With Thin Insulator Region For Charging Or Discharging Floating Electrode By Quantum Mechanical Tunneling Patents (Class 257/321)
  • Patent number: 10651282
    Abstract: Various embodiments include apparatuses and methods of forming the same. One such apparatus can include a first dielectric material and a second dielectric material, and a conductive material between the first dielectric material and the second dielectric material. A charge storage element, such as a floating gate or charge trap, is between the first dielectric material and the second dielectric material and adjacent to the conductive material. The charge storage element has a first surface and a second surface. The first and second surfaces are substantially separated from the first dielectric material and the second dielectric material, respectively, by a first air gap and a second air gap. Additional apparatuses and methods are disclosed.
    Type: Grant
    Filed: October 23, 2018
    Date of Patent: May 12, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Minsoo Lee, Akira Goda
  • Patent number: 10629752
    Abstract: Gate all-around devices are disclosed in which an angled channel including a semiconducting nanostructure is located between a source and a drain. The angled channel has an axis that is oriented at an angle to the top surface of the substrate at an angle in a range of about 1° to less than about 90°. The gate all-around device is intended to meet design and performance criteria for the 7 nm technology generation.
    Type: Grant
    Filed: October 11, 2018
    Date of Patent: April 21, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Russell Chin Yee Teo, Benjamin Colombeau
  • Patent number: 10600802
    Abstract: A first alternating stack of first insulating layers and first spacer layers, an inter-tier dielectric layer, a sacrificial memory opening fill structure, and a second alternating stack of second insulating layers and second spacer layers are formed over a substrate. The spacer layers are formed as, or are subsequently replaced with, electrically conductive layers. A concave downward-facing surface of the inter-tier dielectric layer is formed on a convex upper surface of the sacrificial memory opening fill structure. An inter-tier memory opening is provided by forming second-tier memory opening and removing the sacrificial memory opening fill structure. A memory stack structure including a memory film is formed in the inter-tier memory opening. The memory film includes a rounded top surface at the joint between tiers to enhance its reliability.
    Type: Grant
    Filed: March 7, 2018
    Date of Patent: March 24, 2020
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Tadashi Nakamura, Kota Funayama
  • Patent number: 10593695
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels include conductive wordline material having terminal ends. Charge blocking material is along the terminal ends of the conductive wordline material and has first vertical faces. The insulative levels have terminal ends with second vertical faces. The second vertical faces are laterally offset relative to the first vertical faces. Charge-trapping material is along the first vertical faces, and extends partially along the second vertical faces. The charge-trapping material is configured as segments which are vertically spaced from one another by gaps. Charge-tunneling material extends along the segments of the charge-trapping material. Channel material extends vertically along the stack, and is spaced from the charge-trapping material by the charge-tunneling material. The channel material extends into the gaps. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: October 17, 2018
    Date of Patent: March 17, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Woohee Kim, John D. Hopkins, Changhan Kim
  • Patent number: 10586802
    Abstract: Methods of forming multi-tiered semiconductor devices are described, along with apparatus and systems that include them. In one such method, an opening is formed in a tier of semiconductor material and a tier of dielectric. A portion of the tier of semiconductor material exposed by the opening is processed so that the portion is doped differently than the remaining semiconductor material in the tier. At least substantially all of the remaining semiconductor material of the tier is removed, leaving the differently doped portion of the tier of semiconductor material as a charge storage structure. A tunneling dielectric is formed on a first surface of the charge storage structure and an intergate dielectric is formed on a second surface of the charge storage structure. Additional embodiments are also described.
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: March 10, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 10566053
    Abstract: Memory cells programmed via multi-mechanism charge transports are described herein. An example apparatus includes a semiconductor material, a tunneling material formed on the semiconductor material, a charge trapping material formed on the tunneling material, a charge blocking material formed on the charge trapping material, and a metal gate formed on the charge blocking material. The charge trapping material comprises gallium nitride (GaN), and the memory cell is programmed to the target state via the multi-mechanism charge transport such that charges are simultaneously transported to the charge trapping material through a plurality of different channels.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: February 18, 2020
    Assignee: Micron Technology, Inc.
    Inventor: Arup Bhattacharyya
  • Patent number: 10546917
    Abstract: A semiconductor structure includes a substrate having a trench array therein. The trench array includes a plurality of outer trenches adjacent to and extending along a periphery of the trench array and a plurality of inner trenches. Each of the plurality of outer trenches has a width greater than a width of each of the plurality of inner trenches. A capacitor material stack over the trench array.
