With Electrode Supporting Means Patents (Class 204/286.1)
  • Patent number: 7214297
    Abstract: A contact ring for an electrochemical plating system is provided. The contact ring includes an annular substrate supporting member, a plurality of radially positioned conductive substrate contact pins extending from the substrate supporting member, an annular conductive thief element attached to the substrate supporting member, and at least one source of electrical power in electrical communication with the contact pins and the conductive thief element.
    Type: Grant
    Filed: June 28, 2004
    Date of Patent: May 8, 2007
    Assignee: Applied Materials, Inc.
    Inventors: You Wang, Anzhong Chang, John O. Dukovic
  • Patent number: 7211174
    Abstract: Systems and methods to provide electrical contacts to a workpiece to facilitate electrotreating processes, including electroplating and electroetching processes are presented.
    Type: Grant
    Filed: October 28, 2002
    Date of Patent: May 1, 2007
    Assignee: Novellus Systems, Inc.
    Inventors: Bulent M Basol, Homayoun Talieh, Boguslaw A. Nagorski, Cyprian E. Uzoh, Jeffrey A. Bogart
  • Patent number: 7211175
    Abstract: Controlled-potential electroplating provides an effective method of electroplating metals onto the surfaces of high aspect ratio recessed features of integrated circuit devices. Methods are provided to mitigate corrosion of a metal seed layer on recessed features due to contact of the seed layer with an electrolyte solution. The potential can also be controlled to provide conformal plating over the seed layer and bottom-up filling of the recessed features. For each of these processes, a constant cathodic voltage, pulsed cathodic voltage, or ramped cathodic voltage can be used. An apparatus for controlled-potential electroplating includes a reference electrode placed near the surface to be plated and at least one cathode sense lead to measure the potential at points on the circumference of the integrated circuit structure.
    Type: Grant
    Filed: February 11, 2003
    Date of Patent: May 1, 2007
    Assignee: Novellus Systems, Inc.
    Inventors: Steven T. Mayer, Jonathan Reid, Robert Contolini
  • Patent number: 7208070
    Abstract: The present invention provides improvements in methods for the manufacture of stents. Specifically, the invention provides methods wherein stents are placed on jigs of various designs which facilitate manufacture, stents carried by the jigs are immersed in liquid baths which contain an electrolyte, the stents are urged into contact with their associated electrodes while current is applied to those electrodes, and wherein the positions of contact between the stents and their respective electrodes are altered during processing without removing the stents from the jig. The method is applicable for electropolishing and electro-plating.
    Type: Grant
    Filed: June 6, 2003
    Date of Patent: April 24, 2007
    Assignee: Anopol Limited
    Inventor: Brian Swain
  • Patent number: 7204919
    Abstract: Disclosed is a capping board for use to support anodes and cathodes within adjacent electrolytic cells, which has a plurality of individual seats positioned in spaced apart relationship all along its length to receive and support hanging legs projecting from these anodes and cathodes. This capping board is improved in that it has at least one sheet or wire of electrically conductive material embedded therein. This sheet or wire extends over the length of the board and is shaped and positioned so that part of its extends externally within at least some of the seats so as to allow electrical contact of the legs of either the anodes or the cathodes and to allow fast dissipation of heat in the case of a short circuit.
    Type: Grant
    Filed: December 3, 2003
    Date of Patent: April 17, 2007
    Assignee: Pultrusion Technique Inc.
    Inventor: Robert P. Dufresne
  • Patent number: 7204920
    Abstract: A contact ring for use in electroplating of a substrate material is constructed such that fluid (e.g., electrolyte) is allowed to flow radially away from the axis of a toroidal support ring, thus preventing the trapping of fluids between the substrate and the toroidal support ring. The contact ring is constructed with a series of openings arranged about the circumference of the ring and wherein an electrical contact is placed in the path of each opening so any fluid passing through the opening also passes around the associated electrical contact. Further, the electrical contacts are also placed such that a substrate (e.g., a semiconductor wafer) can be placed inside the support ring so as to electrically contact the electrical contacts. The toroidal support ring has an aerodynamically streamlined cross-section at the openings, such that fluid flows through the openings with reduced aerodynamic drag.
    Type: Grant
    Filed: October 25, 2004
    Date of Patent: April 17, 2007
    Assignee: LSI Logic Corporation
    Inventors: Byung-Sung Leo Kwak, Gregory Frank Piatt, Hiroshi Mizuno
  • Patent number: 7176036
    Abstract: Methods and devices for electrochemical detection of a specific binding pair member utilizing a microsphere with an incorporated electroactive marker, wherein a member of the specific binding pair to be detected is bound, directly or through one or more intermediates, to the microsphere. Multiple specific binding pair members may be detected by use of electrochemically distinguishable electroactive markers. Microspheres with incorporated electroactive markers may include one or more functional groups for binding members of specific binding pairs, and are preferably insoluble in aqueous solvents but soluble in selected organic solvents.
