Abstract: A metal is formed into an opening that is located in an interlayer dielectric (ILD) material that laterally surrounds a semiconductor fin of a partially fabricated vertical transistor and on a physically exposed topmost surface of the semiconductor fin. A patterned material stack of, and from bottom to top, a membrane and a doped amorphous semiconductor material layer is formed on the metal and a topmost surface of the ILD material. A metal induced layer exchange anneal is then employed in which the metal and doped semiconductor material change places such that the doped semiconductor material is in direct contact with the topmost surface of the semiconductor fin. The exchanged doped semiconductor material, which provides a top source/drain structure of the vertical transistor, may have a different crystalline orientation than the topmost surface of the semiconductor fin.

Abstract: Embodiments of the invention are directed to a method of forming a semiconductor device. The method includes forming a channel region comprising a channel region semiconductor material having a first energy band gap characteristic. A source region is formed communicatively coupled to the channel region. A drain region is formed communicatively coupled to the channel region. A gate region is formed communicatively coupled to the channel region. An enhanced band gap region is positioned substantially positioned at an interface between the channel region and the drain region. The enhanced band gap region includes an enhanced band gap region semiconductor material having a second band gap energy characteristic. The first energy band gap is less than the second energy band gap.

Abstract: A method for forming the semiconductor device that includes forming an etch mask covering a drain side of the gate structure and the silicon containing fin structure; etching a source side of the silicon containing fin structure adjacent to the channel region; and forming a germanium containing semiconductor material on an etched sidewall of the silicon containing fin structure adjacent to the channel region. Germanium from the germanium containing semiconductor material is diffused into the channel region to provide a graded silicon germanium region in the channel region having germanium present at a highest concentration in the channel region at the source end of the channel region and a germanium deficient concentration at the drain end of the channel region.

Abstract: A method of forming a vertical transistor includes forming a fin structure on a substrate, forming a gate structure on the fin structure, and forming a bottom source/drain (S/D) region on the fin structure, such that an air gap is formed between the bottom S/D region and the gate structure.

Abstract: Semiconductor devices and methods of forming the same include forming a dummy gate over a fin, which has a lower semiconductor layer, an insulating intermediate layer, and an upper semiconductor layer, to establish a channel region and source/drain regions. Source/drain extensions are grown on the lower semiconductor layer. Source/drain extensions are grown on the upper semiconductor layer. The dummy gate is replaced with a gate stack.

Abstract: A semiconductor structure includes a substrate, a plurality of fins disposed over a top surface of the substrate, and a gate stack surrounding a portion of sidewalls of the plurality of fins. The plurality of fins include two or more active device fins comprising a semiconducting material providing vertical transport channels for respective vertical transport field-effect transistors, and two or more edge fins surrounding the two or more active device fins, the two or more edge fins comprising a dielectric material. Thicknesses of one or more layers of the gate stack surrounding the portion of the sidewalls of the two or more edge fins are different than thicknesses of the one or more layers of the gate stack surrounding the portion of the sidewalls of the active device fins. The vertical transport field-effect transistors provided by the active device fins have uniform threshold voltage.

Abstract: Techniques for integrating a self-aligned heterojunction for TFETs in a vertical GAA architecture are provided. In one aspect, a method of forming a vertical TFET device includes: forming a doped SiGe layer on a Si substrate; forming fins that extend through the doped SiGe layer and partway into the Si substrate such that each of the fins includes a doped SiGe portion disposed on a Si portion with a heterojunction therebetween, wherein the SiGe portion is a source and the Si portion is a channel; selectively forming oxide spacers, aligned with the heterojunction, along opposite sidewalls of only the doped SiGe portion; and forming a gate stack around the Si portion and doped SiGe that is self-aligned with the heterojunction. A vertical TFET device formed by the method is also provided.

Abstract: A semiconductor structure is provided that includes a plurality of high mobility semiconductor material (i.e., silicon germanium alloy of III-V compound semiconductors) fins located above and spaced apart from a bulk semiconductor substrate portion, wherein each of the high mobility semiconductor material fins has a lower faceted surface that is confined within a dielectric isolation structure.

Abstract: A method for manufacturing a semiconductor device includes forming a plurality of fins on a substrate, wherein each fin of the plurality of fins includes silicon germanium. A layer of silicon germanium oxide is deposited on the plurality of fins, and a first thermal annealing process is performed to convert outer regions of the plurality of fins into a plurality of silicon portions. Each silicon portion of the plurality of silicon portions is formed on a silicon germanium core portion. The method further includes forming a plurality of source/drain regions on the substrate, and depositing a layer of germanium oxide on the plurality of source/drain regions. A second thermal annealing process is performed to convert outer regions of the plurality of source/drain regions into a plurality of germanium condensed portions.

Abstract: A method is presented for forming a semiconductor structure. The method includes forming a silicon (Si) channel for a first device, forming a first interfacial layer over the Si channel, forming a silicon-germanium (SiGe) channel for a second device, forming a second interfacial layer over the SiGe channel, and selectively removing germanium oxide (GeOX) from the second interfacial layer by applying a combination of hydrogen (H2) and hydrogen chloride (HCl). The second interfacial is silicon germanium oxide (SiGeOX) and removal of the GeOX results in formation of a pure silicon dioxide (SiO2) layer.

Abstract: A method of forming a semiconductor device that includes forming at least two semiconductor fin structures having sidewalls with {100 } crystalline planes that is present atop a supporting substrate; and epitaxially growing a source/drain region in a lateral direction from the sidewalls of each fin structure. The second source/drain regions have substantially planar sidewalls. A metal wrap around electrode is formed on an upper surface and the substantially planar sidewalls of the source/drain regions. Air gaps are formed between the source/drain regions of the at least two semiconductor fin structures.

