Substrate retaining ring
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Description
Claims
The ornamental design for a substrate retaining ring, as shown and described.
Referenced Cited
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Patent History
Patent number: D793976
Type: Grant
Filed: Aug 10, 2016
Date of Patent: Aug 8, 2017
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Makoto Fukushima (Tokyo), Hozumi Yasuda (Tokyo), Keisuke Namiki (Tokyo), Osamu Nabeya (Tokyo), Shingo Togashi (Tokyo), Satoru Yamaki (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/573,831
Type: Grant
Filed: Aug 10, 2016
Date of Patent: Aug 8, 2017
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Makoto Fukushima (Tokyo), Hozumi Yasuda (Tokyo), Keisuke Namiki (Tokyo), Osamu Nabeya (Tokyo), Shingo Togashi (Tokyo), Satoru Yamaki (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/573,831
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)