Abstract: The object of the present invention is to provide a semiconductor device, which is suitable for use to connect electric condenser microphones. A semiconductor device, comprises: a conductivity-type substrate; an epitaxial layer formed on top of the substrate; island regions separating the epitaxial layer; an input transistor formed on one of the island regions; an insulation layer covering the surface of the input transistor layer; an expansion electrode formed above the insulation layer so as to provide an electrical connection to an input terminal of the input transistor; and resistivity of the epitaxial layer formed below the expansion electrode being in a range of 1000˜5,000 ?·cm.

Abstract: A compound semiconductor device is comprising a compound semiconductor substrate (219) having a ground plane (205); an active element (201) disposed on the substrate; a passive element (211) disposed on the substrate and electrically coupled to the active element; and an insulating layer (202) adjacent the substrate and interposed between the passive device and ground surface such that there is no resistive ground path from the passive device to the ground surface.

Abstract: A high frequency semiconductor device including a high frequency semiconductor chip, comprising an active region provided on a front face side of the high frequency semiconductor chip; a covering electrode provided on the active region and connected to a ground potential; and a back face wiring provided on a back face side of the high frequency semiconductor chip. The back face wiring forms a high frequency transmission line together with the covering electrode functioning as a high frequency ground plate. A front face wiring may be provided on the front face side of the high frequency semiconductor chip to form a high frequency transmission line together with the covering electrode.

Abstract: Since a 5 GHz-band broadband has a frequency twice that of 2.4 GHz, the parasitic capacitance greatly influences deterioration in isolation of a switching device used in this frequency region. Therefore, to improve isolation, a shunt FET is added to the device. The switching device also includes a protecting element that has a first n+-type region, an insulating region and a second n+-type region. This protecting element is connected in parallel between two electrodes of the shunt FET. Since electrostatic charges are discharged between the first and second n+-type regions, the electrostatic energy reaching an operation region of the shunt FET can be reduced without an increase in parasitic capacitance.

Abstract: A multilayer semiconductor device includes at least one structure for transmitting electrical signals, and in particular, microwave signals. The device includes at least one electrically conductive enclosure that includes a bottom plate and a top plate in two different layers. Lateral walls connect the bottom and top plates. Electrically conductive connecting strips extend into the enclosure and are in an intermediate layer, and are electrically insulated from the enclosure. The enclosure has at least one passage through which extends electrical connections of the connecting strips, which are also electrically insulated from the enclosure.

Abstract: There is provided a semiconductor device able to prevent performance degradation of an inductor element provided thereon. A high resistance region is provided below the inductor element formed on the semiconductor substrate. The high resistance region is formed deeper than the well regions of the p-channel and n-channel MOS transistors, thus preventing induction of an eddy current by the magnetic flux generated from the inductor element.

Abstract: A 3-D spiral stacked inductor is provided having a substrate with a plurality of turns in a plurality of levels wherein the number of levels increases from an inner turn to the outer turn of the inductor. First and second connecting portions are respectively connected to an inner turn and an outermost turn, and dielectric material contains the first and second connecting portions and the plurality of turns over the substrate.

Abstract: A high frequency switch, has a transmitting terminal; a receiving terminal; an antenna terminal; a first diode having an anode electrically connected to the transmitting terminal and a cathode electrically connected to the antenna terminal; a second diode having an anode connected through a transmission line of ¼ wavelength to the antenna terminal which is electrically connected to the receiving terminal, and having the side of a cathode grounded; and a control terminal provided to a node between the transmitting terminal and the first anode, wherein the first and second diodes have a tradeoff relationship between ON resistance thereof and capacitance between the anode and the cathode, and the ON resistance of the first diode is lower than the ON resistance of the second diode, and the capacitance of the second diode in the OFF state is smaller than the capacitance of the first diode in the OFF state.

Abstract: A method for manufacturing, in a monolithic circuit including a substrate, an inductance and a through via, including the step of forming, from a first surface of the substrate, at least one trench according to the contour of the inductance to be formed; forming by laser in the substrate a through hole at the location desired for the via; simultaneously insulating the surface of the trench and of the hole; and depositing a conductive material in the trench and at least on the hole walls.

Abstract: The electronic circuit unit of the present invention includes first and second insulating substrates on respective surfaces of which wiring patterns are formed, and thick-film passive elements formed on the surfaces of the first and second insulating substrates in a state in which they are connected to the wiring patterns, wherein the first and second insulating substrates are disposed vertically opposite to each other, and the wiring patterns provided on the first and second insulating substrates are connected through metallic bumps provided between the first and second insulating substrates.

