Plural Gate Electrodes Or Grid Shaped Gate Electrode Patents (Class 257/331)
  • Patent number: 11062956
    Abstract: A semiconductor structure and a method for fabricating the same. The semiconductor structure includes at least one semiconductor fin disposed on a substrate. A disposable gate contacts the at least one semiconductor fin. A spacer is disposed on the at least one semiconductor fin and in contact with the disposable gate. Epitaxially grown source and drain regions are disposed at least partially within the at least one semiconductor fin. A first one of silicide and germanide is disposed on and in contact with the source region. A second one of one of silicide and germanide is disposed on and in contact with the drain region. The method includes epitaxially growing source/drain regions within a semiconductor fin. A contact metal layer contacts the source/drain regions. One of a silicide and a germanide is formed on the source/drain regions from the contact metal layer prior to removing the disposable gate.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: July 13, 2021
    Assignee: International Business Machines Corporation
    Inventors: Praneet Adusumilli, Hemanth Jagannathan, Christian Lavoie, Ahmet S. Ozcan
  • Patent number: 11056484
    Abstract: A semiconductor device includes an IGBT region extending from a front surface to a rear surface of a semiconductor substrate including a first conductive type drift layer, and a diode region lying adjacent to the IGBT region. The IGBT region includes a second conductive type base layer on a side facing the front surface and a first trench portion penetrating the base layer. The first trench portion includes a first gate electrode, a second gate electrode provided directly below the first gate electrode, and an insulating film provided on a side surface of the first gate electrode, between the first gate electrode and the second gate electrode and in a position to contact the second gate electrode. The diode region includes a second conductive type anode layer and a second trench portion including a dummy gate electrode on the side facing the front surface.
    Type: Grant
    Filed: August 7, 2019
    Date of Patent: July 6, 2021
    Assignee: Mitsubishi Electric Corporation
    Inventor: Ryu Kamibaba
  • Patent number: 11049950
    Abstract: A trench power semiconductor device and a manufacturing method thereof are provided. The trench power semiconductor device includes a substrate, an epitaxial layer disposed on the substrate, and a gate structure. The epitaxial layer has at least one trench formed therein, and the gate structure is disposed in the trench. A gate structure includes a lower doped region and an upper doped region disposed above the lower doped region to form a PN junction. The concentration of the impurity decreases along a direction from a peripheral portion of the upper doped region toward a central portion of the upper doped region.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: June 29, 2021
    Assignee: SUPER GROUP SEMICONDUCTOR CO., LTD.
    Inventor: Hsiu-Wen Hsu
  • Patent number: 11049965
    Abstract: A semiconductor device includes a first external electrode with a first electrode surface portion; a second external electrode with a second electrode surface portion; a MOSFET chip with a built-in Zener diode which includes an active region and a peripheral region; a control IC chip which drives the MOSFET chip based on voltage or current between a drain electrode and a source electrode of the MOSFET chip; and a capacitor which supplies power to the MOSFET chip and the control IC chip. The first electrode surface portion is connected to either the drain electrode or the source, the second electrode surface portion is connected to either the source electrode or the drain electrode, a plurality of unit cells of the MOSFET with the built-in Zener diode are provided in the active region, and the breakdown voltage of the Zener diode is set to be lower than that of the peripheral region.
    Type: Grant
    Filed: August 6, 2018
    Date of Patent: June 29, 2021
    Assignee: HITACHI POWER SEMICONDUCTOR DEVICE, LTD.
    Inventors: Masaki Shiraishi, Tetsuya Ishimaru, Junichi Sakano, Mutsuhiro Mori, Shinichi Kurita
  • Patent number: 11011468
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a semiconductor substrate, a target layer, a plurality of metal pads, a plurality of conductive lines, a plurality of conductive plugs, an isolating liner, and a plurality of metal contacts. The semiconductor substrate has a front surface, a rear surface opposite to the front surface, and an implanted region connected to the rear surface. The target layer is disposed over the front surface. The metal pads are disposed over the target layer. The plurality of conductive lines are disposed within the semiconductor substrate and the target layer and connected to the metal pads. The conductive plugs are disposed in the implanted region. The isolating liner encircles the conductive plugs. The metal contacts are disposed over the conductive lines and the conductive plugs.
    Type: Grant
    Filed: November 6, 2019
    Date of Patent: May 18, 2021
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Hsih-Yang Chiu
  • Patent number: 11011538
    Abstract: A transistor comprises channel material having first and second opposing sides. A gate is on the first side of the channel material and a gate insulator is between the gate and the channel material. A first insulating material has first and second opposing sides, with the first side being adjacent the second side of the channel material. A second insulating material of different composition from that of the first insulating material is adjacent the second side of the first insulating material. The second insulating material has at least one of (a), (b), and (c), where, (a): lower oxygen diffusivity than the first material, (b): net positive charge, and (c): at least two times greater shear strength than the first material. In some embodiments, an array of elevationally-extending strings of memory cells comprises such transistors. Other embodiments, including method, are disclosed.