    Type: Grant
    Filed: September 18, 2003
    Date of Patent: February 13, 2007
    Assignee: Arrowhead Center, Inc.
    Inventors: Joseph Wang, Ronen Polsky, Kathryn L. Turner
  • Patent number: 7169270
    Abstract: An improved electrical connection between an inert anode and a conductor rod is disclosed. The conductor rod has a smaller diameter than a hole in the anode such that a gap is provided between the conductor rod and the anode. The gap is filled with an electrically conductive particulate material, such as Cu, Ni and/or Ag. The particulate conductor material is at least partially sintered before or during operation of the anode. To ensure a good connection between the conductor rod and the anode, the particle size distribution of the particulate connector material may be controlled.
    Type: Grant
    Filed: March 9, 2004
    Date of Patent: January 30, 2007
    Assignee: Alcoa, Inc.
    Inventors: LeRoy E. D'Astolfo, Jr., R. Lee Troup
  • Patent number: 7153410
    Abstract: Methods and apparatuses for electrochemical-mechanical processing of microelectronic workpieces. One embodiment of an electrochemical processing apparatus in accordance with the invention comprises a workpiece holder configured to receive a microelectronic workpiece, a workpiece electrode, a first remote electrode, and a second remote electrode. The workpiece electrode is configured to contact a processing side of the workpiece when the workpiece is received in the workpiece holder. The first and second remote electrodes are spaced apart from the workpiece holder. The apparatus can also include an AC power supply, a DC power supply, and a switching assembly. The switching assembly is coupled to the workpiece electrode, the first remote electrode, the second remote electrode, the AC power supply, and the DC power supply.
    Type: Grant
    Filed: March 4, 2002
    Date of Patent: December 26, 2006
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Moore, Whonchee Lee, Scott G. Meikle, Trung T. Doan
  • Patent number: 7138039
    Abstract: Embodiments of the invention may further provide a contact ring for an electrochemical plating system. The contact generally includes a substrate receiving member having a substrate support surface formed thereon, a plurality of electrical contact pins extending from the substrate support surface, a first seal positioned on the substrate support surface radially inward of the plurality of electrical contacts, and a second seal positioned radially outward of the plurality of electrical contacts. Additionally, the contact ring generally includes a fluid inlet configured to supply a fluid to a volume between the first seal and the second seal.
    Type: Grant
    Filed: January 21, 2003
    Date of Patent: November 21, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Vincent E. Burkhart, Harald Herchen, Joseph Yahalom
  • Patent number: 7125477
    Abstract: Systems and methods for electrochemically processing. A contact element defines a substrate contact surface positionable in contact a substrate during processing. In one embodiment, the contact element comprises a wire element. In another embodiment the contact element is a rotating member. In one embodiment, the contact element comprises a noble metal.
    Type: Grant
    Filed: August 2, 2002
    Date of Patent: October 24, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Paul Butterfield, Liang-Yuh Chen, Yongqi Hu, Antoine Manens, Rashid Mavliev, Stan Tsai
  • Patent number: 7122101
    Abstract: A sensor including at least one electrode (3, 4) which is made of electrically conductive plastic and is connected to one end of an electrical conductor (5, 6). The electrode (3, 4) and conductor (5, 6) are surrounded by an insulating housing (2, 22), except that the electrode has an exposed surface (7, 8) for contacting an aggressive or corrosive medium inside the housing. The other end (11, 12) of the electrical conductor protrudes from the housing (2, 22). The housing (2, 22) is made of an electrically insulating plastic material which is joined to the electrode (3, 4) in a sealed manner. In a preferred embodiment, the housing (2, 22) forms a valve seat and seal for a bottom drain valve of a fluid container.
    Type: Grant
    Filed: January 28, 2003
    Date of Patent: October 17, 2006
    Assignee: Xomox International GmbH & Co.
    Inventor: Wolfgang Gonsior
  • Patent number: 7118658
    Abstract: A reactor for electroplating a workpiece includes a vessel having a ring contact arranged to support a workpiece in a horizontal orientation. In an embodiment of the invention, an electrode is arranged below the ring contact, and a pressing member is arranged above the ring contact to press a workpiece into electrical engagement with the ring contact. The vessel may be adapted to contain an electroplating fluid between a top of the ring contact and the electrode. In one embodiment, a movable intermediate workpiece support assembly is carried by the vessel, the support assembly being actuatable to lower a workpiece carried thereby to deliver the workpiece to be supported accurately and precisely on the ring contact.
    Type: Grant
    Filed: May 21, 2002
    Date of Patent: October 10, 2006
    Assignee: Semitool, Inc.
