Sealing material ring for a semiconductor manufacturing apparatus
Latest KOKUSAI ELECTRIC CORPORATION Patents:
- SUBSTRATE PROCESSING APPARATUS, PLURALITY OF ELECTRODES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- METHOD OF FORMING FILM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, FILM FORMING APPARATUS, AND RECORDING MEDIUM
- Substrate processing apparatus, reaction container, method of manufacturing semiconductor device, and recording medium
- Processing method, method of manufacturing semiconductor, and substrate processing apparatus
- METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
Description
Claims
The ornamental design for a sealing material ring for a semiconductor manufacturing apparatus, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
135712 | February 1873 | Jenks |
4225162 | September 30, 1980 | Dola |
4447749 | May 8, 1984 | Reeb, Jr. |
5302980 | April 12, 1994 | Barrett |
6879023 | April 12, 2005 | Gutierrez |
D557226 | December 11, 2007 | Uchino |
8242586 | August 14, 2012 | Chang |
D770992 | November 8, 2016 | Tauchi |
D797691 | September 19, 2017 | Joubert |
D803917 | November 28, 2017 | Harada |
D804556 | December 5, 2017 | Harada |
D810705 | February 20, 2018 | Krishnan |
D827592 | September 4, 2018 | Ichino |
D840364 | February 12, 2019 | Ichino |
270879 | February 1996 | TW |
- DANCO#18 O-Rings (10-Pack), https://www.homedepot.com/p/DANCO-18-O-Rings-10-Pack-96735/100299374, copyright 2000, Home Depot Product Authority, LLC. (Year: 2000).
- O-Rings-Freudenberg Innovating Together, Sealing Technologies, https://www.fst.com/products/static-seals/o-rings, by Freudenberg Sealing Technologies, May 24, 2018. (Year: 2018).
- Assortment Tray A/C Green Universal O-Rings, 18 Styles-110 PCS, https://henrysautowarehouse.com/product/assortment-tray-ac-green-universal-o-rings-18-styles-110-pcs/,copyright 2019 Henry's Automotive Warehouse. (Year: 2019).
- O-Ring, Item #23CJ16, Mfr Model # PP60076G, https://www.grainger.com/product/DAYTON-O-Ring-for-4ZA35A-23CJ16, Grainger, copyright 1994. (Year: 1994).
- Office Action of TW Appln. No. 106301911 dated Sep. 6, 2017, with English translation.
Patent History
Patent number: D862404
Type: Grant
Filed: Apr 19, 2017
Date of Patent: Oct 8, 2019
Assignees: KOKUSAI ELECTRIC CORPORATION (Tokyo), TOHO KASEI CO., LTD. (Nara)
Inventors: Satoru Murata (Toyama), Shinya Morita (Toyama), Masashi Suzuki (Yamatokoriyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/601,165
Type: Grant
Filed: Apr 19, 2017
Date of Patent: Oct 8, 2019
Assignees: KOKUSAI ELECTRIC CORPORATION (Tokyo), TOHO KASEI CO., LTD. (Nara)
Inventors: Satoru Murata (Toyama), Shinya Morita (Toyama), Masashi Suzuki (Yamatokoriyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/601,165
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)