Abstract: A field-effect transistor device includes an active area on a semiconductor substrate and a gate electrode, a source electrode, and a drain electrode are disposed on the surface of the active area, so as to define an FET portion. An electrode defining a line for connection to the gate, an electrode defining a line for connection to the source, and an electrode defining a line for connection to the drain are disposed on the semiconductor substrate. The electrodes define a slot line on the input side for supplying a signal to the FET portion, and a slot line on the output side from which a signal of the FET portion is output. The gate electrode has a shape which extends along the direction that approximately perpendicular to the conduction direction of the signal through the slot line on the input side.

Abstract: A method for conditioning or repairing a dielectric structure of a semiconductor device structure with selectivity over an adjacent conductive or semiconductive structure of the semiconductor device structure, such as a capacitor dielectric and an adjacent bottom electrode of the capacitor. The method includes exposing the dielectric structure and at least an adjacent surface of the conductive or semiconductive structure to an oxidizing atmosphere that includes at least one oxidant and hydrogen species. The at least one hydrogen species adsorbs to a surface of the conductive or semiconductive structure so as to substantially prevent passage of the at least one oxidant into or through the conductive or semiconductive structure. The oxidant oxidizes or repairs voids or other defects that may be present in the dielectric structure. Semiconductor device structures fabricated by employing the method are also disclosed.

Abstract: An integrated circuit inductance structure, including a silicon substrate, a planar winding of a conductive track, a resistive layer, not etched under the winding, a dielectric layer between the winding and said resistive layer, and discontinuous conductive sections, individually parallel to a portion of the winding which is the closest and electrically connected to ground and to the more heavily-doped layer.

Abstract: A field effect transistor (FET) is formed on a semiconductor substrate. A drain terminal, a source terminal, and a gate terminal connected to the FET are also formed on the semiconductor substrate. In an embodiment of the invention, a metal insulator metal (MIM) capacitor for blocking a bias current is disposed between the FET and the drain terminal. A bias terminal is provided between the MIM capacitor and the FET. Passive circuits connected to the drain terminal, the source terminal, and the gate terminal, and a bias circuit connected to the bias terminal are formed on a dielectric substrate. With this arrangement, the circuitry on the semiconductor substrate can be simplified. The general versatility of a resulting semiconductor device can be increased, and the size of the semiconductor device can be reduced.

Abstract: To provide an electronic circuit, a driving method for an electronic circuit, an electro-optical device, a driving method for an electro-optical device, and an electronic appratus which can reduce the dispersion of the threshold voltages of transistors. A driving transistor Trd, first and second switching transistors Tr1 and Tr2, an adjustment transistor Trc, a coupling capacitor C1, and a holding capacitor C2 form a pixel circuit 20.

Abstract: A method of forming a cell memory structure including the step of planarizing an HDP/LDP oxide layer lying over a capacitor area. The method provides for the planarization of the cell storage node, good isolation between the transistor and storage node, reduced step height for the cell-transistor and has the potential for increasing the node capacitance (like DRAM storage node).

Abstract: An integrated circuit is provided that includes a substrate incorporating a semiconductor photodiode device having a p-n junction. The photodiode device includes at least one capacitive trench buried in the substrate and connected in parallel with the junction. In a preferred embodiment, the substrate is formed from silicon, and the capacitive trench includes an internal doped silicon region partially enveloped by an insulating wall that laterally separates the internal region from the substrate. Also provided is a method for fabricating an integrated circuit including a substrate that incorporates a semiconductor photodiode device having a p-n junction.

Abstract: A damascene capacitor structure includes a recessed capacitor plate for preventing leakage and dielectric breakdown between the capacitor plates of the capacitor structure on the surface of the trenches and in the bottom corners of the trenches.

Abstract: RF power transistor provided with an internal shunt inductor, characterized in that the shunt is produced in two separated, capacitors (Cb, Cp), each internally bonded to the transistor internal active die (AD) through internal leads (Li, Ld1), one of which capacitors (Cp) being connected to the transistor lead (L) by a further bond wire (Ld).

Abstract: Multiple coupled inductors are formed in a well in a semiconductor device. The inductors, which preferably are spiral inductors, are strongly coupled with high quality factors. The coupled inductors may be used as efficient signal splitting and combining circuits.