    Type: Grant
    Filed: May 8, 2019
    Date of Patent: May 18, 2021
    Assignee: Micron Technology, Inc.
    Inventors: David H. Wells, Luan C. Tran, Jie Li, Anish A. Khandekar, Kunal Shrotri
  • Patent number: 11004936
    Abstract: Insulated gate semiconductor device includes drift layer of first conductivity type; first base region of second conductivity type on the drift layer; carrier-supply region of the first conductivity type on the first base region and having higher impurity concentration than the drift layer; a first contact region of the second conductivity type on the first base region and having higher impurity concentration than the first base regions; cell-pillars each having polygonal-shape, arranged in a lattice-pattern, sidewalls of the cell-pillars are defined by trenches penetrating the carrier-supply region, the first contact region, and the first base region; and insulated-gate electrode-structures in the trenches. A first pillar selected from the cell-pillars includes the carrier-supply region, the first contact region and the first base region, and the first contact regions are in contact with a limited portion of an outer periphery of a first pillar at a top surface of the first pillar.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: May 11, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Syunki Narita
  • Patent number: 10991762
    Abstract: In a memory unit according to an embodiment of the present disclosure, a memory cell array is configured, when, of a plurality of memory cells, multiple first memory cells whose corresponding fourth wiring line and first wiring line are different from one another are simultaneously accessed, to allow for simultaneous access to the multiple first memory cells, without allowing for simultaneous access to memory cells corresponding to the fourth wiring line shared by the first memory cells.
    Type: Grant
    Filed: March 5, 2018
    Date of Patent: April 27, 2021
    Assignee: Sony Semiconductor Solutions Corporation
    Inventors: Makoto Kitagawa, Yoshiyuki Shibahara, Haruhiko Terada, Yotaro Mori
  • Patent number: 10964783
    Abstract: A semiconductor device according to an exemplary embodiment of the present disclosure includes a substrate, an n? type layer, a plurality of trenches, a p type region, a p+ type region, an n+ type region, a gate electrode, a source electrode, and a drain electrode. The semiconductor device may include a plurality of unit cells. A unit cell among the plurality of unit cells may include a contact portion with which the source electrode and the n+ type region are in contact, a first branch part disposed above the contact portion on a plane, and a second branch part disposed below the contact portion on a plane, the plurality of trenches are separated from each other and disposed with a stripe shape on a plane.
    Type: Grant
    Filed: July 1, 2019
    Date of Patent: March 30, 2021
    Assignees: Hyundai Motor Company, Kia Motors Corporation
    Inventor: Dae Hwan Chun
  • Patent number: 10957534
    Abstract: A method of manufacturing a semiconductor device includes forming a first sacrificial layer including a nitride over a first source layer, forming a second sacrificial layer including aluminum oxide over the first sacrificial layer, forming a second source layer over the second sacrificial layer, forming a stacked structure over the second source layer, forming a channel layer that passes through the stacked structure, the second source layer, the second sacrificial layer, and the first sacrificial layer, the channel layer being enclosed by a memory layer, forming a slit that passes through the stacked structure and the second source layer, forming a polysilicon spacer in the slit, forming an opening by removing the first sacrificial layer and the second sacrificial layer, exposing the channel layer by etching the memory layer, and forming a third source layer in the opening.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: March 23, 2021
    Assignee: SK hynix Inc.
    Inventors: Sun Young Kim, Nam Jae Lee
  • Patent number: 10943833
    Abstract: Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. For example, one or more silicon and silicon germanium stacks are utilized to form PMOS transistors comprising germanium nanowire channels and NMOS transistors comprising silicon nanowire channels. In an example, a first silicon and silicon germanium stack is oxidized to transform silicon to silicon oxide regions, which are removed to form germanium nanowire channels for PMOS transistors. In another example, silicon and germanium layers within a second silicon and silicon germanium stack are removed to form silicon nanowire channels for NMOS transistors. PMOS transistors having germanium nanowire channels and NMOS transistors having silicon nanowire channels are formed as part of a single fabrication process.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: March 9, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Kuo-Cheng Chiang, Carlos H. Diaz, Jean-Pierre Colinge
  • Patent number: 10937874
    Abstract: A semiconductor device includes: a gate electrode groove formed in contact with a drift region, a well region, and a source region; a gate electrode formed on a surface of the gate electrode groove via an insulating film; a source electrode groove in contact with the gate electrode groove; a source electrode electrically connected to a source region; and a gate wiring electrically insulated from the source electrode and formed inside the source electrode groove in contact with the gate electrode.
    Type: Grant
    Filed: August 10, 2016
    Date of Patent: March 2, 2021
    Assignee: NISSAN MOTOR CO., LTD.
