Programmable Signal Paths (e.g., With Fuse Elements, Laser Programmable, Etc) Patents (Class 257/209)
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Patent number: 9064871Abstract: An electronic fuse structure including a first Mx metal comprising a conductive cap, an Mx+1 metal located above the Mx metal, wherein the Mx+1 metal does not comprise a conductive cap, and a via, wherein the via electrically connects the Mx metal to the Mx+1 metal in a vertical orientation.Type: GrantFiled: July 25, 2014Date of Patent: June 23, 2015Assignee: International Business Machines CorporationInventors: Junjing Bao, Elbert E. Huang, Yan Zun Li, Dan Moy
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Patent number: 9059171Abstract: A semiconductor fuse and methods of making the same. The fuse includes a fuse element and a compressive stress liner that reduces the electro-migration resistance of the fuse element. The method includes forming a substrate, forming a trench feature in the substrate, depositing fuse material in the trench feature, depositing compressive stress liner material over the fuse material, and patterning the compressive stress liner material.Type: GrantFiled: June 17, 2013Date of Patent: June 16, 2015Assignee: International Business Machines CorporationInventors: Chih-Chao Yang, Haining S. Yang
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Patent number: 9059170Abstract: An electronic fuse structure including an Mx level comprising an Mx metal, and an Mx+1 level above the Mx level, the Mx+1 level including an Mx+1 metal and a via electrically connecting the Mx metal to the Mx+1 metal in a vertical orientation, where the Mx+1 metal comprises a thick portion and a thin portion, and where the Mx metal, the Mx+1 metal, and the via are substantially filled with a conductive material.Type: GrantFiled: February 6, 2013Date of Patent: June 16, 2015Assignee: International Business Machines CorporationInventors: Junjing Bao, Griselda Bonilla, Samuel S. Choi, Ronald G. Filippi, Wai-Kin Li, Erdem Kaltalioglu, Naftali E. Lustig, Andrew H. Simon, Ping-Chuan Wang, Lijuan Zhang
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Patent number: 9018632Abstract: A TFT substrate is provided in which a wire defect can be easily solved. A method of solving a wire defect in the TFT substrate is also provided. In an embodiment, the TFT substrate is configured so that (i) a plurality of gate lines and a plurality of source lines are arranged in a matrix manner, (ii) a TFT is provided in at least one of intersection regions where the plurality of gate lines and the plurality of source lines intersect with each other, and (iii) the at least one of intersection regions is divided by a slit, which is formed in a corresponding one of the plurality of gate lines, so that the at least intersection region is divided into parts arranged along a longitudinal direction of the plurality of source lines.Type: GrantFiled: April 23, 2012Date of Patent: April 28, 2015Assignee: Sharp Kabushiki KaishaInventor: Makoto Shiomi
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Patent number: 9006795Abstract: A memory cell is provided that includes a diode and a resistance-switching material layer coupled in series with the diode. The resistance-switching material layer has a thickness between 20 and 65 angstroms. Other aspects are also provided.Type: GrantFiled: February 14, 2014Date of Patent: April 14, 2015Assignee: SanDisk 3D LLCInventors: Xiaoyu Yang, Roy E. Scheuerlein, Feng Li, Albert T. Meeks
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Patent number: 9006794Abstract: An integrated circuit with electrically programmable fuse circuitry coupled to a programming transistor is provided. The programming transistor may be a metal-oxide-semiconductor transistor that is separated from other circuitry in an integrated circuit substrate with shallow trench isolation. The electrically programmable fuse circuitry may be formed in a second layer above the integrated circuit substrate using a conductive material which may be tungsten-based. This second layer may further include interconnect wires made from the same conductive material. The electrically programmable fuse may be coupled to the programming transistor through vias and routing paths in a fourth layer above the integrated circuit substrate. The routing paths in the fourth layer may be made from a conductive material which may be different than the fuse conductive material used to form the programmable fuse circuitry.Type: GrantFiled: January 24, 2014Date of Patent: April 14, 2015Assignee: Altera CorporationInventors: Shuang Xie, Shankar Sinha, Cheng-Hsiung Huang
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Patent number: 9006857Abstract: An IR sensor includes a suspended micro-platform having a support layer and a device layer disposed thereon. IR absorbers are disposed in or on the device layer. IR radiation received by the IR absorbers heats an on-platform junction of each of a plurality of series-connected thermoelectric devices operating in a Seebeck mode, the devices producing a voltage indicative of the received IR. Other thermoelectric devices are used to cool the platform, and a pressure sensing arrangement is used to detect loss of vacuum or pressure leaks.Type: GrantFiled: April 4, 2014Date of Patent: April 14, 2015Inventor: William N. Carr
