Combined susceptor, support, and lift system

Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a front perspective view of a combined susceptor, support, and lift system;

FIG. 2 is a rear perspective view thereof;

FIG. 3 is a side view thereof;

FIG. 4 is an enlarged cross-sectional view taken along line 4-4 as indicated in FIG. 3;

FIG. 5 is an enlarged view of FIG. 4 shown with environmental subject matter removed for clarity;

FIG. 6 is a top perspective view of one of the lift pin components shown separately in order to show details not visible otherwise;

FIG. 7 is a bottom perspective view of the lift pin thereof;

FIG. 8 is a front view of the lift pin thereof;

FIG. 9 is a rear view of the lift pin thereof;

FIG. 10 is a left view of the lift pin thereof;

FIG. 11 is a right view of the lift pin thereof;

FIG. 12 is a top view of the lift pin thereof; and,

FIG. 13 is a bottom view of the lift pin thereof.

The dash-dash broken lines depicting the combined susceptor, support, and lift system are for the purpose of illustrating environmental subject matter and portions of the article that form no part of the claimed design. The dash-dot broken lines represent the cross-sectional indicator and form no part of the claimed design. The dash-dot-dot broken lines represent the bounds of the enlarged area and form no part of the claimed design.

Claims

The ornamental design for a combined susceptor, support, and lift system, as shown and described.

Referenced Cited
U.S. Patent Documents
2093261 September 1937 Willson
4790258 December 13, 1988 Drage et al.
5074017 December 24, 1991 Toya
5098198 March 24, 1992 Nulman
5421893 June 6, 1995 Perlov
5455069 October 3, 1995 Lee
5558717 September 24, 1996 Zhao et al.
5795178 August 18, 1998 Schilder et al.
5879128 March 9, 1999 Tietz et al.
6515261 February 4, 2003 Smargiassi et al.
D475271 June 3, 2003 Hannon et al.
6668501 December 30, 2003 Adebar et al.
D564345 March 18, 2008 Prada
D568914 May 13, 2008 Or et al.
D630657 January 11, 2011 Nakamura
D635597 April 5, 2011 Tiner
D640715 June 28, 2011 Tiner
8055336 November 8, 2011 Schulman et al.
D650818 December 20, 2011 Tiner
D695692 December 17, 2013 Takenaga
D712242 September 2, 2014 Deneve
D716644 November 4, 2014 Daniels
D728098 April 28, 2015 Schad et al.
D745463 December 15, 2015 Kobuchi
D777851 January 31, 2017 Simonetti
D784276 April 18, 2017 Tiner et al.
D830981 October 16, 2018 Jeong
10242890 March 26, 2019 Volfovski
10376916 August 13, 2019 Ranish
D864134 October 22, 2019 Watarai
10590535 March 17, 2020 Huggare
10770336 September 8, 2020 Hill et al.
10847906 November 24, 2020 Yanase
D916663 April 20, 2021 Yanase
D917399 April 27, 2021 Yanase
D918146 May 4, 2021 Yanase
11018047 May 25, 2021 Rokkam et al.
D930456 September 14, 2021 VanVolkinburg
D930503 September 14, 2021 Hankinson
D941246 January 18, 2022 Kim
D960099 August 9, 2022 Yanase
11495919 November 8, 2022 Oosaka
D972514 December 13, 2022 Horino
D987577 May 30, 2023 Yokoyama
D1012029 January 23, 2024 Tsuchiya
D1017551 March 12, 2024 Yanase
D1020646 April 2, 2024 Yanase
D1029766 June 4, 2024 Yanase
D1032530 June 25, 2024 Yanase
20050150462 July 14, 2005 Seo et al.
20060156981 July 20, 2006 Fondurulia et al.
20060156988 July 20, 2006 Wu et al.
20100086784 April 8, 2010 Patalay et al.
20130276695 October 24, 2013 Pitney et al.
20140251208 September 11, 2014 Samir et al.
20140290573 October 2, 2014 Okabe et al.
20170226785 August 10, 2017 Merke
20180135166 May 17, 2018 Sakurai
20190051555 February 14, 2019 Hill et al.
20190229008 July 25, 2019 Rokkam et al.
20190311941 October 10, 2019 Moos et al.
20190355612 November 21, 2019 Sakurai
20200119470 April 16, 2020 Yanase
20200365444 November 19, 2020 Hill et al.
20210005993 January 7, 2021 Yanase
20210183686 June 17, 2021 Kim et al.
20210210373 July 8, 2021 Singu et al.
20210343577 November 4, 2021 Yamamoto et al.
Foreign Patent Documents
0 877 414 November 1998 EP
2016-154196 August 2016 JP
2016225445 December 2016 JP
2017-195301 October 2017 JP
2018507561 March 2018 JP
10-2017-0137917 December 2017 KR
10-2019-0090694 August 2019 KR
I669408 August 2019 TW
201937643 September 2019 TW
Patent History
Patent number: D1143085
Type: Grant
Filed: May 2, 2024
Date of Patent: Aug 18, 2026
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Peipei Gao (Chandler, AZ), Wentao Wang (Chandler, AZ), Xing Lin (Chandler, AZ), Han Ye (Phoenix, AZ), Ion Hong Chao (Gilbert, AZ), Siyao Luan (Phoenix, AZ), Alexandros Demos (Scottsdale, AZ), Fan Gao (Chandler, AZ)
Primary Examiner: Rhea Shields
Assistant Examiner: Leah E Hoeferkamp
Application Number: 29/940,463