    Inventors: Ryota Tanaka, Tetsuya Hayashi, Wei Ni, Yasuaki Hayami
  • Patent number: 10930741
    Abstract: A p-type base region is configured by a p?-type channel region and a p-type high-impurity-concentration region adjacent to the channel region in a horizontal direction. A point having a highest impurity concentration in the high-concentration region is located at a position separated from a lower surface of an n++-type source region. The impurity concentration in the high-impurity-concentration region decreases toward the front surface of the semiconductor substrate and the rear surface of the semiconductor substrate in the depth direction. The impurity concentration in the high-impurity-concentration region decreases toward the low-impurity-concentration region in a direction parallel to the front surface of the semiconductor substrate.
    Type: Grant
    Filed: October 22, 2019
    Date of Patent: February 23, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Makoto Utsumi, Tsuyoshi Araoka
  • Patent number: 10916658
    Abstract: A semiconductor device includes a channel pattern including a first semiconductor pattern and a second semiconductor pattern, which are sequentially stacked on a substrate, and a gate electrode that extends in a first direction and crosses the channel pattern. The gate electrode includes a first portion interposed between the substrate and the first semiconductor pattern and a second portion interposed between the first and second semiconductor patterns. A maximum width in a second direction of the first portion is greater than a maximum width in the second direction of the second portion, and a maximum length in the second direction of the second semiconductor pattern is less than a maximum length in the second direction of the first semiconductor pattern.
    Type: Grant
    Filed: June 5, 2020
    Date of Patent: February 9, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junggil Yang, Seungmin Song, Geumjong Bae, Dong Il Bae
  • Patent number: 10916628
    Abstract: Provided is a semiconductor device including a drift region having a first conductivity type provided on a semiconductor substrate; a plurality of trench portions provided above the drift region, on a top surface side of the semiconductor substrate; a base region having a second conductivity type provided in a mesa portion sandwiched between the plurality of trench portions, in the semiconductor substrate; an emitter region having the first conductivity type provided above the base region, on a top surface of the mesa portion; and a contact region having the second conductivity type and a higher doping concentration than the base region, provided adjacent to the emitter region on the top surface of the mesa portion, wherein a mesa width of the mesa portion is less than or equal to 100 nm, and a bottom end of the contact region is shallower than a bottom end of the emitter region.
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: February 9, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yosuke Sakurai, Yuichi Onozawa, Akio Nakagawa
  • Patent number: 10910398
    Abstract: A semiconductor device may include a cell gate conductive pattern in a cell array area that extends to a step area, a cell vertical structure in the cell array area that extends through the cell gate conductive pattern, a cell gate contact structure on the cell gate conductive pattern in the step area, a cell gate contact region in the cell gate conductive pattern and aligned with the cell gate contact structure, a first peripheral contact structure spaced apart from the cell gate conductive pattern, a second peripheral contact structure spaced apart from the first peripheral contact structure, a first peripheral contact region under the first peripheral contact structure, and a second peripheral contact region under the second peripheral contact structure. The cell gate contact region may include a first element and a remainder of the cell gate conductive pattern may not substantially include the first element.
    Type: Grant
    Filed: October 19, 2018
    Date of Patent: February 2, 2021
    Inventors: Jang-Gn Yun, Sunghoi Hur, Jaesun Yun, Joon-Sung Lim
  • Patent number: 10903163
    Abstract: Trench MOSFET with self-aligned body contact with spacer. In accordance with an embodiment of the present invention, a semiconductor device includes a semiconductor substrate, and at least two gate trenches formed in the semiconductor substrate. Each of the trenches comprises a gate electrode. The semiconductor device also includes a body contact trench formed in the semiconductor substrate between the gate trenches. The body contact trench has a lower width at the bottom of the body contact trench and an ohmic body contact implant beneath the body contact trench. The horizontal extent of the ohmic body contact implant is not greater than the lower width of the body contact trench.
    Type: Grant
    Filed: September 13, 2016
    Date of Patent: January 26, 2021
    Assignee: Vishay-Siliconix, LLC
    Inventors: Lingpeng Guan, Kyle Terrill, Seokjin Jo
  • Patent number: 10896952
    Abstract: A semiconductor device includes gate trenches formed in a SiC substrate and extending lengthwise in parallel in a first direction. A trench interval which defines a space between adjacent gate trenches extends in a second direction perpendicular to the first direction. Source regions of a first conductivity type formed in the SiC substrate occupy a first part of the space between adjacent gate trenches. Body regions of a second conductivity type opposite the first conductivity type formed in the SiC substrate and below the source regions occupy a second part of the space between adjacent gate trenches. Body contact regions of the second conductivity type formed in the SiC substrate occupy a third part of the space between adjacent gate trenches. Shielding regions of the second conductivity type formed deeper in the SiC substrate than the body regions adjoin a bottom of at least some of the gate trenches.
