Electroplating flow shaping plate having offset spiral hole pattern

- Novellus Systems, Inc.
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Description

FIG. 1 is a front plan view of an electroplating flow shaping plate having offset spiral hole pattern showing an embodiment of our new design;

FIG. 2 is a bottom view thereof;

FIG. 3 is a right side elevational view thereof, the left, top and bottom side elevational views being identical images thereof;

FIG. 4 is a front perspective view thereof; and

FIG. 5 is a rear perspective view thereof.

FIG. 6 is a front plan view of an electroplating flow shaping plate having offset spiral hole pattern showing a second embodiment of our new design;

FIG. 7 is a bottom view thereof;

FIG. 8 is a right side elevational view thereof, the left, top and bottom side elevational views being identical images thereof;

FIG. 9 is a front perspective view thereof; and

FIG. 10 is a rear perspective view thereof.

FIG. 11 is a front plan view of an electroplating flow shaping plate having offset spiral hole pattern showing a third embodiment of our new design;

FIG. 12 is a bottom view thereof; and

FIG. 13 is a right side elevational view thereof, the left, top and bottom side elevational views being identical images thereof;

FIG. 14 is a front perspective view thereof; and

FIG. 15 is a rear perspective view thereof.

FIG. 16 is a front plan view of an electroplating flow shaping plate having offset spiral hole pattern showing a fourth embodiment of our new design;

FIG. 17 is a bottom view thereof; and

FIG. 18 is a right side elevational view thereof, the left, top and bottom side elevational views being identical images thereof;

FIG. 19 is a front perspective view thereof; and,

FIG. 20 is a rear perspective view thereof.

Claims

We claim the ornamental design for an electroplating flow shaping plate having offset spiral hole pattern, as shown and described.

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Other references
  • U.S. Appl. No. 61/405,608, “Flow diverters and flow shaping plates for electroplating cells”, Mayer et al., filed Oct. 21, 2010.
Patent History
Patent number: D648289
Type: Grant
Filed: Oct 21, 2010
Date of Patent: Nov 8, 2011
Assignee: Novellus Systems, Inc. (San Jose, CA)
Inventors: Steven T. Mayer (Lake Oswego, OR), David Porter (Sherwood, OR), Robert Rash (Portland, OR)
Primary Examiner: Selina Sikder
Attorney: Weaver Austin Villeneuve & Sampson LLP
Application Number: 29/377,521