Abstract: A grounding cap module includes a main body, a frame portion, and a cap portion. The main body includes a first opening penetrating the main body and a grounding portion disposed on a periphery of the main body and configured to be electrically grounded. The frame portion is disposed on the main body and includes a second opening aligned with the first opening. The cap portion is disposed on the frame portion and covers the second opening, wherein the first opening, the second opening and the cap portion define a receiving cavity. A gas injection device and an etching apparatus using the same are also provided.

Abstract: There is provided a film thickness measurement method which measures a film thickness of a specific film to be measured in a multilayer film in situ in a film formation system that forms the multilayer film on a substrate, the method comprising: regarding a plurality of films located under the film to be measured as one underlayer film, measuring a film thickness of the underlayer film, and deriving an optical constant of the underlayer film by spectroscopic interferometry; and after the film to be measured is formed, deriving a film thickness of the film to be measured by spectroscopic interferometry using the film thickness and the optical constant of the underlayer film.

Abstract: An additive manufacturing apparatus produces a shaped article by adding a material melted by emission of a beam, to a workpiece. The additive manufacturing apparatus includes a machining head that emits the beam to the workpiece, a feed unit that feeds the material to the workpiece, and a numerical control device, which is a control unit that determines a machining path along which the machining head is caused to move with respect to the workpiece, and outputs a command to move the machining head. The control unit outputs a command to move the machining head along the machining path obtained by correction performed based on a moving direction of the machining head with respect to the workpiece.

Abstract: Equipment for coating a wafer is disclosed, where the equipment includes a wafer holder configured to spin the wafer while holding the wafer; a rotary drive configured to spin the wafer holder; a nozzle configured to pour liquid onto a surface to be coated of the wafer; an annular duct disposed circumferentially around the wafer when the wafer is spun by the wafer holder, the duct configured to collect material ejected off an edge of the wafer; and an air knife disposed proximate a backside, the backside being opposite the side to be coated, where the air knife is configured to blow an air curtain through a slot onto an exposed edge region of the backside at a grazing angle of incidence to flow gas radially outward along the backside toward the annular duct.

Abstract: Provided herein are systems and methods for storing digital information by assembling an identifier nucleic acid molecule from at least a first component nucleic acid molecule and a second component nucleic acid molecule. The system may include a first printhead configured to dispense a first droplet of a first solution comprising the first component nucleic acid molecule onto a coordinate on a substrate, and a second printhead configured to dispense a second droplet of a second solution comprising the second component nucleic acid molecule onto the coordinate on the substrate, such that the first and second component nucleic acid molecules are collocated on the substrate. The system may include a finisher that dispenses a reaction mix onto the coordinate on the substrate to physically link the first and second component nucleic acid molecules, provides a condition necessary to physically link the first and second component nucleic acid molecules, or both.

Abstract: An application method of an application device configured to apply an adhesive to an object. The method includes applying, prior to applying the adhesive to a specified part of the object, the adhesive to a part different from the specified part, calculating an application quantity of the adhesive applied to the part different from the specified part, making a first correction configured to correct an application condition of the adhesive based on a result of the calculation, and applying the adhesive to the specified part using the application condition corrected in the first correction.

Abstract: An installation and a method for processing optical lenses, whereby transport carriers and block pieces are conveyed backward after use in each case to a commissioning device or blocking device, and the lens carriers are fitted by machine with unblocked or blocked lenses in order to make possible an automated and optimized process sequence.

Abstract: Systems and methods for compensating for radio frequency (RF) power loss are described. One of the methods includes conducting a no plasma test to determine a resistance associated with an output of an impedance matching circuit. After conducting the no plasma test, a substrate is processed in a plasma chamber. During processing of the substrate, power loss associated with the output of the impedance matching circuit is determined. The power loss is used to determine an amount of power to be delivered by an RF generator. The amount of power delivered is adjusted until the power loss is stabilized. The stabilization of the power loss facilitates uniform process of the substrate and additional substrates in the plasma chamber.

Abstract: A method performed by a processor of a plasma processing system including a transfer device and a plasma processing apparatus that includes a process chamber. The process chamber includes a mount table on a surface of which a first focus ring is placed. The method includes controlling the transfer device to transfer the first focus ring out of the process chamber without opening the process chamber to the atmosphere; after the first focus ring is transferred out of the process chamber, controlling the plasma processing apparatus to clean the surface of the mount table; and after the surface of the mount table is cleaned, controlling the transfer device to transfer a second focus ring into the process chamber and place the second focus ring on the surface of the mount table without opening the process chamber to the atmosphere.