    Type: Grant
    Filed: February 21, 2020
    Date of Patent: January 19, 2021
    Assignee: Infineon Technologies AG
    Inventors: Thomas Aichinger, Wolfgang Bergner, Paul Ellinghaus, Rudolf Elpelt, Romain Esteve, Florian Grasse, Caspar Leendertz, Shiqin Niu, Dethard Peters, Ralf Siemieniec, Bernd Zippelius
  • Patent number: 10854611
    Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: December 1, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Kris K. Brown, Raghunath Singanamalla, Vinay Nair, Fawad Ahmed, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Patent number: 10854544
    Abstract: Anti-fuse structure circuit and method of forming an anti-fuse structure circuit are provided. A substrate is provided, and an anti-fuse is formed on the substrate by forming a first gate structure and a dielectric layer on the substrate and forming conductive plugs respectively in the dielectric layer at two sides of the first gate structure. The dielectric layer covers the first gate structure, and the conductive plugs have a width decreasing from top to bottom. A second gate structure is formed on the substrate. A top surface of the first gate structure is higher than a top surface of the second gate structure. The dielectric layer also covers the second gate structure. The conductive plugs are also located respectively in the dielectric layer at two sides of the second gate structure.
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: December 1, 2020
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Junhong Feng
  • Patent number: 10847518
    Abstract: A semiconductor substrate is provided. Active areas and trench isolation regions are formed. The active areas extend along a first direction. Buried word lines extending along a second direction are formed in the semiconductor substrate. Two of the buried word lines intersect with each of the active areas, separating each of the active areas into a digit line contact area and two cell contact areas. Buried digit lines extending along a third direction are formed above the buried word lines. An upper portion of the trench isolation region is removed to form an L-shaped recessed area around each of the cell contact areas. The L-shaped recessed area exposes sidewalls of the cell contact areas. An epitaxial silicon growth process is then performed to grow an epitaxial silicon layer from the exposed sidewalls and a top surface of each of the cell contact areas, thereby forming enlarged cell contact areas.
    Type: Grant
    Filed: December 1, 2017
    Date of Patent: November 24, 2020
    Assignee: Micron Technology, Inc.
    Inventor: Kuo-Chen Wang
  • Patent number: 10833174
    Abstract: A method of forming a transistor device where an extended drain region is formed by performing angled ion implantation of conductivity dopants of a first conductivity type into the sidewalls and bottom portion of a trench. The bottom portion of the trench is then implanted with dopants of a second conductivity type. Source and drain regions are formed on opposing sides of the trench including in upper portions of the trench sidewalls. A channel region is formed in a trench sidewall below the source region. The trench includes a control terminal structure. After formation of the transistor device, the net conductivity type of the bottom portion of the trench is of the first conductivity type.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: November 10, 2020
    Assignee: NXP USA, INC.
    Inventors: Bernhard Grote, Ljubo Radic, Saumitra Raj Mehrotra, Tania Tricia-Marie Thomas, Mark Edward Gibson
  • Patent number: 10811532
    Abstract: A high voltage device includes: a semiconductor layer, an isolation structure, a drift oxide region, a well, a body region, a body contact, a buffer region, a gate, and a source and a drain. The body contact includes a main body contact and at least one sub-body contact. The main body contact is adjacent to the source, wherein the main body contact and the source are rectangles that extend along a width direction, and the source is located between the main body contact and the gate. The sub-body contact extends from the main body contact toward the gate and contacts an inverse current channel. The buffer region encompasses all the periphery of the body region below a top surface of the semiconductor layer, wherein an impurity concentration of the buffer region is lower than an impurity concentration of the body region.
    Type: Grant
    Filed: March 13, 2019
    Date of Patent: October 20, 2020
    Assignee: RICHTEK TECHNOLOGY CORPORATION
    Inventors: Tsung-Yi Huang, Chien-Yu Chen
  • Patent number: 10804388
    Abstract: A semiconductor device 1 includes a trench gate structure 6 formed in a surface layer portion of a first principal surface of a semiconductor layer. A source region 10 and a well region 11 are formed in a surface layer portion of the first principal surface of the semiconductor layer at a side of the trench gate structure 6. The well region 11 is formed in a region at a side of the second principal surface of the semiconductor layer with respect to the source region 10. A channel is formed along the trench gate structure 6 in a portion of the well region 11. A multilayer region 22 is formed in a region between the trench gate structure 6 and the source region 10 in the semiconductor layer. The multilayer region 22 has a p type impurity region 20 formed in the surface layer portion of the first principal surface of the semiconductor layer and an n type impurity region 21 formed in a side of the second principal surface of the semiconductor layer with respect to the second conductivity type impurity region 20.
    Type: Grant
    Filed: January 16, 2017
    Date of Patent: October 13, 2020
    Assignee: ROHM CO., LTD.
    Inventors: Minoru Nakagawa, Seigo Mori, Takui Sakaguchi, Masatoshi Aketa, Yuki Nakano
  • Patent number: 10790148
    Abstract: A method of manufacturing a semiconductor device includes forming a composite spacer architecture over sidewalls of a sacrificial gate disposed over a semiconductor layer, and the subsequent deposition of a supplemental sacrificial gate over the sacrificial gate. A recess etch of the composite spacer architecture is followed by the formation within the recess of a sacrificial capping layer. The supplemental sacrificial gate and the sacrificial gate are removed to expose the composite spacer architecture, which is selectively etched to form a T-shaped cavity overlying a channel region of the semiconductor layer. A replacement metal gate is formed within a lower region of the T-shaped cavity, and a self-aligned contact (SAC) capping layer is formed within an upper region of the T-shaped cavity prior to metallization of the device.