    Type: Grant
    Filed: August 30, 2018
    Date of Patent: January 28, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Hsiang Tsai, Chung-Chuan Tseng, Chia-Ping Lai
  • Patent number: 10497706
    Abstract: Provided is a semiconductor device which has a non-volatile memory including: a semiconductor substrate; a tunnel insulating film formed on a surface of the semiconductor device; a floating gate formed on the tunnel insulating film; a memory cell transistor drain region and a memory cell transistor source region formed from the surface to an inside of the semiconductor substrate in a vicinity of both ends of the floating gate; a first interface formed between the semiconductor substrate and the tunnel insulating film; and a second interface formed between the floating gate and the tunnel insulating film. The first interface and the second interface form an uneven structure having a curvature that changes at an identical period with respect to a place in sectional view.
    Type: Grant
    Filed: February 26, 2019
    Date of Patent: December 3, 2019
    Assignee: ABLIC INC.
    Inventor: Tomomitsu Risaki
  • Patent number: 10475879
    Abstract: Multiple tier structures including a respective alternating stack of insulating layers and electrically conductive layers is formed over a substrate. A memory opening fill structure extends through the alternating stacks, and includes a vertical semiconductor channel and a memory film. A support pillar structure extends through at least an upper alternating stack, and includes a dummy memory film and a dummy memory film. The support pillar structure may be narrower than the memory opening fill structure at a bottommost layer of the upper alternating stack. Additionally or alternatively, the dummy memory film may be located above a horizontal plane including a topmost surface of a lower alternating stack. Optionally, another support pillar structure including a dielectric material may be provided underneath the support pillar structure in the lower alternating stack.
    Type: Grant
    Filed: June 28, 2018
    Date of Patent: November 12, 2019
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Jayavel Pachamuthu, Hiroyuki Kinoshita, Yao-Sheng Lee
  • Patent number: 10461191
    Abstract: A semiconductor device includes a semiconductor substrate, a dielectric layer, a gate structure, a source semiconductor feature, and a drain semiconductor feature. The semiconductor substrate has an active area and a shallow trench isolation (STI) structure surrounding the active area. The semiconductor substrate includes a protrusion structure in the active area and has an undercut at a periphery of the active area. The dielectric layer overlays the protrusion structure of the semiconductor substrate and fills at least a portion of the undercut of the protrusion structure. The gate structure crosses over the protrusion structure. The source semiconductor feature and the drain semiconductor feature are located in the active area and positioned at opposite sides of the gate structure.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: October 29, 2019
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Ching-Chia Huang, Tseng-Fu Lu, Wei-Ming Liao
  • Patent number: 10438663
    Abstract: A semiconductor device is provided that is capable of reducing the possibility of change in state of memory elements formed over a semiconductor substrate with an insulating layer interposed therebetween. The semiconductor device includes nonvolatile memory elements and a bias circuit. Each of the nonvolatile memory elements includes a drain region and a source region arranged so as to sandwich a semiconductor region where a channel is formed, a gate electrode, and a charge storage layer arranged between the gate electrode and the semiconductor region. The nonvolatile memory elements are arranged over the semiconductor substrate with the insulating layer interposed therebetween. When electrons are stored in the charge storage layer, the bias circuit reduces the potential difference between the gate electrode and at least one of the drain region and source region in order to decrease holes stored in the channel of a nonvolatile memory element.
    Type: Grant
    Filed: June 15, 2018
    Date of Patent: October 8, 2019
    Assignee: Renesas Electronics Corporation
    Inventors: Kenichiro Sonoda, Eiji Tsukuda, Keiichi Maekawa
  • Patent number: 10439074
    Abstract: A semiconductor device with improved electrical characteristics is provided. A semiconductor device with improved field effect mobility is provided. A semiconductor device in which the field-effect mobility is not lowered even at high temperatures is provided. A semiconductor device which can be formed at low temperatures is provided. A semiconductor device with improved productivity can be provided. In the semiconductor device, there is a range of a gate voltage where the field-effect mobility increases as the temperature increases within a range of the gate voltage from 0 V to 10 V. For example, such a range of a gate voltage exists at temperatures ranging from a room temperature (25° C.) to 120° C. In the semiconductor device, the off-state current is kept extremely low (lower than or equal to the detection limit of a measurement device) within the above temperature range.
    Type: Grant
    Filed: July 13, 2018
    Date of Patent: October 8, 2019
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Kenichi Okazaki, Masashi Tsubuku, Satoru Saito, Noritaka Ishihara
  • Patent number: 10403632
    Abstract: A three-dimensional semiconductor device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory stack structures extending through the alternating stack and arranged in at least five rows that extend along a first horizontal direction, contact via structures arranged in a same number of rows as the memory stack structures and overlying the memory stack structures, each of the contact via structures being electrically connected to a semiconductor channel of a respective memory stack structure, bit lines contacting a respective contact via structure and extending along a second horizontal direction that is different from the first horizontal direction, and a pair of wall-shaped via structures extending through the alternating stack and laterally extending along the first horizontal direction.
