Forming Multiple Superposed Electrolytic Coatings Patents (Class 205/170)
  • Publication number: 20020153258
    Abstract: The process is provided involving formation of multilayer components in which a photoresist-type material is used not only as a conventional patterning material, but also as an insulating and/or planarizing material between magnetic or electrically conductive layers. A variety of integrated CMOS/micromagnetic components are thereby capable of being formed, including components containing planar inductors and transformers. Additionally, a particular technique is used to etch gold-containing seed layers from a substrate surface without damaging an electroplated copper coil. Also provided is a magnetic material particularly useful in devices such as inductors and transformers. The material is an amorphous iron-cobalt-phosphorus alloy having a composition of CoxPyFez, where x+y+z=100, x is 5 to 15, y is 13 to 20, and z is the remainder. The alloy typically exhibits a coercivity of 0.1 to 0.
    Type: Application
    Filed: December 20, 2001
    Publication date: October 24, 2002
    Inventors: Robert W. Filas, Trifon M. Liakopoulos, Ashraf Lotfi
  • Patent number: 6447664
    Abstract: Methods for coating metallic articles. In an exemplary embodiment, the method comprises the steps of providing a metallic article having an external surface with an oxide thereon; removing at least part of the oxide from the external surface of the article; and placing a coating on the article. The invention also includes coated metallic articles, and an apparatus for coating metallic articles.
    Type: Grant
    Filed: January 8, 1999
    Date of Patent: September 10, 2002
    Assignee: Scimed Life Systems, Inc.
    Inventors: Steven Taskovics, Paul Dicarlo, Bruce W. Flight, V. Chandru Chandrasekaran, Daniel Vancamp
  • Patent number: 6436265
    Abstract: A fabrication method of fabricating an array of microstructures is provided. The method includes the step of preparing a substrate with a surface including a usable region and a dummy region continuously set around the usable region, at least the usable region and the dummy region of the substrate are electrically conductive and have a conductive portion. The method also includes the steps of forming a first insulating layer on the conductive portion, and forming a plurality of openings in the first insulating layer, the openings being arranged in a predetermined array pattern. Additionally, the method includes the step of performing one of electroplating and electrodeposition using the conductive portion as an electrode to form a first plated or electrodeposited layer in the openings and on the first insulating layer in both the usable region and the dummy region.
    Type: Grant
    Filed: March 24, 2000
    Date of Patent: August 20, 2002
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yasuhiro Shimada, Takayuki Yagi, Takayuki Teshima, Takashi Ushijima
  • Publication number: 20020100694
    Abstract: The invention provides a pretreatment process for electroplating aluminum parts or strip, in which the zincating solution is modified to improve the adhesion of the subsequent electroplate to the substrate. The aluminum part or strip, such as an aluminum coin blank or strip for coin blanks, is pretreated with an improved zincate solution which provides hydroxide ions in an amount in the range of 75-175 gpl, zinc ions in an amount in the range of 15-40 gpl, nickel ions in an amount in the range of 2-10 gpl and copper ions in an amount in the range of 1.5-5 gpl. The pretreatment process preferably includes a copper strike applied from a copper cyanide strike bath at a pH in the range of 8.5-11.0, using a current density in the range of 0.1-10 A/dm2. The pretreatment and electroplating steps arc preferably conducted by barrel plating, in accordance with another aspect of the invention.
    Type: Application
    Filed: August 9, 2001
    Publication date: August 1, 2002
    Inventors: Louis Charles Morin, Angie Kathleen Molnar
  • Publication number: 20020084192
    Abstract: The present invention generally provides a method and an apparatus for forming a doped metal film on a conductive substrate. In one aspect of the invention, the deposition process comprises first depositing a phosphorus doped seed layer on a conductive substrate, and then depositing a conductive metal layer on the phosphorus doped seed layer to form a conductive film. In another aspect, the invention provides a method of processing a substrate including depositing a dielectric layer on a substrate, etching a feature into the substrate, depositing a conductive layer in the feature, depositing a phosphorus doped seed layer on the conductive barrier layer, and depositing a conductive metal layer on the phosphorus doped seed layer. In another aspect of the invention, an apparatus is provided that includes a phosphorus doped anode used for depositing a phosphorus doped metal film, such as a seed layer, in an electrochemical deposition process.
    Type: Application
    Filed: January 16, 2002
    Publication date: July 4, 2002
    Applicant: Applied Materials, Inc.
    Inventors: Dan Maydan, Ashok K. Sinha
  • Patent number: 6413404
    Abstract: Bumps are formed by means of uniform plating in which air can be easily discharged.
    Type: Grant
    Filed: February 11, 2000
    Date of Patent: July 2, 2002
    Assignee: Shinko Electric Industries Co., Ltd.