    Type: Grant
    Filed: May 23, 2018
    Date of Patent: September 29, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Heimanu Niebojewski, Ruilong Xie, Andrew M. Greene
  • Patent number: 10790280
    Abstract: A semiconductor includes a first transistor and a second transistor. The first transistor includes a first and a second epitaxial layer, formed of a first semiconductor material. The second epitaxial layer is disposed over the first epitaxial layer. The first transistor also includes a first gate dielectric layer surrounds the first and second epitaxial layers and extends from a top surface of the first epitaxial layer to a bottom surface of the second epitaxial layer and a first metal gate layer surrounding the first gate dielectric layer. The second transistor includes a third epitaxial layer formed of the first semiconductor material and a fourth epitaxial layer disposed directly on the third epitaxial layer and formed of a second semiconductor. The second transistor also includes a second gate dielectric layer disposed over the third and fourth epitaxial layers and a second metal gate layer disposed over the second gate dielectric layer.
    Type: Grant
    Filed: February 2, 2018
    Date of Patent: September 29, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Ching, Chung-Cheng Wu, Ching-Fang Huang, Wen-Hsing Hsieh, Ying-Keung Leung, Cheng-Ting Chung
  • Patent number: 10763273
    Abstract: A memory device comprises an array of two-transistor memory cells, two-transistor memory cells in the array including a vertical select transistor and a vertical data storage transistor. The array comprises a plurality of stacks of conductive lines, a stack of conductive lines including a select gate line and a word line adjacent the select gate line. The device comprises an array of vertical channel lines disposed through the conductive lines to a reference line, gate dielectric structures surrounding the vertical channel lines at channel regions of vertical select transistors in the array of vertical channel lines and the select gate lines, charge storage structures surrounding the vertical channel lines at channel regions of vertical data storage transistors in the array of vertical channel lines and the word lines, and bit lines coupled to the vertical channel lines via upper ends of the vertical channel lines.
    Type: Grant
    Filed: August 23, 2018
    Date of Patent: September 1, 2020
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Guan-Wei Wu, Yao-Wen Chang, I-Chen Yang
  • Patent number: 10763209
    Abstract: A MOS antifuse with an accelerated dielectric breakdown induced by a void or seam formed in the electrode. In some embodiments, the programming voltage at which a MOS antifuse undergoes dielectric breakdown is reduced through intentional damage to at least part of the MOS antifuse dielectric. In some embodiments, damage may be introduced during an etchback of an electrode material which has a seam formed during backfilling of the electrode material into an opening having a threshold aspect ratio. In further embodiments, a MOS antifuse bit-cell includes a MOS transistor and a MOS antifuse. The MOS transistor has a gate electrode that maintains a predetermined voltage threshold swing, while the MOS antifuse has a gate electrode with a void accelerated dielectric breakdown.
    Type: Grant
    Filed: August 19, 2014
    Date of Patent: September 1, 2020
    Assignee: Intel Corporation
    Inventors: Roman Olac-Vaw, Walid Hafez, Chia-Hong Jan, Hsu-Yu Chang, Ting Chang, Rahul Ramaswamy, Pei-Chi Liu, Neville Dias
  • Patent number: 10749027
    Abstract: In one general aspect, an apparatus can include a semiconductor region, and a trench defined within the semiconductor region. The trench can have a depth aligned along a vertical axis and have a length aligned along a longitudinal axis orthogonal to the vertical axis. The trench can have a first portion of the length included in a termination region of the semiconductor region and can have a second portion of the length included in an active region of the semiconductor region.
    Type: Grant
    Filed: December 28, 2018
    Date of Patent: August 18, 2020
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Joseph A. Yedinak, Richard Stokes, Jason Higgs, Fred Session
  • Patent number: 10727339
    Abstract: Vertical semiconductor devices having selectively regrown top contacts and method of fabricating vertical semiconductor devices having selectively regrown top contacts are described. For example, a semiconductor device includes a substrate having a surface. A first source/drain region is disposed on the surface of the substrate. A vertical channel region is disposed on the first source/drain region and has a first width parallel with the surface of the substrate. A second source/drain region is disposed on the vertical channel region and has a second width parallel with and substantially greater than the first width. A gate stack is disposed on and completely surrounds a portion of the vertical channel region.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: July 28, 2020
    Assignee: Intel Corporation
    Inventors: Benjamin Chu-Kung, Gilbert Dewey, Van H. Le, Jack T. Kavalieros, Marko Radosavljevic, Ravi Pillarisetty, Han Wui Then, Niloy Mukherjee, Sansaptak Dasgupta
  • Patent number: 10727246
    Abstract: A three-dimensional semiconductor device includes a stacked structure including a plurality of conductive layers stacked on a substrate, a distance along a first direction between sidewalls of an upper conductive layer and a lower conductive layer being smaller than a distance along a second direction between sidewalls of the upper conductive layer and the lower conductive layer, the first and second directions crossing each other and defining a plane parallel to a surface supporting the substrate, and vertical channel structures penetrating the stacked structure.
