, and a display device including the same. The electroluminescent device includes a first electrode, a hole transport layer disposed on the first electrode, an emission layer disposed on the hole transport layer and including light emitting particles, an electron transport layer disposed on the emission layer and including nanoparticles having electron transport capability, and a second electrode disposed on the electron transport layer, wherein at least a portion of the nanoparticles having electron transport capability include an inorganic oxide core represented by Chemical Formula 1, and a metal-organic compound chemically bound to the surface of the inorganic oxide core.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: February 16, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kun Su Park, Kwanghee Kim, Tae Ho Kim, Eun Joo Jang, Won Sik Yoon
  • Patent number: 10923483
    Abstract: A metal fuse structure may be provided. The metal fuse structure may comprise a first fuse element and a second fuse element. The second fuse element may be adjacent to the first fuse element for a length L. The second fuse element may be spaced apart from first fuse element by a width W.
    Type: Grant
    Filed: March 26, 2019
    Date of Patent: February 16, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Sheng Chang, Yao-Jen Yang
  • Patent number: 10923436
    Abstract: Certain aspects of the present disclosure provide apparatus for thermal matching of integrated circuits (ICs). One example apparatus generally includes a first substrate, a first IC disposed on the first substrate and having a second substrate, and a second IC disposed on the first substrate. The second IC may include a third substrate, a thermal conductivity adjustment region comprising different material than the third substrate, the thermal conductivity adjustment region being adjacent to a first side of the third substrate, and one or more electrical components formed in one or more layers of the second IC adjacent to a second side of the third substrate, wherein the first side and the second side are opposite sides of the third substrate, and wherein a thermal conductivity of the thermal conductivity adjustment region is closer to a thermal conductivity of the second substrate than a thermal conductivity of the third substrate.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: February 16, 2021
    Assignee: Qualcomm Incorporated
    Inventors: Bin Yang, Kai Liu, Xia Li
  • Patent number: 10923334
    Abstract: One or more embodiments described herein generally relate to selective deposition of substrates in semiconductor processes. In these embodiments, a precursor is delivered to a process region of a process chamber. A plasma is generated by delivering RF power to an electrode within a substrate support surface of a substrate support disposed in the process region of the process chamber. In embodiments described herein, delivering the RF power at a high power range, such as greater than 4.5 kW, advantageously leads to greater plasma coupling to the electrode, resulting in selective deposition to the substrate, eliminating deposition on other process chamber areas such as the process chamber side walls. As such, less process chamber cleans are necessary, leading to less time between depositions, increasing throughput and making the process more cost-effective.
    Type: Grant
    Filed: May 3, 2019
    Date of Patent: February 16, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Satya Thokachichu, Edward P. Hammond, IV, Viren Kalsekar, Zheng John Ye, Sarah Michelle Bobek, Abdul Aziz Khaja, Vinay K. Prabhakar, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee
  • Patent number: 10923548
    Abstract: The present disclosure provides a display panel having a display area and a non-display area surrounding the display area, wherein a stress releasing structure is disposed in the non-display area for releasing stress, the stress releasing structure including a substrate; a first inorganic material layer disposed on the substrate; a first patterned conductor layer disposed on the first inorganic material layer; a second inorganic material layer disposed on the first inorganic material layer and the first patterned conductor layer; a third inorganic material layer disposed on the second inorganic material layer; and a second patterned conductor layer disposed on the third inorganic material layer, wherein the second patterned conductor layer is connected to the first patterned conductor layer via at least one first through-hole.
