Having Specific Type Of Active Device (e.g., Cmos) Patents (Class 257/204)
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Patent number: 7952118Abstract: A semiconductor includes a channel region in a semiconductor substrate, a gate dielectric film on the channel region, and a gate on the gate dielectric film. The gate includes a doped metal nitride film, formed from a nitride of a first metal and doped with a second metal which is different from the first metal, and a conductive polysilicon layer formed on the doped metal nitride film. The gate may further include a metal containing capping layer interposed between the doped metal nitride film and the conductive polysilicon layer.Type: GrantFiled: November 28, 2007Date of Patent: May 31, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Hyung-suk Jung, Jong-ho Lee, Sung-kee Han, Ha-jin Lim
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Publication number: 20110121366Abstract: A semiconductor device includes a first single crystal silicon layer including first transistors, a first alignment mark, and at least one metal layer overlying the first single crystal silicon layer for interconnecting the first transistors; a second layer overlying the at least one metal layer, wherein the second layer includes a plurality of second transistors; and a connection path connecting the first transistors and the second transistors and including at least a first strip, a second strip, and a through via connecting the first strip and the second strip, wherein the second strip is substantially orthogonal to the first strip and wherein the through via is substantially away from both ends of the first strip and both ends of the second strip.Type: ApplicationFiled: January 28, 2011Publication date: May 26, 2011Applicant: NuPGA CorporationInventors: Zvi Or-Bach, Brian Cronquist, Israel Beinglass, J.L. de Jong, Deepak C. Sekar, Paul Lim
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Patent number: 7943454Abstract: A semiconductor device structure is provided which includes a first field effect transistor (“FET”) having a first channel region, a first source region, a first drain region and a first gate conductor overlying the first channel region. A second FET is included which has a second channel region, a second source region, a second drain region and a second gate conductor overlying the second channel region. The first and second gate conductors can be portions of a single elongated conductive member extending over both the first and second channel regions. A first stressed film may overlie the first FET and the first stressed film may apply a stress having a first value to the first channel region. A second stressed film may overlie the second FET and the second stressed film may apply a stress having a second value to the second channel region. The second value is substantially different from the first value.Type: GrantFiled: March 31, 2008Date of Patent: May 17, 2011Assignee: International Business Machines CorporationInventors: Xiangdong Chen, Haining S. Yang
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Publication number: 20110108888Abstract: A semiconductor device includes a first mono-crystallized layer including first transistors, and a first metal layer forming at least a portion of connections between the first transistors; and a second layer including second transistors, the second transistors including mono-crystalline material, the second layer overlying the first metal layer, wherein the first metal layer includes aluminum or copper, and wherein the second layer is less than one micron in thickness and includes logic cells.Type: ApplicationFiled: November 18, 2010Publication date: May 12, 2011Applicant: NuPGA CorporationInventors: Zvi Or-Bach, Brian Cronquist, Israel Beinglass, J. L. de Jong, Deepak C. Sekar
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Patent number: 7939895Abstract: Disclosed herein is a semiconductor device including a semiconductor substrate provided with an N-type FET and P-type FET, with a gate electrode of the N-type FET and a gate electrode of the P-type FET having undergone full-silicidation, wherein the gate electrode of the P-type FET has such a sectional shape in the gate length direction that the gate length decreases as one goes upwards from a surface of the semiconductor substrate, and the gate electrode of the N-type FET has such a sectional shape in the gate length direction that the gate length increases as one goes upwards from the surface of the semiconductor substrate.Type: GrantFiled: September 4, 2008Date of Patent: May 10, 2011Assignee: Sony CorporationInventor: Katsuhiko Fukasaku
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Patent number: 7937252Abstract: A CMOS model generating apparatus 1 according to the present invention generates a CMOS model by converting an In-Ip space into an xn-xp space such that a typical condition TT and corner conditions FF, SS in the In-Ip space become (0, 0), (?, ?) and (??, ??) in the xn-xp space, determining an ellipse fitting to the respective mappings of the corner conditions FF, SS, FS and SF with the mapping (0, 0) of the typical condition TT as a center, expressing two independent principal components in the form of a Gaussian distribution using the major and minor axes of this ellipse as axes of the principal components, and obtaining a probability distribution determining deviations of the Gaussian distribution such that the cumulative probability within this ellipse becomes equal to the one presumed by the corner conditions FF, SS, FS and SF.Type: GrantFiled: October 23, 2006Date of Patent: May 3, 2011Assignees: Kyoto University, Jedat Innovation Inc.Inventors: Hidetoshi Onodera, Xuliang Zhang, Nobuto Ono