    Inventors: Daniel J. Woodruff, Kyle M. Hanson
  • Patent number: 7087144
    Abstract: A contact assembly for supporting a substrate in an electrochemical plating system, wherein that contact assembly includes a contact ring and a thrust plate assembly. The contact ring includes an annular ring member having an upper surface and a lower surface, an annular bump member positioned on the upper surface, and a plurality of flexible and conductive substrate contact fingers extending radially inward from the lower surface. The thrust plate includes an annular plate member sized to be received within the annular ring member, and a seal member extending radially outward from the plate member, the seal member being configured to engage the annular bump member for form a fluid seal therewith.
    Type: Grant
    Filed: January 31, 2003
    Date of Patent: August 8, 2006
    Assignee: Applied Materials, Inc.
    Inventor: Harald Herchen
  • Patent number: 7067045
    Abstract: An apparatus for securing a substrate in an electrochemical deposition system is provided. The apparatus generally includes a substrate support member adapted to receive the substrate and a thrust plate assembly adapted to exert a downward force on the substrate. For some embodiments, a first sealing member adapted to engage a plating surface of the substrate may be attached to the substrate support member. The apparatus may also include a second sealing member adapted to engage a non-plating surface of the substrate or a surface of the substrate support member to prevent the flow of plating fluid to a non-plating surface of the substrate. The apparatus may also include electrical contacts to electrically contact the plating or non-plating surface of the substrate.
    Type: Grant
    Filed: October 18, 2002
    Date of Patent: June 27, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Arthur Keigler, Harald Herchen, Vincent E. Burkhart, Son N. Trinh
  • Patent number: 7045045
    Abstract: An inexpensive workpiece holder having high reliability and a processing apparatus equipped with the workpiece holder are provided, in which damage caused by oxygen in the air is prevented. The holder comprises: a ceramic body which has an electrode and a heater circuit and which can holds a workpiece; a tubular member having an end portion connected to the ceramic body; a sealing member which is disposed inside the tubular member and which isolates a space inside the tubular member into two regions: a region on the first end portion (“sealed portion”) and a region on the opposite side (“opposite region”); and power supply conductive members which extend from the opposite region side, penetrating the sealing member to the sealed region side, and which are electrically connected to the electrode and the heater circuit.
    Type: Grant
    Filed: September 10, 2002
    Date of Patent: May 16, 2006
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Masuhiro Natsuhara, Hirohiko Nakata, Akira Kuibira
  • Patent number: 7045041
    Abstract: The invention provides an ion exchange membrane electrolyzer. An electric current is passed through at least one electrode while the electrode is in contact with a plurality of comb-like flat leaf spring tags extending at an angle from a flat leaf spring form of retainer member located on an electrode partition provided in an electrode chamber. Each pair of comb-like flat leaf spring tags are arranged in such a way that adjacent flat leaf spring tags extend in mutually opposite directions.
    Type: Grant
    Filed: April 4, 2003
    Date of Patent: May 16, 2006
    Assignee: Chlorine Engineers Corp. Ltd.
    Inventor: Shinji Katayama
  • Patent number: 7033479
    Abstract: The invention is relative to an electrolytic cell comprising electrodes spaced apart from the back-wall by means of ribs, wherein a portion of the contact surface between the electrodes and the ribs is free from constraints in order to permit the complete removal of the electrodes once they have to be replaced by removing only partially the original contact surface, so that positioning of the substitute electrodes is allowed on the residual portion. A method for substituting the electrodes of the cell which leaves the distance between the electrode surface and the back-wall unvaried is also disclosed.
    Type: Grant
    Filed: October 30, 2001
    Date of Patent: April 25, 2006
    Assignee: De Nora Elettrodi S.p.A.
    Inventors: Dario Oldani, Antonio Pasquinucci
  • Patent number: 7003868
    Abstract: A copper welding rod is used in an arc-welding operation to form a bead that joins a copper starter sheet and a stainless steel hanger bar. The amperage level of the arc-welding equipment is set to generate heat at the weld site which is above the melting point of copper and below the melting point of stainless steel. This results in a welded joint between the copper bead and the hanger bar and a brazed joint between the copper bead and the starter sheet. Since brazing produces little or no fusion, the area of contact between the two dissimilar metals is limited to the interface between them, which significantly reduces the damaging effects of galvanic corrosion. Another improvement lies in the application of a corrosion-resistant metallic coating on the joint between the hanger bar and the starter sheet using a high velocity oxygen fuel flame spray technique.
    Type: Grant
    Filed: February 26, 2003
    Date of Patent: February 28, 2006
    Assignee: T.A. Caid Industries Inc.
    Inventor: Neal J. Preimesberger
  • Patent number: 6962649
    Abstract: Contact assemblies for electrochemical processing of microelectronic workpieces. The contact assemblies can comprise a support member that includes an inner wall which defines an opening configured to receive the workpiece and a plurality of contacts. The individual contacts include a conductor and a cover. The conductor can comprise a proximal section projecting inwardly into the opening relative to the support member, a distal section extending from the proximal section, and an inert exterior at least at the distal section. The cover comprises a dielectric element that covers at least the proximal section of the conductor, but does not cover at least a portion of the distal section of the core. The exposed portion of the distal section of the core, accordingly, defines a conductive contact site for contacting a conductive layer (e.g., a seed layer) on the workpiece.