    Inventors: Yoshihiro Ihara, Takeo Kanazawa, Tsuyoshi Kobayashi
  • Patent number: 6413405
    Abstract: An environmentally functional active carbon and its method of manufacturing is provided. The active carbon has improved adsorption capability against disease-source bacteria and microbes with prominent anti-bacterial and sterilizing effect as well as against organic and inorganic contaminants due to the process of electro-depositing Ag—I to the surface of active carbon and active carbon fiber. This invention creates functional active carbon having outstanding sterilizing effect for disease-source bacteria from known bacteria such as Gram positive bacteria including Staphylococcus, Bacillus subtillis and Gram negative bacteria including Escherichia coli, Pseudomonas Aeruginosa, Klebsiella Pneumonie, Candida Albicans causing albicans as yeast fungus, Trichophyton interdigital causing athlete's foot as a kind of mold.
    Type: Grant
    Filed: December 14, 2000
    Date of Patent: July 2, 2002
    Assignee: Sol Nanochem Ltd.
    Inventor: Woo Young Jung
  • Publication number: 20020074234
    Abstract: An electroplating process for filling damascene structures on substrates, such as wafers having partially fabricated integrated circuits thereon, includes immersing a substrate, under bias, into a copper plating solution to eliminate thin seed layer dissolution and reduce copper oxide, an initiation step to repair discontinuities in a copper seed layer, superfill plating to fill the smallest features, reverse plating to remove the adsorbed plating additives and their by-products from the substrate, a second superfill plating to fill intermediate size features, a second reverse plating to remove adsorbed plating additives and their by-products from the substrate, and a bulk fill plating with high current density to fill large features. The superfill and reverse plating operations may be repeated more than twice prior to bulk filling in order to provide the desired surface morphology.
    Type: Application
    Filed: December 18, 2000
    Publication date: June 20, 2002
    Inventors: Valery M. Dubin, Dave W. Jentz, Christopher Collazo-Davila
  • Patent number: 6395161
    Abstract: A gas sensor and a method for its manufacture are described. The gas sensor has a solid electrolyte having at least one measuring electrode and one porous protective coating. The measuring electrode has an electrically conductive base layer and a further layer, the further layer god being deposited in the pores of the porous protective coating adjacent to the base layer via galvanic deposition. In order to deposit the further layer via galvanic deposition, the basic body, which has been fused with the base layer and the protective coating via vitrification, is immersed in a galvanizing bath, the base layer being connected as the cathode.
    Type: Grant
    Filed: March 23, 2000
    Date of Patent: May 28, 2002
    Assignee: Robert Bosch GmbH
    Inventors: Jens Stefan Schneider, Harald Neumann, Johann Riegel, Frank Stanglmeier, Bernd Schumann
  • Publication number: 20020043466
    Abstract: Methods and apparatus for forming a conformal conductive layer on a substrate for an electroplating process are provided. In one aspect, a method is provided for processing a substrate including depositing a conductive barrier layer on the substrate, and then depositing a nucleation layer on the conductive barrier layer. The nucleation layer is deposited by depositing a first conductive material on the substrate and then depositing a second conductive material on the first conductive material by an electroless deposition process. The second conductive material may comprise nickel, tin, or combinations thereof. The substrate may then be further processed by electroplating a third conductive material on the second conductive material and/or annealing the substrate.
    Type: Application
    Filed: July 6, 2001
    Publication date: April 18, 2002
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Yezdi N. Dordi, Peter W. Hey
  • Patent number: 6361675
    Abstract: A method of manufacturing a semiconductor component includes depositing a first electrically conductive layer (675) over a substrate (270), forming a patterned plating mask (673) over the first electrically conductive layer, coupling a first plating electrode (250) to the first electrically conductive layer without puncturing the plating mask, and plating a second electrically conductive layer onto portions of the first electrically conductive layer. A plating tool for the manufacturing method includes an inner weir (220) located within an outer weir (210), an elastic member (230) over a rim (211) of the outer weir, a pressure ring (240) located over the rim of the outer weir and the elastic member, and a plurality of cathode contacts (250, 251, 252, 253) located between the pressure ring and the outer weir. The substrate is positioned between the elastic member and the pressure ring.
    Type: Grant
    Filed: December 1, 1999
    Date of Patent: March 26, 2002
    Assignee: Motorola, Inc.
    Inventors: Timothy Lee Johnson, Joseph English, David Austin, George F. Carney, Kandis Mae Knoblauch, Douglas G. Mitchell
  • Patent number: 6352634
    Abstract: A method for the manufacture of a leadless substrate with a basic body made of copper or copper base alloy, a solder layer applied to at least one portion of the basic body and made of metals belonging to the group of gold, gold alloy, silver, silver alloy, palladium, and palladium alloy, as well as an intermediate layer arranged between the basic body and the solder layer and made of nickel or nickel alloy, wherein the solder layer consists of at least two separate layers made of different metals and wherein the intermediate layer and the separate layers are deposited by electroplating, characterized in that at least one separate layer is made of silver or silver alloy.