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Publication number: 20110084313Abstract: One inventive aspect relates to a method for forming integrated circuits and circuits obtained therewith. The method of forming a circuit pattern in a device layer of a semiconductor substrate comprises decomposing the circuit pattern in two constituent orthogonal subpatterns. The method further comprises transferring the pattern of a first subpattern to a hard mask layer overlying the device layer. The method further comprises transferring the pattern of the other subpattern to a photosensitive layer overlying the patterned hard mask layer. The method further comprises patterning the device layer using the patterned hard mask layer and the patterned photosensitive layer as a mask. The method further comprises removing the patterned hard mask layer and the patterned photosensitive layer. Furthermore memory or logic circuits obtained using the above technique are described.Type: ApplicationFiled: December 15, 2010Publication date: April 14, 2011Applicant: IMECInventors: Liesbeth Witters, Axel Nackaerts, Gustaaf Verhaegen
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Patent number: 7923755Abstract: In the present invention, a decoupling capacitance circuit, a first output terminal and a second output terminal are provided. The decoupling capacitance circuit comprises a TDDB control circuit consisting of a first Tr and a second Tr, and a third Tr. Conductivity types of the first and second Trs are different from each other. A source of the first Tr is connected to a first power supply wiring, and a drain of the first Tr is connected to a gate of the second Tr. A source of the second Tr is connected to a second power supply wiring, and a drain of the second Tr is connected to a gate of the first Tr. The third and first Trs have the same conductivity type. A source and a drain of the third Tr are connected to the first power supply wiring, and a gate of the third Tr is connected to the drain of the second Tr. The first output terminal is connected to the drain of the first Tr, and the second output terminal is connected to the drain of the second Tr.Type: GrantFiled: August 16, 2010Date of Patent: April 12, 2011Assignee: Panasonic CorporationInventors: Emi Mizushino, Hidetoshi Nishimura, Junichi Yano
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Publication number: 20110079823Abstract: A vertical transistor includes a substrate, a gate, a source region, a drain region, a channel region and a gate dielectric layer. A trench is formed in the substrate, and the gate is disposed in the trench. The source region is disposed in the substrate beneath the gate. The drain region is disposed above the gate. The channel region is disposed at two sides of the gate and located between the source region and the drain region. The gate dielectric layer is located between the gate and the channel region.Type: ApplicationFiled: October 4, 2009Publication date: April 7, 2011Applicant: NANYA TECHNOLOGY CORPORATIONInventors: Tieh-Chiang Wu, Yu-Teh Chiang
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Patent number: 7919793Abstract: Disclosed herein is a semiconductor integrated circuit including: a plurality of standard cells including a transistor having a gate electrode and arranged in combination with each other; a metallic wiring layer interconnecting the standard cells to form a desired circuit; and a plurality of reserve cells having a gate electrode, unconnected with the metallic wiring layer and arranged on a periphery of the standard cells, wherein each of the gate electrodes of the standard cells and the reserve cells has a gate pad section and two gate finger sections extending from the gate pad section to sides opposite to each other in a predetermined direction, and length of the gate pad sections of the reserve cells in a direction orthogonal to the predetermined direction is equal to or more than a sum total value of three times a minimum line width in the metallic wiring layer and twice a minimum separation distance.Type: GrantFiled: November 3, 2009Date of Patent: April 5, 2011Assignee: Sony CorporationInventor: Shusuke Iwata
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Patent number: 7911833Abstract: An anti-parallel diode structure and method of fabrication is presently disclosed. In some embodiments, an anti-parallel diode structure has a semiconductor region comprising a first insulator layer disposed between a first semiconductor layer and a second semiconductor layer. The semiconductor region can be bound on a first side by a first metal material and bound on a second side by a second metal material so that current below a predetermined value is prevented from passing through the semiconductor region and current above the predetermined value passes through the semiconductor region.Type: GrantFiled: July 13, 2009Date of Patent: March 22, 2011Assignee: Seagate Technology LLCInventors: Nurul Amin, Insik Jin, Venugopalan Vaithyanathan, Wei Tian, YoungPil Kim
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Patent number: 7910963Abstract: A transistor of a pixel cell for use in a CMOS imager with a low threshold voltage of about 0.3 V to less than about 0.7 V is disclosed. The transistor is provided with high dosage source and drain regions around the gate electrode and with the halo implanted regions and/or the lightly doped LDD regions and/or the enhancement implanted regions omitted from at least one side of the gate electrode. The low threshold transistor is electrically connected to a high voltage transistor with a high threshold voltage of about 0.7 V.Type: GrantFiled: February 23, 2010Date of Patent: March 22, 2011Assignee: Round Rock Research, LLCInventor: Howard E. Rhodes
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Patent number: 7888706Abstract: A cell based integrated circuit chip includes a top voltage supply rail and a bottom voltage supply rail and a plurality of metal layers defining at least one filler cell. The filler cell is formed by a first field effect transistor of a first type conductivity, typically an n-channel MOSFET. The source or drain electrodes of the n-channel MOSFET are arranged to as act as a capacitor with respect to the bottom voltage supply rail and to which at least one of the source and drain electrodes is connected. A second field effect transistor of an opposite-type conductivity to the first field effect transistor, typically a p-channel MOSFET, is also provided. The source or drain electrodes of the p-channel MOSFET are connected in series between the top voltage supply rail and a gate electrode of the n-channel MOSFET. The gate electrode of the p-channel MOSFET is connected to a source of ground potential via a resistor.Type: GrantFiled: May 31, 2006Date of Patent: February 15, 2011Assignee: Infineon Technologies AGInventor: Pramod Acharya