Abstract: According to examples, an apparatus may include a processor and a memory on which are stored machine-readable instructions that when executed by the processor, cause the processor to determine physical characteristics of a build layer of build material particles. The instructions may also cause the processor to determine an adjustment to forming data based on the determined physical characteristics, the forming data to be used informing a subsequent build layer. The instructions may further cause the processor to apply the determined adjustment to the forming data for use in forming the subsequent build layer, in which portions of a three-dimensional (3D) object are to be formed in the build layer and the subsequent build layer.

Abstract: A method of making a three-dimensional object, including the steps of: (a) providing a carrier platform; (b) producing the three-dimensional object adhered to the carrier platform; (c) immersing the object in a wash liquid with the object remaining adhered to the carrier platform; (d) agitating the object in the wash liquid and/or the wash liquid with the object immersed therein to at least partially remove residual resin from the object; (e) separating the object from the wash liquid, with the object remaining adhered to the carrier platform; (f) agitating the object at least partially remove residual wash liquid; and (g) repeating steps (c) through (f) at least once to remove additional polymerizable resin, steps (c) through (f) are carried out in the same vessel, the immersing step (c) includes filling the vessel with the wash liquid, and the separating step (e) includes draining the wash liquid from the vessel.

Abstract: A device comprising; a controller arranged to receive data for an article to print; a sub-device comprising a resin source arranged to provide material for printing the article; a radiation source arranged to direct radiation for the printing of said article; a plurality of stations, said stations including a printing tank in which the article is printed, at least one cleaning station for cleaning the printed article and a curing station arranged to at least partially complete the curing of the printed article; a build surface upon which the article is arranged to be printed; wherein controller is arranged to move the build surface and the plurality of stations relative to each other.

Abstract: The disclosure relates to a painting installation for painting components with a paint, in particular for painting motor vehicle body components, with a paint booth and an application device, in particular a print head, arranged in the paint booth, for applying the paint to the component located inside the paint booth, the application device operating essentially without overspray, so that the paint applied by the application device essentially completely on the component to be coated without overspray deposits. The disclosure provides that no paint separation is arranged below the first paint booth.

Abstract: An apparatus for producing a three-dimensional object includes a support assembly having a build platform, a track extending through a build area, and a deposition mechanism mounted on the track and configured for producing the three-dimensional object in a layer-by-layer technique. The deposition mechanism includes a carriage movable along the track, a supply of a flowable material mounted on the carriage, a roller in communication with the flowable material, where the roller is rotatably mounted on the carriage and configured for rotating to carry the flowable resin to an application for application to produce the object, and an exposure device mounted on the carriage. The exposure device emits electromagnetic waves to an exposure site to solidify the applied flowable material to produce the object. The roller is permeable to the electromagnetic waves, such that the waves pass through the roller in traveling from the exposure device to the exposure site.

Abstract: A method for building tyres is described. An elementary semifinished product is deposited on a building drum rotated by an output end effector of a robotized arm in form of coils forming a component of a tyre. A processor determines a target rotation speed of the building drum and a target value for a speed parameter associated with the rotation. If the target value is not an integer number, the processor: i) determines a drive interval shorter than the effector settling time; ii) calculates first and second values corresponding to integer numbers immediately preceding and immediately following the target value; iii) calculates a speed parameter PWM profile with minimum and maximum values corresponding to the first and second values; and iv) controls the effector according to the PWM profile.

Abstract: Techniques for controlling a solid precursor vapor source are provided. An example method disclosure includes providing a carrier gas to a precursor material in a sublimation vessel, such that the sublimation vessel includes an inlet area and an outlet area configured to enable the carrier gas to flow through the precursor material, and at least one thermal device configured to add or remove heat from the sublimation vessel, determining a sublimation temperature value and a delta temperature value based on the precursor material and the carrier gas, setting a first temperature in the sublimation vessel based on the sublimation temperature value and the delta temperature value, such that the first temperature is measured proximate to the inlet area, and setting a second temperature in the sublimation vessel based on the sublimation temperature value, such that the second temperature is measured proximate to the outlet area.