Abstract: The present invention relates to integrated circuits having symmetric inducting devices with a ground shield. In one embodiment, a symmetric inducting device for an integrated circuit comprises a substrate, a main metal layer and a shield. The substrate has a working surface. The main metal layer has at least one pair of current path regions. Each of the current path region pairs is formed in generally a regular polygonal shape that is generally symmetric about a plane of symmetry that is perpendicular to the working surface of the substrate. The shield is patterned into segments that are generally symmetric about the plane of symmetry. Medial portions of at least some segments of the shield are formed generally perpendicular to the plane of symmetry as the medial portions cross the plane of symmetry.

Abstract: An integrated NMOS circuit including an active stack having a plurality of isolated p-well active devices M1-M3, a bias stack having a plurality of diode-connected isolated p-well bias devices M4-M6, the gate of each of the plurality of diode-connected isolated p-well bias devices coupled to the gate of a corresponding one of the plurality of isolated p-well active devices, the bulk of each of the plurality of diode-connected isolated p-well bias devices coupled directly to the bulk of the corresponding one of the plurality of isolated p-well active devices, and the source of each of the plurality of diode-connected isolated p-well bias devices coupled directly to the bulk of the corresponding diode-connected isolated p-well bias device.

Abstract: Patterned ground planes are formed between out-of-plane microcoil structures and underlying integrated circuits (ICs). Each out-of-plane coil includes a series of loops extending from base (contact) pads formed on a dielectric layer (e.g., thick IC passivation, or BCB formed on thin passivation). Losses due to capacitive coil-to-substrate coupling are minimized using a central ground plane structure located under the base pads of the microcoil. Magnetic losses are reduced by forming a low-resistance ground plane structure including end portions located outside of the ends of the microcoil. The low-resistance ground plane can be slotted to reduce the loop size of eddy current pathways. The low-resistance ground plane is formed from one or more of the top IC metal layers, copper pads formed between the IC passivation and the dielectric, portions of the metal used to form the microcoil, or combinations thereof.

Abstract: The present invention is related to a semiconductor device that forms an inductor on the same semiconductor substrate together with other active elements and a manufacturing method thereof. The semiconductor device of the present invention comprises a substrate, a semiconductor layer (high-resistance semiconductor layer) formed on this substrate that has an impurity concentration lower than the impurity concentration of the substrate or a first semiconductor layer (high-resistance semiconductor layer) of a first conducting type with an impurity concentration lower than the substrate and a second semiconductor layer of a second conducting type on the first layer, an insulating film formed on this high-resistance semiconductor layer (semiconductor layer, first semiconductor layer), and an inductor formed on this insulating film.

Abstract: A semiconductor integrated circuit has a semiconductor internal circuit having a first power supply line and a second power supply line, wiring layers connected to a plurality of terminals of a first power supply and each having a predetermined inductance, and wiring layers connected to a plurality of terminals of a second power supply and each having a smaller inductance. Each of the former wiring layers has an inductor making a loop around the internal circuit.

Abstract: An inductive structure integrated in a semiconductor substrate, comprising at least a conductive element insulated from the substrate, comprising an insulating structure, which is formed inside said semiconductor substrate and built close to said conductor element, so that the resistance of said substrate is increased and the parasitic currents induced by the conductor element in the substrate are decreased. The insulating structure including a plurality of insulating elements each surrounding a respective one of a plurality of semiconductor islands of the substrate.

Abstract: A spiral coil pattern is formed on a substantially rectangular insulation substrate of an inductor by photolithography. In the coil pattern, the electrode width of a portion of the pattern provided in the vicinity of the right short side of the substrate so as to be substantially parallel to the short side is wider than the electrode width of the other portion of the pattern. The interelectrode spacing of a portion of the pattern is wider than the interelectrode spacing of the other portion of the pattern. When the inductance of the inductor is required to be reduced to make the inductance a desired inductance value, the electrode width of the portion of the coil pattern is made wider in the inner direction of the coil pattern than the original electrode width.

Abstract: A gateway or circuit barrier capacitor incorporated in a semiconductor die structure in lieu of a discrete capacitor employed with such a die in a Chip on Board assembly such as a single in-line memory module (SIMM). The capacitor may comprise a single layer with laterally adjacent, dielectrically separated electrode traces, or a more traditional vertically superimposed electrode design with an intervening dielectric layer. The capacitor is preferably formed using the existing fabrication process for the die by altering a photoresist mask to define the electrode traces in the same step as other conductors, such as bond pads, are formed.

