Abstract: A trench metal-oxide-semiconductor field-effect transistor (MOSFET) device includes a combination of shielded trench gate structure and a superjunction structure within an epitaxial layer including alternating n-doped and p-doped columns in an a drift region. In one example the gate trenches are formed in and over n-doped columns that have an extra charge region near and adjacent to the lower portion of the corresponding gate trench. The extra charge is balanced due to the shield electrodes in the gate trenches.

Abstract: A semiconductor device and a method of making the same. The device includes a semiconductor substrate provided in a chip-scale package (CSP). The device also includes a plurality of contacts provided on a major surface of the substrate. The device further includes an electrically floating metal layer forming an ohmic contact on a backside of the semiconductor substrate. The device is operable to conduct a current that passes through the substrate from a first of said plurality of contacts to a second of said plurality of contacts via the metal layer on the backside.

Abstract: A semiconductor device includes first semiconductor patterns vertically stacked on a substrate and vertically spaced apart from each other, and a first gate electrode on the first semiconductor patterns. The first gate electrode comprises a first work function metal pattern on a top surface, a bottom surface, and sidewalls of respective ones of the first semiconductor patterns, a barrier pattern on the first work function metal pattern, and a first electrode pattern on the barrier pattern. The first gate electrode has a first part between adjacent ones of the first semiconductor patterns. The barrier pattern comprises a silicon-containing metal nitride layer. The barrier pattern and the first electrode pattern are spaced apart from the first part.

Abstract: A transmission device according to an embodiment of the present disclosure includes three output terminals that are arranged in one line and three sets of inductor elements and ESD protection elements that are provided for the respective output terminals. The three output terminals are respectively coupled to three transmission paths. The three sets of the inductor elements and the ESD protection elements are arranged in a non-orthogonal direction with respect to a direction in which the three output terminals are arranged. The transmission device further includes a driver circuit that outputs three actuation signals to the respective three output terminals through the respective three sets of the inductor elements and the ESD protection elements.

Abstract: A BIPOLAR-CMOS-DMOS (BCD) semiconductor device and manufacturing method, which can integrate a Junction Field-Effect Transistor (JFET), two classes of Vertical Double-diffusion Metal Oxide Semiconductor (VDMOS), a Lateral Insulated-Gate Bipolar Transistor (LIGBT) and seven kinds of Laterally Diffused Metal Oxide Semiconductor (LDMOS), a low-voltage Negative channel Metal Oxide Semiconductor (NMOS), a low-voltage Positive channel Metal Oxide Semiconductor (PMOS), a low-voltage Negative-Positive-Negative (NPN) transistor and a low-voltage Positive-Negative-Positive (PNP) transistor, and a diode in the same chip. Bipolar devices in the analog circuit, power components in the switch circuit, Complementary Metal Oxide Semiconductor (CMOS) devices in the logic circuit and other kinds of lateral and vertical components are integrated. This present invention saves costs at the same time greatly improve chip integration.

Abstract: A semiconductor device includes a substrate of a first conductivity type with relatively low impurity concentration; a first region of a second conductivity type with relatively low impurity concentration, =located in the substrate; a second region of the first conductivity type with relatively high impurity concentration, located in the substrate; first and second conductors, located on the first region and separated from each other by an isolator layer; and a third conductor, separated from the first and second conductors by the isolator layer, and located on the second region. The first conductor provides a drain terminal. The second conductor provides a source terminal. The third conductor provides a gate terminal.

Abstract: Power switching devices include a semiconductor layer structure that has an active region and an inactive region. The active region includes a plurality of unit cells and the inactive region includes a field insulating layer on the semiconductor layer structure and a gate bond pad on the field insulating layer opposite the semiconductor layer structure. A gate insulating pattern is provided on the semiconductor layer structure between the active region and the field insulating layer, and at least one source/drain contact is provided on the semiconductor layer structure between the gate insulating pattern and the field insulating layer.

Abstract: Embodiments of the present invention are directed to formation of fins with different active channel heights in a tri-gate or a Fin-FET device. In an embodiment, at least two fins are formed on a front side of the substrate. A gate structure extends over a top surface and a pair of sidewalls of at least a portion of the fins. In an embodiment, the substrate is thinned to expose the bottom surface of the fins. Next, backside etching may be performed on each fin to form active channel regions. The fins may be recessed to different depths, forming active channel regions with differing heights.