Abstract: Techniques for forming VTFET devices with tensile- and compressively-strained channels using dummy stressor materials are provided. In one aspect, a method of forming a VTFET device includes: patterning fins in a wafer; forming bottom source and drains at a base of the fins; forming bottom spacers on the bottom source and drains; growing at least one dummy stressor material along sidewalls of the fins above the bottom spacers configured to induce strain in the fins; surrounding the fins with a rigid fill material; removing the at least one dummy stressor material to form gate trenches in the rigid fill material while maintaining the strain in the fins by the rigid fill material; forming replacement gate stacks in the gate trenches; forming top spacers on the replacement gate stacks; and forming top source and drains over the top spacers at tops of the fins. A VTFET device is also provided.

Abstract: A method of forming a fin field effect transistor device is provided. The method includes forming a plurality of vertical fins on a substrate. The method further includes forming a bottom source/drain layer adjacent to the plurality of vertical fins, and growing a doped layer on the bottom source/drain layer and sidewalls of the plurality of vertical fins. The method further includes forming a dummy gate liner on the doped layer and the bottom source/drain layer, and forming a dummy gate fill on the dummy gate liner. The method further includes forming a protective cap layer on the dummy gate fill, and removing a portion of the protective cap layer to expose a top surface of the plurality of vertical fins.

Abstract: Gate metal patterning techniques enable the incorporation of different work function metals in CMOS devices such as nanosheet transistor devices, vertical FETs, and FinFETs. Such techniques facilitate removal of gate metal from one region of a device without damage from over-etching to an adjacent region. The fabrication of CMOS devices with adjoining nFET/pFET gate structures and having very tight gate pitch is also facilitated. The techniques further enable the fabrication of CMOS devices with adjoining gate structures that require relatively long etch times for removal of gate metal therefrom, such as nanosheet transistors. A nanosheet transistor device including dual metal gates as fabricated allows tight integration.

Abstract: A method of forming a fin field effect device is provided. The method includes forming one or more vertical fins on a substrate and a fin template on each of the vertical fins. The method further includes forming a gate structure on at least one of the vertical fins, and a top spacer layer on the at least one gate structure, wherein at least an upper portion of the at least one of the one or more vertical fins is exposed above the top spacer layer. The method further includes forming a top source/drain layer on the top spacer layer and the exposed upper portion of the at least one vertical fin. The method further includes forming a sacrificial spacer on opposite sides of the fin templates and the top spacer layer, and removing a portion of the top source/drain layer not covered by the sacrificial spacer to form a top source/drain electrically connected to the vertical fins.

Abstract: A nanosheet field effect transistor device includes a semiconductor substrate including a stack of semiconductor nanosheets and a gate structure. The gate structure has an electrically conductive gate contact on the nanosheets and defines a channel region interposed between opposing source or drain (S/D) regions. The nanosheet field effect transistor further includes an electrically conductive cladding layer that encapsulates an outer surface of the S/D regions, and inner spacers on the sidewalls of the gate structure. The inner spacers are interposed between the cladding layer and the gate contact.

Abstract: Devices and methods are provided to fabricate nanosheet field-effect transistor devices having dummy nanosheet channel layers disposed above active nanosheet channel layers to protect the active nanosheet channel layers from oxidation during work function metal patterning processes that are implemented as part of a multi-threshold voltage process module. The dummy nanosheet channel layers have a reduced thickness so that the dummy nanosheet layers do not function as active channel layers of the nanosheet field-effect transistor devices. The dummy nanosheet channel layers serve as oxygen infusion blocking layers to protect the active nanosheet channel layers from being infused with oxygen and oxidized by a directional plasma etch process performed during a work function metal patterning process.

Abstract: A method of forming a vertical transport field effect transistor is provided. The method includes forming a vertical fin on a substrate, and a top source/drain on the vertical fin. The method further includes thinning the vertical fin to form a thinned portion, a tapered upper portion, and a tapered lower portion from the vertical fin. The method further includes depositing a gate dielectric layer on the thinned portion, tapered upper portion, and tapered lower portion of the vertical fin, wherein the gate dielectric layer has an angled portion on each of the tapered upper portion and tapered lower portion. The method further includes depositing a work function metal layer on the gate dielectric layer.

Abstract: A method of forming gate structures to a nanosheet device that includes forming at least two stacks of nanosheets, wherein each nanosheet includes a channel region portion having a gate dielectric layer present thereon. The method may further include forming a dual metal layer scheme on the gate dielectric layer of each nanosheet. The dual metal layer scheme including an etch stop layer of a first composition and a work function adjusting layer of a second composition, wherein the etch stop layer has a composition that provides that the work function adjusting layer is removable by a wet etch chemistry that is selective to the etch stop layer.

Abstract: A technique relates to fabricating a semiconductor device. A contact trench is formed in an inter-level dielectric layer. The contact trench creates an exposed portion of a semiconductor substrate through the inter-level dielectric layer. A gate stack is on the semiconductor substrate, and the inter-level dielectric layer is adjacent to the gate stack and the semiconductor substrate. A source/drain region is formed in the contact trench such that the source/drain region is on the exposed portion of the semiconductor substrate. Tin is introduced in the source/drain region to form an alloyed layer on top of the source/drain region, and the alloyed layer includes the tin and a source/drain material of the source/drain region. A trench layer is formed in the contact trench such that the trench layer is on top of the alloyed layer. A metallic liner layer is formed on the trench layer and the inter-level dielectric layer.