    Type: Grant
    Filed: November 15, 2017
    Date of Patent: July 28, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sang-Yong Park, Jintaek Park
  • Patent number: 10707343
    Abstract: A method of manufacturing a semiconductor device includes in this order: a semiconductor base body preparing step; a first trench forming step; a first insulation film forming step of forming a first insulation film; a gate insulation film forming step; a gate electrode forming step; a second trench forming step of forming a second trench in the inside of a first trench by removing a center portion of the first insulation film; a second insulation film forming step of forming a second insulation film in the inside of the second trench under a condition that a gap remain in the inside of the second trench; a shield electrode forming step of forming a shield electrode in the inside of the gap; and a source electrode forming step of forming a source electrode.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: July 7, 2020
    Assignee: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
    Inventor: Kinya Ohtani
  • Patent number: 10699964
    Abstract: Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. For example, one or more silicon and silicon germanium stacks are utilized to form PMOS transistors comprising germanium nanowire channels and NMOS transistors comprising silicon nanowire channels. In an example, a first silicon and silicon germanium stack is oxidized to transform silicon to silicon oxide regions, which are removed to form germanium nanowire channels for PMOS transistors. In another example, silicon and germanium layers within a second silicon and silicon germanium stack are removed to form silicon nanowire channels for NMOS transistors. PMOS transistors having germanium nanowire channels and NMOS transistors having silicon nanowire channels are formed as part of a single fabrication process.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: June 30, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Kuo-Cheng Ching, Carlos H. Diaz, Jean-Pierre Colinge
  • Patent number: 10686066
    Abstract: This semiconductor device includes: an n-type SiC drift layer; a p-type base region; an n-type source region selectively embedded in the top part of the base region; p-type base contact regions selectively embedded in the top part of the base region so as to form a first gap with the source region along the <11-20> direction; a gate electrode provided via a gate insulating film; and an n-type drain region. The top surface of the drain region has an off-angle relative to the <11-20> direction towards the <0001> direction, and an alignment mark for positioning is formed on the top surface. The drift layer and the base region are epitaxially grown films, and a width wg of the first gap is set in accordance with a positional deviation width of the alignment mark caused by the off-angle and epitaxial growth.
    Type: Grant
    Filed: October 24, 2018
    Date of Patent: June 16, 2020
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Keiji Okumura
  • Patent number: 10679994
    Abstract: Circuits employing asymmetric diffusion breaks in different type semiconductor diffusion regions are disclosed. In examples herein, diffusion breaks having dimensions asymmetric to each other are provided in different types of diffusion regions in a circuit to increase carrier mobility in semiconductor channels of a semiconductor device formed in different diffusion regions. In examples herein, the circuit includes a P-type and N-type semiconductor device(s) formed in a P-type and an N-type diffusion region(s), respectively, formed in the substrate. Complementary metal oxide semiconductor (CMOS) circuits can be realized from the P-type and N-type semiconductor devices. Diffusion breaks can induce strain in the diffusion regions with a magnitude of the induced strain related to a dimension of the diffusion breaks. As one example, an induced tensile strain may increase carrier mobility in N-type devices and decrease carrier mobility in P-type devices, with induced compressive strain having the opposite effect.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: June 9, 2020
    Assignee: QUALCOMM Incorporated
    Inventor: Haining Yang
  • Patent number: 10672782
    Abstract: A semiconductor memory device includes a semiconductor substrate, transistors formed in an upper surface of the semiconductor substrate, a stacked body provided on the semiconductor substrate, a first contact, and a second contact. The transistors are arranged along a first direction. A minimum period of an arrangement of the transistors is a first period. The stacked body includes electrode films. A configuration of a first portion of the stacked body is a staircase-like having terraces. A first region and a second region are set along the first direction in the first portion. A length in the first direction of the terrace disposed in the second region is longer than the first period. A length in the first direction of the terrace disposed in the first region is shorter than the first period.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: June 2, 2020
    Assignee: Toshiba Memory Corporation
    Inventor: Tetsuaki Utsumi
  • Patent number: 10658351
    Abstract: An electronic device can include a transistor having a gate electrode, a first portion, and a second portion, wherein along the gate electrode, the first portion of the transistor has a first gate-to-drain capacitance and a first gate-to-source capacitance, the second portion of the transistor has a second gate-to-drain capacitance and a second gate-to-source capacitance, and a ratio of the first gate-to-drain capacitance to the first gate-to-source capacitance is less than a ratio of the second gate-to-drain capacitance to the second gate-to-source capacitance.