    Type: Grant
    Filed: January 18, 2018
    Date of Patent: September 3, 2019
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Hiroyuki Ogawa, Hiroyuki Tanaka
  • Patent number: 10381375
    Abstract: A semiconductor device includes: a stack structure including horizontal conductive patterns and interlayer insulating layers, which are alternately stacked; gate patterns overlapping with both ends of the stack structure under the stack structure, the gate patterns being spaced apart from each other; and a channel pattern including vertical parts penetrating the stack structure, and a connection part disposed under the stack structure, the connection part connecting the vertical parts.
    Type: Grant
    Filed: March 23, 2018
    Date of Patent: August 13, 2019
    Assignee: SK hynix Inc.
    Inventor: Kang Sik Choi
  • Patent number: 10355014
    Abstract: Some embodiments include an assembly which has channel material pillars, and which has memory cells along the channel material pillars. A conductive structure is under the channel material pillars. The conductive structure has doped semiconductor material in direct contact with bottom regions of the channel material pillars. One or more of magnesium, scandium, yttrium and lanthanide elements is along the bottom regions of the channel material pillars. Some embodiments include methods of forming assemblies. A structure is formed, and a mass is formed against an upper surface of the structure. Plugs are formed within openings in the mass. The plugs comprise a second material over a first material. The first material includes one or more of magnesium, scandium, yttrium and lanthanide elements. Openings are formed to terminate on the first material, and are then extended through the first material. Channel material pillars are formed within the openings.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: July 16, 2019
    Assignee: Micron Technology, Inc.
    Inventors: David Ross Economy, John Mark Meldrim, Haoyu Li, Yongjun Jeff Hu, Christopher W. Petz, Daniel Billingsley, Everett A. McTeer
  • Patent number: 10325810
    Abstract: A memory and a method for fabricating the memory are provided. The method includes forming a plurality of first gate structures on a base substrate. Each first gate structure includes a floating gate structure and a control gate structure. The control gate structure includes a body region and a top region. A size of the top region is smaller than a size of the body region along a direction perpendicular to a length direction of the control gate structure. A sidewall of the top region is connected to a sidewall of the body region. The method also includes forming a dielectric layer on the base substrate and covering the plurality of first gate structures, while simultaneously forming air gaps in the dielectric layer between the adjacent first gate structures. A top of each air gap is above or coplanar with a top surface of the control gate structure.
    Type: Grant
    Filed: January 4, 2018
    Date of Patent: June 18, 2019
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventors: Liang Han, Sheng Fen Chiu, Liang Chen
  • Patent number: 10319730
    Abstract: A memory device according to an embodiment includes: a stacked film having a plurality of semiconductor films, and a plurality of insulating films each provided between the semiconductor films; a first electrode provided above the stacked film; a second electrode provided above the stacked film; a plurality of first conductive pillars penetrating through the stacked film and having one end electrically connected to the first electrode and another end not connected and positioned below the stacked film; a plurality of memory cells each provided between each of the first conductive pillars and each of the semiconductor films; a plurality of second conductive pillars electrically connected to each of the semiconductor films and the second electrode; a peripheral circuit board provided above the first electrode and the second electrode; a third electrode provided between the first electrode and the peripheral circuit board, the third electrode electrically connected to the first electrode; a fourth electrode prov
    Type: Grant
    Filed: March 21, 2018
    Date of Patent: June 11, 2019
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Kouji Matsuo
  • Patent number: 10297604
    Abstract: Some embodiments of the present disclosure relate to method of forming a memory device. In some embodiments, the method may be performed by forming a floating gate over a first dielectric on a substrate. A control gate is formed over the floating gate and first and second spacers are formed along sidewalls of the control gate. The first and second spacers extend past outer edges of an upper surface of the floating gate. An etching process is performed on the first and second spacers to remove a portion of the first and second spacers that extends past the outer edges of the upper surface of the floating gate along an interface between the first and second spacers and the floating gate.
    Type: Grant
    Filed: July 19, 2017
    Date of Patent: May 21, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chang-Ming Wu, Shih-Chang Liu, Chia-Shiung Tsai, Ru-Liang Lee
  • Patent number: 10269822
    Abstract: The present disclosure relates to a method of forming an embedded flash memory cell that provides for improved performance by providing for a tunnel dielectric layer having a relatively uniform thickness, and an associated apparatus. The method is performed by forming a charge trapping dielectric structure over a logic region, a control gate region, and a select gate region within a substrate. A first charge trapping dielectric etching process is performed to form an opening in the charge trapping dielectric structure over the logic region, and a thermal gate dielectric layer is formed within the opening. A second charge trapping dielectric etching process is performed to remove the charge trapping dielectric structure over the select gate region. Gate electrodes are formed over the thermal gate dielectric layer and the charge trapping dielectric structure remaining after the second charge trapping dielectric etching process.
