Electrode cover for a plasma processing apparatus

Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

This application contains subject matter related to the following co-pending U.S. design patent applications:

Application Ser. No. 29/610,995, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”;

Application Ser. No. 29/610,998, filed herewith and entitled “Ring for a Plasma Processing Apparatus”;

Application Ser. No. 29/610,999, filed herewith and entitled “Cover Ring for a Plasma Processing Apparatus”; and

Application Ser. No. 29/611,001, filed herewith and entitled “Discharge Chamber for a Plasma Processing Apparatus”.

FIG. 1 is a front, top and right side perspective view of an electrode cover for a plasma processing apparatus, showing our new design;

FIG. 2 is a front, bottom and right side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a top plan view thereof;

FIG. 8 is a bottom plan view thereof;

FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 3; and,

FIG. 10 is an enlarged view of the portion shown in BOX 10 in FIG. 9.

The box labeled FIG. 10 in FIG. 9 is shown in broken lines and forms no part of the claimed design.

Claims

The ornamental design for an electrode cover for a plasma processing apparatus, as shown and described.

Referenced Cited
U.S. Patent Documents
D404372 January 19, 1999 Ishii
D494551 August 17, 2004 Doba
D557226 December 11, 2007 Uchino et al.
D557425 December 11, 2007 Nakamura et al.
D559993 January 15, 2008 Nagakubo
D559994 January 15, 2008 Nagakubo et al.
D699199 February 11, 2014 Kuwabara
D699200 February 11, 2014 Nagakubo
D709536 July 22, 2014 Yoshimura
D709537 July 22, 2014 Kuwabara
D709538 July 22, 2014 Mizukami
D709539 July 22, 2014 Kuwabara
D717746 November 18, 2014 Lau
D729730 May 19, 2015 Gillespie-Brown
D770992 November 8, 2016 Tauchi et al.
D783922 April 11, 2017 Kirkland
D789888 June 20, 2017 Jang
D797691 September 19, 2017 Joubert
D803917 November 28, 2017 Harada
D804556 December 5, 2017 Harada
D810705 February 20, 2018 Krishnan
D813181 March 20, 2018 Okajima
20040077167 April 22, 2004 Willis
20090050272 February 26, 2009 Rosenberg
20120263569 October 18, 2012 Priddy
20150024330 January 22, 2015 Tian
20160002788 January 7, 2016 Nal
Foreign Patent Documents
D1210213 June 2004 JP
D1361441 June 2009 JP
D1551512 June 2014 JP
Other references
  • Ichino et al., Design U.S. Appl. No. 29/610,995, filed Jul. 18, 2017.
  • Ichino et al., Design U.S. Appl. No. 29/610,998, filed Jul. 18, 2017.
  • Ichino et al., Design U.S. Appl. No. 29/610,999, filed Jul. 18, 2017.
  • Nunomura et al., Design U.S. Appl. No. 29/611,001, filed Jul. 18, 2017.
Patent History
Patent number: D840364
Type: Grant
Filed: Jul 18, 2017
Date of Patent: Feb 12, 2019
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Takamasa Ichino (Tokyo), Kohei Sato (Tokyo), Kazunori Nakamoto (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/610,996