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Publication number: 20110031536Abstract: In a layout structure of a standard cell including off transistors 126, 127 unnecessary for logic operation of a circuit, dummy via contacts 116, 117 are disposed on impurity diffusion regions 103, 106 of the off transistors 126, 127, respectively. Dummy metal interconnects 122, 123 are connected to the dummy via contacts 116, 117, respectively. Thus, variations in the density of via contacts, which are one of causes lowering the production yield of semiconductor integrated circuits, is reduced, improving manufacturing defects of the via contacts.Type: ApplicationFiled: October 15, 2010Publication date: February 10, 2011Applicant: PANASONIC CORPORATIONInventors: Nana Okamoto, Masaki Tamaru, Hidetoshi Nishimura
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Patent number: 7882482Abstract: A layout method that enables a high power switch mode voltage regulator integrated circuit to generate a large output current and achieve substantially low switching loss is disclosed. The layout method includes forming an array of switching elements on a semiconductor die, each switching element including a plurality of discrete transistors configured to have a substantially reduced ON resistance; and forming a plurality of gate driver circuits on the same die among the switching elements, all using a single metal process. Each gate driver circuit placed substantially close to and dedicated to drive only one switching element so that the gate coupling capacitance resistance product is substantially reduced.Type: GrantFiled: October 12, 2007Date of Patent: February 1, 2011Assignee: Monolithic Power Systems, Inc.Inventor: Paul Ueunten
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Patent number: 7879677Abstract: A FinFET includes a fin that is on a substrate and extends away from the substrate. A device isolation layer is disposed on the substrate on both sides of the fin. An insulating layer is between the fin and the substrate. The insulating layer is directly connected to the device isolation layer and has a different thickness than the device isolation layer. A gate electrode crosses over the fin. A gate insulating layer is between the gate electrode and the fin. Source and drain regions are on the fins and on opposite sides of the gate electrode. Related nonvolatile memory devices that include FinFETs and methods of making FinFETs and nonvolatile memory devices are also disclosed.Type: GrantFiled: July 10, 2008Date of Patent: February 1, 2011Assignee: Samsung Electronics Co., Ltd.Inventor: Chang-Hyun Lee
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Patent number: 7875909Abstract: A gate array of a semiconductor substrate on which plural unit cells are arranged in parallel, the unit cells having the same pattern that includes a source potential region VDD, a PMOS, an NMOS and a ground potential region GND. Metal wiring lines being formed, with an insulating layer between, on the unit cells, with contacts that make electrical connection between the metal wiring lines and the unit cell transistors. The gate wiring of a transistor in a non-used unit cell is used in place of a metal wiring line. By doing so, the area of metal wiring lines in a gate array is reduced and the array wiring efficiency is increased.Type: GrantFiled: November 17, 2006Date of Patent: January 25, 2011Assignee: Oki Semiconductor Co., Ltd.Inventor: Hirofumi Uchida
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Patent number: 7875529Abstract: Methods, devices, modules, and systems providing semiconductor devices in a stacked wafer system are described herein. One embodiment includes a first wafer for NMOS transistors in a CMOS architecture and a second wafer for PMOS transistors in the CMOS architecture, with the first wafer being bonded and electrically coupled to the second wafer to form at least one CMOS device. Another embodiment includes a number of DRAM capacitors formed on a first wafer and support circuitry associated with the DRAM capacitors formed on a second wafer, with the first wafer being bonded and electrically coupled to the second wafer to form a number of DRAM cells. Another embodiment includes a first wafer having a number of vertical transistors coupled to a data line and a second wafer having amplifier circuitry associated with the number of vertical transistors, with the first wafer being bonded and electrically coupled to the second wafer.Type: GrantFiled: October 5, 2007Date of Patent: January 25, 2011Assignee: Micron Technology, Inc.Inventors: Leonard Forbes, Paul A. Farrar, Arup Bhattacharyya, Hussein I. Hanafi, Warren M. Farnworth
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Patent number: 7871878Abstract: A method of manufacturing a semiconductor device that includes a first and second device regions on a substrate. The method includes the steps of forming an insulation layer on the substrate, laminating a first semiconductor layer having a plane orientation different from the surface of the substrate on the insulation layer and exposing the substrate by removing the insulation layer and the first semiconductor layer from the second device region. A second semiconductor layer having the same plane orientation as the substrate and that is made of a strained layer is formed by epitaxial growth on the exposed substrate in the second device region.Type: GrantFiled: April 17, 2009Date of Patent: January 18, 2011Assignee: Sony CorporationInventors: Junli Wang, Toyotaka Kataoka, Masaki Saito
