Process chamber manifold

- Applied Materials, Inc.
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Description

FIG. 1 is a top, front, left side isometric view of a process chamber manifold, showing our new design.

FIG. 2 is a bottom, rear, right side isometric view thereof.

FIG. 3 is a left side elevation view thereof.

FIG. 4 is a right side elevation view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a rear elevation view thereof.

FIG. 7 is a top plan view thereof.

FIG. 8 is a bottom plan view thereof.

FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 7; and,

FIG. 10 is a cross-sectional view taken along line 10-10 in FIG. 7.

Claims

The ornamental design for a process chamber manifold, as shown and described.

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Patent History
Patent number: D1089130
Type: Grant
Filed: Jan 19, 2024
Date of Patent: Aug 19, 2025
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Geraldine Vasquez (Santa Clara, CA), Shreyas Patil Shanthaveeraswamy (Bangalore), Mehran Behdjat (Santa Clara, CA), Dien-Yeh Wu (Santa Clara, CA), Jallepally Ravi (San Ramon, CA), Yu Lei (Belmont, CA), Sandesh Yadamane (Bangalore), Yi Xu (San Jose, CA), Manjunatha Koppa (Bangalore)
Primary Examiner: Richard Edgar
Assistant Examiner: Alexander Joseph David
Application Number: 29/924,552