    Type: Grant
    Filed: November 30, 2016
    Date of Patent: April 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jui-Yu Pan, Cheng-Bo Shu, Chung-Jen Huang, Jing-Ru Lin, Tsung-Yu Yang, Yun-Chi Wu, Yueh-Chieh Chu
  • Patent number: 10263003
    Abstract: Provided is a semiconductor device which has a non-volatile memory including: a semiconductor substrate; a tunnel insulating film formed on a surface of the semiconductor device; a floating gate formed on the tunnel insulating film; a memory cell transistor drain region and a memory cell transistor source region formed from the surface to an inside of the semiconductor substrate in a vicinity of both ends of the floating gate; a first interface formed between the semiconductor substrate and the tunnel insulating film; and a second interface formed between the floating gate and the tunnel insulating film. The first interface and the second interface form an uneven structure having a curvature that changes at an identical period with respect to a place in sectional view.
    Type: Grant
    Filed: March 21, 2018
    Date of Patent: April 16, 2019
    Assignee: ABLIC INC.
    Inventor: Tomomitsu Risaki
  • Patent number: 10262937
    Abstract: An integrated circuit device includes at least one fin-type active region, a gate line on the at least one fin-type active region, and a source/drain region on the at least one fin-type active region at at least one side of the gate line. A first conductive plug is connected to the source/drain region and includes cobalt. A second conductive plug is connected to the gate line and spaced apart from the first conductive plug. A third conductive plug is connected to each of the first conductive plug and the second conductive plug. The third conductive plug electrically connects the first conductive plug and the second conductive plug.
    Type: Grant
    Filed: August 17, 2017
    Date of Patent: April 16, 2019
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Joon-gon Lee, Ryuji Tomita, Do-Sun Lee, Chul-sung Kim, Do-hyun Lee
  • Patent number: 10217754
    Abstract: Provided is a method of fabricating a memory device including performing an ion implantation process by using a mask layer as an implanting mask, so as to form a first embedded doped region and a second embedded doped region in a substrate. The first embedded doped region extends along the first direction, passes through the control gate, and is electrically connected to the first doped region, the second doped region and the third doped region at two sides of control gates. The second embedded doped region extends along the second direction, is located in the substrate under the third doped region, and electrically connected to the third doped region. The first embedded doped region is electrically connected to the second embedded doped region.
    Type: Grant
    Filed: May 15, 2014
    Date of Patent: February 26, 2019
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Ya-Jung Tsai, Chun-Lien Su, Hsin-Fu Lin, Hung-Chi Chen
  • Patent number: 10170490
    Abstract: Some embodiments include apparatuses and methods of using such apparatuses. One of the apparatuses includes a semiconductor material, a pillar extending through the semiconductor material, a select gate located along a first portion of the pillar, memory cells located along a second portion of the pillar, and transistors coupled to the select gate through a portion of the semiconductor material. The transistors include sources and drains formed from portions of the semiconductor material. The transistors include gates that are electrically uncoupled to each other.
    Type: Grant
    Filed: March 6, 2017
    Date of Patent: January 1, 2019
    Assignee: Micron Technology, Inc.
    Inventor: Toru Tanzawa
  • Patent number: 10170186
    Abstract: Semiconductor device, memory arrays, and methods of writing information to a memory cell include or utilize one or more memory cells. The memory cell(s) include a first transistor located on top of a substrate and connected to a first terminal, a second transistor located on top of the first transistor and connected in parallel to the first transistor and connected to a second terminal, where the first and second transistors share a common floating gate and a common output terminal, and an access transistor connected in series to the common output terminal and a low voltage terminal, the access transistor configured to trigger hot-carrier injection to the common floating gate to change a voltage of the common floating gate.
    Type: Grant
    Filed: September 13, 2017
    Date of Patent: January 1, 2019
    Assignee: International Business Machines Corporation
    Inventors: Jeng-Bang Yau, Tak Ning
  • Patent number: 10164042
    Abstract: A semiconductor device includes a field effect transistor (FET). The FET includes a first channel, a first source and a first drain; a second channel, a second source and a second drain; and a gate structure disposed over the first and second channels. The gate structure includes a gate dielectric layer and a gate electrode layer. The first source includes a first crystal semiconductor layer and the second source includes a second crystal semiconductor layer. The first source and the second source are connected by an alloy layer made of one or more Group IV element and one or more transition metal elements. The first crystal semiconductor layer is not in direct contact with the second crystal semiconductor layer.