    Type: Grant
    Filed: April 1, 2019
    Date of Patent: February 16, 2021
    Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
    Inventors: Zhiwei Zhou, Seungkyu Choi
  • Patent number: 10923401
    Abstract: Embodiments of the present invention are directed to techniques for providing a gate cut critical dimension (CD) shrink and active gate defect healing using selective deposition. The selective silicon on silicon deposition described herein effectively shrinks the gate cut CD to below lithographic limits and repairs any neighboring active gate damage resulting from a processing window misalignment by refilling the inadvertently removed sacrificial material. In a non-limiting embodiment of the invention, a sacrificial gate is formed over a shallow trench isolation region. A portion of the sacrificial gate is removed to expose a surface of the shallow trench isolation region. A semiconductor material is selectively deposited on exposed sidewalls of the sacrificial gate. A gate cut dielectric is formed on a portion of the shallow trench isolation between sidewalls of the semiconductor material.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: February 16, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Andrew Greene, Marc Bergendahl, Ekmini A. De Silva, Alex Joseph Varghese, Yann Mignot, Matthew T. Shoudy, Gangadhara Raja Muthinti, Dallas Lea
  • Patent number: 10916644
    Abstract: A semiconductor device includes a first electrode, a second electrode disposed at a position opposing the first electrode, and a semiconductor body provided between the first electrode and the second electrode. The semiconductor body includes a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type and a third semiconductor layer of the second conductivity type; the second semiconductor layer is provided between the first semiconductor layer and the first electrode; and the third semiconductor layer is selectively provided inside the first semiconductor layer and disposed at a position separated from the second semiconductor layer. The first electrode is electrically connected to the second semiconductor layer and includes an extension portion; and the extension portion pierces the second semiconductor layer, extends in a first direction toward the second electrode, and is connected to the third semiconductor layer.
    Type: Grant
    Filed: January 7, 2019
    Date of Patent: February 9, 2021
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventors: Keiko Kawamura, Tsuneo Ogura
  • Patent number: 10910468
    Abstract: Provided is a capacitor structure including a substrate, a cup-shaped lower electrode, a top supporting layer, a capacitor dielectric layer, and an upper electrode. The cup-shaped lower electrode is located on the substrate. The top supporting layer surrounds the upper portion of the cup-shaped lower electrode. The top supporting layer includes a high-k material. Surfaces of the cup-shaped lower electrode and the top supporting layer are covered by the capacitor dielectric layer. A surface of the capacitor dielectric layer is covered by the upper electrode.
    Type: Grant
    Filed: January 10, 2020
    Date of Patent: February 2, 2021
    Assignee: Winbond Electronics Corp.
    Inventors: Cheol Soo Park, Ming-Tang Chen, Chun-Chieh Wang
  • Patent number: 10892379
    Abstract: GaN-based nanowire heterostructures have been intensively studied for applications in light emitting diodes (LEDs), lasers, solar cells and solar fuel devices. Surface charge properties play a dominant role on the device performance and have been addressed within the prior art by use of a relatively thick large bandgap AlGaN shell covering the surfaces of axial InGaN nanowire LED heterostructures has been explored and shown substantial promise in reducing surface recombination leading to improved carrier injection efficiency and output power. However, these lead to increased complexity in device design, growth and fabrication processes thereby reducing yield/performance and increasing costs for devices. Accordingly, there are taught self-organising InGaN/AlGaN core-shell quaternary nanowire heterostructures wherein the In-rich core and Al-rich shell spontaneously form during the growth process.
    Type: Grant
    Filed: November 26, 2019
    Date of Patent: January 12, 2021
    Assignee: The Royal Institution for the Advancement of Learning/McGill University
    Inventors: Zetian Mi, Songrui Zhao, Renjie Wang
  • Patent number: 10892206
    Abstract: A method of forming a bonding assembly that includes positioning a plurality of polymer spheres against an opal structure and placing a substrate against a second major surface of the opal structure. The opal structure includes the first major surface and the second major surface with a plurality of voids defined therebetween. The plurality of polymer spheres encapsulates a solder material disposed therein and contacts the first major surface of the opal structure. The method includes depositing a material within the voids of the opal structure and removing the opal structure to form an inverse opal structure between the first and second major surfaces. The method further includes removing the plurality of polymer spheres to expose the solder material encapsulated therein and placing a semiconductor device onto the inverse opal structure in contact with the solder material.
    Type: Grant
    Filed: January 17, 2019
    Date of Patent: January 12, 2021
    Assignee: TOYOTA MOTOR ENGINEERING & MANUFACTURING NORTH AMERICA, INC.