    Type: Grant
    Filed: February 1, 2000
    Date of Patent: March 5, 2002
    Assignee: W. C. Heraeus GmbH & Co. KG
    Inventors: Heinz Förderer, Thomas Frey, Günter Herklotz
  • Publication number: 20020023838
    Abstract: A gas sensor and a method for its manufacture are described. The gas sensor has a solid electrolyte (11) having at least one measuring electrode (15) and one porous protective coating (16). The measuring electrode (15) has an electrically conductive base layer (25) and a further layer (27), the further layer (27) being deposited in the pores of the porous protective coating (16) adjacent to the base layer (25) via galvanic deposition. In order to deposit the further layer (27) via galvanic deposition, the basic body (10), which has been fused with the base layer (25) and the protective coating (16) via vitrification, is immersed in a galvanizing bath, the base layer (25) being connected as the cathode.
    Type: Application
    Filed: March 23, 2000
    Publication date: February 28, 2002
    Inventors: JENS STEFAN SCHNEIDER, HARALD NEUMANN, JOHANN RIEGEL, FRANK STANGLMEIER, BERND SCHUMANN
  • Patent number: 6350364
    Abstract: A method for electroplating copper in trenches, including the steps of providing a semiconductor substrate having a trench formed therein and electrolytically depositing a first copper containing layer having an upper surface and a predetermined thickness within the trench. The first copper deposition step has a first ratio of brighteners concentration:levelers concentration. Then a second copper containing layer having an upper surface and a predetermined thickness is electrolytically deposited over the first copper containing layer. The second copper deposition step has a second ratio of brighteners concentration:levelers concentration that is less than the said first ratio of brighteners concentration:levelers concentration. The second copper containing layer upper surface having a greater planarity than the first copper containing layer upper surface due to an increased concentration of levelers relative to the brighteners in the electrolytic bath.
    Type: Grant
    Filed: February 18, 2000
    Date of Patent: February 26, 2002
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventor: Syun-Ming Jang
  • Publication number: 20020012804
    Abstract: The disclosure relates to a process for forming a deposit on the surface of a metallic or conductive surface. The process employs an electrolytic process to deposit a silicate containing coating or film upon a metallic or conductive surface.
    Type: Application
    Filed: February 1, 2001
    Publication date: January 31, 2002
    Inventors: Robert L. Heimann, William M. Dalton, John Hahn, David M. Price, Wayne L. Soucie, Ravi Chandran
  • Publication number: 20020011415
    Abstract: A method and apparatus for electrochemically depositing a metal into a high aspect ratio structure on a substrate are provided. In one aspect, a method is provided for processing a substrate including positioning a substrate having a first conductive material disposed thereon in a processing chamber containing an electrochemical bath, depositing a second conductive material on the first conductive material as the conductive material is contacted with the electrochemical bath by applying a plating bias to the substrate while immersing the substrate into the electrochemical bath, and depositing a third conductive material in situ on the second conductive material by an electrochemical deposition technique to fill the feature. The bias may include a charge density between about 20 mA*sec/cm2 and about 160 mA*sec/cm2. The electrochemical deposition technique may include a pulse modulation technique.
    Type: Application
    Filed: May 10, 2001
    Publication date: January 31, 2002
    Applicant: Applied Materials, Inc.
    Inventors: Peter Hey, Byung-Sung Leo Kwak
  • Publication number: 20020008034
    Abstract: A process for metallization of a workpiece, such as a semiconductor workpiece. In an embodiment, an alkaline electrolytic copper bath is used to electroplate copper onto a seed layer, electroplate copper directly onto a barrier layer material, or enhance an ultra-thin copper seed layer which has been deposited on the barrier layer using a deposition process such as PVD. The resulting copper layer provides an excellent confirm copper coating that fills trenches, vias, and other microstructures in the workpiece. When used for seed layer enhancement, the resulting copper seed layer provide an excellent conformal copper coating that allows the microstructures to be filled with a copper layer having good uniformity using electrochemical deposition techniques. Further, copper layers that are electroplated in the disclosed manner exhibit low sheet resistance and are readily annealed at low temperatures.
    Type: Application
    Filed: December 7, 2000
    Publication date: January 24, 2002
    Inventors: Linlin Chen, Gregory J. Wilson, Paul R. McHugh, Robert A. Weaver, Thomas L. Ritzdorf
  • Publication number: 20020000381
    Abstract: A process for galvanic depositing of a dispersion layer on a surface of a work piece, in particular a contact layer on a plain bearing half liner, is described, whereby an electrolyte with the dispersed phase finely distributed therein is moved opposite the work piece surface to be coated with formation of a flow component parallel to the surface. In order to create advantageous processing conditions it is proposed that the surface of the work piece to be coated is profiled prior to coating with an average minimum profile depth of 5 &mgr;m and is then coated transversely to a relevant profile direction in a flow component of the electrolyte opposite the work piece surface.
