Gas ring for a plasma processing apparatus
Latest Hitachi High-Technologies Corporation Patents:
This application contains subject matter related to the following co-pending U.S. design patent applications:
Application Ser. No. 29/635,287, filed herewith and entitled “Electrode Plate for a Plasma Processing Apparatus”;
Application Ser. No. 29/635,292, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”; and
Application Ser. No. 29/635,296, filed herewith and entitled “Electrode Plate Peripheral Ring for a Plasma Processing Apparatus”.
The broken lines in
Claims
The ornamental design for a gas ring for a plasma processing apparatus, as shown and described.
| 5174775 | December 29, 1992 | Birch |
| 5486975 | January 23, 1996 | Shamouilian |
| D447223 | August 28, 2001 | Mattsson |
| D465061 | October 29, 2002 | Guthrie |
| D494552 | August 17, 2004 | Tezuka |
| D515675 | February 21, 2006 | Tremoulet, Jr. |
| D574934 | August 12, 2008 | Darce |
| D631142 | January 18, 2011 | Angell |
| 7885530 | February 8, 2011 | Bushnell, III |
| D638550 | May 24, 2011 | Bedingham |
| D655401 | March 6, 2012 | Muramatsu |
| D659175 | May 8, 2012 | Fujikata |
| D667561 | September 18, 2012 | Bedingham |
| D672050 | December 4, 2012 | Lee |
| D699200 | February 11, 2014 | Nagakubo |
| D730734 | June 2, 2015 | Rapparini |
| D743513 | November 17, 2015 | Yamagishi |
| D793572 | August 1, 2017 | Kozuka |
| D793976 | August 8, 2017 | Fukushima |
| D810705 | February 20, 2018 | Krishnan |
| D811226 | February 27, 2018 | Logel |
| 20040004327 | January 8, 2004 | Veiga |
| 20070050901 | March 8, 2007 | Hung |
| 20140090554 | April 3, 2014 | Chalk |
| D1117165 | August 2001 | JP |
| D1142402 | June 2002 | JP |
| D1438663 | April 2012 | JP |
| D1545406 | March 2016 | JP |
- S-SiC Mechanical Components. Online, published date unknown. Retrieved on Apr. 27, 2019 from URL: http://caecsic.com/S-SiC.html.
- Metal Gaskets Manufacturer. Online, published date unknown. Retrieved on Apr. 27, 2019 from URL: https://www.jaydeepsteels.com/metal-gaskets/.
- Isozaki et al., Design U.S. Appl. No. 29/635,287, filed Jan. 30, 2018.
- Isozaki et al., Design U.S. Appl. No. 29/635,292, filed Jan. 30, 2018.
- Isozaki et al., Design U.S. Appl. No. 29/635,296, filed Jan. 30, 2018.
Type: Grant
Filed: Jan 30, 2018
Date of Patent: Dec 31, 2019
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Kouji Okuda (Tokyo), Motohiro Tanaka (Tokyo)
Primary Examiner: Susan Bennett Hattan
Assistant Examiner: Omeed Agilee
Application Number: 29/635,289