Abstract: A wafer inspection system includes a controller in communication with an electron-beam inspection tool. The controller includes circuitry to: acquire, via an optical imaging tool, coordinates of defects on a sample; set a Field of View (FoV) of the electron-beam inspection tool to a first size to locate a subset of the defects; determine a position of each defect of the subset of the defects based on inspection data generated by the electron-beam inspection tool during a scanning of the sample; adjust the coordinates of the defects based on the determined positions of the subset of the defects; and set the FoV of the electron-beam inspection tool to a second size to locate additional defects based on the adjusted coordinates.

Abstract: Systems and methods for irradiating a sample with a charged-particle beam are disclosed. The charged-particle beam system may comprise a stage configured to hold a sample and is movable in at least one of X-Y-Z axes. The charged-particle beam system may further comprise a position sensing system to determine a lateral and vertical displacement of the stage, and a beam deflection controller configured to apply a first signal to deflect a primary charged-particle beam incident on the sample to at least partly compensate for the lateral displacement, and to apply a second signal to adjust a focus of the deflected charged-particle beam incident on the sample to at least partly compensate for the vertical displacement of the stage. The first and second signals may comprise an electrical signal having a high bandwidth in a range of 10 kHz to 50 kHz, and 50 kHz to 200 kHz, respectively.

Abstract: A power sourcing equipment is provided. The power sourcing equipment may include an input terminal, an output terminal, a switch, and a device detection circuit. The input terminal may receive a power signal. The output terminal may be electrically coupled to a powered device via a coaxial cable, which transmits the power signal from the power sourcing equipment to the powered device or a data signal from the powered device to the power sourcing equipment. The switch may control an electrical connection between the input and output terminal(s). The device detection circuit may detect whether the data signal is being transmitted from the powered device to the power sourcing equipment. If the data signal is not being transmitted from the powered device to the power sourcing equipment, the device detection circuit may control an operation of the switch based on an electrical parameter associated with the powered device.

Abstract: An airstream cooling assembly includes an evaporator and a first and second condenser. The evaporator is configured to have a first airstream directed over its outer surface and to change the phase of a primary cooling medium from liquid to gas. The first condenser is configured to have a second airstream directed over its outer surface, transfer heat from the primary cooling medium, and change the phase of the primary cooling medium from gas to liquid. The second condenser is configured to accept a secondary cooling medium, and when accepting the secondary cooling medium, to receive the primary cooling medium from the evaporator, transfer heat from the primary cooling medium, and change the phase of the primary cooling medium from gas to liquid. The evaporator is configured to receive the primary cooling medium in the liquid phase from at least one of the first condenser and the second condenser.

Abstract: An inspection method includes the following steps: identifying a plurality of patterns within an image; and comparing the plurality of patterns with each other for measurement values thereof. The above-mentioned inspection method uses the pattern within the image as a basis for comparison; therefore, measurement values of the plurality of pixels constructing the pattern can be processed with statistical methods and then compared, and the false rate caused by variation of a few pixels is decreased significantly. An inspection system implementing the above-mentioned method is also disclosed.

Abstract: A method for decoding an encoded code stream is provided. The method may include obtaining the encoded code stream. The method may include determining a plurality of code blocks based on the encoded code stream. The method may include determining a plurality of bit-planes for each of the plurality of code blocks, the plurality of bit-planes ranging from a most significant bit-plane to a least significant bit-plane. The method may include determining at least one query-plane for each of the plurality of bit-planes. The method may further include decoding each of the plurality of bit-planes based on the at least one query-plane.

Abstract: An exhaust heat recovery boiler includes: a duct casing in which exhaust gas flows; a tubular extending portion extending upward from the duct casing; a heat exchanger tube located in the duct casing; a hammering rod connected to the heat exchanger tube in the duct casing and passing through an inside of the extending portion, the hammering rod including an upper part projecting to an outside of the extending portion; and an annular sleeve attached to the upper part of the hammering rod through a packing. The extending portion includes an upper flat surface which is located at an upper end of the extending portion, realizes a seal between the upper flat surface and a lower surface of the sleeve, and is annular and flat.

Abstract: A heat exchanger tube block is stacked on another heat exchanger tube block in an upper-lower direction and connected to the another heat exchanger tube block. The heat exchanger tube block includes: a duct casing wherein exhaust gas containing dust flows in the upper-lower direction; a heat exchanger tube in the duct casing extends horizontally; an inlet header connects to the heat exchanger tube inlet; an outlet header connected to an outlet of the heat exchanger tube; and a vibration transmitting member transmitting vibration, applied to an upper end part of the vibration transmitting member, to the heat exchanger tube to make the dust accumulating on the heat exchanger tube fall. A lower end of the duct casing is formed horizontally. The inlet header is located higher than the lower end of the duct casing. The outlet header is located higher than the lower end of the duct casing.

Abstract: A heat dissipation assembly includes a condenser, an evaporator, a vapor conduit, and a liquid conduit. The condenser has a condensing chamber therein. Two ends of the vapor conduit are respectively connected to the condenser and the evaporator. Two ends of the liquid conduit are respectively connected to the condenser and the evaporator. A geometric center of the liquid conduit in the condensing chamber is lower than or equal to a geometric center of the condensing chamber.

Abstract: A defect pattern grouping method is disclosed. The defect pattern grouping method comprises obtaining a first polygon that represents a first defect from an image of a sample, comparing the first polygon with a set of one or more representative polygons of a defect-pattern collection, and grouping the first polygon with any one or more representative polygons identified based on the comparison.