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Patent number: 9000489Abstract: A multi-field effect transistor (FET) device includes a first FET device arranged on a substrate, the first FET device including a first active region and a second active region, a second FET device arranged on the substrate, the second FET device including a first active region and a second active region, and a first conductive interconnect electrically connecting the first active region of the first FET device to the first active region of the second FET device, the first conductive interconnect having a first cross sectional area proximate to the first active region of the first FET device that is greater than a second cross sectional area proximate to the first active region of the second FET device.Type: GrantFiled: October 31, 2012Date of Patent: April 7, 2015Assignee: International Business Machines CorporationInventor: Ning Lu
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Patent number: 9000490Abstract: A semiconductor package includes an interposer and a plurality of integrated circuit (IC) dice disposed on and intercoupled via the interposer. A first IC die has a clock speed rating that is greater than a clock speed rating of another of the IC dice. A plurality of programmable voltage tuners are coupled to the plurality of IC dice, respectively. A first voltage tuner is coupled to the first IC die, and the first voltage tuner is programmed to reduce a voltage level of voltage input to the first voltage tuner and output the reduced voltage to the first IC die.Type: GrantFiled: April 19, 2013Date of Patent: April 7, 2015Assignee: Xilinx, Inc.Inventors: Thao H. T. Vo, Andy H. Gan, Xiao-Yu Li, Matthew H. Klein
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Patent number: 8975122Abstract: An arrangement of nonvolatile memory devices, having at least one memory device level stacked level by level above a semiconductor substrate, each memory level comprising an oxide layer substantially disposed above a semiconductor substrate, a plurality of word lines substantially disposed above the oxide layer; a plurality of bit lines substantially disposed above the oxide layer; a plurality of via plugs substantially in electrical contact with the word lines and, an anti-fuse dielectric material substantially disposed on side walls beside the bit lines and substantially in contact with the plurality of bit lines side wall anti-fuse dielectrics.Type: GrantFiled: January 6, 2014Date of Patent: March 10, 2015Assignee: Macronix International Co., Ltd.Inventor: Hsiang-Lan Lung
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Patent number: 8969999Abstract: A fuse device and method for fabricating the fuse device is disclosed. An exemplary fuse device includes a first contact and a second contact coupled with a metal-semiconductor alloy layer, wherein the metal-semiconductor alloy layer extends continuously between the first contact and the second contact. The metal-semiconductor alloy layer is disposed over an epitaxial layer that is disposed over a fin structure of a substrate.Type: GrantFiled: October 27, 2011Date of Patent: March 3, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Minchang Liang, Shien-Yang Wu, Wei-Chang Kung
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Patent number: 8963284Abstract: A semiconductor device includes: an e-fuse gate, a floating pattern between the e-fuse gate and an e-fuse active portion, a blocking dielectric pattern between the floating pattern and the e-fuse gate, and an e-fuse dielectric layer between the floating pattern and the e-fuse active portion. The floating pattern includes a first portion between the e-fuse gate and the e-fuse active portion and a pair of second portions extended upward along both sidewalls of the e-fuse gate from both edges of the first portion.Type: GrantFiled: September 23, 2013Date of Patent: February 24, 2015Assignee: Samsung Electronics Co., Ltd.Inventor: Deok-Kee Kim
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Patent number: 8958227Abstract: Multiple integrated circuits (ICs) die, from different wafers, can be picked-and-placed, front-side planarized using a vacuum applied to a planarizing disk, and attached to each other or a substrate. The streets between the IC die can be filled, and certain techniques or fixtures allow application of monolithic semiconductor wafer processing for interconnecting different die. High density I/O connections between different IC die can be obtained using structures and techniques for aligning vias to I/O structures, and programmably routing IC I/O lines to appropriate vias. Existing IC die can be retrofitted for such interconnection to other IC die, such as by using similar techniques or tools.Type: GrantFiled: October 22, 2013Date of Patent: February 17, 2015Assignee: CrossFire Technologies, Inc.Inventors: Kevin Atkinson, Clifford H. Boler
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Patent number: 8941110Abstract: Semiconductor structures are provided containing an electronic fuse (E-fuse) that includes a fuse element and at least one underlying tungsten contact that is used for programming the fuse element. In some embodiments, a pair of neighboring tungsten contacts is used for programming the fuse element. In another embodiment, an overlying conductive region can be used in conjunction with one of the underlying tungsten contacts to program the fuse element. In the disclosed structures, the fuse element is in direct contact with upper surfaces of a pair of underlying tungsten contacts. In one embodiment, the semiconductor structures may include an interconnect level located atop the fuse element. The interconnect level has a plurality of conductive regions embedded therein. In other embodiments, the fuse element is located within an interconnect level that is located atop the tungsten contacts.Type: GrantFiled: November 17, 2011Date of Patent: January 27, 2015Assignee: International Business Machines CorporationInventors: Rajiv V. Joshi, Chih-Chao Yang