    Type: Grant
    Filed: December 5, 2001
    Date of Patent: November 8, 2005
    Assignee: Semitool, Inc.
    Inventors: Gregory J. Wilson, John M. Pedersen, Steve L. Eudy
  • Patent number: 6939448
    Abstract: Contact assemblies, electroplating machines with contact assemblies, and methods for making contact assemblies that are used in the fabrication of microelectronic workpieces. The contact assemblies can be wet-contact assemblies or dry-contact assemblies. A contact assembly for use in an electroplating system can comprise a support member and a contact system coupled to the support member. The support member, for example, can be a ring or another structure that has an inner wall defining an opening configured to allow the workpiece to move through the support member along an access path. In one embodiment, the support member is a conductive ring having a plurality of posts depending from the ring that are spaced apart from one another by gaps. The contact system can be coupled to the posts of the support member. The contact system can have a plurality of contact members projecting inwardly into the opening relative to the support member and transversely with respect to the access path.
    Type: Grant
    Filed: April 7, 2003
    Date of Patent: September 6, 2005
    Assignee: Semitool, Inc.
    Inventors: Robert W. Batz, Jr., John M. Pedersen, John L. Klocke, LinLin Chen
  • Patent number: 6913850
    Abstract: A method of manufacturing a thin film electrochemical apparatus is disclosed. A near net shape ceramic element is molded including a planar base region and a plurality of tubular regions. The planar base region is infiltrated with a non-conductive material. Each of the tubular regions is infiltrated with a porous conductive material. A porous catalytic electrode material is applied onto the infiltrated regions to form one of a cathodic and anodic surface. A ceramic electrolyte coating is deposited onto the porous catalytic electrode material. A porous catalytic electrode material is applied onto the deposited ceramic electrolyte coating. A porous conductive material is deposited onto the porous catalytic electrode to form the other of the cathodic and anodic surface.
    Type: Grant
    Filed: December 4, 2001
    Date of Patent: July 5, 2005
    Assignee: Litton Systems, Inc.
    Inventors: Scott R. Sehlin, Vincent L. Sprenkle
  • Patent number: 6911127
    Abstract: Contact assemblies, electroplating machines with contact assemblies, and methods for making contact assemblies that are used in the fabrication of microelectronic workpieces. The contact assemblies can be wet-contact assemblies or dry-contact assemblies. A contact assembly for use in an electroplating system can comprise a support member and a contact system coupled to the support member. The support member, for example, can be a ring or another structure that has an inner wall defining an opening configured to allow the workpiece to move through the support member along an access path. In one embodiment, the support member is a conductive ring having a plurality of posts depending from the ring that are spaced apart from one another by gaps. The contact system can be coupled to the posts of the support member. The contact system can have a plurality of contact members projecting inwardly into the opening relative to the support member and transversely with respect to the access path.
    Type: Grant
    Filed: January 28, 2003
    Date of Patent: June 28, 2005
    Assignee: Semitool, Inc.
    Inventors: Robert W. Batz, Jr., John M. Pedersen, John L. Klocke, LinLin Chen
  • Patent number: 6911128
    Abstract: The invention relates to a device for the decontamination of water, particularly of heavy metals and/or arsenic and/or their compounds, by means of electrolysis, wherein the water to be purified is fed through a receptacle and passes by electrodes of different polarities. According to the invention, a combination of electrodes made from iron, aluminium, and graphite, or from aluminium and graphite, is used. Facing the direction of the receptacle bottom, the undersides of the electrodes are contained in groove-like, electrically insulated recesses that are spaced apart and separated from one another on their opposite side by single electrically insulating spacers, wherein the spacers are attached to the electrodes, and the electrodes, which can be unfolded, are arranged in the groove-like recesses (FIG. 5).
    Type: Grant
    Filed: September 12, 2002
    Date of Patent: June 28, 2005
    Assignee: ARS USA LLC
    Inventor: Giselher Klose
  • Patent number: 6899801
    Abstract: A method and apparatus for automatically refilling reference electrodes used in chemical analysis. The apparatus generally includes a reference electrode including an outer chamber with an electrolyte contained therein, an adapter to secure the plumbing to the reference electrode, and a computer to control the refill unit. The refill unit further includes a pump, a refill bottle, and plumbing to connect the refill bottle to the pump and the pump to the reference electrode. The method generally includes drawing refill electrolyte from a refill bottle and pumping the refill electrolyte to the reference electrode. Embodiments of the invention further include an automatically refillable reference electrode.