Abstract: A method for preparing a perovskite solar cell is disclosed, which comprises the following steps: providing a first electrode; forming an active layer on the first electrode; and forming a second electrode on the active layer. Herein, the active layer can be prepared by the following steps: mixing a perovskite precursor and a solvent mixture to form a precursor solution, wherein the solvent mixture comprises a first solvent and a second solvent, the first solvent is selected from the group consisting of ?-butyrolactone (GBL), dimethyl sulfoxide (DMSO), 2-methylpyrazine (2-MP), dimethylformamide (DMF), 1-methyl-2-pyrrolidone (NMP), dimethylacetamide (DMAc) and a combination thereof, and the second solvent is an alcohol; and coating the first electrode with the precursor solution and heating the precursor solution to form the active layer.

Abstract: The present disclosure relates to systems and methods for transmitting data in a video signal. The systems may perform the methods to generate a data frame, wherein the data frame may include at least a frame header and frame data, the frame header may include at least one autocorrelation and cross-correlation sequence; insert the data frame into an area of a video signal, wherein the inserted area of the video signal is not an area of line and field synchronization or an area of effective video; transmit the video signal having the data frame to another device.

Abstract: Systems and methods for optimal electron beam metrology guidance are disclosed. According to certain embodiments, the method may include receiving an acquired image of a sample, determining a set of image parameters based on an analysis of the acquired image, determining a set of model parameters based on the set of image parameters, generating a set of simulated images based on the set of model parameters. The method may further comprise performing measurement of critical dimensions on the set of simulated images and comparing critical dimension measurements with the set of model parameters to provide a set of guidance parameters based on comparison of information from the set of simulated images and the set of model parameters. The method may further comprise receiving auxiliary information associated with target parameters including critical dimension uniformity.

Abstract: A method for image combination may include obtaining a first image and a second image; dividing the first image into a plurality of first image blocks and dividing the second image into a plurality of second image blocks; for each of the plurality of first image blocks, determining a first block weight based on edge information of the first image block and determining a second block weight based on overall information of the first image block; for each of the plurality of second image blocks, determining a third block weight based on overall information of the second image block; determining an exposure gain ratio based on the second block weights and the third block weights; determining a first combination weight and a second combination weight based on the exposure gain ratio; generating a third image based on the first combination weights and the second combination weights.

Abstract: A microfluidic device and a biological detection method using the microfluidic device are provided. The microfluidic device includes a sample mixing area, an optical indicator mixing area and an observation area. The sample mixing area stores barcode beads and configured to receive a test sample to mix the barcode beads with the test sample, in which the barcode beads correspond to different detecting targets. The optical indicator mixing area is configured to receive an optical indicator and the barcode beads to mix the barcode beads with the optical indicator. The observation area is configured to receive the barcode beads from the optical indicator mixing area. In the biological detection method, at first, images of the barcode beads are captured. Thereafter, images of reacted barcode beads are determined, and values of barcode patterns thereof are recognized to determine reacting targets of the test sample.

Abstract: A cooling assembly includes an evaporator containing a primary cooling medium, a passive condenser, and a heat exchanger. When a secondary cooling medium is provided to the heat exchanger, the primary cooling medium in the gas phase switches from being received by the passive condenser to the heat exchanger without operating any valves located between the evaporator and the passive condenser and between the evaporator and the heat exchanger. The primary cooling medium circulates between the evaporator and the passive condenser and between the evaporator and the heat exchanger by natural circulation and gravity without a pump in the flow path of the primary cooling medium between the heat exchanger and the evaporator and between the passive condenser and the evaporator to circulate the primary cooling medium.

Abstract: A method of generating an IC layout diagram includes abutting a first row of cells with a second row of cells along a border, the first row including first and second active sheets, the second row including third and fourth active sheets, the active sheets extending along a row direction and having width values. The active sheets are overlapped with first through fourth back-side via regions, the first active sheet width value is greater than the third active sheet width value, a first back-side via region width values is greater than a third back-side via region width value, and a value of a distance from the first active sheet to the border is less than a minimum spacing rule for metal-like defined regions. At least one of abutting the first row with the second row or overlapping the active sheets with the back-side via regions is performed by a processor.

Abstract: Systems and methods for conducting critical dimension metrology are disclosed. According to certain embodiments, a charged particle beam apparatus generates a beam for imaging a first area and a second area. Measurements are acquired corresponding to a first feature in the first area, and measurements are acquired corresponding to a second feature in the second area. The first area and the second area are at separate locations on a sample. A combined measurement is calculated based on the measurements of the first feature and the measurements of the second feature.

Abstract: An improved charged particle beam inspection apparatus, and more particularly, a particle beam apparatus for inspecting a wafer including an improved scanning mechanism for detecting fast-charging defects is disclosed. An improved charged particle beam inspection apparatus may include a charged particle beam source that delivers charged particles to an area of the wafer and scans the area. The improved charged particle beam apparatus may further include a controller including a circuitry to produce multiple images of the area over a time sequence, which are compared to detect fast-charging defects.

Abstract: An improved method and apparatus for enhancing an inspection image in a charged-particle beam inspection system. An improved method for enhancing an inspection image comprises acquiring a first image and a second image of multiple stacked layers of a sample that are taken with a first focal point and a second focal point, respectively, associating a first segment of the first image with a first layer among the multiple stacked layers and associating a second segment of the second image with a second layer among the multiple stacked layers, updating the first segment based on a first reference image corresponding to the first layer and updating the second segment based on a second reference image corresponding to the second layer, and combining the updated first segment and the updated second segment to generate a combined image including the first layer and the second layer.