Electrode member for a plasma processing apparatus
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Claims
The ornamental design for a electrode member for a plasma processing apparatus, as shown and described.
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Type: Grant
Filed: Mar 29, 2012
Date of Patent: Feb 11, 2014
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Keiichi Nagakubo (Nirasaki)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/417,071