Electroless plating of metallic features on nonmetallic or semiconductor layer without extraneous plating
In the manufacture of a microelectronic component having metallic features on a polyimide layer, the metallic features being spaced from one another by gaps, at least some of which gaps have widths in a range from about one micron to about 500 microns, corrosion protection is provided by plating those features by electroless deposition of a nickel-phosphorus alloy forming a layer having a thickness in a range from about 200 .ANG. to about 3000 .ANG., at a rate of about 100 .ANG. per minute, in an aqueous plating bath comprising nickel sulfate hexahydrate in an amount of about 5.5 grams per liter, sodium hypophosphite in an amount of about six grams per liter, boric acid in an amount of about 30 grams per liter, sodium citrate in an amount of about 45 grams per liter, lead acetate in an amount of about one part per million by weight of lead, and a surfactant in an amount of about 0.1 grams per liter. The bath has a temperature of about 72.degree. C. and a pH of about 8.1. The gaps having widths of at least one micron remain essentially free of extraneous plating.
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Claims
1. In the manufacture of a microelectronic component having metallic features on a nonmetallic or semiconductor layer, the metallic features being spaced from one another by gaps, at least some of which gaps have widths in a range from about one micron to about 500 microns, a method of providing a coating on the metallic features, the method comprising the step of electroless plating of the metallic features with a nickel-phosphorus alloy and forming a layer having a thickness in a range from about 300.ANG. to about 3000.ANG., at a rate in a range from about 100.ANG. per minute to about 300.ANG. per minute, in an aqueous plating bath consisting essentially of water, a nickel salt in a range from about four grams per liter to about seven grams per liter, a hypophosphite in a range from about three grams per liter to about six grams per liter, a buffering agent in a range from about 30 grams per liter to about 40 grams per liter, a complexing agent in a range from about 30 grams per liter to about 60 grams per liter, a decelerating agent in a range from about 0.5 part per million to about 1.5 parts per million by weight, and a surfactant in a range from about 0.05 grams per liter to about 0.2 grams per liter, the bath having a temperature in a range from about 65.degree. C. to about 80.degree. C. and a pH in a range from about 7.5 to about 8.5, whereby the gaps having widths of at least one micron remain free of extraneous plating.
2. The method of claim 1 wherein the layer is a polyimide layer, the nickel salt is nickel sulfate hexahydrate, the hypophosphite is sodium hypophosphite, the buffering agent is boric acid or sodium borate, the complexing agent is citric acid or sodium citrate, and the decelerating agent is lead acetate or lead sulphite.
3. The method of claim 2 wherein the buffering agent is boric acid, the complexing agent is sodium citrate, and the decelerating agent is lead acetate.
4. In the manufacture of a microelectronic component having metallic features on a polyimide layer, the metallic features being spaced from one another by gaps, at least some of which gaps have widths in a range from about one micron to about 500 microns, a method of providing a coating on the metallic features, the method comprising the step of electroless plating of the metallic features with a nickel-phosphorous alloy and forming a layer having a thickness in a range from about 200.ANG. to about 3000.ANG., at a rate of about 100.ANG. per minute, in an aqueous plating bath consisting essentially of water, nickel sulfate hexahydrate in an amount of about 5.5 grams per liter, boric acid in an amount of about 30 grams per liter, sodium hypophosphite in an amount of about six grams per liter, sodium citrate in an amount of about 45 grams per liter, lead acetate in an amount of about one part per million by weight of lead, and a surfactant in an amount of about 0.1 grams per liter, the bath having a temperature of about 72.degree. C. and a pH of about 8.1, whereby the gaps having widths of at least one micron remain free of extraneous plating.
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Type: Grant
Filed: Mar 11, 1997
Date of Patent: Dec 8, 1998
Assignee: International Business Machines Corporation (Armonk, NY)
Inventors: Krystyna W. Semkow (Poughquag, NY), Eugene J. O'Sullivan (Nyack, NY)
Primary Examiner: Benjamin Utech
Law Firm: Dressler, Rockey, Milnamow & Katz
Application Number: 8/815,337
International Classification: B05D 512;
