Patents by Inventor Trung (Tim) Trinh

Trung (Tim) Trinh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030134439
    Abstract: The invention includes a method of treating a predominantly inorganic dielectric material on a semiconductor wafer. A laser is utilized to generate activated oxygen species. Such activated oxygen species react with a component of the dielectric material to increase an oxygen content of the dielectric material. The invention also includes a method of forming a capacitor construction. A first capacitor electrode is formed to be supported by a semiconductor substrate. A dielectric material is formed over the first capacitor electrode. A precursor is provided at a location proximate the dielectric material, and a laser beam is focused at such location. The laser beam generates an activated oxygen species from the precursor. The activated oxygen species contacts the dielectric material. Subsequently, a second capacitor electrode is formed over the dielectric material.
    Type: Application
    Filed: January 17, 2003
    Publication date: July 17, 2003
    Inventors: Gurtej S. Sandhu, Trung Tri Doan
  • Publication number: 20030127669
    Abstract: An ovonic phase-change semiconductor memory device having a reduced area of contact between electrodes of chalcogenide memories, and methods of forming the same. Such memory devices are formed by forming a tip protruding from a lower surface of a lower electrode element. An insulative material is applied over the lower electrode such that an upper surface of the tip is exposed. A chalcogenide material and an upper electrode are either formed atop the tip, or the tip is etched into the insulative material and the chalcogenide material and upper electrode are deposited within the recess. This allows the memory cells to be made smaller and allows the overall power requirements for the memory cell to be minimized.
    Type: Application
    Filed: January 17, 2003
    Publication date: July 10, 2003
    Inventors: Trung T. Doan, D. Mark Durcan, Brent D. Gilgen
  • Publication number: 20030129773
    Abstract: The invention includes a method of treating a predominantly inorganic dielectric material on a semiconductor wafer. A laser is utilized to generate activated oxygen species. Such activated oxygen species react with a component of the dielectric material to increase an oxygen content of the dielectric material. The invention also includes a method of forming a capacitor construction. A first capacitor electrode is formed to be supported by a semiconductor substrate. A dielectric material is formed over the first capacitor electrode. A precursor is provided at a location proximate the dielectric material, and a laser beam is focused at such location. The laser beam generates an activated oxygen species from the precursor. The activated oxygen species contacts the dielectric material. Subsequently, a second capacitor electrode is formed over the dielectric material.
    Type: Application
    Filed: January 17, 2003
    Publication date: July 10, 2003
    Inventors: Gurtej S. Sandhu, Trung Tri Doan
  • Patent number: 6585575
    Abstract: A method and apparatus for releasably attaching a planarizing medium, such as a polishing pad, to the platen of a chemical-mechanical planarization machine. In one embodiment, the apparatus can include several apertures in the upper surface of the platen that are coupled to a vacuum source. When a vacuum is drawn through the apertures in the platen, the polishing pad is drawn tightly against the platen and may therefore be less likely to wrinkle when a semiconductor substrate is engaged with the polishing pad during planarization. When the vacuum is released, the polishing pad can be easily separated from the platen. The apparatus can further include a liquid trap to separate liquid from the fluid drawn by the vacuum source through the apertures, and can also include a releasable stop to prevent the polishing pad from separating from the platen should the vacuum source be deactivated while the platen is in motion.
    Type: Grant
    Filed: August 9, 2001
    Date of Patent: July 1, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Trung Tri Doan, Scott E. Moore
  • Publication number: 20030119244
    Abstract: The invention includes a method of forming a conductive interconnect. An electrical node location is defined to be supported by a silicon-containing substrate. A silicide is formed in contact with the electrical node location. The silicide is formed by exposing the substrate to hydrogen, TiCl4 and plasma conditions to cause Ti from the TiCl4 to combine with silicon of the substrate to form TiSix. Conductively doped silicon material is formed over the silicide. The conductively doped silicon material is exposed to one or more temperatures of at least about 800° C. The silicide is also exposed to the temperatures of at least about 800° C.
