Gas ring for a plasma processing apparatus

Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

This application contains subject matter related to the following co-pending U.S. design patent applications:

Application Ser. No. 29/635,287, filed herewith and entitled “Electrode Plate for a Plasma Processing Apparatus”;

Application Ser. No. 29/635,292, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”; and

Application Ser. No. 29/635,296, filed herewith and entitled “Electrode Plate Peripheral Ring for a Plasma Processing Apparatus”.

FIG. 1 is a front and bottom perspective view of a gas ring for a plasma processing apparatus according to the design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a rear elevational view thereof;

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 2; and,

FIG. 9 is an enlarged view of the portion shown in BOX 9 in FIG. 8.

The broken lines in FIG. 8 show the boundary of the enlarged portion illustrated in FIG. 9 and form no part of the claimed design.

Claims

The ornamental design for a gas ring for a plasma processing apparatus, as shown and described.

Referenced Cited
U.S. Patent Documents
5174775 December 29, 1992 Birch
5486975 January 23, 1996 Shamouilian
D447223 August 28, 2001 Mattsson
D465061 October 29, 2002 Guthrie
D494552 August 17, 2004 Tezuka
D515675 February 21, 2006 Tremoulet, Jr.
D574934 August 12, 2008 Darce
D631142 January 18, 2011 Angell
7885530 February 8, 2011 Bushnell, III
D638550 May 24, 2011 Bedingham
D655401 March 6, 2012 Muramatsu
D659175 May 8, 2012 Fujikata
D667561 September 18, 2012 Bedingham
D672050 December 4, 2012 Lee
D699200 February 11, 2014 Nagakubo
D730734 June 2, 2015 Rapparini
D743513 November 17, 2015 Yamagishi
D793572 August 1, 2017 Kozuka
D793976 August 8, 2017 Fukushima
D810705 February 20, 2018 Krishnan
D811226 February 27, 2018 Logel
20040004327 January 8, 2004 Veiga
20070050901 March 8, 2007 Hung
20140090554 April 3, 2014 Chalk
Foreign Patent Documents
D1117165 August 2001 JP
D1142402 June 2002 JP
D1438663 April 2012 JP
D1545406 March 2016 JP
Other references
  • S-SiC Mechanical Components. Online, published date unknown. Retrieved on Apr. 27, 2019 from URL: http://caecsic.com/S-SiC.html.
  • Metal Gaskets Manufacturer. Online, published date unknown. Retrieved on Apr. 27, 2019 from URL: https://www.jaydeepsteels.com/metal-gaskets/.
  • Isozaki et al., Design U.S. Appl. No. 29/635,287, filed Jan. 30, 2018.
  • Isozaki et al., Design U.S. Appl. No. 29/635,292, filed Jan. 30, 2018.
  • Isozaki et al., Design U.S. Appl. No. 29/635,296, filed Jan. 30, 2018.
Patent History
Patent number: D871608
Type: Grant
Filed: Jan 30, 2018
Date of Patent: Dec 31, 2019
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Kouji Okuda (Tokyo), Motohiro Tanaka (Tokyo)
Primary Examiner: Susan Bennett Hattan
Assistant Examiner: Omeed Agilee
Application Number: 29/635,289