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Patent number: 8937365Abstract: In a semiconductor integrated circuit device including fuse elements for performing laser trimming processing, a dummy fuse formed of a first polycrystalline Si film is formed between the fuse elements formed of a second polycrystalline Si film, and a nitride film is formed on the dummy fuse. In this manner, the step difference of an interlayer film caused by the presence and absence of the fuse element formed of the polycrystalline Si film is eliminated, to thereby prevent SOG films having moisture-absorption characteristics on an inner surface of a fuse opening region and on an internal element side from connecting to each other.Type: GrantFiled: September 30, 2013Date of Patent: January 20, 2015Assignee: Seiko Instruments Inc.Inventor: Yukimasa Minami
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Patent number: 8933491Abstract: An array of vertically stacked tiers of memory cells includes a plurality of horizontally oriented access lines within individual tiers of memory cells and a plurality of horizontally oriented global sense lines elevationally outward of the tiers. A plurality of select transistors is elevationally inward of the tiers. A plurality of pairs of local first and second vertical lines extends through the tiers. The local first vertical line within individual of the pairs is in conductive connection with one of the global sense lines and in conductive connection with one of the two source/drain regions of one of the select transistors. The local second vertical line within individual of the pairs is in conductive connection with another of the two source/drain regions of the one select transistor. Individual of the memory cells include a crossing one of the local second vertical lines and one of the horizontal access lines and programmable material there-between.Type: GrantFiled: March 29, 2011Date of Patent: January 13, 2015Assignee: Micron Technology, Inc.Inventor: Zengtao T. Liu
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Patent number: 8933492Abstract: A one time programmable memory cell having an anti-fuse device with a low threshold voltage independent of core circuit process manufacturing technology is presented. A two transistor memory cell having a pass transistor and an anti-fuse device, or a single transistor memory cell having a dual thickness gate oxide, are formed in a high voltage well that is formed for high voltage transistors. The threshold voltage of the anti-fuse device differs from the threshold voltages of any transistor in the core circuits of the memory device, but has a gate oxide thickness that is the same as a transistor in the core circuits. The pass transistor has a threshold voltage that differs from the threshold voltages of any transistor in the core circuits, and has a gate oxide thickness that differs from any transistor in the core circuits.Type: GrantFiled: November 7, 2008Date of Patent: January 13, 2015Assignee: Sidense Corp.Inventor: Wlodek Kurjanowicz
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Patent number: 8916910Abstract: Reconfigurable 3D interconnect is provided that can be used for digital and RF signals. The reconfigurable 3D interconnect can include an array of vertical interconnect vias (or TSVs) providing a signal path between a first core element of a 3D IC and a second core element of the 3D IC stacked above the first core element. A routing circuit can be used to route a signal from the first core element to the second core element through selected TSVs of the array of TSVs providing the signal path between the first core element and the second core element. The routing circuit allows re-routing of the signal through different selected TSVs during operation, which can provide real time adjustments and capacity optimization of the TSVs passing the particular signal between the elements.Type: GrantFiled: December 13, 2010Date of Patent: December 23, 2014Assignee: Research Foundation of State University of New YorkInventors: Robert E. Geer, Wei Wang, Tong Jing
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Publication number: 20140368965Abstract: [Subject] To provide a highly-reliable and small-size chip component, e.g., a chip resistor having an accurate resistance value. [Solution] The chip resistor (10) includes: a substrate (11); a plurality of resistor elements each having a resistive film portion (20) provided on the substrate (11) and an aluminum-containing interconnection film portion (21) provided in contact with the resistive film portion (20); electrodes (12, 13) provided on the substrate (11); and a plurality of fuses (F) each having an aluminum-containing interconnection film portion integral with the aluminum-containing interconnection film portion of the resistor element and disconnectably connecting the resistor element to the electrodes (12, 13). [Effect] The resistance of the chip resistor can be adjusted at a desired resistance value by selectively disconnecting desired ones of the fuses.Type: ApplicationFiled: January 8, 2013Publication date: December 18, 2014Applicant: ROHM CO., LTD.Inventors: Yasuhiro Kondo, Hiroshi Tamagawa, Hiroki Yamamoto