    Type: Grant
    Filed: March 20, 2002
    Date of Patent: May 31, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Todd A. Balisky, Srujal (Steven) Patel
  • Patent number: 6881309
    Abstract: In an electroplating reactor for plating a spinning wafer, a diffusion plate is supported above an anode located within a cup filled with process fluid within the reactor. The diffusion plate includes a plurality of openings which are arranged in a spiral pattern. The openings allow for an improved plating thickness distribution on the wafer surface. The openings can be elongated slots curved along the direction of the spiral path.
    Type: Grant
    Filed: June 14, 2001
    Date of Patent: April 19, 2005
    Assignee: Semitool, Inc.
    Inventors: Kyle M. Hanson, Robert A. Weaver, Jerry Simchuk, Raymon F. Thompson
  • Patent number: 6863799
    Abstract: A method for manufacturing improved cast anodes for corrosion protection in storage tanks calls for integrating a plurality of spaced steel core rods into a sacrificial galvanic anode material sheet. The sheet is divided into segments such that a width of each segment is four to eight times the thickness of the galvanic sheet.
    Type: Grant
    Filed: May 22, 2002
    Date of Patent: March 8, 2005
    Inventor: James B. Bushman
  • Patent number: 6855235
    Abstract: Embodiments of the invention generally provide an electrochemical plating cell having an electrolyte container assembly configured to hold a plating solution therein, a head assembly positioned above the electrolyte container, the head assembly being configured to support a substrate during an electrochemical plating process, and an anode assembly positioned in a lower portion of the electrolyte container. The anode assembly generally includes a copper member having a substantially planar upper surface, at least one groove formed into the substantially planar upper surface, each of the at least one grooves originating in a central portion of the substantially planar anode surface and terminating at a position proximate a perimeter of the substantially planar upper surface, and at least one fluid outlet positioned at a perimeter of the substantially planar upper anode surface.
    Type: Grant
    Filed: May 28, 2002
    Date of Patent: February 15, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Harald Herchen, Craig Brodeur, Quinwei Wu, Peter Kimball, Vincent Burkhart
  • Patent number: 6852236
    Abstract: A method and apparatus for turbulently exposing water flowing through a water system to a plurality of electrodes of an ion generator and having a self-contained tank through which water flows is provided with an inlet pipe that directs water flow between the electrodes. A tank cover serves as a non-electrical conducting head for the plurality of electrodes that extend downwardly from the underside of the cover. The electrodes are functionally configured to maximize water flow between them. Following the flow of water between the electrodes, a double vortex of water flow is created along one wall of the tank. A sight glass allows for visualization of the container contents, and in particular electrode wastage or wear, during operation.
    Type: Grant
    Filed: April 20, 2004
    Date of Patent: February 8, 2005
    Inventors: William Holt, John V. Kraft
  • Patent number: 6852205
    Abstract: According to the present invention, there is provided an electrode plate for a water electrolysis device, which is formed from a metal plate having such a thickness as to be capable of being press-formed, and which comprises a flat plate portion, and a peripheral edge portion positioned on the outer side of the flat plate portion and bent so that recesses and protrusions are alternately arrayed along an outer peripheral edge thereof.
    Type: Grant
    Filed: September 25, 2000
    Date of Patent: February 8, 2005
    Assignee: Shinko-Pantec Co., Ltd.
    Inventors: Manabu Toyoshima, Masaru Yonezawa, Kiyoshi Hirai, Akiko Miyake, Yutaka Ishii, Tsutomu Oi, Shingo Toriu
  • Patent number: 6849178
    Abstract: An apparatus for water treatment by means of an electrical field is provided with an anode and a cathode in at least one treatment chamber through which the water to be treated passes. The apparatus is characterized in that the at least one treatment chamber forms a prismatic space with an elongated cross section, the anode and the cathode are formed by pairs of parallel, stick-shaped electrodes which extend spaced apart into said space and a voltage is applicable between the electrodes. One end of the at least one treatment chamber is connected to a water inlet and the other end of the at least one treatment chamber is connected to a water outlet, whereby a waterflow from one electrode to the other is generatable which is substantially transverse to the longitudinal axes of the electrodes.
    Type: Grant
    Filed: August 12, 2002
    Date of Patent: February 1, 2005
    Assignee: Hans Sasserath & Co. KG
    Inventor: Willi Hecking
  • Patent number: 6843897
    Abstract: Embodiments of the invention generally provide an electrochemical plating cell having an electrolyte container assembly configured to hold a plating solution therein, a head assembly positioned above the electrolyte container, the head assembly being configured to support a substrate during an electrochemical plating process, and an anode assembly positioned in a lower portion of the electrolyte container. The anode assembly generally includes a copper member having a substantially planar upper surface, at least one groove formed into the substantially planar upper surface, each of the at least one grooves originating in a central portion of the substantially planar anode surface and terminating at a position proximate a perimeter of the substantially planar upper surface, and at least one fluid outlet positioned at a perimeter of the substantially planar upper anode surface.
