In Integrated Circuit Structure Patents (Class 257/334)
  • Patent number: 11600725
    Abstract: A semiconductor power device having shielded gate structure in an active area and trench field plate termination surrounding the active area is disclosed. A Zener diode connected between drain metal and source metal or gate metal for functioning as a SD or GD clamp diode. Trench field plate termination surrounding active area wherein only cell array located will not cause BV degradation when SD or GD poly clamped diode integrated.
    Type: Grant
    Filed: April 8, 2022
    Date of Patent: March 7, 2023
    Assignee: NAMI MOS CO., LTD.
    Inventor: Fu-Yuan Hsieh
  • Patent number: 11600309
    Abstract: Structures for 3D sense amplifiers for 3D memories are disclosed. A first embodiment uses one type of vertical transistors in constructing 3D sense amplifiers. A second embodiment uses both n- and p-type transistors for 3D sense amplifiers. Either or both of n- and p-type transistors are vertical transistors. The n- and p-type transistors may reside on different levels, or on the same level above a substrate if both are vertical transistors. In any embodiment, different options are available for gate contact formation. In any embodiments and options or alternatives thereof, one or more sense-enable circuits may be used. Sense amplifiers for several bit lines may be staggered on one or both sides of a memory array. Column multiplexers may be used to couple particular bit lines to data outputs. Bit-line multiplexers may be used to couple certain bit lines to shared 3D sense amplifiers.
    Type: Grant
    Filed: December 15, 2020
    Date of Patent: March 7, 2023
    Assignee: BESANG, INC.
    Inventor: Sang-Yun Lee
  • Patent number: 11581409
    Abstract: Disclosed is a transistor device which includes a semiconductor body having a first surface, a source region, a drift region, a body region being arranged between the source region and the drift region, a gate electrode adjacent the body region and dielectrically insulated from the body region by a gate dielectric, and a field electrode adjacent the drift region and dielectrically insulated from the drift region by a field electrode dielectric, wherein the field electrode comprises a first layer and a second layer, wherein the first layer has a lower electrical resistance than the second layer, wherein a portion of the second layer is disposed above and directly contacts a portion of the first layer.
    Type: Grant
    Filed: February 16, 2021
    Date of Patent: February 14, 2023
    Assignee: Infineon Technologies Austria AG
    Inventor: Thomas Feil
  • Patent number: 11575041
    Abstract: A method of current detection includes providing a transistor arrangement which comprises a drift and drain region arranged in a semiconductor body and each connected to a drain node, a plurality of load transistor cells each having a source region integrated in a first region of the semiconductor body, a plurality of sense transistor cells each having a source region integrated in a second region of the semiconductor body, a first source node electrically connected to the source region of each of the plurality of the load transistor cells via a first source conductor, and a second source node electrically connected to the source region of each of the plurality of the sense transistor cells via a second source conductor; and detecting a first current flowing between the drain node and the first source node of the transistor arrangement, wherein detecting the first current includes measuring a second current flowing between the drain node and the second source node of the transistor arrangement.
    Type: Grant
    Filed: November 25, 2020
    Date of Patent: February 7, 2023
    Assignee: Infineon Technologies Austria AG
    Inventor: Gerhard Noebauer
  • Patent number: 11569377
    Abstract: A semiconductor device according to an embodiment includes: a first electrode; and a substrate including a first surface in contact with the first electrode and a second surface provided opposite to the first surface, the first surface including a first groove including a first length and a second length shorter than the first length, the first length in a first direction parallel to the first surface, the second length in a second direction parallel to the first surface, the second direction intersecting with the direction, wherein the substrate includes a semiconductor layer having first conductive type, a first semiconductor region provided between the semiconductor layer and the second surface, the first semiconductor region having second conductive type, a second semiconductor region provided between the first semiconductor region and the second surface, the second semiconductor region having first conductive type higher than an impurity concentration of the semiconductor layer, and a second electrode pr
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: January 31, 2023
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventor: Hideharu Kojima
  • Patent number: 11551979
    Abstract: A method for manufacturing a semiconductor structure includes etching trenches in a semiconductor substrate to form a semiconductor fin between the trenches; converting sidewalls of the semiconductor fin into hydrogen-terminated surfaces each having silicon-to-hydrogen (S—H) bonds; after converting the sidewalls of the semiconductor fin into the hydrogen-terminated surfaces, depositing a dielectric material overfilling the trenches; and etching back the dielectric material to fall below a top surface of the semiconductor fin.
    Type: Grant
    Filed: October 23, 2020
    Date of Patent: January 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Cheng Chou, Shiu-Ko Jangjian, Cheng-Ta Wu
  • Patent number: 11552164
    Abstract: A semiconductor device comprises: a substrate; a well region provided in the substrate, having a second conductivity type; source regions having a first conductivity type; body tile regions having the second conductivity type, the source regions and the body tie regions being alternately arranged in a conductive channel width direction so as to form a first region extending along the conductive channel width direction, and a boundary where the edges of the source regions and the edges of the body tie regions are alternately arranged being formed on two sides of the first region; and a conductive auxiliary region having the first conductivity type, provided on at least one side of the first region, and directly contacting the boundary, a contact part comprising the edge of at least one source region on the boundary and the edge of at least one body tie region on the boundary.