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Patent number: 8896090Abstract: A fuse, a method of making the fuse and a circuit containing the fuse. The fuse includes an electrically conductive and conformal liner on sidewalls and the bottom of a trench; a copper layer on the conformal liner, a first thickness of the copper layer over the bottom of the trench in a lower portion of the trench greater than a second thickness of the copper layer over the sidewalls of the trench in an abutting upper portion of the trench; and a dielectric material on the copper layer in the trench, the dielectric material filling remaining space in the upper portion of said trench.Type: GrantFiled: February 22, 2013Date of Patent: November 25, 2014Assignee: International Business Machines CorporationInventors: Nicholas R. Hogle, Baozhen Li, Keith Kwong Hon Wong, Chih-Chao Yang
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Patent number: 8889490Abstract: As for a memory element implemented in a semiconductor device typified by an RFID, it is an object of the present invention to reduce manufacturing steps and to provide a memory element and a memory circuit having the element with reduced cost. It is a feature of the present invention that a memory element sandwiched between electrodes has an organic compound, and an electrode connected to a semiconductor element controlling the memory element functions as an electrode of the memory element. In addition, an extremely thin semiconductor film formed on an insulated surface is used for the memory element; therefore cost can be reduced.Type: GrantFiled: July 2, 2010Date of Patent: November 18, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Yoshinobu Asami
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Publication number: 20140332856Abstract: An electronic fuse structure including a first Mx metal comprising a conductive cap, an Mx+1 metal located above the Mx metal, wherein the Mx+1 metal does not comprise a conductive cap, and a via, wherein the via electrically connects the Mx metal to the Mx+1 metal in a vertical orientation.Type: ApplicationFiled: July 25, 2014Publication date: November 13, 2014Inventors: Junjing Bao, Elbert E. Huang, Yan Zun Li, Dan Moy
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Patent number: 8878254Abstract: A semiconductor memory device according to one embodiment of the present invention includes a dielectric film configured to store information depending on presence or absence of a conductive path therein, and a plurality of electrodes provided to contact a first surface of the dielectric film. The conductive path can be formed between two electrodes arbitrarily selected form the plurality of electrodes. The conductive path has a rectifying property of allowing a current to flow more easily in a first direction connecting arbitrary two electrodes than in a second direction opposite to the first direction. The largest possible number of the conductive paths that may be formed is larger than the number of the plurality of electrodes.Type: GrantFiled: October 28, 2013Date of Patent: November 4, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Yoshiaki Fukuzumi, Hideaki Aochi
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Patent number: 8866171Abstract: To provide a light-emitting element or a light-emitting device in which power is not consumed wastefully even if a short-circuit failure occurs. The present invention focuses on heat generated due to a short-circuit failure which occurs in a light-emitting element. A fusible alloy which is melted at temperature T2 by heat generated due to the short-circuit failure when the short-circuit failure occurs is used for at least one of a pair of electrodes in a light-emitting element, and a layer containing an organic composition which is melted at temperature T1 is formed on a surface of the electrode opposite to a surface facing the other electrode. The present inventors have reached a structure in which the temperature T2 is lower than temperature T3 at which the light-emitting element is damaged and the temperature T1 is lower than the temperature T2, and this structure can achieve the objects.Type: GrantFiled: March 6, 2012Date of Patent: October 21, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yasuo Nakamura, Satoshi Seo, Masaaki Hiroki
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Patent number: 8860175Abstract: A fuse of a semiconductor device and a method for forming the same are disclosed. The fuse includes a first metal line formed over a semiconductor substrate, a second metal line spaced apart from the first metal line, and a contact fuses formed of a metal contact coupled to the first metal line and the second metal line. Upper parts of the contact fuses overlap with each other, and lower parts are spaced apart from each other. Since the fuse is formed of a metal contact, fuse oxidation and fuse movement can be prevented. A conventional metal-contact fabrication process can be used, so that mass production of semiconductor devices is possible. In addition, the fuse region is reduced in size, reducing production costs.Type: GrantFiled: December 18, 2012Date of Patent: October 14, 2014Assignee: SK hynix Inc.Inventor: Chi Hwan Jang