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Patent number: 7868359Abstract: In a semiconductor device including multiple unit cells arranged in an array, transistors are affected by a stress from an STI at different degrees depending on the position in the array. As a result, a variation occurs in transistor characteristic. In a semiconductor device according to the present invention, each of predetermined transistors in outermost unit blocks in the array has a transistor size according to the stress from the STI.Type: GrantFiled: February 15, 2008Date of Patent: January 11, 2011Assignee: Renesas Electronics CorporationInventor: Toshifumi Takahashi
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Patent number: 7863653Abstract: A semiconductor device is provided comprising an oxide layer over a first silicon layer and a second silicon layer over the oxide layer, wherein the oxide layer is between the first silicon layer and the second silicon layer. The first silicon layer and the second silicon layer comprise the same crystalline orientation. The device further includes a graded germanium layer on the first silicon layer, wherein the graded germanium layer contacts a spacer and the first silicon layer and does not contact the oxide layer. A lower portion of the graded germanium layer comprises a higher concentration of germanium than an upper portion of the graded germanium layer, wherein a top surface of the graded germanium layer lacks germanium.Type: GrantFiled: November 20, 2006Date of Patent: January 4, 2011Assignee: International Business Machines CorporationInventors: Henry K. Utomo, Judson R. Holt, Haining S. Yang
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Patent number: 7863652Abstract: To provide a semiconductor integrated circuit device advantageous against EM and ESD. A plurality of I/O cells; a power wire formed of a plurality of interconnect layers over the above-described I/O cells; a bonding pad formed in an upper layer of the power wire and in a position corresponding to the I/O cell; and lead-out areas capable of electrically coupling the I/O cell to the bonding pad are provided. The above-described power wire includes a first power wire and a second power wire, and the above-described I/O cell includes first elements coupled to the first power wire and second elements coupled to the second power wire. The first element is placed on the first power wire side, and the second element is placed on the second power wire side. The first power wire and the second power wire can allow for a high current due to the interconnect layers over the I/O cells, thus having robustness against EM and ESD.Type: GrantFiled: December 10, 2009Date of Patent: January 4, 2011Assignee: Renesas Electronics CorporationInventors: Shunsuke Toyoshima, Kazuo Tanaka, Masaru Iwabuchi
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Patent number: 7864560Abstract: A nano device includes an array of cells disposed in rows and columns and constructed over a substrate, and an optical circuit disposed over the substrate, wherein the optical circuit is formed by nano elements in a self-assembled process.Type: GrantFiled: November 12, 2009Date of Patent: January 4, 2011Inventor: Bao Tran
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Patent number: 7863174Abstract: A vertical pillar transistor may include a plurality of lower pillars, a plurality of upper pillars, a first insulation part, a second insulation part and a word line. The plurality of lower pillars protrudes substantially perpendicular to a substrate and is defined by a plurality of trenches. The plurality of lower pillars extends along a second direction and may be separated from each other along a first direction substantially perpendicular to the second direction. The plurality of upper pillars may be formed on the plurality of lower pillars. The plurality of upper pillars has a width substantially smaller than that of the plurality of lower pillars. The first insulation part has a substantially uniform thickness on a sidewall of each of the plurality of lower pillars. The second insulation part may be formed on the first insulation part to fill a gap between the adjacent upper pillars.Type: GrantFiled: March 26, 2009Date of Patent: January 4, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Hui-Jung Kim, Yong-Chul Oh, Jae-Man Yoon, Hyun-Woo Chung, Hyun-Gi Kim, Kang-Uk Kim
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Patent number: 7855404Abstract: A complementary BiCMOS semiconductor device comprises a substrate of a first conductivity type and a number of active regions which are provided therein and which are delimited in the lateral direction by shallow field insulation regions, in which vertical npn-bipolar transistors with an epitaxial base are arranged in a first subnumber of the active regions and vertical pnp-bipolar transistors with an epitaxial base are arranged in a second subnumber of the active regions, wherein either one transistor type or both transistor types have both a collector region and also a collector contact region in one and the same respective active region. To improve the high-frequency properties exclusively in a first transistor type in which the conductivity type of the substrate is identical to that of the collector region, an insulation doping region is provided between the collector region and the substrate.Type: GrantFiled: December 1, 2004Date of Patent: December 21, 2010Assignee: IHP GmbH—Innovations for High Performance Microelectronics/Leibniz-Instituit fur Innovative MikroelektronikInventors: Bernd Heinenman, Jürgen Drews, Steffen Marschmayer, Holger Rücker