    Type: Grant
    Filed: August 9, 2019
    Date of Patent: January 10, 2023
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Huajun Jin, Guipeng Sun
  • Patent number: 11538914
    Abstract: A semiconductor device includes a semiconductor substrate, a gate dielectric, a gate electrode, and a pair of source/drain regions. The gate dielectric is disposed in the semiconductor substrate having an upper boundary lower than an upper surface of the semiconductor substrate, and an upper surface flush with the upper surface of the semiconductor substrate. The gate electrode is disposed over the gate dielectric having a first section over the upper boundary of the gate dielectric and a second section over the upper surface of the gate dielectric. The second section partially covers and partially exposes the upper surface of the gate dielectric. The pair of source/drain regions are disposed on opposing sides of the gate dielectric.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: December 27, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Ta-Yuan Kung, Ruey-Hsin Liu, Chen-Liang Chu, Chih-Wen Yao, Ming-Ta Lei
  • Patent number: 11538932
    Abstract: The present application relates to a semiconductor transistor device that includes a Schottky diode electrically connected in parallel to a body diode formed between a body region and a drift region. A diode junction of the Schottky diode is formed adjacent to the drift region and is arranged vertically above a lower end of the body region.
    Type: Grant
    Filed: April 15, 2020
    Date of Patent: December 27, 2022
    Assignee: Infineon Technologies Austria AG
    Inventor: Ling Ma
  • Patent number: 11502084
    Abstract: A three-dimensional semiconductor memory device includes first semiconductor patterns, which are vertically spaced apart from each other on a substrate, each of which includes first and second end portions spaced apart from each other, and first and second side surfaces spaced apart from each other to connect the first and second end portions, first and second source/drain regions disposed in each of the first semiconductor patterns and adjacent to the first and second end portions, respectively, a channel region in each of the first semiconductor patterns and between the first and second source/drain regions, a first word line adjacent to the first side surfaces and the channel regions and vertically extended, and a gate insulating layer interposed between the first word line and the first side surfaces. The gate insulating layer may be extended to be interposed between the first source/drain regions.
    Type: Grant
    Filed: August 6, 2020
    Date of Patent: November 15, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Joongchan Shin, Changkyu Kim, Hui-Jung Kim, Iljae Shin, Taehyun An, Kiseok Lee, Eunju Cho, Hyungeun Choi, Sung-Min Park, Ahram Lee, Sangyeon Han, Yoosang Hwang
  • Patent number: 11488964
    Abstract: A method of manufacturing a semiconductor structure includes: receiving a substrate having an active region and a non-active region adjacent to the active region; forming an etch stop layer over the non-active region of the substrate, in which the etch stop layer is oxide-free; forming an isolation over the etch stop layer; removing a portion of the active region and a portion of the isolation to form a first trench in the active region and a second trench over the etch stop layer, respectively, in which a thickness of the etch stop layer beneath the second trench is greater than a depth difference between the first trench and the second trench; forming a dielectric layer in the first trench; and filling a conductive material on the dielectric layer in the first trench and in the second trench. A semiconductor structure is also provided.
    Type: Grant
    Filed: July 9, 2021
    Date of Patent: November 1, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Ching-Chia Huang, Wei-Ming Liao
  • Patent number: 11482601
    Abstract: A vertical trench shield device can include a plurality of gate structures and a termination structure surrounding the plurality of gate structures. The plurality of gate structures can include a plurality of gate regions and a corresponding plurality of gate shield regions. The plurality of gate structures can be disposed between the plurality of source regions, and extending through the plurality of body regions to the drift region. The plurality of gate structures can be separated from each other by a first predetermined spacing in a core area. A first set of the plurality of gate structures can extend fully to the termination structure. The ends of a second set of the plurality of gate structures can be separated from the termination structure by a second predetermined spacing. The first and second spacings can be configured to balance charge in the core area and the termination area in a reverse bias condition.
    Type: Grant
    Filed: March 16, 2021
    Date of Patent: October 25, 2022
    Assignee: Vishay-Siliconix, LLC
    Inventors: Jun Hu, M. Ayman Shibib, Misbah Azam, Kyle Terrill
  • Patent number: 11467567
    Abstract: A method and a system for developing semiconductor device fabrication processes are provided. The developments of vertical and lateral semiconductor device fabrication processes can be integrated in the system. First, according to a target semiconductor device and a specification thereof, an initial target model and a general database are captured. The initial target model and the general database are compared to obtain a corresponding relationship. According to the corresponding relationship, multiple fixed fabrication parameters of the general database are applied to the initial target model, such that at least one adjustable parameter is defined. Thereafter, the parameter is set according to a setting instruction received through a user interface to produce a target model to be simulated. A simulation test is performed with the target model, and the adjustable parameter is modified until the simulation result of the target model satisfies a standard result.