Abstract: The object of the present invention is to provide a semiconductor device, which is suitable for use to connect electric condenser microphones. A semiconductor device, comprises: a conductivity-type substrate; an epitaxial layer formed on top of the substrate; island regions separating the epitaxial layer; an input transistor formed on one of the island regions; an insulation layer covering the surface of the input transistor layer; an expansion electrode formed above the insulation layer so as to provide an electrical connection to an input terminal of the input transistor; and resistivity of the epitaxial layer formed below the expansion electrode being in a range of 1000˜5,000 &OHgr;·cm.

Abstract: A method to form contacts in an integrated circuit device comprising to eliminate shorting between adjacent contacts due to dielectric layer voids is achieved. A substrate is provided. Narrowly spaced conductive lines are provided on the substrate. A dielectric layer is deposited overlying the conductive lines and the substrate. The dielectric layer is etched through to the top surface of the substrate in areas defined by lithographic mask to form contact openings between adjacent narrowly spaced conductive lines. An insulating layer is deposited overlying the dielectric layer and filling the contact openings wherein the insulating layer forms a lining layer inside the contact openings and fills any voids in the dielectric layer extending out of the contact openings. The insulating layer is etched through to expose the top surface of the substrate. A conductive layer is deposited overlying the dielectric layer and filling the contact openings. The conductive layer is etched as defined by lithographic mask.

Abstract: The present invention provides a bar circuit for reducing cross talk and eddy current of an integrated circuit. The bar circuit comprises a semiconductor substrate with a first conductivity type; a strip of first well with a second conductivity type in the semiconductor substrate; and a strip of second well with the second conductivity type in the semiconductor substrate. The strip of second well is located below and adjacent to the strip of first well, whereby forms a junction barrier for reducing the cross talk and the eddy current.

Abstract: A semiconductor substrate made of P− type or P−− type silicon having a thickness of approximately 700 &mgr;m and a resistivity of 10 &OHgr;·cm to 1000 &OHgr;·cm is provided, a BOX layer with a thickness of 0.2 &mgr;m to 10 &mgr;m is provided on the semiconductor substrate and a p− type SOI layer is provided on this BOX layer. A first insulating film, which makes contact with the BOX layer, is locally buried in this p− type SOI layer and a CMOS is formed in a region of the p− type SOI layer wherein the above-described first insulating film is not provided. A second insulating film is provided above the first insulating film and over the CMOS, so as to cover the CMOS, and an inductor is provided on the region of this second insulating film corresponding to the first insulating film.

Abstract: A semiconductor light-emitting unit includes: a semiconductor laser diode; a photodetector functioning as a sub-mount for mounting the diode thereon; and a heating member, incorporated with the photodetector, for heating the diode. If the ambient temperature of the diode falls within a range where kinks are possibly caused in the low-temperature I-L characteristic of the diode, then current is supplied to the heating member, thereby heating the diode. The heating member may be either a doped region defined within a semiconductor substrate or a doped polysilicon film formed on the substrate. Also, the heating member is preferably located under the laser diode with a heat-dissipating layer and an insulating layer interposed therebetween. The semiconductor light-emitting unit with this structure can effectively eliminate kinks from the low-temperature I-L characteristic of the semiconductor laser diode.

Abstract: A semiconductor device comprises a silicon substrate 10 of a resistivity above or equal to 800 &OHgr;·cm and an oxygen concentration under or equal to 5×1017 cm−3, and an inductor 32b formed in the silicon substrate. A concentration of oxygen contained in the silicon substrate is set to be low, whereby the silicon substrate is less vulnerable to thermal donor effect, and even in a case that a silicon substrate of high resistivity is used, a semiconductor device which suppresses conversion of a conduction type of the silicon substrate while having an inductance of high Q. It is not necessary to bury a highly resistive layer in the silicon substrate, whereby a semiconductor device having an inductance of high Q can be fabricated by simple fabrication steps, which contributes to cost reduction of the semiconductor device.

Abstract: The present invention provides a foil wound low profile power L-C processor. A magnetic winding is disposed within a core. The magnetic winding can be made of one or more sets of conductive foil and insulation film wound together in a spiral pattern. The magnetic winding can also include dielectric film. The magnetic winding can have a center aperture in which a non-magnetic and non-conductive center post can be disposed. The center post can also be divided into portions with a combined length less than the length of the center aperture to form an air gap within the center aperture.