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Patent number: 8860095Abstract: An electronic circuit, includes a plurality of electronic devices configured as interconnected to provide one or more circuit functions and at least one interconnect structure that includes a first patterned conductor connected to a terminal of a first electronic device in the electronic circuit. A second patterned conductor is connected to a terminal of a second electronic device in the electronic circuit. A first electrode is connected to a portion of the first patterned conductor, and a second electrode is connected to a portion of the second patterned conductor. A metal oxide region is formed between the first electrode and the second electrode. The metal oxide region provides a reprogrammable switch function between the first patterned conductor and the second patterned conductor by providing a conductivity that is selectively controlled by a direction and an amount of current that passes through the metal oxide region during a switch setting operation for the metal oxide region.Type: GrantFiled: February 13, 2013Date of Patent: October 14, 2014Assignee: International Business Machines CorporationInventors: Stephen M. Gates, Daniel C. Edelstein, Kailash Gopalakrishnan, Ramachandran Muralidhar
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Patent number: 8848443Abstract: A semiconductor memory device includes at least one first semiconductor chip including a plurality of memory cells and a second semiconductor chip including a fuse circuit configured to repair defective cells among the memory cells of the at least one first semiconductor chip.Type: GrantFiled: August 9, 2011Date of Patent: September 30, 2014Assignee: Hynix Semiconductor Inc.Inventor: Saeng-Hwan Kim
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Publication number: 20140252419Abstract: A MEMS logic device comprising agate which pivots on a torsion hinge, two conductive channels on the gate, one on each side of the torsion hinge, source and drain landing pads under the channels, and two body bias elements under the gate, one on each side of the torsion hinge, so that applying a threshold bias between one body bias element and the gate will pivot the gate so that one channel connects the respective source and drain landing pad, and vice versa. An integrated circuit with MEMS logic devices on the dielectric layer, with the source and drain landing pads connected to metal interconnects of the integrated circuit. A process of forming the MEM switch.Type: ApplicationFiled: May 20, 2014Publication date: September 11, 2014Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: James N. Hall, Lance W. Barron, Cuiling Gong
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Patent number: 8829645Abstract: An e-fuse structure and method has an anode; a fuse link (a first end of the fuse link is connected to the anode); a cathode (a second end of the fuse link opposite the first end is connected to the cathode); and a silicide layer on the fuse link. The silicide layer has a first silicide region adjacent the anode and a second silicide region adjacent the cathode. The second silicide region comprises an impurity not contained within the first silicide region. Further, the first silicide region is thinner than the second silicide region.Type: GrantFiled: June 12, 2008Date of Patent: September 9, 2014Assignee: International Business Machines CorporationInventors: Deok-Kee Kim, Ahmet S Ozcan, Haining S Yang
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Publication number: 20140246704Abstract: An integrated circuit device includes a fuse in which a pair of terminal portions connected to different conductive components is provided on both sides of a cuttable portion that is cut as needed by being irradiated with laser light, the cuttable portion and the pair of terminal portions being integrally formed. The cuttable portion may be thinner than the terminal portions.Type: ApplicationFiled: August 22, 2013Publication date: September 4, 2014Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Kenji YAMADA, Hideki KIMIJIMA
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Publication number: 20140246705Abstract: Aspects of the invention relate to techniques of testing interconnects in stacked designs for leakage defects. Logic “1” or “0” is first applied to one end of an interconnect during a first pulse. Then, logic value at the one end is captured, which triggered by an edge of a second pulse. The first pulse precedes the second pulse by a time period being selected from a plurality of delay periods. The plurality of delay periods is generated by a device shared by a plurality of interconnects.Type: ApplicationFiled: March 3, 2014Publication date: September 4, 2014Applicant: Mentor Graphics CorporationInventors: Shi-Yu Huang, Kun-Han Tsai, Wu-Tung Cheng, Yu-Hsiang Lin, Li-Ren Huang
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Patent number: 8809997Abstract: An e-fuse structure includes a first doped region and a second doped region formed in a substrate. The first doped region has a first conductivity type and the second doped region has a second conductivity type different from the first conductivity type. The first and second doped regions contact each other. A conductive pattern is disposed on the first and second doped regions and contacts the first and second doped regions. A first contact plug is disposed on the conductive pattern in an area corresponding to the first doped region, and a second contact plug is disposed on the conductive pattern in an area corresponding to the second doped region.Type: GrantFiled: June 14, 2012Date of Patent: August 19, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Yongsang Cho, Intaek Ku, Donghoon Kim, Ikhwan Kim, Choulhwan Oh