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Patent number: 7855111Abstract: Hybrid orientation technology (HOT) substrates for CMOS ICs include (100)-oriented silicon regions for NMOS and (110) regions for PMOS for optimizing carrier mobilities in the respective MOS transistors. Boundary regions between (100) and (110) regions must be sufficiently narrow to support high gate densities and SRAM cells. This invention provides a method of forming a HOT substrate containing regions with two different silicon crystal lattice orientations, with boundary morphology less than 40 nanometers wide. Starting with a direct silicon bonded (DSB) wafer of a (100) substrate wafer and a (110) DBS layer, NMOS regions in the DSB layer are amorphized by a double implant and recrystallized on a (100) orientation by solid phase epitaxy (SPE). Crystal defects during anneal are prevented by a low temperature oxide layer on the top surface of the wafer. An integrated circuit formed with the inventive method is also disclosed.Type: GrantFiled: August 7, 2009Date of Patent: December 21, 2010Assignee: Texas Instruments IncorporatedInventors: Haowen Bu, Shaofeng Yu, Angelo Pinto, Ajith Varghese
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Patent number: 7842975Abstract: A semiconductor device includes a substrate portion and a number of diffusion regions defined within the substrate portion. The diffusion regions are separated from each other by a non-active region of the substrate portion. The semiconductor device includes a number of linear gate electrode segments defined to extend over the substrate portion in a single common direction. In one embodiment, the diffusion regions are defined in a non-symmetrical manner relative to a centerline of the substrate portion. In another embodiment, the substrate portion corresponds to a region of the semiconductor device in which first and second cells are defined, and respectively include diffusion shapes of different size. In another embodiment, one or more of the diffusion regions is defined to have a periphery formed by more than four orthogonally related sides.Type: GrantFiled: September 17, 2008Date of Patent: November 30, 2010Assignee: Tela Innovations, Inc.Inventors: Scott T. Becker, Michael C. Smayling
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Patent number: 7838908Abstract: A semiconductor device includes: a semiconductor substrate; a PFET formed on the substrate, the PFET includes a SiGe layer disposed on the substrate, a high-K dielectric layer disposed on the SiGe layer, a first metallic layer disposed on the high-k dielectric layer, a first intermediate layer disposed on the first metallic layer, a second metallic layer disposed on the first intermediate layer, a second intermediate layer disposed on the second metallic layer, and a third metallic layer disposed on the second intermediate layer; an NFET formed on the substrate, the NFET includes the high-k dielectric layer, the high-k dielectric layer being disposed on the substrate, the second intermediate layer, the second intermediate layer being disposed on the high-k dielectric layer, and the third metallic layer, the third metallic layer being disposed on the second intermediate layer. Alternatively, the first metallic layer is omitted.Type: GrantFiled: January 26, 2009Date of Patent: November 23, 2010Assignee: International Business Machines CorporationInventors: Unoh Kwon, Siddarth A. Krishnan, Takashi Ando, Michael P. Chudzik, Martin M. Frank, William K. Henson, Rashmi Jha, Yue Liang, Vijay Narayanan, Ravikumar Ramachandran, Keith Kwong Hon Wong
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Patent number: 7830025Abstract: A contact layout structure includes a substrate having at least a first region defined thereon, plural sets of first contact layouts positioned along a predetermined direction in the first region, and a plurality of second contact layouts positioned in the first region. Each set of the first contact layout has two square contact units and two adjacent rectangle contact units positioned between the two square contact units.Type: GrantFiled: May 19, 2008Date of Patent: November 9, 2010Assignee: United Microelectronics Corp.Inventor: Wen-Chieh Wang
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Patent number: 7829926Abstract: A demultiplexer using transistors for accessing memory cell arrays. The demultiplexer includes (a) a substrate; (b) 2N semiconductor regions which are parallel to one another and run in a first direction; (c) first N gate electrode lines, which (i) run in a second direction which is perpendicular to the first direction, (ii) are electrically insulated from the 2N semiconductor regions, and (iii) are disposed between the first plurality of memory cells and the contact region; (d) a contact region; (e) a first plurality of memory cells. An intersection transistor exists at each of intersections between the first N gate electrode lines and the 2N semiconductor regions. In response to pre-specified voltage potentials being applied to the contact region and the first N gate electrode lines, memory cells of the first plurality of memory cells disposed on only one of the 2N semiconductor regions are selected.Type: GrantFiled: May 5, 2008Date of Patent: November 9, 2010Assignee: International Business Machines CorporationInventors: Kailash Gopalakrishnan, Rohit Sudhir Shenoy
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Patent number: 7826251Abstract: A static random access memory cell includes a metal hi-k layer; a poly-SiON gate stack over the metal hi-k layer; a plurality of inverters disposed within the poly-SiON gate stack; and a plurality of field effect transistors placed in the metal hi-k layer.Type: GrantFiled: May 22, 2008Date of Patent: November 2, 2010Assignee: International Business Machines CorporationInventors: Leland Chang, Jeffrey W. Sleight
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Patent number: 7825437Abstract: In general, in one aspect, a method includes forming N-diffusion and P-diffusion fins in a semiconductor substrate. A P-diffusion gate layer is formed over the semiconductor substrate and removed from the N-diffusion fins. A pass-gate N-diffusion gate layer is formed over the semiconductor substrate and removed from the P-diffusion fins and pull-down N-diffusion fins. A pull-down N-diffusion layer is formed over the semiconductor substrate.Type: GrantFiled: December 28, 2007Date of Patent: November 2, 2010Assignee: Intel CorporationInventors: Ravi Pillarisetty, Suman Datta, Jack Kavalieros, Brian S. Doyle, Uday Shah