    Type: Grant
    Filed: May 28, 2002
    Date of Patent: January 18, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Harald Herchen, Vincent Burkhart
  • Patent number: 6830667
    Abstract: To provide a cathode cartridge, which comprises a tabular cathode conductor 5, which has an open hole having a same shape to that of plated pats 2a of a plated base 2 as a negative plate, which has a plurality of a protruding portion that presses contact to a peripheral part 2d around the plated parts 2a, a first elastic thin board 3, which covers a rear side of the plated base 2 and has a recess 3a, a tabular rear wall insulator 6, which covers both a back side of the cathode conductor 5 and a back side of the first elastic thin board 3, and has a recess 6b, a tabular front side insulator 7, which has an aperture having the same shape to that of the plated parts 2a, which covers a front side of the cathode conductor 5, and has a recess 7b, into which the cathode conductor 5 gets just, and a second elastic thin board 4, which has an aperture (open hole) having the same shape to that of the plated parts 2a, which is sandwiched between the cathode conductor 5 to provide a cathode cartridge of testing device for
    Type: Grant
    Filed: June 20, 2001
    Date of Patent: December 14, 2004
    Assignee: Yamamoto-MS Co., Ltd.
    Inventor: Wataru Yamamoto
  • Publication number: 20040231978
    Abstract: The invention relates to electroplating. In particular, the invention relates to an improved anode for electroplating metals onto substrates, and to a method of electroplating metals onto substrates utilizing the anode. The anode has a solid metal portion, and a metal electrode shaft having one or more barbs projecting outwardly from a periphery of the shaft at one end of the shaft. The barbs are fixed through the body extend a distance therethrough.
    Type: Application
    Filed: March 9, 2004
    Publication date: November 25, 2004
    Inventor: Tamara L White
  • Patent number: 6811661
    Abstract: A cathode cartridge of a testing device for electroplating is provided, and includes a dummy plate 7 as a negative pole provided outside a tabular front insulator 6. The dummy plate includes an orifice a having the same shape as a plated part 2a of a plated base 2 as a negative plate. Protruding portions 4 press contact to a peripheral part of the plated base 2a. A tabular cathode conductor 4 connects with a direct voltage source not soaked in a plating solvent. A tabular rear insulator 5 covers rear sides of the plated base 2 and the cathode conductor 4, and has a recess, into which the plated base 2 and the cathode conductor 4 are retained. A tabular front insulator 6 having an orifice having the same shape as the plated base 2a covers a front side of the cathode conductor 4. An elastic thin board 9 is sandwiched between the plate base 2 and the tabular front insulator.
    Type: Grant
    Filed: May 22, 2001
    Date of Patent: November 2, 2004
    Assignee: Yamamoto-MS Co., Ltd.
    Inventor: Wataru Yamamoto
  • Patent number: 6805777
    Abstract: An inert anode (10) for use in an electrolysis process to make metals such as aluminum, contains a hollow interior with an open top portion (16), an interior closed bottom (18) and interior walls (19) where the top interior side walls (16) have at least one interior groove (20) which helps relieve stress on the anode material and helps provide locking and support of the anode.
    Type: Grant
    Filed: April 2, 2003
    Date of Patent: October 19, 2004
    Assignee: Alcoa Inc.
    Inventor: Leroy E. D'Astolfo, Jr.
  • Publication number: 20040200719
    Abstract: It is described a newly designed anode suitable for bipolar type diaphragm chlor-alkali electrolyzers characterised by being made of two parallel opposed titanium sheets provided with openings and a catalytic coating for chlorine evolution, and with an elastically responding expansion device fixed to each surface of the two sheets, wherein the opening of the expansion device and thereby of the sheets fixed thereto is adjusted by a mobile pivot comprising two sections of different diameter and a spring. The spring is compressed when the anodes are assembled in the electrolyzer allowing the sliding of the pivot causing the two sheets to spread out. Hence, the distance between sheets and cathode-supported diaphragms is decreased or even suppressed depending on the regulation of the device effected before assembling and the operating electric voltage of the electrolyzer results substantially reduced.
    Type: Application
    Filed: March 31, 2004
    Publication date: October 14, 2004
    Inventor: Salvatore Peragine
  • Publication number: 20040195093
    Abstract: The present invention provides a process for manufacturing a porous metal electrode, wherein the porosity degree is in the range of 30 to 50% and the metal is capable of forming a stable, uniform, oxide layer having a dielectric constant greater than 25 (k≧25), preferably selected from the group consisting of tantalum and niobium, comprising a substantially uniform porous layer of deposited said metal particles thereon.