Abstract: A NOR-type three-dimensional memory device includes a vertically alternating stack of insulating layers and electrically conductive layers located over a substrate, and laterally alternating sequences of respective active region pillars and respective memory stack structures. Each laterally alternating sequence is electrically isolated from the electrically conductive layers by a respective blocking dielectric layer at each level of the electrically conductive layers. Each memory stack structures include a memory film and a semiconductor channel material portion that vertically extend through the vertically alternating stack. The active region pillars include an alternating sequence of source pillar and drain pillars.

Abstract: A semiconductor structure with current flow path direction controlling is provided, which comprises a substrate and an epitaxial layer having a first conductivity type on the substrate. A first doped region is on the substrate and the first doped region has the first or a second conductivity type. A second doped region is enclosed by the epitaxial layer and has the second conductivity type. A third doped region is located in the epitaxial layer and between the first and second doping regions, and the third doped region has the second conductivity type. A fourth doped region is enclosed by the third doped region and has the first conductivity type. A fifth doped region is enclosed by the first doped region and the conductivity type is opposite to that of the first doped region.

Abstract: A structure having: a plurality of field effect transistors (FETs) connected between a common input and a common output, each one of the field effect transistors comprises: a source region, a drain region, and a gate electrode for controlling carriers through a channel region of a transistor region of the structure between the source region and the drain region; a plurality of diodes, each one of the diodes being associated with a corresponding one of the plurality of FETs, each one of the diodes having an electrode in Schottky contact with a diode region of the corresponding one of the FETs. The gate electrode and the diode electrode extend along parallel lines. The source region, the drain region, the channel region, and a diode region having therein the diode are disposed along a common line.

Abstract: A method for fabricating a semiconductor device comprises forming a first hardmask, a planarizing layer, and a second hardmask on a substrate. Removing portions of the second hardmask and forming alternating blocks of a first material and a second material over the second hardmask. The blocks of the second material are removed to expose portions of the planarizing layer. Exposed portions of the planarizing layer and the first hardmask are removed to expose portions of the first hardmask. Portions of the first hardmask and portions of the substrate are removed to form a first fin and a second fin. Portions of the substrate are removed to further increase the height of the first fin and substantially remove the second fin. A gate stack is formed over a channel region of the first fin.

Abstract: In an embodiment, a power semiconductor device includes: a semiconductor body for conducting a load current between first and second load terminals; source and channel regions and a drift volume in the semiconductor body; a semiconductor zone in the semiconductor body and coupling the drift volume to the second load terminal, a first transition established between the semiconductor zone and the drift volume; a control electrode insulated from the semiconductor body and the load terminals and configured to control a path of the load current in the channel region; and a trench extending into the drift volume along an extension direction and including a field electrode. A cross-sectional area of the field electrode is smaller than a cross-sectional area of the control electrode in a plane parallel to the extension direction.

Abstract: A trench semiconductor device includes a layer of semiconductor material, an exterior trench pattern formed in the layer of semiconductor material, and an interior trench pattern formed in the layer of semiconductor material, at least partially surrounded by the exterior trench pattern. The exterior trench pattern includes a plurality of exterior trench portions that are each lined with dielectric material and filled with conductive material, and the interior trench pattern includes a plurality of interior trench portions that are each lined with dielectric material and filled with conductive material.

Abstract: A vertical semiconductor field-effect transistor includes a semiconductor body having a front side, and a field electrode trench extending from the front side into the semiconductor body. The field electrode trench includes a field electrode and a field dielectric arranged between the field electrode and the semiconductor body. The vertical semiconductor field-effect transistor further includes a gate electrode trench arranged next to the field electrode trench, extending from the front side into the semiconductor body, and having two electrodes which are separated from each other and the semiconductor body. A front side metallization is arranged on the front side and in contact with the field electrode and at most one of the two electrodes.

Abstract: A pixel cell includes a photodiode disposed in a semiconductor material to accumulate image charge in response to incident light and a global shutter gate transistor coupled to the photodiode to selectively deplete the image charge from the photodiode. A storage transistor is disposed in the semiconductor material to store the image charge. An isolation structure is disposed in the semiconductor material proximate to the storage transistor to isolate a sidewall of the storage transistor from stray light and stray charge. The isolation structure is filled with tungsten and is coupled to receive a variable bias signal to control a bias of the isolation structure. The variable bias signal is set to a first bias value during a transfer of the image charge to the storage transistor. The variable bias signal is set to a second bias value during a transfer of the image charge from the storage transistor.

Abstract: A semiconductor device includes a semiconductor layer, a metal layer electrically contacting the semiconductor layer, and a two-dimensional material layer between the semiconductor layer and the metal layer and having a two-dimensional crystal structure.

