Electroplating flow shaping plate having offset spiral hole pattern
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Claims
We claim the ornamental design for an electroplating flow shaping plate having offset spiral hole pattern, as shown and described.
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Type: Grant
Filed: Oct 21, 2010
Date of Patent: Nov 8, 2011
Assignee: Novellus Systems, Inc. (San Jose, CA)
Inventors: Steven T. Mayer (Lake Oswego, OR), David Porter (Sherwood, OR), Robert Rash (Portland, OR)
Primary Examiner: Selina Sikder
Attorney: Weaver Austin Villeneuve & Sampson LLP
Application Number: 29/377,521