    Type: Application
    Filed: May 16, 2001
    Publication date: January 3, 2002
    Applicant: MIBA GLEITLAGER AKTIENGESELLSCHAFT
    Inventor: Thomas Rumpf
  • Patent number: 6332967
    Abstract: Methods for preparing high quality superconducting oxide precursors which are well suited for further oxidation and annealing to form superconducting oxide films. The method comprises forming a multilayered superconducting precursor on a substrate by providing an electrodeposition bath comprising an electrolyte medium and a substrate electrode, and providing to the bath a plurality of precursor metal salts which are capable of exhibiting superconducting properties upon subsequent treatment. The superconducting precursor is then formed by electrodepositing a first electrodeposited (ED) layer onto the substrate electrode, followed by depositing a layer of silver onto the first electrodeposited (ED) layer, and then electrodepositing a second electrodeposited (ED) layer onto the Ag layer. The multilayered superconducting precursor is suitable for oxidation at a sufficient annealing temperature in air or an oxygen-containing atmosphere to form a crystalline superconducting oxide film.
    Type: Grant
    Filed: November 23, 1999
    Date of Patent: December 25, 2001
    Assignee: Midwest Research Institute
    Inventor: Raghu N. Bhattacharya
  • Patent number: 6329071
    Abstract: Using a chrome plating bath containing organic sulfonic acid, plating is conducted by application of a pulse current to thereby form a crack-free lower chrome layer on a steel substrate. The lower chrome layer has a compressive residual stress of 100 MPa or more and a crystal grain size of from 9 nm to less than 16 nm. Subsequently, by application of a direct current, a cracked upper chrome layer is formed on the lower chrome layer, to thereby obtain a chrome plated part. The lower chrome layer imparts the chrome plated part with heat resistance and corrosion resistance, and the upper chrome layer imparts the chrome plated part with wear resistance and good sliding properties.
    Type: Grant
    Filed: November 2, 1999
    Date of Patent: December 11, 2001
    Assignee: Tokico Ltd.
    Inventors: Yuichi Kobayashi, Junichi Nagasawa, Shoichi Kamiya, Toshiyuki Fukaya, Hiromi Yamauchi, Kazuo Watanabe
  • Patent number: 6328871
    Abstract: The invention generally provides a method for preparing a surface for electrochemical deposition comprising forming a high conductance barrier layer on the surface and depositing a seed layer over the high conductance barrier layer. Another aspect of the invention provides a method for filling a structure on a substrate, comprising depositing a high conductance barrier layer on one or more surfaces of the structure, depositing a seed layer over the barrier layer, and electrochemically depositing a metal to fill the structure.
    Type: Grant
    Filed: August 16, 1999
    Date of Patent: December 11, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Peijun Ding, Tony Chiang, Tse-Yong Yao, Barry Chin
  • Publication number: 20010042689
    Abstract: This invention employs a novel approach to the copper metallization of a workpiece, such as a semiconductor workpiece. In accordance with the invention, an alkaline electrolytic copper bath is used to electroplate copper onto a seed layer, electroplate copper directly onto a barrier layer material, or enhance an ultra-thin copper seed layer which has been deposited on the barrier layer using a deposition process such as PVD. The resulting copper layer provides an excellent conformal copper coating that fills trenches, vias, and other microstructures in the workpiece. When used for seed layer enhancement, the resulting copper seed layer provide an excellent conformal copper coating that allows the microstructures to be filled with a copper layer having good uniformity using electrochemical deposition techniques. Further, copper layers that are electroplated in the disclosed manner exhibit low sheet resistance and are readily annealed at low temperatures.
    Type: Application
    Filed: June 20, 2001
    Publication date: November 22, 2001
    Applicant: Semitool, Inc.
    Inventor: Linlin Chen
  • Patent number: 6319190
    Abstract: The invention relates to radioactive ruthenium sources with a dosage rate of at least 1.5 Gy/min at a distance (water) of 2 mm, consisting of an activity carrier and an encapsulation of the carrier made of a material compatible with the human body. A multilayer system made of metals and/or alloys is galvanically applied on the carrier. At least two layers in said system are made of ruthenium 106 and inactive intermediate layers made of other metals or alloys are provided between the radioactive ruthenium layers. The activity carrier is encapsulated with a material compatible with the human body, for instance a metal or a plastic material. Encapsulation can be carried out by filing a capsule and subsequently sealing or galvanically depositing a top layer made, for instance of hard gold.
    Type: Grant
    Filed: February 14, 2000
    Date of Patent: November 20, 2001
    Assignee: Bebig Isotopentechnik und Umweltdiagnostik GmbH
    Inventors: Werner Schmidt, Renate Freudenberger, Michael Andrassy, Jürgen Ziegler, Detlev Behrendt, Andre Hess
  • Patent number: 6312579
    Abstract: A multilayer engine bearing (10) includes a steel backing (12) having a liner (14) of bearing metal of either copper-lead or aluminum alloys formed on the backing (12). A multilayer overplate (24, 124) is formed on the base lining member (16) and includes at least a first layer (28, 128) electrodeposited from a bath at a first current density to a desired thickness, and at least one additional layer (26, 126) electrodeposited from the same bath but at a different current density and to a desired thickness to yield a composite lamellar overplate structure having layers with differing deposit characteristics, such as hard and soft layers, generated from the same bath at different current densities.
    Type: Grant
    Filed: November 4, 1999
    Date of Patent: November 6, 2001
    Assignee: Federal-Mogul World Wide, Inc.