Abstract: A semiconductor device includes a trench structure extending into a semiconductor body from a first surface. The trench structure has a shield electrode, a dielectric structure and a diode structure. The diode structure is arranged at least partly between the first surface and a first part of the dielectric structure. The shield electrode is arranged between the first part of the dielectric structure and a bottom of the trench structure. The shield electrode and the semiconductor body are electrically isolated by the dielectric structure. Corresponding methods of manufacture are also described.

Abstract: A method of forming a vertical fin field effect transistor (vertical finFET) with two concentric gate structures, including forming one or more tubular vertical fins on a substrate, forming a first gate structure around an outer wall of at least one of the one or more tubular vertical fins, and forming a second gate structure within an inner wall of at least one of the one or more tubular vertical fins having the first gate structure around the outer wall.

Abstract: A method of forming a semiconductor device and resulting structures having closely packed vertical transistors with reduced contact resistance by forming a semiconductor structure on a doped region of a substrate, the semiconductor structure including a gate formed over a channel region of a semiconductor fin. A liner is formed on the gate and the semiconductor fin, and a dielectric layer is formed on the liner. Portions of the liner are removed to expose a top surface and sidewalls of the semiconductor fin and a sidewall of the dielectric layer. A recessed opening is formed by recessing portions of the liner from the exposed sidewall of the dielectric layer. A top epitaxy region is formed on the exposed portions of the semiconductor fin and dielectric layer such that an extension of the top epitaxy region fills the recessed opening. The top epitaxy region is confined between portions of the liner.

Abstract: A method of fabricating adjacent vertical fins with top source/drains having an air spacer and a self-aligned top junction, including, forming two or more vertical fins on a bottom source/drain, forming a top source/drain on each of the two or more vertical fins, wherein the top source/drains are formed to a size that leaves a gap between the adjacent vertical fins, and forming a source/drain liner on the top source/drains, where the source/drain liner occludes the gap between adjacent top source/drains to form a void space between adjacent vertical fins.

Abstract: The present invention discloses a Schottky diode. The Schottky diode comprises a substrate having a device well. A drift region is disposed within the device well. A guard ring region is disposed within the device well and adjacent to the drift region. A field isolation region and a dielectric film are disposed on a top substrate surface. The dielectric film is aligned to the field isolation region. A field plate is disposed over the field isolation region and the dielectric film. The field plate completely covers a top surface of the dielectric film and partially overlaps the guard ring region. A conductive contact layer is disposed adjacent to the dielectric film. The conductive contact layer contacts a portion of the device well to define a Schottky diode interface.

Abstract: A MOS gate having a trench gate structure is formed on the front surface side of a silicon carbide substrate. A gate trench of the trench gate structure goes through an n+ source region and a p-type base region and reaches an n? drift region. Between adjacent gate trenches, a first p+ region that goes through the p-type base region in the depth direction and reaches the n? drift region is formed at a position separated from the gate trenches. The first p+ region is formed directly beneath a p++ contact region. The width of the first p+ region is less than the width w1 of the gate trench. A second p+ region is formed at the bottom of the gate trench. The first and second p+ regions are silicon carbide epitaxial layers.

Abstract: A well of a first type of conductivity is formed in a semiconductor substrate, and wells of a second type of conductivity are formed in the well of the first type of conductivity at a distance from one another. By an implantation of dopants, a doped region of the second type of conductivity is formed in the well of the first type of conductivity between the wells of the second type of conductivity and at a distance from the wells of the second type of conductivity. Source/drain contacts are applied to the wells of the second type of conductivity, and a gate dielectric and a gate electrode are arranged above regions of the well of the first type of conductivity that are located between the wells of the second type of conductivity and the doped region of the second type of conductivity.

Abstract: A triple well isolated diode including a substrate having a first conductivity type and a buried layer in the substrate. The buried layer has a second conductivity type opposite to the first conductivity type. The triple well isolated diode includes an epi-layer over the substrate and the buried layer. A portion of the epi-layer having the first conductivity type contacts the buried layer. The triple well isolated diode includes a first well, a second well, a third well and a deep well in the epi-layer. The first well and the third well have the second conductivity type. The second well and the deep well have the first conductivity type. The second well surrounds sides of the first well. The third well surrounds sides of the second well. The deep well extends beneath the first well to electrically connect to the second well on opposite sides of the first well.

