Sealing material ring for a semiconductor manufacturing apparatus

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Description

FIG. 1 is a front, bottom, and right side perspective view of a sealing material ring for a semiconductor manufacturing apparatus, showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a top plan view thereof;

FIG. 5 is a bottom plan view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a right side elevational view thereof;

FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2 thereof; and,

FIG. 9 is an enlarged cross-sectional view taken along line 9-9 in FIG. 8.

Claims

The ornamental design for a sealing material ring for a semiconductor manufacturing apparatus, as shown and described.

Referenced Cited
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Foreign Patent Documents
270879 February 1996 TW
Other references
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Patent History
Patent number: D862404
Type: Grant
Filed: Apr 19, 2017
Date of Patent: Oct 8, 2019
Assignees: KOKUSAI ELECTRIC CORPORATION (Tokyo), TOHO KASEI CO., LTD. (Nara)
Inventors: Satoru Murata (Toyama), Shinya Morita (Toyama), Masashi Suzuki (Yamatokoriyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/601,165