Cover of seal cap for reaction chamber of semiconductor
Description
Claims
The ornamental design for a cover of seal cap for reaction chamber of semiconductor, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
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Patent History
Patent number: D855027
Type: Grant
Filed: May 30, 2018
Date of Patent: Jul 30, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Yusaku Okajima (Tokyo), Shuhei Saido (Tokyo), Hidenari Yoshida (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/649,486
Type: Grant
Filed: May 30, 2018
Date of Patent: Jul 30, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Yusaku Okajima (Tokyo), Shuhei Saido (Tokyo), Hidenari Yoshida (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/649,486
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)