    Type: Application
    Filed: January 30, 2003
    Publication date: June 26, 2003
    Inventors: Gurtej S. Sandhu, Trung Tri Doan, Howard E. Rhodes, Sujit Sharan, Philip J. Ireland, Martin Ceredig Roberts
  • Publication number: 20030116834
    Abstract: An apparatus and method for attaching a semiconductor die to a lead frame wherein the electric contact points of the semiconductor die are relocated to the periphery of the semiconductor die through a plurality of conductive traces. A plurality of leads extends from the lead frame over the conductive traces proximate the semiconductor die periphery and directly attaches to and makes electrical contact with the conductive traces in an LOC arrangement. Alternately, a connector may contact a portion of the conductive trace to make contact therewith.
    Type: Application
    Filed: February 14, 2003
    Publication date: June 26, 2003
    Inventor: Trung T. Doan
  • Patent number: 6583028
    Abstract: In accordance with an aspect of the invention, a method of forming a trench isolation region includes forming a trench within a substrate. A silanol layer is formed to partially fill the trench and then converted, at least some of the silanol, to a compound including at least one of SiOn and RSiOn, where R includes an organic group. An electrically insulative material is formed over the converted silanol to fill the trench. In another aspect of the invention, a method of forming a trench isolation region includes forming a trench within a substrate. A first layer of at least one of Si(OH)x and (CH3)ySi(OH)4−y is formed to partially fill the trench. At least some of the Si(OH)x if present is converted to SiO2 and at least some of (CH3)ySi(OH)4−y if present is converted to (CH3)xSiO2−x. Next, a layer of an electrically insulative material is formed to fill the trench.
    Type: Grant
    Filed: August 2, 2002
    Date of Patent: June 24, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Trung Tri Doan, Gurtej S. Sandhu
  • Patent number: 6582281
    Abstract: The invention includes a semiconductive processing method of electrochemical-mechanical removing at least some of a conductive material from over a surface of a semiconductor substrate. A cathode is provided at a first location of the wafer, and an anode is provided at a second location of the wafer. The conductive material is polished with the polishing pad polishing surface. The polishing occurs at a region of the conductive material and not at another region. The region where the polishing occurs is defined as a polishing operation location. The polishing operation location is displaced across the surface of the substrate from said second location of the substrate toward said first location of the substrate. The polishing operation location is not displaced from said first location toward said second location when the polishing operation location is between the first and second locations.
    Type: Grant
    Filed: March 23, 2000
    Date of Patent: June 24, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Trung Tri Doan, Scott G. Meikle
  • Publication number: 20030114421
    Abstract: The present invention relates to novel &agr;-substituted-&bgr;-aminoethylphosphonate and &agr;-substituted-&bgr;-aminovinylphosphonate derivatives and their uses for lowering plasma levels of apo (a), Lp(a), apo B, apo B associated lipoproteins (low density lipoproteins and very low density lipoproteins) and for lowering plasma levels of total cholesterol.
    Type: Application
    Filed: September 4, 2002
    Publication date: June 19, 2003
    Inventors: Hieu Trung Phan, Lan Mong Nguyen, Vinh Van Diep, Raymond Azoulay, Harald Eschenhof, Eric Joseph Niesor, Craig Leigh Bentzen, Robert John Ife
  • Publication number: 20030102008
    Abstract: A method and system providing a high flux of point of use activated reactive species for semiconductor processing wherein a workpiece is exposed to a gaseous atmosphere containing a transmission gas that is substantially nonattenuating to preselected wavelengths of electromagnetic radiation. A laminar flow of a gaseous constituent is also provided over a substantially planar surface of the workpiece wherein a beam of the electromagnetic radiation is directed into the gaseous atmosphere such that it converges in the laminar flow to provide maximum beam energy in close proximity to the surface of the workpiece, but spaced a finite distance therefrom. The gaseous constituent is dissociated by the beam producing an activated reactive species that reacts with the surface of the workpiece.