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Publication number: 20100270563Abstract: A method of manufacturing a semiconductor device includes: forming, on one surface of a substrate, source electrodes and drain electrodes, a semiconductor layer provided between the source electrodes and the drain electrodes, and a gate insulator layer provided to cover a surface of the semiconductor layer; forming an insulator layer on a surface of the gate insulator layer, the insulator layer having through portions; and forming electrodes on the gate insulator layer around the bottom of the through portions and on the insulator layer in the vicinity of the through portions by a vapor film formation method simultaneously so as not to come into contact with each other, forming gate electrodes by using the electrodes formed on the gate insulator layer, and forming pixel electrodes electrically connected to the source electrodes or the drain electrodes by using the electrodes formed on the insulator layer.Type: ApplicationFiled: April 21, 2010Publication date: October 28, 2010Applicant: SEIKO EPSON CORPORATIONInventor: Takeo KAWASE
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Patent number: 7812396Abstract: A semiconductor device having a first semiconductor region and second semiconductor region including impurities formed on an insulating layer formed on a semiconductor substrate, an insulator formed between the first semiconductor region and the second semiconductor region, a first impurity diffusion control film formed on the first semiconductor region and a second impurity diffusion control film formed on the second semiconductor region, a channel layer formed on the first impurity diffusion control film and second impurity diffusion film to cross at right angles with a direction where the first semiconductor region and the second semiconductor region are extended, a gate insulating film formed on the channel layer and a gate electrode formed on the gate insulating layer.Type: GrantFiled: March 20, 2007Date of Patent: October 12, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Masaru Kito, Hideaki Aochi, Ryota Katsumata, Masaru Kidoh
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Patent number: 7807990Abstract: A semiconductor device includes: a p-channel MIS transistor including: a first insulating layer formed on a semiconductor region between a source region and a drain region, and containing at least silicon and oxygen; a second insulating layer formed on the first insulating layer, and containing hafnium, silicon, oxygen, and nitrogen, and a first gate electrode formed on the second insulating layer. The first and second insulating layers have a first and second region respectively. The first and second regions are in a 0.3 nm range in the film thickness direction from an interface between the first insulating layer and the second insulating layer. Each of the first and second regions include aluminum atoms with a concentration of 1×1020 cm?3 or more to 1×1022 cm?3 or less.Type: GrantFiled: May 24, 2007Date of Patent: October 5, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Masato Koyama, Yoshinori Tsuchiya, Yuuichi Kamimuta, Reika Ichihara, Katsuyuki Sekine
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Patent number: 7808001Abstract: An n-channel MOS transistor and a p-channel MOS transistor are formed on a semiconductor substrate 100. The p-channel MOS transistor includes a gate electrode 102a, a first offset sidewall 103a formed on side surfaces of the gate electrode 102a so as to contain fine particles 110 of group IV semiconductor therein. The n-channel MOS transistor includes a gate electrode 102b and a second offset sidewall 103b formed on side surfaces of the gate electrode 102b. After ion implantation of group IV semiconductor, heat treatment is performed to form the fine particles 110, so that a thickness of the first offset sidewall 103a can be made larger than a thickness of the second offset sidewall 103b.Type: GrantFiled: June 11, 2007Date of Patent: October 5, 2010Assignee: Panasonic CorporationInventor: Shinji Takeoka
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Patent number: 7808017Abstract: A semiconductor integrated circuit having a first p-type MOS transistor; a first n-type MOS transistor; a second p-type MOS transistors; a and second n-type MOS transistors having fourth gate electrodes disposed so as to be adjacent to the second diffused regions of the first n-type MOS transistor. The semiconductor integrated circuit further having an absolute value of a threshold voltage of the second p-type MOS transistor being higher than an absolute value of a threshold voltage of the first p-type MOS transistor, and an absolute value of a threshold voltage of the second n-type MOS transistor being higher than an absolute value of a threshold voltage of the first n-type MOS transistor.Type: GrantFiled: February 1, 2010Date of Patent: October 5, 2010Assignee: Kabushiki Kaisha ToshibaInventor: Mototsugu Hamada
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Patent number: 7800151Abstract: In the present invention, a decoupling capacitance circuit, a first output terminal and a second output terminal are provided. The decoupling capacitance circuit comprises a TDDB control circuit consisting of a first Tr and a second Tr, and a third Tr. Conductivity types of the first and second Trs are different from each other. A source of the first Tr is connected to a first power supply wiring, and a drain of the first Tr is connected to a gate of the second Tr. A source of the second Tr is connected to a second power supply wiring, and a drain of the second Tr is connected to a gate of the first Tr. The third and first Trs have the same conductivity type. A source and a drain of the third Tr are connected to the first power supply wiring, and a gate of the third Tr is connected to the drain of the second Tr. The first output terminal is connected to the drain of the first Tr, and the second output terminal is connected to the drain of the second Tr.Type: GrantFiled: March 1, 2007Date of Patent: September 21, 2010Assignee: Panasonic CorporationInventors: Emi Mizushino, Hidetoshi Nishimura, Junichi Yano