Abstract: A method of forming structure includes providing a substrate in a reaction chamber, forming a first layer overlaying the substrate, and forming a second layer onto the first layer. Temperature of the first layer is controlled during the forming of the first layer using infrared electromagnetic radiation emitted by the first layer. Temperature of the second layer is controlled during the forming of the second layer using infrared electromagnetic radiation emitted by the second layer. Semiconductor device structures and semiconductor processing systems are also described.

Abstract: In an example of the disclosure, a priming lane and a non-priming lane are identified within an image frame to be printed by a printer. A line of molten wax is applied to the roller. The molten wax when cooled is to form a wax ridge upon the roller. The roller having the formed wax ridge is wetted with the primer. The wetted roller is rotated against the substrate to apply the primer. A first width of the wetted roller that does not include the wax ridge forms the priming lane upon the substrate. A second width of the roller that includes the wax ridge causes the primer to not transfer and thereby forms the non-priming lane upon the substrate.

Abstract: A semiconductor processing device is disclosed. The device can include a reactor and a solid source vessel configured to supply a vaporized solid reactant to the reactor. A process control chamber can be disposed between the solid source vessel and the reactor. The device can include a valve upstream of the process control chamber. A control system can be configured to control operation of the valve based at least in part on feedback of measured pressure in the process control chamber.

Abstract: A three-dimensional object printing apparatus includes a liquid discharge head having a nozzle surface, a moving mechanism that changes a position and a pose of the liquid discharge head relative to a three-dimensional workpiece, and a controller. The workpiece has a first surface and a second surface that forms a corner bent or curved in a convex shape between the first surface and the second surface. When an axis along a scanning direction of the liquid discharge head with respect to the workpiece in a first printing operation of performing printing on the first surface is a first scanning axis and a normal vector of the nozzle surface in the first printing operation is a first discharge vector, the controller controls the driving of the moving mechanism such that the first discharge vector has a component in a direction toward the second surface along the first scanning axis.

Abstract: A control system includes: a specifying part for specifying a model corresponding to a processing apparatus and a control algorithm that generates a control signal for controlling the processing apparatus; a simulator for simulating the state of the processing apparatus with the model; a first control signal generation part for generating a control signal based on the measurement value by using the control algorithm; a second control signal generation part for generating a control signal based on an output value of the simulator by using the control algorithm; a first adjustment part for adjusting a value of a model parameter included in the model; and a second adjustment part for adjusting a value of a control parameter included in the control algorithm so that an evaluation value calculated for the output value of the simulator becomes closer to a target value.

Abstract: A microwave plasma source that generates a microwave plasma in a processing space in which a target substrate is processed, includes: a microwave generation part for generating microwave; a waveguide through which the microwave generated by the microwave generation part propagates; an antenna part including a slot antenna having a predetermined pattern of slots formed therein and being configured to radiate the microwave propagating through the waveguide into the processing space and a microwave-transmitting plate being made of a dielectric material and being configured to transmit the microwave radiated from the slots therethrough and supply the microwave into the processing space; a temperature detector for detecting a temperature at a predetermined position in a microwave propagation path leading to the slot antenna; and an abnormality detection part for receiving the temperature detected by the temperature detector and detect an abnormality in the microwave propagation path based on the detected temperatu

Abstract: The present invention relates to a method for coating a component of a turbomachine in a bath, in which method, the component is partially immersed in the bath containing a coating material; the component is rotated at least intermittently around an axis of rotation, which lies outside of the bath, during the at least partial immersion; the component is at most immersed partially over and beyond the rotation.

Abstract: A method for producing a three-dimensional element on a timepiece component, in particular on a dial, that includes generating, by means of a control unit, at least one control instruction for a printing device for reproducing a reference digital graphical representation relating to said three-dimensional element, and constructing, by means of the printing device, at least two substantially superimposed or superimposed layers each having at least one particle which is printed on the timepiece component and which forms the three-dimensional element.

Abstract: An execution device according to an exemplary embodiment includes an operation device, an acceleration sensor, and an arithmetic device. The operation device is a device for executing a predetermined operation. The acceleration sensor measures acceleration applied to the execution device. The arithmetic device measures an elapsed time after the acceleration measured by the acceleration sensor becomes a value within a reference range, and when a predetermined time elapses while the acceleration remains a value within the reference range, causes the operation device to execute the predetermined operation.

