Cover ring for use in semiconductor processing chamber

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a bottom isometric view of a cover ring for use in a semiconductor processing chamber in accordance with some embodiments.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a front elevation view thereof.

FIG. 5 is a back elevation view thereof.

FIG. 6 is a right side elevation view thereof; and,

FIG. 7 is a left side elevation view thereof.

The broken lines in the drawings illustrate portions of the cover ring for use in a semiconductor processing chamber that form no part of the claimed design.

Claims

The ornamental design for a cover ring for use in a semiconductor processing chamber, as shown and described.

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Patent History
Patent number: D1038049
Type: Grant
Filed: Nov 18, 2020
Date of Patent: Aug 6, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Abhishek Chowdhury (Bangalore), Harisha Sathyanarayana (Bangalore), Edwin C. Suarez (Pleasanton, CA), Siqing Lu (Santa Clara, CA), Nataraj Bhaskar Rao (Bangalore)
Primary Examiner: Shawn T Gingrich
Assistant Examiner: Caleb M Baker
Application Number: 29/758,812