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Patent number: 7800135Abstract: A semiconductor power switch having an array of basic cells in which peripheral regions in the active drain region extend beside the perimeter of the base-drain junction, the peripheral regions being of higher dopant density than the rest of the second drain layer. Intermediate regions in the centre of the active drain region are provided of lighter dopant density than the rest of the second drain layer. This provides an improved compromise between the on-state resistance and the breakdown voltage by enlarging the current conduction path at in its active drain region. On the outer side of each edge cell of the array, the gate electrode extends over and beyond at least part of the perimeters of the base-source junction and the base-drain junction towards the adjacent edge of the die. Moreover, on the outer side of each edge cell, the second drain layer includes a region of reduced dopant density that extends beyond the gate electrode right to the adjacent edge of the die.Type: GrantFiled: July 25, 2005Date of Patent: September 21, 2010Inventors: Jean-Michel Reynes, Stephane Alves, Alain Deram, Blandino Lopes, Joel Margheritta
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Patent number: 7800223Abstract: A chip-scale package houses a monolithic semiconductor die containing first and second lateral metal oxide semiconductor field effect transistors (MOSFETs) formed on a surface of the semiconductor die. The MOSFETs are formed using a lateral double diffused metal oxide semiconductor structure. The first MOSFET has a first conduction terminal coupled to a first package terminal and a second conduction terminal coupled to a second package terminal. The second MOSFET has a first conduction terminal coupled to a control terminal of the first MOSFET, a second conduction terminal coupled to a third package terminal, and a control terminal coupled to a fourth package terminal. A resistor is coupled between the first package terminal and the control terminal of the first MOSFET. A logic level enable signal controls the first MOSFET to enable the second MOSFET to connect a DC voltage from the first package terminal to the second package terminal.Type: GrantFiled: January 18, 2006Date of Patent: September 21, 2010Assignee: Great Wall Semiconductor CorporationInventors: Samuel J. Anderson, David N. Okada
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Patent number: 7795098Abstract: An apparatus and method for manufacturing rotated field effect transistors. The method comprises providing a substrate including a first gate structure and a second gate structure, which are not parallel to each other. The method further includes performing a first ion implant substantially orthogonal to an edge of the first gate structure to form a first impurity region and performing a second ion implant at a direction different than that of the first ion implant and substantially orthogonal to an edge of the second gate structure to form a second impurity region under the edge of the second gate structure.Type: GrantFiled: October 17, 2007Date of Patent: September 14, 2010Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, Myung-hee Na, Edward J. Nowak
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Patent number: 7790561Abstract: The present invention provides a method for manufacturing a semiconductor device, a semiconductor device, and a method for manufacturing an integrated circuit including a semiconductor device. The method for manufacturing the semiconductor device, without limitation, may include providing a gate dielectric layer (413, 423) and a gate electrode layer (418, 428) over a substrate (310), and forming a gate sidewall spacer (610, 630) along one or more sidewalls of the gate dielectric layer (413, 423) and the gate electrode layer (418, 428) using a plasma enhanced chemical vapor deposition process, and forming different hydrogen concentration in NMOS and PMOS sidewall spacers (610, 630) using a local hydrogen treatment (LHT) method.Type: GrantFiled: July 1, 2005Date of Patent: September 7, 2010Assignee: Texas Instruments IncorporatedInventors: Richard P. Rouse, Shashank S. Ekbote, Haowen Bu
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Patent number: 7791114Abstract: A transistor of a pixel cell for use in a CMOS imager with a low threshold voltage of about 0.3 V to less than about 0.7 V is disclosed. The transistor is provided with high dosage source and drain regions around the gate electrode and with the halo implanted regions and/or the lightly doped LDD regions and/or the enhancement implanted regions omitted from at least one side of the gate electrode. The low threshold transistor is electrically connected to a high voltage transistor with a high threshold voltage of about 0.7 V.Type: GrantFiled: March 20, 2008Date of Patent: September 7, 2010Assignee: Round Rock Research, LLCInventor: Howard E. Rhodes
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Patent number: 7781282Abstract: A shared contact structure, semiconductor device and method of fabricating the semiconductor device, in which the shared contact structure may include a gate electrode disposed on an active region of a substrate and including facing first and second sidewalls. The first sidewall may be covered with an insulating spacer. The source/drain regions may be formed within the active region adjacent the first sidewall, and provided on the opposite side of the second sidewall. A corner protection pattern may be formed adjacent the source/drain regions and the insulating spacer, and covered by an inter-layer dielectric. A shared contact plug may be formed through the inter-layer dielectric, to be in contact with the gate electrode, corner protection pattern and source/drain regions.Type: GrantFiled: March 17, 2006Date of Patent: August 24, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Abraham Yoo, Hee-Sung Kang, Heon-Jong Shin