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Patent number: 8809142Abstract: An e-fuse structure and method has an anode; a fuse link (a first end of the fuse link is connected to the anode); a cathode (a second end of the fuse link opposite the first end is connected to the cathode); and a silicide layer on the fuse link. The silicide layer has a first silicide region adjacent the anode and a second silicide region adjacent the cathode. The second silicide region comprises an impurity not contained within the first silicide region. Further, the first silicide region is thinner than the second silicide region.Type: GrantFiled: April 23, 2012Date of Patent: August 19, 2014Assignee: International Business Machines CorporationInventors: Deok-Kee Kim, Ahmet S. Ozcan, Haining S. Yang
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Publication number: 20140225165Abstract: An electronic circuit, includes a plurality of electronic devices configured as interconnected to provide one or more circuit functions and at least one interconnect structure that includes a first patterned conductor connected to a terminal of a first electronic device in the electronic circuit. A second patterned conductor is connected to a terminal of a second electronic device in the electronic circuit. A first electrode is connected to a portion of the first patterned conductor, and a second electrode is connected to a portion of the second patterned conductor. A metal oxide region is formed between the first electrode and the second electrode. The metal oxide region provides a reprogrammable switch function between the first patterned conductor and the second patterned conductor by providing a conductivity that is selectively controlled by a direction and an amount of current that passes through the metal oxide region during a switch setting operation for the metal oxide region.Type: ApplicationFiled: February 13, 2013Publication date: August 14, 2014Applicant: International Business Machines CorporationInventors: Stephen M. Gates, Daniel C. Edelstein, Kailash Gopalakrishnan, Ramachandran Muralidhar
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Patent number: 8803281Abstract: A semiconductor device has a field insulating film provided on a semiconductor substrate, and a fuse provided on the field insulating film and having a fuse trimming laser irradiation portion and fuse terminals. The semiconductor device further includes an intermediate insulating film covering the fuse, a first TEOS layer on the intermediate insulating film, an SOG layer for planarizing the first TEOS layer, a second TEOS layer on the SOG layer and on the first TEOS layer, a protective film on the second TEOS layer, and an opening portion above the fuse trimming laser irradiation portion in a region from the protective film to the first TEOS layer. A seal ring is provided on the intermediate insulating film so as to surround the opening portion. The seal ring is disposed over the fuse so as to overlap each of the fuse terminals in plan view.Type: GrantFiled: September 27, 2012Date of Patent: August 12, 2014Assignee: Seiko Instruments Inc.Inventor: Hisashi Hasegawa
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Publication number: 20140217473Abstract: A method for manufacturing of a device including a first substrate including a plurality of sets of nanostructures arranged on the first substrate, wherein each of the sets of nanostructures is individually electrically addressable, the method including the steps of: providing a substrate having a first face, the substrate having an insulating layer including an insulating material arranged on the first face of the substrate forming an interface between the insulating layer and the substrate; providing a plurality of stacks on the first substrate, wherein each stack includes a first conductive layer and a second conductive layer; heating the first substrate having the plurality of stacks arranged thereon in a reducing atmosphere to enable formation of nanostructures on the second conductive material; heating the first substrate having the plurality of stacks arranged thereon in an atmosphere such that nanostructures are formed on the second layer.Type: ApplicationFiled: June 29, 2012Publication date: August 7, 2014Inventor: Waqas Khalid
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Patent number: 8796785Abstract: To suppress variation of a signal in a semiconductor device. By suppressing the variation, formation of a stripe pattern in displaying an image on a semiconductor device can be suppressed, for example. A distance between two adjacent signal lines which go into a floating state in different periods (G1) is longer than a distance between two adjacent signal lines which go into a floating state in the same period (G0, G2). Consequently, variation in potential of a signal line due to capacitive coupling can be suppressed. For example, in the case where the signal line is a source signal line in an active matrix display device, formation of a stripe pattern in a displayed image can be suppressed.Type: GrantFiled: January 12, 2011Date of Patent: August 5, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Hideaki Shishido