Abstract: A means for fabrication of solenoidal inductors integrated in a semiconductor chip is provided. The solenoidal coil is partially embedded in a deep well etched into the chip substrate. The non-embedded part of the coil is fabricated as part of the BEOL metallization layers. This allows for a large cross-sectional area of the solenoid turns, thus reducing the turn-to-turn capacitive coupling. Because the solenoidal coils of this invention have a large diameter cross-section, the coil can be made with a large inductance value and yet occupy a small area of the chip. The fabrication process includes etching of a deep cavity in the substrate after all the FEOL steps are completed; lining said cavity with a dielectric followed by fabrication of the part of the coil that will be embedded by deposition of a conductive material metal through a mask; deposition of dielectric and planarization of same by CMP.

Abstract: A semiconductor integrated circuit device, which enables impedance adjustment of a particular pad without affecting other pads or signal wirings or without the need for a design change in basic layout, has formed a number of elements and wirings on and in a silicon substrate 11, and pads 13 stacked thereon via an insulation film 12. A particular pad 13a is connected to a signal wiring 17a formed in a bus line region 17, and a capacitor-forming conductor 14 behaving as an impedance adjusting conductor is formed to surround the pad 13a. A source line conductor 15 is made in a space between the pad 13a and the capacitor-forming conductor 14 to encircle the capacitor-forming conductor 14. Therefore, the pad capacitance can be increased by using the space around the pad 13a, other signal wirings 17b and any others formed in the bus line region 17 are not affected substantially. Since here is used the portion around the pad which is not used normally, the basic layout need not be changed.

Abstract: A power electronics module has a metal substrate, a printed circuit card carried on one of the faces of the substrate, and components, at least some of which are power components, mounted on the card. The card also carries electrical interconnection tracks between the components themselves and with external power supply. Conductive bridges of a shape enabling each of them to extend over a power component mutually interconnect short segments of interconnection tracks, that carry power current.

Abstract: An apparatus and method is described incorporating one or more layers of SiCOH and one or more layers of patterned conductors in an integrated circuit chip. The invention overcomes the problem of capacitance by lowering the k of the delectric and overcomes the problem of breakdown voltage and the leakage curent by tailoring the composition of SiCOH.

Abstract: A method to form contacts in an integrated circuit device comprising to eliminate shorting between adjacent contacts due to dielectric layer voids is achieved. A substrate is provided. Narrowly spaced conductive lines are provided on the substrate. A dielectric layer is deposited overlying the conductive lines and the substrate. The dielectric layer is etched through to the top surface of the substrate in areas defined by lithographic mask to form contact openings between adjacent narrowly spaced conductive lines. An insulating layer is deposited overlying the dielectric layer and filling the contact openings wherein the insulating layer forms a lining layer inside the contact openings and fills any voids in the dielectric layer extending out of the contact openings. The insulating layer is etched through to expose the top surface of the substrate. A conductive layer is deposited overlying the dielectric layer and filling the contact openings. The conductive layer is etched as defined by lithographic mask.

Abstract: A new method and structure is provided for the simultaneous creation of inductive and capacitive components in a monolithic substrate. The invention provides a method and structure whereby a vertical spiral inductor is created on the surface of a substrate. Multiple capacitors are created inside the coils of the vertical spiral conductor. A base layer of dielectric is deposited over the surface of a semiconductor substrate, contact plugs are provided in the base layer of dielectric. Multiple layers of dielectric are deposited over the surface of the base layer, layers of coils are created in the multiple layers of dielectric. Vias are provided in the layer of dielectric to interconnect overlying coils of the spiral inductor. An etch stop layer is deposited on the surface of the upper layer of dielectric.

Abstract: An inductor has a spiral aluminum track deposited on an oxide layer over a silicon substrate. The substrate is etched away to form a trench, which extends around beneath the track and provides an air gap having a low dielectric constant. The oxide layer has an inner region within the track, an outer region outside the track and a bridging region extending between the other regions. The bridging region is comprised of intact bridges and gaps therebetween, which are open to the trench and through which an etchant has access to the silicon substrate to form the trench by etching.