    Type: Grant
    Filed: August 16, 2018
    Date of Patent: May 19, 2020
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Balaji Padmanabhan, Kirk K. Huang, Prasad Venkatraman, Emily M. Linehan, Zia Hossain
  • Patent number: 10651301
    Abstract: In one embodiment, a semiconductor device includes a semiconductor substrate having an upper surface, a trench electrode placed inside a trench formed on the upper surface, and a trench insulating film placed between the trench electrode and the semiconductor substrate, and the semiconductor substrate includes a drift layer, a floating layer for electric field reduction, a hole barrier layer, a body layer and an emitter layer, and the emitter layer, the body layer and the hole barrier layer are separated from the drift layer by the floating layer for electric field reduction, and a path of a carrier passing through an inverted layer formed in the body layer includes the body layer, the hole barrier layer, a non-inverted region of the floating layer for electric field reduction, and the drift layer.
    Type: Grant
    Filed: May 15, 2018
    Date of Patent: May 12, 2020
    Assignee: Renesas Electronics Corporation
    Inventors: Ryo Kanda, Hitoshi Matsuura
  • Patent number: 10651276
    Abstract: A semiconductor device has a cell which includes a first semiconductor region of a first conductive type, a base region of a second conductive type on the first semiconductor region, a source region of the first conductive type on the base region, a gate electrode penetrating through the base region in a first direction to reach the first semiconductor region and extending in a second direction, and a gate insulting film between the gate electrode and the first semiconductor region, between the gate electrode and the base region, and between the gate electrode and the source region. The cell has a region having a first threshold voltage and a region having a second threshold voltage higher than the first threshold voltage.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: May 12, 2020
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventors: Tatsuya Nishiwaki, Kohei Oasa, Hiroshi Matsuba, Hung Hung, Kikuo Aida, Kentaro Ichinoseki
  • Patent number: 10629595
    Abstract: A power semiconductor device includes a semiconductor substrate having a first side. A plurality of active transistor cells is formed in an active area of the semiconductor substrate. Each of the plurality of active transistor cells includes a spicular trench which extends from the first side into the semiconductor substrate and has a field electrode. A gate electrode structure has a plurality of intersecting gate trenches running between the spicular trenches. The intersecting gate trenches form gate crossing regions of different shape when seen in a plan projection onto the first side of the power semiconductor device.
    Type: Grant
    Filed: June 27, 2018
    Date of Patent: April 21, 2020
    Assignee: Infineon Technologies Austria AG
    Inventors: Cedric Ouvrard, Cesar Augusto Braz, Olivier Guillemant, David Laforet, Gerhard Noebauer, Li Juin Yip
  • Patent number: 10622365
    Abstract: A semiconductor device, the device including: a plurality of memory cells; and peripheral circuits, the peripheral circuits include controlling the plurality of memory cells, where each of the plurality of memory cells includes a first gate and a second gate, where the plurality of memory cells each include a channel region, at least one channel facet, a charge trap region and a tunneling region, where a portion of the peripheral circuits are designed to control the first gate and the second gate so to position two distinct memory sites, a first memory site and second a memory site, within the charge trap region of the at least one channel facet of at least one of the plurality of memory cells, and where the first memory site is substantially closer to the first gate than the second memory site.
    Type: Grant
    Filed: April 7, 2019
    Date of Patent: April 14, 2020
    Assignee: MONOLITHIC 3D INC.
    Inventors: Zvi Or-Bach, Jin-Woo Han
  • Patent number: 10615118
    Abstract: An anti-fuse device includes a program transistor and a read transistor. The program transistor executes a program via insulation breakdown of a gate insulating layer. The read transistor is adjacent to the program transistor and reads the state of the program transistor. At least one of a first gate electrode of the program transistor or a second gate electrode of the read transistor is buried in a substrate.
    Type: Grant
    Filed: February 26, 2019
    Date of Patent: April 7, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Dong-hyun Lee
  • Patent number: 10615215
    Abstract: A solid-state imaging device includes a pixel having a photoelectric conversion element which generates a charge in response to incident light, a first transfer gate which transfers the charge from the photoelectric conversion element to a charge holding section, and a second transfer gate which transfers the charge from the charge holding section to a floating diffusion. The first transfer gate includes a trench gate structure having at least two trench gate sections embedded in a depth direction of a semiconductor substrate, and the charge holding section includes a semiconductor region positioned between adjacent trench gate sections.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: April 7, 2020
    Assignee: Sony Semiconductor Solutions Corporation
    Inventor: Takahiro Kawamura
  • Patent number: 10600886
    Abstract: A vertical fin field-effect-transistor and a method for fabricating the same. The vertical fin field-effect-transistor includes a substrate, a first source/drain layer including a plurality of pillar structures, and a plurality of fins disposed on and in contact with the plurality of pillar structures. A doped layer epitaxially grown from the first source/drain layer is in contact with the plurality of fins and the plurality of pillar structures. A gate structure is disposed in contact with two or more fins in the plurality of fins. The gate structure includes a dielectric layer and a gate layer. A second source/drain layer is disposed on the gate structure. The method includes epitaxially growing a doped layer in contact with a plurality of fins and a plurality of pillar structures. A gate structure is formed in contact with two or more fins. A second source/drain layer is formed on the gate structure.
