Self-centering wafer carrier for chemical vapor deposition

- Veeco Instruments Inc.
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Description

FIG. 1 is a top perspective view of a first embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 2 is a bottom perspective view of the first embodiment thereof;

FIG. 3 is a top view of the first embodiment thereof;

FIG. 4 is a bottom view of the first embodiment thereof;

FIG. 5 is a right view of the first embodiment thereof,

FIG. 6 is a left view of the first embodiment thereof;

FIG. 7 is a rear view of the first embodiment thereof;

FIG. 8 is a front view of the first embodiment thereof; and

FIG. 9 is a cross section view taken along 9-9 in FIG. 3 of the first embodiment thereof.

FIG. 10 is a top perspective view of a second embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 11 is a bottom perspective view of the second embodiment thereof;

FIG. 12 is a top view of the second embodiment thereof;

FIG. 13 is a bottom view of the second embodiment thereof;

FIG. 14 is a right view of the second embodiment thereof;

FIG. 15 is a left view of the second embodiment thereof;

FIG. 16 is a rear view of the second embodiment thereof;

FIG. 17 is a front view of the second embodiment thereof; and

FIG. 18 is a cross section view taken along 18-18 in FIG. 12 of the second embodiment thereof.

FIG. 19 is a top perspective view of a third embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 20 is a bottom perspective view of the third embodiment thereof;

FIG. 21 is a top view of the third embodiment thereof;

FIG. 22 is a bottom view of the third embodiment thereof;

FIG. 23 is a right view of the third embodiment thereof;

FIG. 24 is a left view of the third embodiment thereof;

FIG. 25 is a rear view of the third embodiment thereof; and

FIG. 26 is a front view of the third embodiment thereof.

FIG. 27 is a top perspective view of a fourth embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 28 is a bottom perspective view of the fourth embodiment thereof;

FIG. 29 is a top view of the fourth embodiment thereof;

FIG. 30 is a bottom view of the fourth embodiment thereof;

FIG. 31 is a right view of the fourth embodiment thereof;

FIG. 32 is a left view of the fourth embodiment thereof;

FIG. 33 is a rear view of the fourth embodiment thereof;

FIG. 34 is a front view of the fourth embodiment thereof; and,

FIG. 35 is a cross section view taken along 35-35 in FIG. 29 of the fourth embodiment thereof.

Claims

The ornamental design for a self-centering wafer carrier for chemical vapor deposition, as shown and described.

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Patent History
Patent number: D810705
Type: Grant
Filed: Apr 1, 2016
Date of Patent: Feb 20, 2018
Assignee: Veeco Instruments Inc. (Plainview, NY)
Inventors: Sandeep Krishnan (Jersey City, NJ), Alexander I. Gurary (Bridgewater, NJ), Chenghung Paul Chang (Easton, PA), Earl Marcelo (Franklin Park, NJ)
Primary Examiner: Jeffrey D Asch
Assistant Examiner: Tracey J Bell
Application Number: 29/559,977