Abstract: A semiconductor substrate structure includes a semiconductor substrate (P-type), a first buried well region (N-type) disposed in the semiconductor substrate, a first buried layer (N-type) and a second buried layer (P-type) disposed in the semiconductor substrate and on the first buried well region. The first buried layer has a first portion and a second portion. The second buried layer is located between the first portion and the second portion. A top surface of the first portion, a top surface of the second buried layer, and a top surface of the second portion are level with a top surface of the semiconductor substrate, a sidewall of the first portion is aligned with a sidewall of the first buried well region, and a sidewall of the second portion is aligned with another sidewall of the first buried well region. A semiconductor device includes the semiconductor substrate structure and an epitaxial layer.

Abstract: A method for forming a trench diode for a power semiconductor device includes forming a first trench having a first opening and a second trench having a second opening in a substrate material, the second opening of the second trench being wider than the first opening of the first trench. An insulating layer is formed over surfaces of the first and second trenches. A first semiconductor material is provided within the first and second trenches, the first semiconductor material filling the first trench at least until the first opening is entirely plugged and partially filling the second trench so that a portion of the second opening remains open, the first semiconductor material having a first conductivity type. A second semiconductor material is provided within the second trench and over the first semiconductor material, the second semiconductor material having a second conductivity type that is different from the first conductivity type.

Abstract: Vertical sense devices in vertical trench MOSFET. In accordance with an embodiment of the present invention, a semiconductor device includes a main vertical trench metal oxide semiconductor field effect transistor (main-MOSFET). The main-MOSFET includes a plurality of parallel main trenches, wherein the main trenches comprise a first electrode coupled to a gate of the main-MOSFET, and a plurality of main mesas between the main trenches, wherein the main mesas comprise a main source and a main body of the main-MOSFET. The semiconductor device also includes a sense-diode. The sense-diode includes a plurality of sense-diode trenches, wherein each of the sense-diode trenches comprises a portion of one of the main trenches, and a plurality of sense-diode mesas between the source-FET trenches, wherein the sense-diode mesas comprise a sense-diode anode that is electrically isolated from the main source of the main-MOSFET.

Abstract: According to one embodiment, an IGBT has a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, a third semiconductor layer of the second conductivity type, a fourth semiconductor layer of the first conductivity type, and a fifth semiconductor layer of the second conductivity type, between a first electrode and a second electrode, on the first electrode in order. A third electrode is provided on the third semiconductor layer, the fourth semiconductor layer, and the fifth semiconductor layer via a gate insulating film, and is insulated from the first electrode and the second electrode. A fourth electrode is provided between the third electrode and the second semiconductor layer, and is insulated from the third electrode and the second semiconductor layer.

Abstract: A field plate power device comprises: a substrate; a multilayer semiconductor layer disposed on the substrate; a source electrode, a drain electrode, and a gate electrode located between the source electrode and the drain electrode disposed on the multilayer semiconductor layer; a dielectric layer disposed on the gate electrode, a part of the multilayer semiconductor layer between the gate electrode and the source electrode and another part of the multilayer semiconductor layer between the gate electrode and the drain electrode; a groove disposed in a part of the dielectric layer between the gate electrode and the drain electrode; and a field plate disposed on the groove. The field plate comprises a first portion away from the gate electrode in a horizontal direction, and the first portion has an overall upward tilted shape in the horizontal direction away from the gate electrode.

Abstract: A method of fabricating a semiconductor structure includes providing a semiconductor substrate, forming a trench in the semiconductor substrate, overfilling the trench with a first semiconductor material, wherein the first semiconductor material does not have a dopant, forming a second semiconductor material on the first semiconductor material, wherein the second semiconductor material contains a dopant, and performing a thermal treatment so that the dopant in the second semiconductor material diffuses into the first semiconductor material to form a doped third semiconductor material in the trench.

Abstract: In accordance with another aspect, a power switch assembly includes a transistor package including a die case, a source bus tab extending from a first side of the die case, a drain bus tab extending from a second side of the die case, a first power bus rail operatively connected to the source bus tab of the transistor package and a second power bus rail operatively connected to the drain bus tab of the transistor package.