    Type: Application
    Filed: May 18, 2004
    Publication date: October 7, 2004
    Inventors: Nissim Cohen, Israel Schuster, Ludmila Cherniak, Tali Peled
  • Patent number: 6780292
    Abstract: An electrolytic treatment apparatus includes a substantially hollow tubular outer vessel housing closed at its bottom end and provided with a liquid inlet and liquid outlet adjacent its bottom and top ends. A self-contained reactor cartridge unit integrates the vessel cap, electrodes, electrode supports, any electrode wiring connections and any liquid dispersion members into a single removable unit for installation into and removal from the vessel housing so that, when maintenance is required, complete reactor cartridges may be exchanged in a matter of seconds, thereby virtually eliminating downtime of the treatment system for maintenance and other electrode replacement needs.
    Type: Grant
    Filed: April 10, 2002
    Date of Patent: August 24, 2004
    Assignee: Raintech International, Inc.
    Inventors: Greg W. Hermann, David L. Winburn
  • Patent number: 6773571
    Abstract: The present invention pertains to methods and apparatus for electroplating a substantially uniform layer of a metal onto a work piece having a seed layer thereon. The total current of a plating cell is distributed among a plurality of anodes in the plating cell in order to tailor the current distribution in the plating electrolyte to compensate for resistance and voltage variation across a work piece due to the seed layer. Focusing elements are used to create “virtual anodes” in proximity to the plating surface of the work piece to further control the current distribution in the electrolyte during plating.
    Type: Grant
    Filed: May 22, 2002
    Date of Patent: August 10, 2004
    Assignee: Novellus Systems, Inc.
    Inventors: Steven T. Mayer, Evan E. Patton, Brian Paul Blackman, Jonathan D. Reid, Thomas Anand Ponnuswamy, Harold D. Perry
  • Patent number: 6761809
    Abstract: An electrically regeneratable battery of electrochemical cells for capacitive deionization (including electrochemical purification) and regeneration of electrodes is operated at alternate polarities during consecutive cycles. In other words, after each regeneration step operated at a given polarity in a deionization-regeneration cycle, the polarity of the deionization step in the next cycle is maintained. In one embodiment, two end electrodes are arranged one at each end of the battery, adjacent to end plates. An insulator layer is interposed between each end plate and the adjacent end electrode. Each end electrode includes a single sheet of conductive material having a high specific surface area and sorption capacity, preferably a sheet formed of carbon aerogel composite. The battery further includes a plurality of generally identical double-sided intermediate electrodes that are equidistally separated from each other, between the two end electrodes.
    Type: Grant
    Filed: January 3, 2002
    Date of Patent: July 13, 2004
    Assignee: The Regents of the University of California
    Inventors: Tri D. Tran, David J. Lenz
  • Patent number: 6749731
    Abstract: A detection chip capable of detecting large amounts of genes with high sensitivity is provided. The gene detection chip comprises a plurality of pins 12 as measurement electrodes, a common electrode 22 as a counter electrode therefor, and a tabular member 14 with a plurality of pin holes 15 for accommodating the pins. An arrangement may be adopted in which the diameters of the pin holes 15 taper off in the direction in which the pins are inserted, and the pins are held in place in the narrowest sections of the pin holes 15.
    Type: Grant
    Filed: January 30, 2002
    Date of Patent: June 15, 2004
    Assignees: Kyocera Corporation, Tum Gene, Inc.
    Inventors: Shinichi Kobori, Kazuhiro Nakama, Shingo Satoh, Hiroyoshi Miyahara
  • Patent number: 6716325
    Abstract: An electrolytic cell including a plurality of electrodes arranged to define a plurality of channels between adjacent electrodes is disclosed. Each channel is in fluid communication adjacent a first end with a first adjacent channel and is in fluid communication adjacent a second end with a second adjacent channel.
    Type: Grant
    Filed: November 14, 2001
    Date of Patent: April 6, 2004
    Inventor: Malcolm Barrie Bentley
  • Patent number: 6713308
    Abstract: The analytical process utilized in the system of this invention comprises three (3) step distinct steps wherein an analyte of interest in a test sample is initially labeled and subsequently isolated within a porous medium of a test device. Once isolated within the medium, the label is displaced from the analyte, or from the complex with the analyte, and converted, under electrolytic condition, to a metallic species which is caused test to deposit upon a working electrode of the test device. This working electrode is part of an electrode array that is positioned coincident with the porous medium, yet maintained physically remote therefrom. This deposit is then stripped from the working electrode, under anodic stripping conditions, and the current generated within the electrode array monitored. The characteristic response curve that is produced thereby can be correlated with the identity and concentration of the analyte(s) with the test sample.