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Patent number: 8796739Abstract: A polycrystalline fuse includes a first layer of polycrystalline material on a substrate and a second layer of a silicide material on the first layer. The first and second layers are shaped to form first and second terminal portions of a first width joined along a length of the fuse by a fuse portion of a second width narrower than the first width. First and second contacts are connected to the first and second terminal portions respectively. The silicide material being discontinuous in a terminal region of the second layer along the length of the fuse.Type: GrantFiled: December 31, 2013Date of Patent: August 5, 2014Assignee: Intersil CorporationInventor: Michael D. Church
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Patent number: 8796667Abstract: A static random access memory (SRAM) includes: a first carbon nanotube (CNT) inverter, a second CNT inverter, a first switching transistor, and a second switching transistor. The first CNT inverter includes at least a first CNT transistor. The second CNT inverter is connected to the first CNT inverter and includes at least one second CNT transistor. The first switching transistor is connected to the first CNT inverter. The second switching transistor is connected to the second CNT inverter.Type: GrantFiled: December 1, 2009Date of Patent: August 5, 2014Assignees: Samsung Electronics Co., Ltd., Sungkyunkwan University Foundation for Corporate CollaborationInventors: Eun-hong Lee, Un-jeong Kim, Woo-jong Yu, Young-hee Lee
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Patent number: 8791507Abstract: A layout of a semiconductor device is capable of reliably reducing a variation in gate length due to the optical proximity effect, and enables flexible layout design to be implemented. Gate patterns (G1, G2, G3) of a cell (C1) are arranged at the same pitch, and terminal ends (e1, e2, e3) of the gate patterns are located at the same position in the Y direction, and have the same width in the X direction. A gate pattern (G4) of a cell (C2) has protruding portions (4b) protruding toward the cell (C1) in the Y direction, and the protruding portions (4b) form opposing terminal ends (eo1, eo2, eo3). The opposing terminal ends (eo1, eo2, eo3) are arranged at the same pitch as the gate patterns (G1, G2, G3), are located at the same position in the Y direction, and have the same width in the X direction.Type: GrantFiled: March 18, 2013Date of Patent: July 29, 2014Assignee: Panasonic CorporationInventors: Kazuyuki Nakanishi, Masaki Tamaru
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Patent number: 8779405Abstract: A resistive random access memory (ReRAM) cell comprising a first conductive electrode and a dielectric storage material layer over the first conductive electrode. The dielectric storage material layer is conducive to the formation of conductive filaments during the application of a filament forming voltage to the cell. The cell includes a second conductive electrode over the dielectric storage material layer and a layer of conductive nanoclusters (911, 1211) including a plurality of nanoclusters in contact with the dielectric storage material layer and in contact with the first conductive electrode or the second conductive electrode.Type: GrantFiled: June 1, 2012Date of Patent: July 15, 2014Assignee: Freescale Semiconductor, Inc.Inventors: Feng Zhou, Frank K. Baker, Jr., Ko-Min Chang, Cheong Min Hong
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Patent number: 8759945Abstract: A fuse structure, an e-fuse including the fuse structure and a semiconductor device including the e-fuse are disclosed. The fuse structure includes first and second electrodes extending in a first direction, and spaced a predetermined distance apart from each other and having one ends thereof facing each other, an insulation layer formed between the one end of the first electrode and the one end of the second electrode facing each other, and a conductive film overlapping portions of the first and second electrodes on the insulation layer and contacting the first electrode and the one end of the second electrode.Type: GrantFiled: April 7, 2011Date of Patent: June 24, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Seong-Ho Kim, Won-Mo Park, Gil-Sub Kim, Ho-Ju Song
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Patent number: 8749020Abstract: An integrated circuit structure is provided. The integrated circuit structure includes a semiconductor substrate; a dielectric layer over the semiconductor substrate; a metal fuse in the dielectric layer; a dummy pattern adjacent the metal fuse; and a metal line in the dielectric layer, wherein a thickness of the metal fuse is substantially less than a thickness of the metal line.Type: GrantFiled: March 9, 2007Date of Patent: June 10, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsien-Wei Chen, Hao-Yi Tsai, Shin-Puu Jeng, Shih-Hsun Hsu
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Publication number: 20140151752Abstract: Multiple integrated circuits (ICs) die, from different wafers, can be picked-and-placed, front-side planarized using a vacuum applied to a planarizing disk, and attached to each other or a substrate. The streets between the IC die can be filled, and certain techniques or fixtures allow application of monolithic semiconductor wafer processing for interconnecting different die. High density I/O connections between different IC die can be obtained using structures and techniques for aligning vias to I/O structures, and programmably routing IC I/O lines to appropriate vias. Existing IC die can be retrofitted for such interconnection to other IC die, such as by using similar techniques or tools.Type: ApplicationFiled: October 22, 2013Publication date: June 5, 2014Applicant: CrossFire Technologies, Inc.Inventors: Kevin Atkinson, Clifford H. Boler