    Type: Application
    Filed: November 30, 2001
    Publication date: June 5, 2003
    Inventors: Gurtej S. Sandhu, Trung T. Doan
  • Patent number: 6573601
    Abstract: A process for forming vertical contacts in the manufacture of integrated circuits, and devices so manufactured. The process eliminates the need for precise mask alignment and allows the etch of the contact hole to be controlled independent of the etch of the interconnect trough. The process includes the steps of: forming an insulating layer on the surface of a substrate; forming an etch stop layer on the surface of the insulating layer; forming an opening in the etch stop layer; etching to a first depth through the opening in the etch stop layer and into the insulating layer to form an interconnect trough; forming a photoresist mask on the surface of the etch stop layer and in the trough; and continuing to etch through the insulating layer until reaching the surface of the substrate to form a contact hole. The above process may be repeated one or more times during the formation of multilevel metal integrated circuits.
    Type: Grant
    Filed: May 1, 2002
    Date of Patent: June 3, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Charles H. Dennison, Trung T. Doan
  • Patent number: 6573199
    Abstract: The invention includes a method of treating a predominantly inorganic dielectric material on a semiconductor wafer. A laser is utilized to generate activated oxygen species. Such activated oxygen species react with a component of the dielectric material to increase an oxygen content of the dielectric material. The invention also includes a method of forming a capacitor construction. A first capacitor electrode is formed to be supported by a semiconductor substrate. A dielectric material is formed over the first capacitor electrode. A precursor is provided at a location proximate the dielectric material, and a laser beam is focused at such location. The laser beam generates an activated oxygen species from the precursor. The activated oxygen species contacts the dielectric material. Subsequently, a second capacitor electrode is formed over the dielectric material.
    Type: Grant
    Filed: August 30, 2001
    Date of Patent: June 3, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Trung Tri Doan
  • Publication number: 20030101312
    Abstract: An apparatus and method for capturing and restoring a machine state of a computer system. The apparatus includes a PC card having a non-volatile memory for storing machine state information corresponding to a machine state and a controller coupled to the nonvolatile memory to control the transfer of the machine state information to and from the nonvolatile memory. The apparatus further includes a transfer component for directing the controller to coordinate the storage and download of the machine state information in order to capture and restore a computer system to the stored machine state.
    Type: Application
    Filed: November 26, 2001
    Publication date: May 29, 2003
    Inventors: Trung T. Doan, Dean A. Klein
  • Publication number: 20030098480
    Abstract: A capacitor structure is formed over a semiconductor substrate by atomic layer deposition to achieve uniform thickness in memory cell dielectric layers, particularly where the dielectric layer is formed in a container-type capacitor structure. In accordance with several embodiments of the present invention, a process for forming a capacitor structure over a semiconductor substrate is provided. Other embodiments of the present invention relate to processes for forming memory cell capacitor structures, memory cells, and memory cell arrays. Capacitor structures, memory cells, and memory cell arrays are also provided.
    Type: Application
    Filed: August 27, 2002
    Publication date: May 29, 2003
    Inventors: Lingyi A. Zheng, Er-Xuan Ping, Lyle Breiner, Trung T. Doan
  • Publication number: 20030095386
    Abstract: An apparatus is described that is capable of receiving a number of different types of flash memory cards using a single slot. The apparatus includes a housing that defines a slot to receive different types of removable memory cards. The slot includes a central region of a first height and outer regions of a second height. A plurality of electrically conductive contact areas are disposed within the slot. The apparatus may receive, for example, any one of a Smart Media flash memory card, a Memory Stick flash memory card, a Secure Digital flash memory card, and MultiMedia flash memory card.
    Type: Application
    Filed: November 19, 2001
    Publication date: May 22, 2003
    Applicant: Imation Corp.