Abstract: A method of manufacturing a semiconductor device that includes a semiconductor layer of a first conductivity type, and a parallel pn layer formed on the semiconductor layer, the pn layer having first semiconductor regions of the first conductivity type and second semiconductor regions of a second conductivity type, the first and second regions being alternately arranged parallel to a surface of the semiconductor layer. In one embodiment, the method includes repeatedly performing the following steps to stack the epitaxial growth layers on the semiconductor layer to form the pn layer: forming an epitaxial growth layer of the first conductivity type or non-doped, the epitaxial growth layer having an impurity concentration lower than that of the semiconductor layer, ion implanting a first-conductivity-type impurity into the epitaxial growth layer, selectively ion implanting a second-conductivity-type impurity into the epitaxial growth layer and ion implanting a group 18 element into the epitaxial growth layer.

Abstract: A semiconductor device includes a first source wiring substructure connected to a plurality of source doping region portions of a transistor structure, and a second source wiring substructure connected to a plurality of source field electrodes located in a plurality of source field trenches extending into a semiconductor substrate. A contact wiring portion of the first source wiring substructure and a contact wiring portion of the second source wiring substructure are located in a wiring layer of a layer stack located on the semiconductor substrate. The contact wiring portion of the first source wiring substructure and the contact wiring portion of the second source wiring substructure each have a lateral size sufficient for a contact for at least a temporary test measurement. The wiring layer including the contact wiring portions is located closer to the substrate than any ohmic electrical connection between the first and the second source wiring substructures.

Abstract: Techniques for forming VFETs having different gate lengths (and optionally different gate pitch and/or gate oxide thickness) on the same wafer are provided. In one aspect, a method of forming a VFET device includes: patterning fins in a wafer including a first fin(s) patterned to a first depth and a second fin(s) patterned to a second depth, wherein the second depth is greater than the first depth; forming bottom source/drains at a base of the fins; forming bottom spacers on the bottom source/drains; forming gates alongside the fins, wherein the gates formed alongside the first fin(s) have a first gate length Lg1, wherein the gates formed alongside the second fin(s) have a second gate length Lg2, and wherein Lg1<Lg2; forming top spacers over the gates; and forming top source/drains over the top spacers. A VFET is also provided.

Abstract: A SiC semiconductor device capable of increasing a switching speed without destroying a gate insulating film. In addition, in a SiC-MOSFET including an n-type semiconductor substrate formed of SiC, a p-type semiconductor layer is entirely or partially provided on an upper surface of a p-type well layer that has a largest area of the transverse plane among a plurality of p-type well layers provided in an n-type drift layer and is arranged on an outermost periphery immediately below a gate electrode pad. It is preferable that a concentration of an impurity contained in the p-type semiconductor layer be larger than that of the p-type well layer.

Abstract: A semiconductor device includes a semiconductor body having opposite first and second surfaces. The semiconductor body includes a load current component having a load current transistor area and a sensor component having a sensor transistor area. The load current transistor area and the sensor transistor area share a same transistor unit construction. The load current transistor area includes first and second transistor area parts, and the sensor transistor area includes a third transistor area part. The first and the third transistor area parts differ from the second transistor area part between the first and the third transistor area parts by a load current transistor area element being absent in the second transistor area part. The second transistor area part is electrically disconnected from a parallel connection of the first and second transistor area parts by the load current transistor area element being absent in the second transistor area part.

Abstract: In one general aspect, a device can include a first trench disposed in a semiconductor region, a second trench disposed in the semiconductor region, and a recess disposed in the semiconductor region between the first trench and the second trench. The recess has a sidewall and a bottom surface. The device also includes a Schottky interface along a sidewall of the recess and the bottom surface of the recess excludes a Schottky interface.

Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes: a deep trench in a substrate; a sidewall insulating film on a side surface of the deep trench; an interlayer insulating film on the sidewall insulating film; and an air gap in the interlayer insulating film.

Abstract: A vertical transistor includes a gate structure interposed between a proximate spacer doped with a first dopant-type and a distal spacer doped with the first dopant-type. The proximate spacer is formed on an upper surface of a semiconductor substrate. At least one channel region extends vertically from the proximate doping source layer to the distal doping source layer. A proximate S/D extension region is adjacent the proximate spacer and a distal S/D extension region is adjacent the distal spacer. The proximate and distal S/D extension regions include dopants that match the first dopant-type of the proximate and distal doping sources.

Abstract: A semiconductor device may include first and second fins formed side by side on a substrate, a first elevated doped region formed on the first fin and having a first doping concentration of impurities, a second elevated doped region formed on the second fin, and a first bridge connecting the first elevated doped region and the second elevated doped region to each other. Methods of manufacturing such a semiconductor device are also disclosed.

Abstract: Systems and methods herein are directed towards semiconductor devices and methods of manufacture thereof, including the formation of a plurality of passive trenches that act as a single passive trench and may be connected to gate electrodes and/or emitters in various embodiments.