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Publication number: 20100207130Abstract: An active matrix substrate 40 according to the present invention includes a conductive film 44 and a wiring 80 for supplying a signal to the conductive film 44, characterized in that the wiring 80 includes a first conductive layer 61 and a second conductive layer 62 having a relatively large line width in comparison with the first conductive layer 61 and laminated so as to cover the first conductive layer 61, and the conductive film 44 is arranged in a matrix pattern, and at least a portion of the conductive film 44 is disposed overlapping the wiring 80.Type: ApplicationFiled: May 23, 2008Publication date: August 19, 2010Applicant: SHARP KABUSHIKI KAISHAInventor: Hideaki Sunohara
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Publication number: 20100187573Abstract: Disclosed herein is a semiconductor integrated circuit including: a plurality of standard cells including a transistor having a gate electrode and arranged in combination with each other; a metallic wiring layer interconnecting the standard cells to form a desired circuit; and a plurality of reserve cells having a gate electrode, unconnected with the metallic wiring layer and arranged on a periphery of the standard cells, wherein each of the gate electrodes of the standard cells and the reserve cells has a gate pad section and two gate finger sections extending from the gate pad section to sides opposite to each other in a predetermined direction, and length of the gate pad sections of the reserve cells in a direction orthogonal to the predetermined direction is equal to or more than a sum total value of three times a minimum line width in the metallic wiring layer and twice a minimum separation distance.Type: ApplicationFiled: November 3, 2009Publication date: July 29, 2010Applicant: Sony CorporationInventor: Shusuke Iwata
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Patent number: 7763944Abstract: The invention relates to a CMOS device (10) with an NMOST I and PMOST 2 having gate regions (1D,2D) comprising a compound containing both a metal and a further element. According to the invention the first and second conducting material both comprise a compound containing as the metal a metal selected from the group comprising molybdenum and tungsten and both comprise as the further element an element selected from the group comprising carbon, oxygen and the chalcogenides. Preferably both the first and second conducting material comprise a compound of molybdenum and carbon or oxygen. The invention also provides an attractive method of manufacturing such a device.Type: GrantFiled: August 10, 2005Date of Patent: July 27, 2010Assignee: NXP B.V.Inventors: Jacob C. Hooker, Robert Lander, Robertus Wolters
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Publication number: 20100181600Abstract: A method of designing integrated circuits includes providing a first chip and a second chip identical to each other. Each of the first chip and the second chip includes a base layer including a Logic Transistor Unit (LTU) array. The LTU array includes LTUs identical to each other and arranged in rows and columns. The method further includes connecting the base layer of the first chip to form a first application chip; and connecting the base layer of the second chip to form a second application chip different from the first application chip.Type: ApplicationFiled: November 12, 2009Publication date: July 22, 2010Inventors: Oscar M. K. Law, Kuo H. Wu
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Patent number: 7759744Abstract: A semiconductor device 100 includes a silicon substrate 102, an N-type MOSFET 118 including a first high dielectric constant film 111 and a polycrystalline silicon film 114 on the silicon substrate 102, and a P-type MOSFET 120 including a second high dielectric constant film 12 and a polycrystalline silicon film 114 juxtaposed to N-type MOSFET 118 on the silicon substrate 102. The second high dielectric constant film 112 is formed to have the film thickness thinner than the film thickness of the first high dielectric constant film 111. The first high dielectric constant film 111 and the second high dielectric constant film 112 contains one or more element(s) selected from Hf and Zr.Type: GrantFiled: May 16, 2005Date of Patent: July 20, 2010Assignees: NEC Electronics Corporation, NEC CorporationInventors: Naohiko Kimizuka, Kiyotaka Imai, Yuri Masuoka, Toshiyuki Iwamoto, Motofumi Saitoh, Hirohito Watanabe, Masayuki Terai
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Patent number: 7755089Abstract: A semiconductor device includes a semiconductor substrate, p-type first and n-type second semiconductor regions formed on the substrate so as to be insulated with each other, n-channel and p-channel MOS transistors formed on the first and second semiconductor regions, the n-channel transistor including a first pair of source/drain regions formed on the first semiconductor region, a first gate insulator formed in direct contact with the first semiconductor region and formed as an amorphous insulator containing at least La, and a first gate electrode formed on the first gate insulator, the p-channel MOS transistor including a second pair of source/drain regions formed opposite to each other on the second semiconductor region, a second gate insulator including a silicon oxide film and the amorphous insulating film formed thereon on the second semiconductor region, and a second gate electrode formed on the second gate insulator.Type: GrantFiled: September 20, 2007Date of Patent: July 13, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Masamichi Suzuki, Masato Koyama