Electrode cover for a plasma processing apparatus

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Description

This application contains subject matter related to the following co-pending U.S. design patent applications:

Application Ser. No. 29/610,996, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”;

Application Ser. No. 29/610,998, filed herewith and entitled “Ring for a Plasma Processing Apparatus”;

Application Ser. No. 29/610,999, filed herewith and entitled “Cover Ring for a Plasma Processing Apparatus”; and

Application Ser. No. 29/611,001, filed herewith and entitled “Discharge Chamber for a Plasma Processing Apparatus”.

FIG. 1 is a front, top and right side perspective view of an electrode cover for a plasma processing apparatus, showing our new design;

FIG. 2 is a front, bottom and right side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a top plan view thereof;

FIG. 8 is a bottom plan view thereof;

FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 3; and,

FIG. 10 is an enlarged view of the portion shown in BOX 10 in FIG. 9.

The box labeled FIG. 10 in FIG. 9 is shown in broken lines and forms no part of the claimed design.

Claims

The ornamental design for an electrode cover for a plasma processing apparatus, as shown and described.

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Other references
  • Ichino et al., Design U.S. Appl. No. 29/610,996, filed Jul. 18, 2017.
  • Ichino et al., Design U.S. Appl. No. 29/610,998, filed Jul. 18, 2017.
  • Ichino et al., Design U.S. Appl. No. 29/610,999, filed Jul. 18, 2017.
  • Nunomura et al., Design U.S. Appl. No. 29/611,001, filed Jul. 18, 2017.
Patent History
Patent number: D827592
Type: Grant
Filed: Jul 18, 2017
Date of Patent: Sep 4, 2018
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Takamasa Ichino (Tokyo), Kohei Sato (Tokyo), Kazunori Nakamoto (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/610,995