Abstract: A semiconductor device includes a pillar-shaped semiconductor layer formed on a substrate; a first insulator surrounding the pillar-shaped semiconductor layer; a first gate surrounding the first insulator and made of a metal having a first work function; a second gate surrounding the first insulator and made of a metal having a second work function different from the first work function, the second gate being located below the first gate; a third gate surrounding the first insulator and made of a metal having the first work function, the third gate being located below the second gate; and a fourth gate surrounding the first insulator and made of a metal having the second work function different from the first work function, the fourth gate being located below the third gate. The first gate, the second gate, the third gate, and the fourth gate are electrically connected together.

Abstract: The power module includes: a first metallic circuit pattern, a semiconductor device disposed on the first metallic circuit pattern; a leadframe electrically connected to the semiconductor device; and a stress buffering layer disposed on an upper surface of the semiconductor device, and capable of buffering a CTE difference between the semiconductor device and the leadframe. The leadframe is connected to the semiconductor device via the stress buffering layer, a CTE of the stress buffering layer is equal to or less than a CTE of the leadframe, and a cross-sectional shape of the stress buffering layer is L-shape. There is provided: the power module capable of realizing miniaturization and large current capacity, and reducing cost thereof by using leadframe structure, and capable of reducing a variation in welding and improving a yield without damaging a semiconductor device; and a fabrication method for such a power module.

Abstract: A trench gate semiconductor switching element is provided. The semiconductor substrate of this element includes a second conductivity type bottom region in contact with the gate insulation layer at a bottom surface of the trench; and a first conductivity type second semiconductor region extending from a position in contact with a lower surface of the body region to a position in contact with a lower surface of the bottom region, and in contact with the gate insulation layer on a lower side of the body region. The bottom region includes a low concentration region in contact with the gate insulation layer in a first range of the bottom surface positioned at an end in a long direction of the trench; and a high concentration region in contact with the gate insulation layer in a second range of the bottom surface adjacent to the first range.

Abstract: In a general aspect, a power semiconductor device can include a semiconductor region having an active region and a termination region. The device can also include a plurality of trench shield electrodes each having a first portion disposed in the active region and a second portion disposed in the termination region. One or more of the trench shield electrodes can have a second portion that extends a first distance into the termination region, while one or more other trench shield electrodes can have a second portion that extends a second distance into the termination region, the second distance being less than the first distance. The trench shield electrode(s) having the second portion that extends the second distance into the termination region can be interleaved with the trench shield electrode(s) having the second portion that extends the first distance into the termination region.

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to graphene detectors integrated with optical waveguide structures and methods of manufacture. The structure includes a plurality of non-planar fin structures composed of substrate material, and a non-planar sheet of graphene material extending entirely over each of the plurality of non-planar fin structures.

Abstract: Apparatuses and methods for gate power to circuits of semiconductor devices are described. An example apparatus includes a substrate, a first wiring and a second wiring, and a plurality of transistors. The first wiring may be supplied with a power voltage, and the first wiring is formed over the substrate and is elongating in a first direction. The second wiring may be formed between the substrate and the first wiring, and vertically overlapping the first wiring with the second wiring elongating in the first direction. The plurality of transistors are vertically coupled between the first wiring and the second wiring.

Abstract: A semiconductor device includes a plurality of striped-shaped trenches extending into a semiconductor substrate. At least one trench of a first group of trenches of the plurality of striped-shaped trenches is located between two trenches of a second group of trenches of the plurality of striped-shaped trenches. A gate of a transistor structure is located in each trench of the second group of trenches and a gate insulation layer is located between the gate and the semiconductor substrate in each trench of the second group of trenches. Trench insulation material is located in each trench of the first group of trenches. A thickness of the trench insulation material throughout each trench of the first group of trenches is at least two times larger than a thickness of the gate insulation layer in each trench of the second group of trenches.

Abstract: Some embodiments include a memory device. The device has a fin with a first source/drain region, a second source/drain region and a channel region. The first source/drain region extends to a first height. The second source/drain region extends to a second height less than the first height. The channel region extends along a trough between the first and second source/drain regions. A charge-storage device is over the first source/drain region. A first sense/access line is along a sidewall of the fin and is spaced from the channel region by dielectric material. A second sense/access line is over the second source/drain region. An uppermost surface of the second sense/access line is beneath an uppermost surface of the first source/drain region. Some embodiments include memory arrays, and some embodiments include methods of forming memory arrays.