    Inventors: Trung V. Le, Robert W. Tapani
  • Publication number: 20030097177
    Abstract: A posterior chamber phakic lens made from an elastomeric, foldable, highly biocompatible material. The lens has a generally circular optic and a pair of integrally formed, plate-style haptics. The haptics project posteriorly from the optic. A plurality of openings are formed at the intersection of the optic and the haptics, the holes extending all the way through the lens. The distal tips of the haptics are split or forked so as to project anteriorly and posteriorly. The anterior arm is designed to fit against the posterior iris, and the posterior arm is design to be supported in the anterior ciliary sulcus. Such a construction provides for a stable lens once implanted in the eye, helps to avoid pupillary blockage and allows for improved aqueous flow around the natural lens.
    Type: Application
    Filed: November 21, 2001
    Publication date: May 22, 2003
    Inventor: Son Trung Tran
  • Publication number: 20030092241
    Abstract: In accordance with an aspect of the invention, a method of forming a trench isolation region includes forming a trench within a substrate. A silanol layer is formed to partially fill the trench and then converted, at least some of the silanol, to a compound including at least one of SiOn and RSiOn, where R includes an organic group. An electrically insulative material is formed over the converted silanol to fill the trench. In another aspect of the invention, a method of forming a trench isolation region includes forming a trench within a substrate. A first layer of at least one of Si(OH)x and (CH3)ySi(OH)4-y is formed to partially fill the trench. At least some of the Si(OH)x if present is converted to SiO2 and at least some of (CH3)ySi(OH)4-y if present is converted to (CH3)xSiO2-x. Next, a layer of an electrically insulative material is formed to fill the trench.
    Type: Application
    Filed: December 23, 2002
    Publication date: May 15, 2003
    Inventors: Trung Tri Doan, Gurtej S. Sandhu
  • Patent number: 6562070
    Abstract: An anterior chamber phakic lens made from an elastomeric, foldable, highly biocompatible material. The lens has a generally circular optic and integrally formed plate-style haptics, the haptics containing an opening into which project a pair of pincer arms. the pincer arms are sized and shaped so as to pull away from each other when the lens is folded, and are draw back toward each other when the folded lens is released and allowed to return to its unfolded state. Such movement allows the pincers to gather a small section of the iris so as to hold the lens in place.
    Type: Grant
    Filed: January 9, 2002
    Date of Patent: May 13, 2003
    Assignee: Alcon, Inc.
    Inventors: Son Trung Tran, Stephen J. Van Noy
  • Patent number: 6559054
    Abstract: In one aspect, the invention includes a method of treating a surface of a substrate. A mixture which comprises at least a frozen first material and liquid second material is provided on the surface and moved relative to the substrate. In another aspect, the invention encompasses a method of treating a plurality of substrates. A treating member is provided proximate a first substrate, and an initial layer of frozen material is formed over a surface of the treating member. A surface of the first substrate is treated by moving at least one of the treating member and the first substrate relative to the other of the treating member and the first substrate. After the surface of the first substrate is treated, the initial layer of frozen material is removed from over the surface of the treating member.
    Type: Grant
    Filed: May 22, 2001
    Date of Patent: May 6, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Moore, Trung Tri Doan
  • Patent number: 6557104
    Abstract: A method and apparatus for secure processing of cryptographic keys, wherein a cryptographic key stored on a token is processed in a secure processor mode using a secure memory. A main system processor is initialized into a secure processing mode, which cannot be interrupted by other interrupts, during a power-on sequence. A user enters a Personal Identification Number (PIN) to unlock the cryptographic key stored on the token. The cryptographic key and associated cryptographic program are then loaded into the secure memory. The secure memory is locked to prevent access to the stored data from any other processes. The user is then prompted to remove the token and the processor exits the secure mode and the system continues normal boot-up operations. When an application requests security processing, the cryptographic program is executed by the processor in the secure mode such that no other programs or processes can observe the execution of the program.
    Type: Grant
    Filed: May 2, 1997
    Date of Patent: April 29, 2003
    Assignee: Phoenix Technologies Ltd.
    Inventors: Son Trung Vu, Quang Phan