    Inventors: Brian L. Bank, James R. Toth
  • Patent number: 6306457
    Abstract: A coating system and a method for its manufacture are provided. An electrically conductive base coat and a porous overcoat lying over the base coat are arranged on a ceramic substrate. At least one additional deposited layer is arranged on the base coat in such a way that the additional layer is formed in the pores of the porous overcoat adjacent to the base coat. The additional layer is deposited either by currentless or electrolytic deposition. For electrolytic deposition of the additional layer, the ceramic substrate sintered with the base coat and the overcoat is submerged in an electrolytic bath and the base coat is connected as a cathode. The currentless deposition takes place from a solution of the metal to be deposited with the addition of a reducing agent.
    Type: Grant
    Filed: July 23, 1999
    Date of Patent: October 23, 2001
    Assignee: Robert Bosch GmbH
    Inventors: Jens Stefan Schneider, Frank Stanglmeier, Bernd Schumann
  • Publication number: 20010027922
    Abstract: A composite material includes a structural carrier layer and a relatively thin metal foil layer separated by a release layer. The release layer, that may be an admixture of a metal such as nickel or chromium and a non-metal such as chromium oxide, nickel oxide, chromium phosphate or nickel phosphate, provides a peel strength for the metal foil layer from the carrier strip that is typically on the order of 0.1 pound per inch to 2 pounds per inch. This provides sufficient adhesion to prevent premature separation of the metal foil layer from the carrier layer, but easy removal of the carrier layer when desired. Typically, the metal foil layer is subsequently bonded to a dielectric and the carrier layer then removed. The metal foil layer is then imaged into circuit features in the manufacture of printed circuit boards and flexible circuits.
    Type: Application
    Filed: April 26, 2001
    Publication date: October 11, 2001
    Inventors: Szuchain Chen, Julius Fister, Andrew Vacco, Nina Yukov, A. James Brock
  • Patent number: 6290833
    Abstract: This invention employs a novel approach to the copper metallization of a workpiece, such as a semiconductor workpiece. In accordance with the invention, an alkaline electrolytic copper bath is used to electroplate copper onto a seed layer, electroplate copper directly onto a barrier layer material, or enhance an ultra-thin copper seed layer which has been deposited on the barrier layer using a deposition process such as PVD. The resulting copper layer provides an excellent conformal copper coating that fills trenches, vias, and other microstructures in the workpiece. When used for seed layer enhancement, the resulting copper seed layer provide an excellent conformal copper coating that allows the microstructures to be filled with a copper layer having good uniformity using electrochemical deposition techniques. Further, copper layers that are electroplated in the disclosed manner exhibit low sheet resistance and are readily annealed at low temperatures.
    Type: Grant
    Filed: August 31, 1999
    Date of Patent: September 18, 2001
    Assignee: Semitool, Inc.
    Inventor: Linlin Chen
  • Patent number: 6277253
    Abstract: Embodiments include a method for depositing material onto a workpiece in a sputtering chamber. The method includes sputtering a target and a coil in said sputtering chamber. The coil may have a preformed multilayer structure formed outside of the sputtering chamber. The outer layer of the coil may act as a secondary source of deposition material. The multilayer structure may be formed with an inner region or a base metal and an outer layer of a sputtering metal. The outer layer may be formed using a process such as plasma spraying, arc spraying, flame spraying, ion plating, chemical vapor deposition and electroplating.
    Type: Grant
    Filed: October 6, 1999
    Date of Patent: August 21, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Murali Narasimhan, Xiangbing Li
  • Patent number: 6277263
    Abstract: This invention employs a novel approach to the copper metallization of a workpiece, such as a semiconductor workpiece. In accordance with the invention, an alkaline electrolytic copper bath is used to electroplate copper onto a seed layer, electroplate copper directly onto a barrier layer material, or enhance an ultra-thin copper seed layer which has been deposited on the barrier layer using a deposition process such as PVD. The resulting copper layer provides an excellent conformal copper coating that fills trenches, vias, and other microstructures in the workpiece. When used for seed layer enhancement, the resulting copper seed layer provide an excellent conformal copper coating that allows the microstructures to be filled with a copper layer having good uniformity using electrochemical deposition techniques. Further, copper layers that are electroplated in the disclosed manner exhibit low sheet resistance and are readily annealed at low temperatures.
    Type: Grant
    Filed: August 31, 1999
    Date of Patent: August 21, 2001
    Assignee: Semitool, Inc.
    Inventor: LinLin Chen
  • Publication number: 20010011638
    Abstract: A method of forming a metal seed layer, preferably a copper layer, for subsequent electrochemical deposition. The metal seed layer is formed by the oxidation-reduction reaction of a metal salt with a reducing agent present in a layer on the substrate to be plated. Metal interconnects for semiconductor devices may be produced by the method, which has the advantage of forming the metal seed layer by a simple electrochemical plating process that may be combined with the plating of the interconnect itself as a single-bath operation.