    Type: Grant
    Filed: January 30, 2017
    Date of Patent: December 25, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yee-Chia Yeo, Hung-Li Chiang, Jyh-Cherng Sheu, Sung-Li Wang, I-Sheng Chen, Chi On Chui
  • Patent number: 10153039
    Abstract: The present disclosure includes memory cells programmed via multi-mechanism charge transports. An example apparatus includes a semiconductor material, a tunneling material formed on the semiconductor material, a charge trapping material formed on the tunneling material, a charge blocking material formed on the charge trapping material, and a metal gate formed on the charge blocking material. The charge trapping material comprises gallium nitride (GaN), and the memory cell is programmed to the target state via the multi-mechanism charge transport such that charges are simultaneously transported to the charge trapping material through a plurality of different channels.
    Type: Grant
    Filed: July 5, 2017
    Date of Patent: December 11, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Arup Bhattacharyya
  • Patent number: 10134866
    Abstract: Provided herewith are embodiments related to a semiconductor structure and a method for forming the semiconductor structure. A first spacer layer and a second spacer layer are formed opposite a major surface of a substrate. The second spacer layer is removed using the first spacer layer as a stop layer. The removal of the second spacer layer forms an air-gap spacer in an area previously occupied by the second spacer layer.
    Type: Grant
    Filed: March 15, 2017
    Date of Patent: November 20, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
  • Patent number: 10128267
    Abstract: A non-volatile memory device includes channel hole structures, bit lines, and intermediate wiring. The channel hole structures are arranged in a two-dimensional pattern on and extend vertically from a substrate. The bit lines extend in a first direction, are spaced apart from each other in a second direction crossing the first direction, and are electrically connected to the plurality of channel hole structures. The intermediate wiring which connects channel hole structures and the bit lines. The bit lines includes a first bit line and a second bit line directly connected to the channel hole structures through a first contact and spaced apart in the second direction. The intermediate wiring is between the first bit line and the second bit line.
    Type: Grant
    Filed: July 27, 2017
    Date of Patent: November 13, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Woo Joo Sim, Wang Ho Shin, Kyu Bin Han
  • Patent number: 10096610
    Abstract: A 3D NAND storage device includes a plurality of layers containing doped semiconductor material interleaved with a plurality of layers of dielectric material. A first portion of the plurality of doped semiconductor material layers may be doped with a first dopant having a first dopant parameter. A second portion of the plurality of doped semiconductor material layers may be doped with a second dopant having a second dopant parameter. In embodiments, the first portion of the plurality of doped semiconductor layers may include a dopant at a concentration less than a defined threshold. In embodiments, the second portion of the plurality of doped semiconductor layers may include a dopant at a concentration less than the defined threshold. The differing dopant concentrations have been found to beneficially and advantageously affect the etch rate in the respective semiconductor layers when forming control gate recesses in the semiconductor layers.
    Type: Grant
    Filed: September 29, 2017
    Date of Patent: October 9, 2018
    Assignee: Intel Corporation
    Inventors: John Hopkins, Younghee Kim, Jie Li, Yu Yuwen, Ramey Abdelrahaman, Kunal Shrotri
  • Patent number: 10090308
    Abstract: A semiconductor memory device having a memory cell including a plurality of memory cells, a first P-type well region, a second P-type well region, and an N-type well region disposed between the first P-Type well region and the second P-type well region. The semiconductor memory element defines a plurality of first regions, a plurality of second regions, a plurality of third regions, and a plurality of fourth regions, and each first region includes the memory cell. Each second region, each third region and each fourth region include a voltage contact to provide a voltage to the first P-type well region, the second P-type well region, and the N-type well region. The first region to the fourth region do not overlap with each other.
    Type: Grant
    Filed: April 26, 2017
    Date of Patent: October 2, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chien-Hung Chen, Meng-Ping Chuang, Hsueh-Hao Shih
  • Patent number: 10038002
    Abstract: Some embodiments include a semiconductor device having a stack structure including a source comprising polysilicon, an etch stop of oxide on the source, a select gate source on the etch stop, a charge storage structure over the select gate source, and a select gate drain over the charge storage structure. The semiconductor device may further include an opening extending vertically into the stack structure to a level adjacent to the source. A channel comprising polysilicon may be formed on a side surface and a bottom surface of the opening. The channel may contact the source at a lower portion of the opening, and may be laterally separated from the charge storage structure by a tunnel oxide. A width of the channel adjacent to the select gate source is greater than a width of the channel adjacent to the select gate drain.
    Type: Grant
    Filed: October 18, 2016
    Date of Patent: July 31, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Hongbin Zhu, Zhenyu Lu, Gordon Haller, Jie Sun, Randy J. Koval, John Hopkins
  • Patent number: 10038102
    Abstract: A semiconductor device includes a semiconductor substrate including a main surface, an element separation film formed over the main surface, and a fin protruding from the element separation film and extending in the first direction in plan view. The semiconductor device further includes a control gate electrode extending in the second direction that is orthogonal to the first direction along the surface of the fin through a gate insulating film and overlaps with a first main surface of the element separation film, and a memory gate electrode extending in the second direction along the surface of the fin through an insulating film and overlaps with a second main surface of the element separation film, in which the second main surface is lower than the first main surface relative to the main surface.
