Substrate retaining ring

- EBARA CORPORATION
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Description

FIG. 1 is a top perspective view of a substrate retaining ring, showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a side view thereof, with the ring being radially symmetrical about a vertical axis;

FIG. 6 is a cross sectional view taken along line 6-6 in FIG. 3;

FIG. 7 is a cross sectional view taken along line 7-7 in FIG. 3; and,

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 3.

Claims

The ornamental design for a substrate retaining ring, as shown and described.

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Patent History
Patent number: D793976
Type: Grant
Filed: Aug 10, 2016
Date of Patent: Aug 8, 2017
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Makoto Fukushima (Tokyo), Hozumi Yasuda (Tokyo), Keisuke Namiki (Tokyo), Osamu Nabeya (Tokyo), Shingo Togashi (Tokyo), Satoru Yamaki (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/573,831