    Type: Application
    Filed: January 4, 2001
    Publication date: August 9, 2001
    Inventors: Terry L. Gilton, Dinesh Chopra
  • Patent number: 6269551
    Abstract: A method employed to dry a copper foil having been subjected to various surface treatments, which method comprises irradiating at least one surface-treated side of the copper foil with near infrared rays to dry the copper foil, and an apparatus suitable to the method. The drying of the copper foil having undergone surface treatments can be accomplished by a simple apparatus with low electric power while controlling the heating of the surface of the copper foil so that the drying temperature can be held at 100° C. or higher at which a eutectic alloying of rust preventive metal and copper foil, for example, alloying (brass formation) of zinc and copper on the surface of the copper foil is effected.
    Type: Grant
    Filed: July 16, 1999
    Date of Patent: August 7, 2001
    Assignee: Mitsui Mining & Smelting Co., Ltd.
    Inventors: Nobuyuki Imada, Kazuhide Oshima
  • Publication number: 20010009226
    Abstract: An electroplating apparatus is provided with a metal target and a device for supporting a semiconductor wafer (or other workpiece) in an electroplating solution. The target (anode) may be located relatively far from the wafer surface (cathode) at the beginning of the plating process, until a sufficient amount of metal is plated. When an initial amount of metal is built up on the wafer surface, the target may be moved closer to the wafer for faster processing. The movement of the target may be controlled automatically according to one or more process parameters.
    Type: Application
    Filed: March 21, 2001
    Publication date: July 26, 2001
    Inventor: Scott E. Moore
  • Patent number: 6258241
    Abstract: A process for electroplating metal on a resistive substrate and the article of manufacture produced therefrom are disclosed. The metal layer is electroplated onto the resistive substrate in an electroplating bath having a polarization parameter &xgr; less than approximately 10 such that the metal layer is of substantially uniform thickness. The polarization parameter &xgr; of less than approximately 10 for the electroplating bath can be achieved by numerous means, such as by providing a low metal ion concentration in the electroplating bath or by adding one or more additives to the electroplating bath. The present invention may be used with a variety of metals and resistive substrates.
    Type: Grant
    Filed: December 10, 1997
    Date of Patent: July 10, 2001
    Assignee: Lucent Technologies, Inc.
    Inventor: Ken M. Takahashi
  • Patent number: 6235180
    Abstract: Method and appartus suitable for forming promptly a phosphate film of excellent performance for cold drawing on the steel wires are disclosed. The steel wires are descaled by cathodic electrolysis in acid solution, and thereafter, phosphate film are formed by cathodic electrolysis on the steel wires. Contacting with the solution containing colloidal titanium are preferable to be carried out between cathodic descaling process and phosphate film forming process. Descaling of cathodic electrolysis may preferably be performed in acid solution at a temperature of lower than 90° C. and in 1˜100 A/dm2. Phosphate film forming may preferably be performed by using electrolyte containing Zn ion, phosphoric acid ion and nitric acid ion, at a temperature of lower than 90° C., in 1˜100 A/dm2 and for 1˜30 seconds.
    Type: Grant
    Filed: June 30, 1999
    Date of Patent: May 22, 2001
    Assignees: Nihon Parkerizing Co., Ltd., Fujisyouji Kabushikigaisha
    Inventors: Naoyuki Kobayashi, Atsushi Moriyama, Shigemasa Takagi, Tomoaki Katsumata
  • Patent number: 6228243
    Abstract: A new method to synthesize crystalline films, superlattices and multilayered devices based on metallic or semiconductor compounds or alloys in electrolyte media on non-crystalline substrates. An automated sequence of flow, equilibration and underpotential electrodeposition from a single electrolyte comprising the film constituents leads to the synthesis of stoichiometric, epitaxial layers. The invention process is based on a new concept of electrochemical molecular layer epitaxy; it provides a relatively simple, fast and inexpensive method to fabricate a wide range of high quality technological materials, ranging from large-area single phase films to multiple quantum-well structures.
    Type: Grant
    Filed: February 8, 1999
    Date of Patent: May 8, 2001
    Inventor: Shalini Menezes
  • Patent number: 6224991
    Abstract: Treated copper foil for use in the manufacture of copper-clad laminates for printed circuit boards, wherein a continuous, very thin cobalt barrier layer, which is substantially non-ferromagnetic, is electrodeposited on a copper bonding treatment electrodeposited on a bonding side of a base copper foil; and a process and electrolyte for producing such treated foil, wherein the electrolyte contains a low concentration of cobalt and certain addition agents.
    Type: Grant
    Filed: September 13, 1999
    Date of Patent: May 1, 2001
    Assignee: Yates Foil USA, Inc.
    Inventors: Charles B. Yates, George Gaskill, Chinsai T. Cheng, Ajesh Shah, Adam M. Wolski, Paul DuFresne
  • Patent number: 6221228
    Abstract: A part fabricating method comprises the steps of machining an object to fabricate a part cast mold, depositing a first metal on a surface of the cast mold to form a first metal layer, and depositing a second metal different in kind from the first metal inside the cast mold to form a part. The first metal layer is then selectively removed to take out the part formed inside the cast mold.