Abstract: A semiconductor device of the present invention includes ohmic source plate electrodes, gate plate electrodes, and drain plate electrodes in parallel from each other in a heat generating region various designs are used to more evenly distribute heat generated in the semiconductor device. A first example has gold-plate electrodes formed on the respective source and drain plate electrodes in parallel with the ohmic plate electrodes. The gold-plate electrode arranged at the central portion of the heat generating region plate electrodes has the widest width and gold-plate electrodes arranged toward the center portion to the peripheral portion of the heat generating region narrow gradually. By the structure mentioned above, the semiconductor device of the present invention has uniform temperature distribution in a heat generating region. A second example uses a plurality of stripe plates perpendicular to the ohmic plate electrodes.

Abstract: Junction Field Effect Transistor (JFET) offers fast switching speed than bipolar transistor since JFET is a majority carrier device. This invention comprises two normally “off” JFETs, one in N-channel and one in P-channel to form Complementary Junction Field Effect Transistors for high speed, low voltage and/or high current applications. The discrete device structure is disclosed in this invention. The integrated Complementary Junction Field Effect Transistors structure processed in standard CMOS process is disclosed in this invention. A vertical gate structure of Complementary Junction Field Effect Transistors is disclosed. Complementary Junction Field Effect Transistors structure is also disclosed in SOI substrate.

Abstract: A field effect transistor (FET) having a stabilization circuit with a stabilization condition not affected by another circuit element, for example, a matching circuit. The stabilization circuit is pre-formed inside of the FET, thereby pre-stabilizing the FET in a frequency range in which a power amplifier is used.

Abstract: A gateway or circuit barrier capacitor incorporated in a semiconductor die structure in lieu of a discrete capacitor employed with such a die in a Chip on Board assembly such as a single in-line memory module (SIMM). The capacitor may comprise a single layer with laterally adjacent, dielectrically-separated electrode traces, or a more traditional vertically-superimposed electrode design with an intervening dielectric layer. The capacitor is preferably formed using the existing fabrication process for the die by altering a photoresist mask to define the electrode traces in the same step as other conductors, such as bond pads, are formed.

Abstract: A method for fabricating an inductor device includes the steps of forming a plurality of trenches in a substrate by selectively etching the substrate, implanting dopants into sidewalls and bottom portion of each trench, forming an oxide layer by oxidizing the trenches and the substrate and simultaneously forming a doped layer in the surroundings of the trenches by diffusing the dopants into the substrate, and forming a dielectric layer on a resultant structure to fill the entrance of the trenches, thereby forming air-gap layers inside the trenches, thereby reducing a parasitic capacitance and a magnetic coupling.

Abstract: A method for manufacturing a semiconductor device having a metal-insulator-metal (MIM) capacitor comprises the steps of forming a first dielectric film on a substrate, forming a MIM capacitor on the first dielectric film, forming a second dielectric film covering the MIM capacitor, selectively removing the first and second dielectric films to expose the substrate surface, surface treating using a hydrochloric acid solution, forming a third dielectric film on the second dielectric film and the substrate, and forming a transistor on the third dielectric film. The second dielectric film protects the capacitor insulator film of the MIM capacitor.

Abstract: A passive element circuit is formed by a spiral inductor, a high-dielectric-constant thin-film capacitor, a via hole, and a bonding pad. By using SrTiO.sub.3 as the high-dielectric-constant thin-film, which exhibits a dielectric constant of 200 up to a frequency of 20 GHz, it is possible to achieve a reduction of the capacitor surface area to approximately 1/30 of the area formerly required when using a SiN.sub.x (dielectric constant up to 6.5). Two high-dielectric-constant thin-film capacitors, a via hole for grounding, and a bonding pad are disposed at the center, which are surrounded by the spiral inductor. To connect the two high-dielectric-constant thin-film capacitors are joined in series, they are formed on one high-dielectric-constant thin-film. A lead from the spiral inductor is made by a metal wire from the bonding pad at the center.

Abstract: The present invention relates to a heterojunction bipolar transistor structure having a device mesa 401 with a collector region 402, a base region 403 and an emitter region 404. An emitter metal layer 405 is connected to a ballast resistor 406 which in turn is connected to an emitter bump 407 by way of the air bridge 408. The thermal bump 409 is connected to the emitter metallization by way of a layer of heat dissipation material 410, preferably silicon nitride. The present structure enables dissipation of heat at the emitter contact as well as a ballast resistor connected to the emitter by way of metallization 405. This arrangement enables the dissipation of joule heat to avoid higher temperature of operation which results increased current at the collector which increases the temperature thereby further increasing the current, as well as provides a ballast resistor to reduce the collector current back to an acceptable value to avoid thermal runaway.