Electrode member for a plasma processing apparatus

- Tokyo Electron Limited
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Description

FIG. 1 is a front view of an electrode member for a plasma processing apparatus showing my new design, the rear view being identical.

FIG. 2 is a right side view of the electrode member for a plasma processing apparatus of FIG. 1, the left side view being identical.

FIG. 3 is a top plan view of the electrode member for a plasma processing apparatus of FIG. 1.

FIG. 4 is a bottom plan view of the electrode member for a plasma processing apparatus of FIG. 1.

FIG. 5 is a cross sectional view of the electrode member for a plasma processing apparatus of FIG. 1 taken along line 1-1 of FIG. 3; and,

FIG. 6 is a perspective view of the electrode member for a plasma processing apparatus of FIG. 1.

Claims

The ornamental design for a electrode member for a plasma processing apparatus, as shown and described.

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Other references
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Patent History
Patent number: D699200
Type: Grant
Filed: Mar 29, 2012
Date of Patent: Feb 11, 2014
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Keiichi Nagakubo (Nirasaki)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/417,071