    Inventor: Shailesh N. Joshi
  • Patent number: 10886072
    Abstract: A method for producing a photoelectric conversion element includes forming a hole transport layer containing a hole transport material by causing the hole transport material to adhere to one of a light-absorbing layer and a conductive layer; melting the hole transport layer by heating the hole transport layer to a temperature that is higher than or equal to a melting point of the hole transport material and is in a range of 120° C. or higher and 170° C. or lower; and bonding the light-absorbing layer and the conductive layer with the hole transport layer disposed therebetween by performing cooling while bringing the other of the light-absorbing layer and the conductive layer into contact with the melted hole transport layer under pressure. The light-absorbing layer contains a compound represented by general formula (1), where A represents an organic molecule, B represents a metal atom, and X represents a halogen atom.
    Type: Grant
    Filed: May 8, 2019
    Date of Patent: January 5, 2021
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Hiroshi Sugimura, Shintaro Miyanishi
  • Patent number: 10879460
    Abstract: A random access memory device (400) comprises inert-inert electrode cell (210) and inert-active electrode cell (110). The inert-inert electrode cell (210) and inert-active electrode cell (110) are connected in series in a serial connection. The inert-inert electrode cell (210) comprises a top inert electrode (200), an electrolyte (202) and a bottom inert electrode (206), the inert-active electrode cell (110) comprises a top active electrode (100), an electrolyte (102) and a bottom inert electrode (106). The bottom inert electrode (200) of inert-inert electrode cell (210) is connected with negative electrode of voltage source (300) and the top active electrode (100) of inert-active electrode cell (110) is connected with positive electrode of voltage source (300).
    Type: Grant
    Filed: February 21, 2018
    Date of Patent: December 29, 2020
    Assignee: Univerzita Pardubice
    Inventors: Tomas Wagner, Bo Zhang
  • Patent number: 10879444
    Abstract: Solid-state transducers (“SSTs”) and vertical high voltage SSTs having buried contacts are disclosed herein. An SST die in accordance with a particular embodiment can include a transducer structure having a first semiconductor material at a first side of the transducer structure, and a second semiconductor material at a second side of the transducer structure. The SST can further include a plurality of first contacts at the first side and electrically coupled to the first semiconductor material, and a plurality of second contacts extending from the first side to the second semiconductor material and electrically coupled to the second semiconductor material. An interconnect can be formed between at least one first contact and one second contact. The interconnects can be covered with a plurality of package materials.
    Type: Grant
    Filed: October 31, 2019
    Date of Patent: December 29, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Vladimir Odnoblyudov, Martin F. Schubert
  • Patent number: 10872757
    Abstract: A semiconductor substrate processing method includes: a peeling layer forming step of forming a peeling layer by irradiating a first semiconductor substrate with a laser beam having a wavelength capable of passing through the first semiconductor substrate while positioning a focal point of the laser beam within the first semiconductor substrate; a second semiconductor substrate forming step of forming a second semiconductor substrate by epitaxial growth on an upper surface of the first semiconductor substrate after performing the peeling layer forming step; a peeling step of peeling off the first semiconductor substrate from the peeling layer; and a grinding step of grinding and removing the first semiconductor substrate after performing the peeling step.
    Type: Grant
    Filed: August 8, 2019
    Date of Patent: December 22, 2020
    Assignee: DISCO CORPORATION
    Inventor: Kazuya Hirata
  • Patent number: 10872959
    Abstract: A semiconductor device includes gate trenches and dummy gate trenches formed on the upper surface side of a semiconductor substrate, gate electrodes embedded in the gate trenches, dummy gate electrodes embedded in the dummy gate trenches, a channel layer formed in the surface portion on the upper surface side of the semiconductor substrate, a carrier storage layer formed below the channel layer, and a collector layer formed on the lower surface side of the semiconductor substrate. A relationship D4<D1<D3<D2 holds true, where D1 is the depth of the bottoms of the gate electrodes, D2 is the depth of the bottoms of the dummy gate electrodes, D3 is the depth of the bottom of the carrier storage layer, and D4 is the depth of the junction between the channel layer and the carrier storage layer.
    Type: Grant
    Filed: January 14, 2019
    Date of Patent: December 22, 2020
    Assignee: Mitsubishi Electric Corporation
    Inventor: Ze Chen