    Type: Grant
    Filed: January 10, 2018
    Date of Patent: July 31, 2018
    Assignee: Renesas Electronics Corporation
    Inventor: Tatsuyoshi Mihara
  • Patent number: 10020363
    Abstract: Sacrificial semiconductor material portions are connected by a sacrificial semiconductor line extending along a different horizontal direction and protruding into an underlying source conductive layer. After formation of a vertically alternating stack of insulating layers and spacer material layers, memory stack structures are formed through the vertically alternating stack and through the sacrificial semiconductor material portions. A backside trench can be formed through the vertically alternating stack employing the sacrificial semiconductor line as an etch stop structure. Source strap material portions providing lateral electrical contact to semiconductor channels of the memory stack structures can be formed by replacement of sacrificial semiconductor material portions and the sacrificial semiconductor line with source strap material portions. Structural-reinforcement portions may be employed to provide structural stability during the replacement process.
    Type: Grant
    Filed: March 14, 2017
    Date of Patent: July 10, 2018
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Hiroyuki Ogawa, Yasuo Kasagi, Satoshi Shimizu, Kazuyo Matsumoto, Yohei Masamori, Jixin Yu, Tong Zhang, James Kai
  • Patent number: 10008570
    Abstract: The contact area between a source strap structure of a buried source layer and semiconductor channels within memory structures can be increased by laterally expanding a source-level volume in which the memory stack structures are formed. In one embodiment, sacrificial semiconductor pedestals can be formed in source-level memory openings prior to formation of a vertically alternating stack of insulating layers and sacrificial material layers. Memory openings can include bulging portions formed by removal of the sacrificial semiconductor pedestals. Memory stack structures can be formed with a greater sidewall surface area in the bulging portions to provide a greater contact area with the source strap structure. Alternatively, bottom portions of memory openings can be expanded selective to upper portions during, or after, formation of the memory openings to provide bulging portions and to increase the contact area with the source strap structure.
    Type: Grant
    Filed: March 14, 2017
    Date of Patent: June 26, 2018
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Jixin Yu, Kento Kitamura, Tong Zhang, Chun Ge, Yanli Zhang, Satoshi Shimizu, Yasuo Kasagi, Hiroyuki Ogawa, Daxin Mao, Kensuke Yamaguchi, Johann Alsmeier, James Kai
  • Patent number: 9997627
    Abstract: A semiconductor device includes: a channel layer surrounded by a source layer; a first dielectric layer around the source layer; a gate layer around the channel layer and on the source layer; a first oxide semiconductor layer between the gate layer and the channel layer; a second oxide semiconductor layer between the gate layer and the drain layer; a second gate dielectric layer between the second oxide semiconductor layer and the drain layer; a drain layer on the gate layer and around the channel layer; and a second dielectric layer around the drain layer.
    Type: Grant
    Filed: September 19, 2017
    Date of Patent: June 12, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wanxun He, Su Xing
  • Patent number: 9991332
    Abstract: An integrated circuit has a lateral flux capacitor assembly that includes a first metal layer having a capacitive portion with first and second lateral sides and first and second capacitive fingers, a first dummy metal lines portion positioned adjacent the first lateral side of the capacitive portion and a second dummy metal lines portion positioned adjacent the second lateral side of the capacitive portion. The first set of capacitive fingers is electrically connected to the first dummy metal lines portion and the second set of capacitive fingers is electrically connected to the second dummy metal lines portion. A method of making an integrated circuit assembly with a lateral flux capacitor includes electrically connecting a first plurality of capacitive fingers in a first metal layer to a first dummy metal lines portion of the first metal layer.
    Type: Grant
    Filed: November 4, 2016
    Date of Patent: June 5, 2018
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventor: Zhi-Qi Li
  • Patent number: 9978761
    Abstract: The present disclosure relates to an improved integrated circuit having an embedded flash memory device with a word line having its height reduced, and associated processing methods. In some embodiments, the flash memory device includes a gate stack separated from a substrate by a gate dielectric. The gate stack includes a control gate separated from a floating gate by a control gate dielectric. An erase gate is disposed on a first side of the gate stack and a word line is disposed on a second side of the gate stack that is opposite to the first side. The word line has a height that monotonically increases from an outer side opposite to the gate stack to an inner side closer to the gate stack. A word line height at the outer side is smaller than an erase gate height.