    Type: Grant
    Filed: November 2, 2018
    Date of Patent: March 24, 2020
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
  • Patent number: 10593787
    Abstract: A semiconductor layer may be subjected to etching to form a trench therein. An epitaxial layer may be further formed in the trench. Here, the impurity concentration of the epitaxial layer is controlled to be lower than that of the semiconductor layer. In this manner, concentration of electrical fields in the trench is reduced. A first innovations herein provides a semiconductor device including a first semiconductor layer containing impurities of a first conductivity type, a trench provided in the first semiconductor layer on a front surface side thereof, and a second semiconductor layer provided on an inner wall of the trench, where the second semiconductor layer contains impurities of the first conductivity type at a lower concentration than the first semiconductor layer.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: March 17, 2020
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Takeyoshi Nishimura
  • Patent number: 10586862
    Abstract: A semiconductor device according to embodiments includes, a SiC substrate, SiC layer, a trench having a side face and a bottom face, a first conductivity type first SiC region, a second conductivity type second SiC region between the first SiC region and the SiC substrate, a first conductivity type third SiC region between the second SiC region and the SiC substrate, a boundary between the second SiC region and the third SiC region provided at a side of the side face, the boundary including a first region, a distance between the first region and a front face of the SiC layer increasing as a distance from the side face to the first region increasing, and distance from the side face to the first region being 0 ?m or more and 0.3 ?m or less, a gate insulating film and gate insulating film.
    Type: Grant
    Filed: August 1, 2016
    Date of Patent: March 10, 2020
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Teruyuki Ohashi, Ryosuke Iijima
  • Patent number: 10566330
    Abstract: A CMOS system on chip including a series of partial gate-all-around field effect transistors. Each partial GAA FET includes a fin having a stack of channel regions, source and drain regions on opposite sides of the fin, a dielectric separation region including a dielectric material between first and second channel regions, a gate stack on the fin, and a pair of sidewall spacers on opposite sides of the gate stack. A portion of the dielectric separation region has a length from an outer edge of the dielectric separation region to an inner edge of a respective sidewall spacer. The length of the portion of the dielectric separation region of one of the partial GAA FETs is different than the length of the portion of the dielectric separation region of another one of the partial GAA FETs.
    Type: Grant
    Filed: May 11, 2018
    Date of Patent: February 18, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Mark S. Rodder, Borna J. Obradovic, Dharmendar Palle, Rwik Sengupta, Mohammad Ali Pourghaderi
  • Patent number: 10546857
    Abstract: A complementary metal oxide semiconductor (CMOS) vertical transistor structure with closely spaced p-type and n-type vertical field effect transistors (FETs) is provided. After forming a dielectric material portion contacting a proximal sidewall of a first semiconductor fin for formation of a p-type vertical FET and a proximal sidewall of a second semiconductor fin for formation of an n-type vertical FET, a first gate structure is formed contacting a distal sidewall of the first semiconductor fin, and a second gate structure is formed contacting a distal sidewall of the second semiconductor fin. Because no gate structures are formed between the first and second semiconductor fins, the p-type vertical FET is spaced from the n-type FET only by the dielectric material portion.
    Type: Grant
    Filed: February 16, 2017
    Date of Patent: January 28, 2020
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Patent number: 10546867
    Abstract: According to one embodiment, a method for manufacturing a semiconductor device includes forming a first metal material inside the first holes; forming a plurality of metal layers on the first region, the metal layers being stacked with an insulator interposed, the metal layers including a plurality of terrace portions arranged in a staircase configuration with a level difference; forming a second insulating layer on the first insulating layer and on the terrace portions; simultaneously forming a second hole and a plurality of third holes piercing the second insulating layer, the second hole reaching the first metal material, the third holes reaching the terrace portions; and forming a second metal material inside the second hole and inside the third holes.
    Type: Grant
    Filed: February 28, 2018
    Date of Patent: January 28, 2020
    Assignee: Toshiba Memory Corporation
    Inventor: Yuya Matsuda
  • Patent number: 10546872
    Abstract: A three-dimensional nonvolatile memory device and a method for fabricating the same include a semiconductor substrate, a plurality of active pillars, a plurality of gate electrodes, and a plurality of supporters. The semiconductor substrate includes a memory cell region and a contact region. The active pillars extend in the memory cell region perpendicularly to the semiconductor substrate. The gate electrodes intersect the active pillars, extend from the memory cell region to the contact region and are stacked on the semiconductor substrate. The supporters extend in the contact region perpendicularly to the semiconductor substrate to penetrate at least one or more of the gate electrodes.
    Type: Grant
    Filed: June 27, 2017
    Date of Patent: January 28, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Soodoo Chae, Myoungbum Lee, HuiChang Moon, Hansoo Kim, JinGyun Kim, Kihyun Kim, Siyoung Choi, Hoosung Cho