Cover of seal cap for reaction chamber of semiconductor
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Description
Claims
The ornamental design for a cover of seal cap for reaction chamber of semiconductor, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
| 5789810 | August 4, 1998 | Gross |
| D642547 | August 2, 2011 | Untersee |
| D720309 | December 30, 2014 | Kaneko |
| D742339 | November 3, 2015 | Takagi |
| D748594 | February 2, 2016 | Takagi |
| D796458 | September 5, 2017 | Jang |
| D797067 | September 12, 2017 | Zhang |
| D813181 | March 20, 2018 | Okajima et al. |
| D840981 | February 19, 2019 | Forster |
| 20170221790 | August 3, 2017 | Tomie |
| 20170229360 | August 10, 2017 | Kothandapani |
| 1598442 | February 2018 | JP |
Patent History
Patent number: D855027
Type: Grant
Filed: May 30, 2018
Date of Patent: Jul 30, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Yusaku Okajima (Tokyo), Shuhei Saido (Tokyo), Hidenari Yoshida (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/649,486
Type: Grant
Filed: May 30, 2018
Date of Patent: Jul 30, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Yusaku Okajima (Tokyo), Shuhei Saido (Tokyo), Hidenari Yoshida (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/649,486
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)