    Type: Grant
    Filed: July 22, 2016
    Date of Patent: May 22, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ming-Chyi Liu, Shih-Chang Liu, Sheng-Chieh Chen
  • Patent number: 9972545
    Abstract: A semiconductor device includes an n-type vertical field-effect transistor (FET) that includes: a first source/drain feature disposed in a substrate; a first vertical bar structure that includes a first sidewall and a second sidewall disposed over the substrate; a gate disposed along the first sidewall of the first vertical bar structure; a second vertical bar structure electrically coupled to the first vertical bar structure; and a second source/drain feature disposed over the first vertical bar structure; and a p-type FET that includes; a third source/drain feature disposed in the substrate; a third vertical bar structure that includes a third sidewall and a fourth sidewall disposed over the substrate; the gate disposed along the third sidewall of the third vertical bar structure; a fourth vertical bar structure electrically coupled to the third vertical bar structure; and a fourth source/drain feature disposed over the third vertical bar structure.
    Type: Grant
    Filed: April 12, 2017
    Date of Patent: May 15, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hung-Li Chiang, Chih Chieh Yeh, Cheng-Yi Peng, Tzu-Chiang Chen, Yee-Chia Yeo
  • Patent number: 9972631
    Abstract: Provided is a memory device including a substrate and a gate structure. The gate structure is located on the substrate. The gate structure includes a stack gate and a selection gate aside the stack structure. A topmost surface of the selection gate is lower than a topmost surface of the stack gate.
    Type: Grant
    Filed: November 16, 2016
    Date of Patent: May 15, 2018
    Assignee: Winbond Electronics Corp.
    Inventors: Che-Fu Chuang, Hsiu-Han Liao, Yao-Ting Tsai
  • Patent number: 9910749
    Abstract: A non-volatile memory system includes a plurality of non-volatile data memory cells arranged into groups of data memory cells, a plurality of select devices connected to the groups of data memory cells, a selection line connected to the select devices, a plurality of data word lines connected to the data memory cells, and one or more control circuits connected to the selection line and the data word lines. The one or more control circuits are configured to determine whether the select devices are corrupted. If the select devices are corrupted, then the one or more control circuits repurpose one of the word lines (e.g., the first data word line closet to the select devices) to be another selection line, thus operating the memory cells connected to the repurposed word line as select devices.
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: March 6, 2018
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Nian Niles Yang, Jiahui Yuan, Grishma Shah, Xinde Hu, Lanlan Gu, Bin Wu
  • Patent number: 9899410
    Abstract: Disclosed herein is a non-volatile storage system with memory cells having a charge storage region that may be configured to store a higher density of charges (e.g., electrons) in the middle than nearer to the control gate or channel. The charge storage region has a middle charge storage material that stores a higher density of charges than two outer charge storage materials that are nearer to the control gate or channel, in one aspect. The charge storage region of one aspect has oxide regions between the middle charge storage material and the two outer charge storage materials. The oxide regions of one embodiment are thin (e.g., less than one nanometer) such that during operation charges may easily pass through the oxide regions. The non-volatile memory cell programs quickly and has high data retention.
    Type: Grant
    Filed: December 13, 2016
    Date of Patent: February 20, 2018
    Assignee: SanDisk Technologies LLC
    Inventors: Hoon Cho, Jun Wan, Ching-Huang Lu
  • Patent number: 9831260
    Abstract: Provided is a semiconductor memory device. The semiconductor memory device includes a peripheral circuit gate pattern on a first substrate, an impurity region in the first substrate and spaced apart from the peripheral circuit gate pattern, a cell array structure on the peripheral circuit gate pattern, a second substrate between the peripheral circuit gate pattern and the cell array structure, and a via that is in contact with the impurity region and disposed between the first substrate and the second substrate. The via electrically connects the first and second substrates to each other.
    Type: Grant
    Filed: January 11, 2017
    Date of Patent: November 28, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Gang Zhang, Hyuk Kim, Yong-Hyun Kwon, Sangwuk Park
  • Patent number: 9824933
    Abstract: Structures and fabrication methods for a vertical-transport field-effect transistor. A plurality of pillars comprised of a semiconductor material are formed. First and second gate structures are located along a length of the pillars. The second gate structure is vertically spaced along the length of the pillars relative to the first gate structure. The first and second gate structures are each associated with a channel defined in the pillars.
    Type: Grant
    Filed: August 9, 2016
    Date of Patent: November 21, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventor: Bartlomiej J. Pawlak
  • Patent number: 9824966
    Abstract: A sacrificial film and an alternating stack of insulating layers and sacrificial material layers are sequentially formed over a substrate. A memory stack structure including a memory film and a vertical semiconductor channel is formed through the alternating stack and the sacrificial film on the substrate. A source level cavity is formed by introducing an etchant or a reactant through a backside trench and removing the sacrificial film. After removal of an annular portion of the memory film, a portion of the vertical semiconductor channel is converted into an annular source region by introducing electrical dopants into the channel. A source contact layer is formed in the source level cavity and directly on the annular source region. The sacrificial material layers are replaced with electrically conductive layers. The annular source region and the source contact layer can provide low source contact resistance in a three-dimensional NAND memory device.