    Type: Grant
    Filed: May 12, 2000
    Date of Patent: March 30, 2004
    Inventors: Fang Lu, Frank N. W. Lu, Kai Hua Wang
  • Publication number: 20040055878
    Abstract: An anode for the electrolysis of aluminium is disclosed. The anode comprises an electrode 10, and a head 22 for suspending the electrode and for supplying electricity to the electrode 10. A slot 14 is provided in the surface of the electrode 10. The slot 14 has a neck. Means for inserting the head 22 into the slot 14 of the electrode 10 are provided in the electrode 10. A portion of the head 22 has a larger cross-section than the neck of the slot 14. The head 22 is mounted in the slot 14 of the electrode 10 with the portion of larger cross-section below the neck of the slot 14. The head 22 is therefore retained in the slot 14 of the electrode 10 when the electrode 10 is suspended.
    Type: Application
    Filed: June 26, 2003
    Publication date: March 25, 2004
    Inventor: Zelimkhan S. Tsomaev
  • Publication number: 20040045813
    Abstract: A heater function and an electrostatic chuck function are incorporated in a ceramic plate for placing a wafer, and the ceramic plate is fixed to a cooling jacket with ceramic bolts having a low coefficient of thermal conductivity with an intervening heat insulating member. In order to transmit heat input in the wafer to the water-cooling jacket with high repeatability, a heat-conducting member having elasticity in the vertical direction is sandwiched between the ceramic plate and the cooling jacket. The degradation of temperature distribution of wafers due to the radiant heat radiation from the sidewall of the ceramic plate to the chamber can be minimized by covering the circumference of the ceramic plate with a radiation insulator.
    Type: Application
    Filed: September 3, 2002
    Publication date: March 11, 2004
    Inventors: Seiichiro Kanno, Ken Yoshioka, Ryoji Nishio, Saburou Kanai, Hideki Kihara, Koji Okuda, Manabu Edamura
  • Publication number: 20040035694
    Abstract: Contact assemblies, electroplating machines with contact assemblies, and methods for making contact assemblies that are used in the fabrication of microelectronic workpieces. The contact assemblies can be wet-contact assemblies or dry-contact assemblies. A contact assembly for use in an electroplating system can comprise a support member and a contact system coupled to the support member. The support member, for example, can be a ring or another structure that has an inner wall defining an opening configured to allow the workpiece to move through the support member along an access path. In one embodiment, the support member is a conductive ring having a plurality of posts depending from the ring that are spaced apart from one another by gaps. The contact system can be coupled to the posts of the support member. The contact system can have a plurality of contact members projecting inwardly into the opening relative to the support member and transversely with respect to the access path.
    Type: Application
    Filed: April 7, 2003
    Publication date: February 26, 2004
    Inventors: Robert W. Batz, John M. Pedersen, John L. Klocke, Linlin Chen
  • Publication number: 20040020765
    Abstract: The present invention relates to an edge insulation member for an electrode plate used for electrolytic refinement of metal, and to a fixing method for it. On a tip portion 22A of a main body 22, a fitting groove 23 and a jaw portion 24 for tightly fitting an electrode plate 1 are formed to extend along the lengthwise direction of the main body 22. On a base end portion of the main body 22, an engagement notch 25 for fitting a support rod 26 is formed to extend along the lengthwise direction of the main body 22. A plurality of pin insertion holes 27 are formed on the side surface of the jaw portion 24. Fitting jigs made up from a pin 30 and a stopper 40 is removably fitted in this pin insertion hole 27. The support rod 26 is removably fitted in the engagement notch 25.
    Type: Application
    Filed: May 27, 2003
    Publication date: February 5, 2004
    Inventors: Hiroshi Tanaka, Fumihiko Shimizu
  • Patent number: 6685808
    Abstract: An electrochemical gas sensor is provided which can be assembled economically and in a few steps. The electrodes (1, 2, 3) with associated electric lines are applied in a planiform manner to a membrane strip, which is impermeable to the electrolyte but permeable to gases. The membrane strip (6) is deposited in the sensor housing in a zigzag-folded pattern, so that the membrane strip limits the opening of the sensor housing for the entry of the measured gas. The electrodes (1, 2, 3) are arranged stacked in the sensor housing (5, 7) at spaced locations from one another due to the membrane strip (6) deposited in a zigzag-folded pattern.
    Type: Grant
    Filed: November 5, 2002
    Date of Patent: February 3, 2004
    Assignee: Dragerwerk Aktiengesellschaft
    Inventor: Peter Tschuncky
  • Publication number: 20040016639
    Abstract: An electrolytic cell for the reduction of aluminum having a layer of interlocking cathode tiles positioned on a cathode block. Each tile includes a main body and a vertical restraining member to prevent movement of the tiles away from the cathode block during operation of the cell. The anode of the electrolytic cell may be positioned about 1 inch from the interlocking cathode tiles.
    Type: Application
    Filed: July 29, 2002
    Publication date: January 29, 2004
    Inventors: Alton T. Tabereaux, Guy L. Fredrickson, Eric Groat, Thomas Mroz, Alan Ulicny, Mark F. Walker