    Type: Grant
    Filed: December 2, 1998
    Date of Patent: April 24, 2001
    Assignee: Seiko Instruments Inc.
    Inventors: Reiko Irie, Masayuki Suda, Toshihiko Sakuhara, Tatsuaki Ataka
  • Patent number: 6207035
    Abstract: A method for manufacturing a metal composite strip for the production of electrical contact components. A film made of tin or a tin alloy is first applied onto an initial material made of an electrically conductive base material. A film of silver is then deposited thereonto. Copper or a copper alloy is preferably used as the base material. The tin film can be applied in the molten state, and the silver film by electroplating. Furthermore, both the tin film and the silver film can be deposited by electroplating. A further alternative provides for manufacturing the tin film in the molten state and the silver film by cathodic sputtering. The diffusion operations which occur in the coating result in a homogeneous film of a tin-silver alloy. This formation can be assisted by way of a heat treatment of the composite strip.
    Type: Grant
    Filed: November 20, 1998
    Date of Patent: March 27, 2001
    Assignee: Stolberger Metallwerke GmbH & Co. KG
    Inventors: Udo Adler, Klaus Schleicher
  • Patent number: 6193871
    Abstract: A nickel electrode prepared by depositing one of an oxide and hydroxide of a zinc-salt to an electrode substrate in a first step and, thereafter, depositing nickel-active material to the electrode substrate in a separate step.
    Type: Grant
    Filed: December 9, 1998
    Date of Patent: February 27, 2001
    Assignee: Eagle-Picher Industries, Inc.
    Inventors: Dwaine K. Coates, Dennis Chiappetti
  • Patent number: 6187454
    Abstract: A method of coating a metal part that is to be soldered, in particular a part of an electrical connector for high frequency signals, in which method a layer of white bronze is applied to said part. The layer of white bronze is initially covered in a fine layer of palladium, and then in a fine layer of gold.
    Type: Grant
    Filed: July 16, 1998
    Date of Patent: February 13, 2001
    Assignee: Radiall
    Inventor: Yves Rivassou
  • Patent number: 6183880
    Abstract: This invention provides a composite foil comprising an aluminum carrier layer and an ultra-thin copper foil having a protective layer disposed between them comprising a porous copper layer and an interpenetrating zinc layer. A process for producing such composite foils comprises the steps of preparing the surface of the aluminum carrier, electrodepositing a porous copper layer on the aluminum carrier layer followed by electrodepositing a zinc layer, and then electrodepositing two layers of copper to form the ultra-thin copper foil. The composite foil provides a uniform bond strength between the aluminum carrier and the protective layer which is adequate to prevent separation of the carrier and ultra-thin copper foil during handling and lamination, but which is significantly lower than the peel strength of a copper/substrate bond, so that the carrier can easily be removed after lamination of the composite foil to an insulating substrate.
    Type: Grant
    Filed: August 7, 1998
    Date of Patent: February 6, 2001
    Assignee: Mitsui Mining & Smelting Co., Ltd.
    Inventors: Junshi Yoshioka, Shinichi Obata, Makoto Dobashi, Takashi Kataoka
  • Patent number: 6165340
    Abstract: A shield is applied to a permeable core in a predetermined pattern, where the predetermined pattern covers less than the entire surface area of the permeable core.
    Type: Grant
    Filed: October 1, 1997
    Date of Patent: December 26, 2000
    Assignee: VLT Corporation
    Inventors: Lance L. Andrus, Cruz R. Calderon, Craig R. Davidson, Patrizio Vinciarelli
  • Patent number: 6126806
    Abstract: A process and structure for enhancing electromigration resistance within a copper film using impurity lamination and other additives to form intermetallic compounds to suppress metal grain boundary growth and metal surface mobility of a composite copper film. The present invention provides an alloy seed layer and laminated impurities to incorporate indium, tin, titanium, their compounds with oxygen, and their complexes with oxygen, carbon, and sulfur into other films. The intermetallics form and segregate to grain boundaries during an annealing process to reduce copper atom mobility. A further aspect of the present invention is the use of high-temperature, inter-diffusion of additives included in an alloy seed layer to form a barrier layer by combining with materials otherwise unsuitable for barrier material functions.
    Type: Grant
    Filed: December 2, 1998
    Date of Patent: October 3, 2000
    Assignee: International Business Machines Corporation
    Inventor: Cyprian E. Uzoh
  • Patent number: 6103086
    Abstract: The reliability of Cu and Cu alloy interconnects is significantly enhanced by controlling the temperature of the electroplating solution during via opening filling to substantially prevent occlusion of the opening. Embodiments of the present invention include electroplating Cu or a Cu alloy from an electroplating solution at a temperature of about 20.degree. C. or less.