    Type: Grant
    Filed: August 12, 2016
    Date of Patent: November 21, 2017
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Senaka Kanakamedala, Raghuveer S. Makala, Yanli Zhang, Rahul Sharangpani, James Kai, Yao-Sheng Lee
  • Patent number: 9825049
    Abstract: A semiconductor device of the present invention has a first insulating film formed between a control gate electrode and a semiconductor substrate and a second insulating film formed between a memory gate electrode and the semiconductor substrate and between the control gate electrode and the memory gate electrode, the second insulating film having a charge accumulating part therein. The second insulating film has a first film, a second film serving as a charge accumulating part disposed on the first film, and a third film disposed on the second film. The third film has a sidewall film positioned between the control gate electrode and the memory gate electrode and a deposited film positioned between the memory gate electrode and the semiconductor substrate. In this structure, the distance at a corner part of the second insulating film can be increased, and electric-field concentration can be reduced.
    Type: Grant
    Filed: January 16, 2016
    Date of Patent: November 21, 2017
    Assignee: Renesas Electronics Corporation
    Inventors: Naohiro Hosoda, Daisuke Okada, Kozo Katayama
  • Patent number: 9799746
    Abstract: Techniques for preventing leakage of contact material into air-gap spacers during contact formation. For example, a method comprises forming a contact trench on a semiconductor structure over an air-gap spacer and depositing a liner in the contact trench. The liner deposition material fills a portion of the air-gap spacer pinching off the contact trench to the air-gap spacer.
    Type: Grant
    Filed: September 28, 2016
    Date of Patent: October 24, 2017
    Assignees: International Business Machines Corporation, GlobalFoundries Inc.
    Inventors: Kangguo Cheng, Ruilong Xie, Tenko Yamashita
  • Patent number: 9793384
    Abstract: One illustrative method of forming a TFET device includes forming a first semiconductor material that extends for a full length of a drain region, a gate region and a source region of the device, masking the drain region while exposing at least a portion of the gate region and exposing the source region, forming a second semiconductor material above the gate region and above the source region, forming a third semiconductor material above the second semiconductor material and above the gate region and above the source region, the third semiconductor material being doped with an opposite type of dopant material than in the first semiconductor material, masking the drain region, and forming a gate structure above at least a portion of the exposed gate region.
    Type: Grant
    Filed: October 1, 2014
    Date of Patent: October 17, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventor: Bartlomiej Jan Pawlak
  • Patent number: 9780116
    Abstract: According to one embodiment, a semiconductor device includes a stacked body and a pillar. The stacked body includes insulating films, electrode films, and silicon containing films. Each of the insulating films and each of the electrode films are stacked alternately. One of the silicon containing films is provided between one of the insulating films and one of the electrode films. The pillar extends in the stacked body in a stacking direction of the insulating films and the electrode films. The pillar includes a silicon pillar and a memory film. The silicon pillar extends in the stacking direction. The memory film is provided between the silicon pillar and one of the electrode films.
    Type: Grant
    Filed: December 8, 2016
    Date of Patent: October 3, 2017
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Hideaki Masuda, Katsuyasu Shiba, Nobuhide Yamada
  • Patent number: 9773802
    Abstract: Example embodiments relate to a method of fabricating a synapse memory device capable of being driven at a low voltage and realizing a multi-level memory. The synapse memory device includes a two-transistor structure in which a drain region of a first transistor including a memory layer and a first source region of a second transistor share a source-drain shared area. The synapse memory device is controlled by applying a voltage through the source-drain shared area. The memory layer includes a charge trap layer and a threshold switching layer, and may realize a non-volatile multi-level memory function.
    Type: Grant
    Filed: July 13, 2016
    Date of Patent: September 26, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Xianyu Wenxu, Inkyeong Yoo, Hojung Kim, Seong ho Cho
  • Patent number: 9768018
    Abstract: The inventive concepts provide semiconductor devices and methods of fabricating the same. According to the method, sub-stack structures having a predetermined height and active holes are repeatedly stacked. Thus, cell dispersion may be improved, and various errors such as a not-open error caused in an etching process may be prevented. A grain size of an active pillar used as channels may be increased or maximized using a metal induced lateral crystallization method, so that a cell current may be improved. A formation position of a metal silicide layer including a crystallization inducing metal may be controlled such that a concentration grade of the crystallization inducing metal may be controlled depending on a position within the active pillar.
    Type: Grant
    Filed: April 13, 2016
    Date of Patent: September 19, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: YuJeong Seo, JinTaek Park, Youngwoo Park