Abstract: One or more embodiments described herein generally relate to systems and methods for calibrating an optical emission spectrometer (OES) used for processing semiconductor substrates. In embodiments herein, a light fixture is mounted to a plate within a process chamber. A light source is positioned within the light fixture such that it provides an optical path that projects directly at a window through which the OES looks into the process chamber for its reading. When the light source is on, the OES measures the optical intensity of radiation from the light source. To calibrate the OES, the optical intensity of the light source is compared at two separate times when the light source is on. If the optical intensity of radiation at the first time is different than the optical intensity of radiation at the second time, the OES is modified.

Abstract: A positioning apparatus includes a stage configured to hold a substrate, a first pin configured to hold an edge ring and a second pin separately provided from the first pin and configured to hold the edge ring. The positioning apparatus further includes a rotation mechanism configured to rotate the stage and the first pin, an elevating mechanism configured to raise and lower at least one of the first pin and the second pin and a detection mechanism configured to detect a position of an outer circumference of the substrate held by the stage and a position of an inner circumference of the edge ring held by the first pin.

Abstract: A three-dimensional (3D) printing system includes a resin vessel containing photocurable resin, an imaging system, a build plate with a plate upper surface, a vertical positioner, a volume compensator (VC), and a controller. The controller is configured to: (a) operate the VC to maintain a resin upper surface proximate to a build plane, (b) operate the imaging system and the vertical positioner to generate a plurality of base layers upon the plate upper surface, (c) receive a first signal responsive to vertical motion of the resin upper surface, (d) analyze the first signal to determine a metric that is related to an extent of immersion of the plate upper surface below the resin upper surface during formation of the base layers, and (e) operate the imaging system and the vertical positioner to begin generation of the 3D article after the metric has reached a predefined threshold.

Abstract: Disclosed herein are embodiments of a system for use in additive manufacturing methods. The system can comprise a first container, and a first fluid and a second fluid forming a fluid-fluid interface within the first container. The first fluid is between the fluid-fluid interface and the transparent portion of the first container and configured to remove oxygen from the second fluid at the fluid-fluid interface to facilitate polymerization of a monomeric component in the second fluid. The system can also comprise a circulation system configured to circulate the first fluid through the first container such that the first fluid flows between the fluid-fluid interface and the inner surface of the transparent portion of the first container.

Abstract: A system (1) for applying a sealing agent to the surface (5) of an internal cavity (2) of a pneumatic tyre (3) provided with an applicator device (12) for supplying a strip of sealing agent that is applied to the surface (5) and an opto-electronic device (4*; 20) that is integral to the nozzle (18) of the applicator device (12) and that is provided with at least one sensor element (9*; 20) that is able to acquire a plurality of images of the surface (5) and to provide a plurality of signals that are indicative of said plurality of acquired images; and an electronic processing system (11) connected to the opto-electronic device (4*; 20), and to the applicator device (12) and configured so as to acquire the signals that are indicative of the plurality of images acquired by the opto-electronic device (4*; 20); and to control the application of the sealing agent as a function of the plurality of signals that are indicative of the plurality of images acquired by the opto-electronic device (4*; 20).

Abstract: A coating apparatus includes a coating member, a pressing member, an abutment member, and a restriction member. The coating member coats a sheet with a coating agent. The pressing member is movable and abuts on the coating member to form a nip. The abutment member abuts on the coating member at a position different from a position of the nip. The restriction member restricts movement of the coating member in a separation direction in which the coating member separates from the abutment member.

Abstract: The disclosure relates to a paint supply system for a coating installation (e.g. painting installation) comprising a ring line for circulation of a coating agent, a ring line tapping point in the ring line for extraction of the coating agent from the ring line, a consumer and a tap line leading from the ring line tapping point to the consumer. The disclosure provides a device for alternately moving the coating agent forward and backward in the tap line to avoid settling of the coating agent in the tap line.

Abstract: Systems and methods for making it easier to remove support structures printed in conjunction with printing an object using stereolithographic additive manufacturing are disclosed. In some exemplary embodiments, one or more interfaces between the printed object and the support structures are modulated to allow for easy separation between them, in some instances even when the object and support structures are made from the same material. Various modulation techniques are disclosed, including adjusting an intensity of exposure to light at interfaces between the object and support structures, and using two materials where one material cures at two wavelength ranges and the other material only cures at one of the two wavelength ranges. Other systems and methods that allow for easy separation of part and support structure are also described.