    Type: Grant
    Filed: January 5, 1999
    Date of Patent: August 15, 2000
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Christy Woo, Axel Preusse, Sergey Lopatin
  • Patent number: 6099710
    Abstract: A method of controlling excessive electroforming portion of an oscillating plate for an ink-jet printer includes steps of supplying a direct current power to electroform a first layer for a first time period, supplying an alternating current power to electroform a second layer on the first layer for a second time period to form an oscillating layer, coating the second layer with a photoresistive agent at positions where no projection is to be formed and supplying the alternating current power to electroform for a third time period so as to form desired projections on the second layer, whereby no excessive electroforming portion will be formed on the projections.
    Type: Grant
    Filed: November 2, 1998
    Date of Patent: August 8, 2000
    Assignee: DBTEL Incorporated
    Inventor: Michael Mou
  • Patent number: 6083375
    Abstract: A process for producing a terminal metal pad structure electrically interconnecting a package and other components. More particularly, the invention encompasses a process for producing a plurality of corrosion-resistant terminal metal pads. Each pad includes a base pad containing copper which is encapsulated within a series of successively electroplated metal encapsulating films to produce a corrosion-resistant terminal metal pad.
    Type: Grant
    Filed: November 2, 1998
    Date of Patent: July 4, 2000
    Assignee: International Business Machines Corporation
    Inventors: Tien-Jen Cheng, Ajay P. Giri, Ashwani K. Malhotra, John R. Pennacchia, Eric D. Perfecto, Roy Yu
  • Patent number: 6077413
    Abstract: A method for preparing a radioactive, implantable, medical device is provided. The method involves depositing a layer of a radioactive metal that emits beta particles and that has a half-life of between 2 hours and 7 days and a maximum beta energy of between 0.7 and 2.3 MeV onto a metallic surface of the device. In one embodiment, the radioactive metal and a carrier metal are electroplated onto the metallic surface. In another embodiment, a second metallic layer comprising a barrier metal is electroplated onto the radioactive metal layer. A medical device having a metallic surface with a radioactive metallic coating thereon is provided. In one embodiment, the coating comprises a radioactive layer comprising a radioactive metal that emits beta-particles and that has a half-life of between 2 hours and 7 days and an energy level of from about 0.7 MeV to 2.3 MeV and a carrier metal. In another embodiment, the coating further comprises a second layer deposited on the radioactive layer.
    Type: Grant
    Filed: February 6, 1998
    Date of Patent: June 20, 2000
    Assignees: The Cleveland Clinic Foundation, Case Western Reserve University
    Inventors: Urs Hafeli, Uziel Landau, Matt C. Warburton
  • Patent number: 6019886
    Abstract: A method and circuit (14) for monitoring an electroplating operation of an electroplating machine (10) of the type having a first electroplating cell (18) for depositing nickel onto an integrated circuit leadframe (12) and a second electroplating cell (19) for subsequently depositing palladium onto the leadframe (12). A first current (30) is applied in the first electroplating cell (18) to form a nickel deposit on the leadframe (12) and a second current (31) is applied in the second electroplating cell (19) to from a palladium deposit on the nickel deposit. The second current (31) is greater than the first current (30) if the electroplating machine (10) is operating normally. The first current (30) and second current (31) are compared in a comparator (44) during the electroplating operation, and if the second current (31) is less than the first current (30), an error signal is generated on an output line (50). If desired, the electroplating machine (10) may be stopped in response to the error signal.
    Type: Grant
    Filed: September 16, 1997
    Date of Patent: February 1, 2000
    Assignee: Texas Instruments Incorporated
    Inventors: David M. Drew, Paul R. Moehle
  • Patent number: 5989406
    Abstract: A magnetically shape-anisotropic material is made by providing a matrix with a plurality of elongated holes, and depositing first and second magnetic materials in each hole so as to form elongated particles including the first material adjacent one end and the second material adjacent the opposite end. One of the materials is a magnetically soft material having relatively low coercivity whereas the other material is a magnetically hard material having relatively high coercivity. The particles have dimensions transverse to their axes of elongation smaller than the magnetic domain size of the magnetically soft material.
    Type: Grant
    Filed: October 17, 1997
    Date of Patent: November 23, 1999
    Assignee: NanoSciences Corporation
    Inventors: Charles P. Beetz, Jr., John Steinbeck, Robert W. Boerstler, David R. Winn
  • Patent number: 5976342
    Abstract: A method for manufacturing an orifice plate that is built up in multiple layers and includes a complete axial through passage for a fluid. The orifice plate includes inlet openings, outlet openings, and at least one conduit lying between them. The layers or functional planes of the orifice plate are built up on one another by electroplating metal deposition (multilayer electroplating). Orifice plates manufactured in this manner are particularly suitable for use on injection valves in fuel injection systems, in paint nozzles, inhalers, or inkjet printers, or in freeze-drying processes, for spraying or injecting fluids such as beverages.
    Type: Grant
    Filed: March 3, 1998
    Date of Patent: November 2, 1999
    Assignee: Robert Bosch GmbH
    Inventors: Stefan Arndt, Dietmar Hahn, Heinz Fuchs, Gottfried Flik, Guenter Dantes, Gilbert Moersch, Detlef Nowak, Joerg Heyse, Beate Ader, Frank Schatz