Self-centering wafer carrier for chemical vapor deposition
Latest Veeco Instruments Inc. Patents:
Claims
The ornamental design for a self-centering wafer carrier for chemical vapor deposition, as shown and described.
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Type: Grant
Filed: Apr 1, 2016
Date of Patent: Feb 20, 2018
Assignee: Veeco Instruments Inc. (Plainview, NY)
Inventors: Sandeep Krishnan (Jersey City, NJ), Alexander I. Gurary (Bridgewater, NJ), Chenghung Paul Chang (Easton, PA), Earl Marcelo (Franklin Park, NJ)
Primary Examiner: Jeffrey D Asch
Assistant Examiner: Tracey J Bell
Application Number: 29/559,977