Abstract: Apparatus and methods to control the phase of power sources for plasma process regions in a batch process chamber. A master exciter controls the phase of the power sources during the process sequence based on feedback from the match circuits of the respective plasma sources.

Abstract: Nephelometric measuring devices are described. The nephelometric measuring devices can be configured such that an amount of scattered light having different pathlengths impingent upon one or more scattered-light detectors from a beam propagating through a suspension can result in substantially equivalent sensitivity and in correlation between the scattered-light detectors' response and a turbidity value of the suspension. The response of the scattered-light detector(s) receiving scattered light at a nephelometric angle of 85-110° from a beam of light propagating through the suspension can be in accordance to an equation selected from a group of non-linear equations where: x/y=anxn+an?1xn?1+ . . . +a2x2+a1x+a0; where “n” is an integer greater than 0; “x” is equal to the turbidity value of the suspension; “y” is equal to the response of the scattered-light detector; and “an” are calibration coefficients.

Abstract: A method and an apparatus of plasma-assisted semiconductor processing is provided. The method comprises: a) providing substrates at each of the multiple stations; b) distributing RF power including a first target frequency to multiple stations to thereby generate a plasma in the stations, wherein the RF power is distributed according to a RF power parameter configured to reduce station to station variations; c) tuning an impedance matching circuit for a first station included in the multiple stations while distributing RF power to the first station by: i) measuring a capacitance of a capacitor in the impedance matching circuit without disconnecting the capacitor from the impedance matching circuit; and ii) adjusting, according to the capacitance measured in (i) and the RF power parameter, a capacitance of the capacitor; and d) performing a semiconductor processing operation on the substrate at each station.

Abstract: Methods and systems for forming objects through photo-curing of a liquid resin in a tank by selective exposure (through a mask) to radiation, in which during printing operations the liquid resin in the tank is displaced relative to the build area along an axis orthogonal to that along which the object is extracted from the liquid resin in the tank. A volume of the photo-curing liquid resin may be cycled through a cooling arrangement by being extracted from the tank, cooled, and then reintroduced into the tank as printing of the object is taking place. The mask is preferably one in which charged colorant particles are dispersed in an optically transparent fluid within a plurality of bi-state cells.

Abstract: A plasma processing apparatus includes a processing vessel; a placing table, serving as a lower electrode, disposed within the processing vessel; an upper electrode serving as a facing electrode of the placing table; a plasma processor configured to form a gas within the processing vessel into plasma by supplying a high frequency power and to process a processing target object on the placing table with the plasma; a cover member configured to cover the upper electrode from thereabove; a cooler provided within the cover member and configured to cool the upper electrode with a coolant having a temperature lower than a dew point temperature of exterior air outside the processing vessel; and a gas supply configured to supply a low-dew point gas having a dew point temperature lower than the dew point temperature of the exterior air into a space surrounded by the cover member and the upper electrode.

Abstract: The embodiments described herein generally relate to a stem assembly for coupling a susceptor to a process chamber. The stem assembly includes a pivot mechanism, a first flexible seal coupled to the pivot mechanism, a second flexible seal coupled to a plate on a first side of the plate, the plate having a second side coupled to the first flexible seal, a housing coupled to the second flexible seal, and a motion assembly adapted to move the housing in an X axis and a Y axis, and position the susceptor angularly relative to an X-Y plane of the process chamber.

Abstract: Systems and method for producing graphene on a substrate are described. Certain types of exemplar systems include lateral arrangements of a substrate gas scavenging environment and an annealing environment. Certain other types of exemplar systems include lateral arrangements of a graphene producing environment and a cooling environment, which cools the graphene produced on the substrate. Yet other types of exemplar systems include lateral arrangements of a localized annealing environment, localized graphene producing environment and a localized cooling environment inside the same enclosure. Certain type of exemplar methods for producing graphene on a substrate include scavenging a first portion of the substrate and preferably, contemporaneously annealing a second portion of the substrate.