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Patent number: 8742465Abstract: A method of cutting an electrical fuse including a first conductor and a second conductor, the first conductor including a first cutting target region, the second conductor branched from the first conductor and connected to the first conductor and including a second cutting target region, which are formed on a semiconductor substrate, the method includes flowing a current in the first conductor, causing material of the first conductor to flow outward near a coupling portion connecting the first conductor to the second conductor, and cutting the first cutting target region and the second cutting target region.Type: GrantFiled: September 28, 2012Date of Patent: June 3, 2014Assignee: Renesas Electronics CorporationInventor: Takehiro Ueda
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Patent number: 8735242Abstract: A method of forming a semiconductor device includes forming a field-effect transistor (FET), and forming a fuse which includes a graphene layer and is electrically connected to the FET.Type: GrantFiled: July 31, 2012Date of Patent: May 27, 2014Assignee: International Business Machines CorporationInventor: Wenjuan Zhu
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Patent number: 8735885Abstract: A memory device is provided, which includes a memory element including a first electrode, a second electrode, and a silicon layer disposed between the first electrode and the second electrode. The memory element is capable of being in a first state, a second state, and a third state. A first data is written to the memory element being in the first state so that a potential of the first electrode is higher than a potential of the second electrode, whereby the memory element being in the second state is obtained. A second data is written to the memory element being in the first state so that a potential of the second electrode is higher than a potential of the first electrode, whereby the memory element being in the third state is obtained.Type: GrantFiled: December 3, 2008Date of Patent: May 27, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Hajime Tokunaga
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Patent number: 8723242Abstract: A non-volatile semiconductor memory device and a method of manufacturing the same of the embodiments are provided. The non-volatile semiconductor memory device includes: drain contact plugs formed in memory cell regions and having bottom ends joined to drain diffusion layers of the respective memory cells; a local interconnect provided to extend in a WL direction across the memory cell regions and a shunt region, and having a bottom end joined commonly to plural source diffusion layers; drain via plugs formed in the memory cell regions and having bottom ends joined to the top ends of the respective drain contact plugs; and a power supply via for source formed in the shunt region to extend in a BL direction, and having a bottom end joined to the top end of the local interconnect.Type: GrantFiled: March 25, 2011Date of Patent: May 13, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Kazuhiro Asada
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Patent number: 8723231Abstract: A die micro electro-mechanical switch management system and method facilitate power conservation by selectively preventing electrical current from flowing in designated components. A present invention semiconductor die comprises a block of transistors for performing switching operations, a bus (e.g., a power bus, a signal bus, etc.) for conveying electrical current and a micro electro-mechanical switch that couples and decouples the block of transistors to and from the bus. The micro electro-mechanical switch is opened and closed depending upon operations (e.g., switching operations) being performed by the block of transistors. Electrical current is prevented from flowing to the block of transistors when the micro electro-mechanical switch is open and the block of transistors is electrically isolated. The micro electro-mechanical switch can interrupt electrical current flow in a plurality of the bus lines and/or can be included in a relay array.Type: GrantFiled: September 15, 2004Date of Patent: May 13, 2014Assignee: Nvidia CorporationInventor: Michael B. Diamond
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Patent number: 8723291Abstract: A semiconductor integrated circuit which can perform reliable relief processing using an electric fuse. The semiconductor integrated circuit includes a fuse wiring, a first electrode pad, a second electrode pad, a pollution-control layer, and a first via hole wiring and a second via hole wiring. The fuse wiring is cut by current exceeding a predetermined value. A first electrode pad is connected to one side of a fuse wiring, a second electrode pad is connected to the other of a fuse wiring, a pollution-control layer is formed in the upper layer and the lower layer of the fuse wiring via an insulating layer. In the fuse wiring, second via hole wiring of a pair is formed in the outside of a first via hole wiring so that the first the via hole wiring is surrounded.Type: GrantFiled: August 23, 2012Date of Patent: May 13, 2014Assignee: Renesas Electronics CorporationInventors: Toshiaki Yonezu, Takeshi Iwamoto, Shigeki Obayashi, Masashi Arakawa, Kazushi Kono