Abstract: Provided are a coating apparatus and a coating system, where the coating apparatus includes: a coating module, the coating module including a coating roller and a coating die, where the coating roller is configured to drive, when rotating, a substrate to move toward the coating die, and the coating die is configured to apply a coating onto the substrate; an error acquisition module having a predetermined distance to the coating roller and configured to acquire a circular run-out error of rotation of the coating roller and transmit the circular run-out error to a linkage module; and the linkage module configured to adjust position of the coating die in real time according to the circular run-out error transmitted to the linkage module, so as to keep a distance between the coating roller and the coating die unchanged.

Abstract: Coated nanofibers and methods for forming the same. A magnetic nanofiber is formed and a barrier coating is deposited on the magnetic nanofiber by atomic layer deposition (“ALD”) process. The coated nanofiber may include a reduced magnetic nanostructure and a barrier coating comprising a first oxide coating on the nanofiber, the coating being non-reactive with the magnetic polymer nanofiber, the barrier coating have a thickness of 2 nm to 12 nm.

Abstract: In a layer deposition method, a substrate is loaded into a process chamber. A gas filling tank is charged with a gas to a predetermined charge pressure. The pressure of the gas is elevated to a pressure greater than the predetermined charge pressure. The gas is introduced into the process chamber.

Abstract: The invention is generally a system for washing off residual resin from objects which are three-dimensionally (3D) printed through a vat polymerization (VP) process. Exemplary systems may include a solvent receptacle, a wash reservoir in fluid communication with the solvent receptacle, and a controller configured to pump a solvent from the solvent receptacle to the wash reservoir for washing off residual resin from a 3D-printed object. Exemplary methods may include pumping a first solution of a plurality of solvent solutions from the solvent receptacle to the wash reservoir, dispersing the first solution onto the 3D-printed object, pumping the first solution from the wash reservoir to the solvent receptacle, pumping a second solution of the plurality of solvent solutions from the solvent receptacle to the wash reservoir, and dispersing the second solution onto the 3D-printed object.

Abstract: Light emitting device, method of manufacturing the light emitting device, and display device including the light emitting device are disclosed. The light emitting device includes a first electrode and a second electrode each having a surface opposite the other, a light emitting layer including quantum dots that is disposed between the first electrode and the second electrode, and an electron auxiliary layer disposed between the light emitting layer and the second electrode, wherein the electron auxiliary layer includes metal oxide nanoparticles including an anion of an organic acid bound to a surface of the metal oxide nanoparticle.

Abstract: To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

Abstract: The present disclosure relates to a slot die coating apparatus for coating an electrode active material slurry onto an electrode collector, the slot die coating apparatus including a coating roller, a die comprising a lower discharge opening, through which a first electrode active material slurry is discharged, and an upper die located on the upper side of the lower die and having an upper discharge opening, through which a second electrode active material slurry is discharged, and an upper air vent may be installed in the upper die and a lower air vent may be installed in the lower die.

Abstract: A substrate processing device includes: a chamber; a substrate processing mechanism that has a holding member, and discharges a processing fluid onto a substrate held by the holding member; a joint pipe that has a lower opening provided below the holding member, and an upper opening provided above the holding member, and is disposed such that at least part of the joint pipe from the lower opening to the upper opening passes through the outside of the chamber; and an air flow generator that is provided in the joint pipe. The air flow generator circulates an atmosphere in the chamber by discharging the atmosphere in the chamber from the lower opening to the joint pipe to allow the atmosphere to pass through the joint pipe, thereby introducing the atmosphere again into the chamber via the upper opening so that a downflow of the atmosphere occurs in the chamber.

Abstract: The disclosure concerns a coating method and a corresponding coating device for coating components with a nozzle applicator with several nozzles, in particular for painting motor vehicle body components. The disclosure provides that the nozzle applicator is flexibly controlled during the coating method.

Abstract: A substrate processing method includes: carrying out a substrate from a substrate transfer container by a substrate transfer device; placing the substrate in a first position of a substrate holder; moving the substrate holder into a reaction container and processing the substrate in the reaction chamber; obtaining a film thickness measurement result of the substrate processed in the reaction container; creating a model from the film thickness measurement result; determining a second position where the substrate is placed in the substrate holder and a transfer position setting value obtained from the model; adjusting the first position of the substrate to the second position; calculating an eccentricity state of the substrate from a newly obtained film thickness measurement result; calculating an optimization such that the eccentricity state is minimized; and determining a third position to which a new substrate is placed from the transfer position setting value.