    Type: Grant
    Filed: June 28, 2021
    Date of Patent: October 11, 2022
    Assignee: AICP TECHNOLOGY CORPORATION
    Inventor: Kei-Kang Hung
  • Patent number: 11462638
    Abstract: A SiC SJ trench MOSFET having first and second type gate trenches for formation of gate electrodes and super junction regions is disclosed. The gate electrodes are disposed into the first type gate trenches having a thick oxide layer on trench bottom. The super junction regions are formed surrounding the second type gate trenches filled up with the thick oxide layer. The device further comprises gate oxide electric field reducing regions adjoining lower surfaces of body regions and space apart from the gate trenches.
    Type: Grant
    Filed: October 19, 2020
    Date of Patent: October 4, 2022
    Assignee: NAMI MOS CO., LTD.
    Inventor: Fu-Yuan Hsieh
  • Patent number: 11456299
    Abstract: Some embodiments include an integrated assembly with a semiconductor-material-structure having a first source/drain region, a second source/drain region, and a channel region between the first and second source/drain regions. The semiconductor-material-structure has a first side and an opposing second side. A first conductive structure is adjacent to the first side and is operatively proximate the channel region to gatedly control coupling of the first and second source/drain regions through the channel region. A second conductive structure is adjacent to the second side and is spaced from the second side by an intervening region which includes a void. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: May 12, 2021
    Date of Patent: September 27, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Sanh D. Tang
  • Patent number: 11430792
    Abstract: Provided is a DRAM including a substrate, first bit line structures, second bit line structures, and word line structures. The substrate has active regions each including pillar structures arranged along a first direction. Two first bit line structures extended along the first direction and buried in the substrate are disposed between the active regions arranged along a second direction. Each second bit line structure is located between the pillar structures and extended through the active regions along the second direction to be disposed on the first bit line structures and electrically connected to the first bit line structures. The word line structures are disposed on and spaced apart from the second bit line structures. Each word line structure extended along the second direction is located between the pillar structures and passes through the active regions arranged along the second direction. A manufacturing method of the DRAM is also provided.
    Type: Grant
    Filed: July 9, 2020
    Date of Patent: August 30, 2022
    Assignee: Winbond Electronics Corp.
    Inventors: Kai Jen, Hao-Chuan Chang
  • Patent number: 11410995
    Abstract: A semiconductor structure and a method for forming a semiconductor structure are provided. The semiconductor structure includes a well region extending in a first direction; a gate electrode disposed within the substrate and overlapping the well region; a gate dielectric layer disposed within the substrate and laterally surrounding the gate electrode; a plurality of first protection structures disposed over the gate electrode; a second protection structure extending in a second direction different from the first direction over the gate dielectric layer; and an insulating layer extending in the second direction between the second protection structure and the gate dielectric layer.
    Type: Grant
    Filed: May 14, 2021
    Date of Patent: August 9, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Jhu-Min Song, Chien-Chih Chou, Kong-Beng Thei, Fu-Jier Fan
  • Patent number: 11411010
    Abstract: A semiconductor memory device includes a substrate having a memory cell region, a peripheral region, and a dam region between the memory cell region and the peripheral region, the memory cell region having a rectangular shape according to a top view and having a plurality of active regions defined therein; a plurality of bit line structures extending on the substrate in the memory cell region to be parallel with each other in a first horizontal direction, each including a bit line; a plurality of buried contacts filling lower portions of spaces among the plurality of bit line structures on the substrate; a plurality of landing pads on the plurality of buried contacts; and a dam structure including a first dam structure and a second dam structure in the dam region and being at the same level as the plurality of landing pads.
    Type: Grant
    Filed: May 4, 2020
    Date of Patent: August 9, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyejin Seong, Jisuk Park, Sungho Choi
  • Patent number: 11393933
    Abstract: A semiconductor device includes first and second layers and first and second electrodes. The first layer has a first semiconductor containing an impurity of a first conductivity type. The second layer is in contact with the first layer and has a second semiconductor containing the impurity at a lower concentration than the first semiconductor. The first electrode is in contact with a first surface of the first layer. The second electrode is in contact with a second surface of the second layer. The second layer further has first and second trenches. The first trench has therein a third electrode connected to the second electrode. The second trench is located closer to an outer perimeter portion of the second layer than the first trench and has therein a fourth electrode connected to the second electrode. An entire outer perimeter end of the second electrode is in contact with the fourth electrode.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: July 19, 2022
    Assignee: KYOCERA CORPORATION
    Inventor: Shingo Kabutoya
  • Patent number: 11387219
    Abstract: A power semiconductor module has a first and second intermediate circuit rail, an AC potential rail and with a packaged first and second power semiconductor switch. The respective power semiconductor switch has a first and second load current terminal and a control terminal, wherein the first power semiconductor switch is between the first intermediate circuit rail and the AC potential rail and the second power semiconductor switch is between the second intermediate circuit rail and the AC potential rail. The first load terminal of the first power semiconductor switch is contacted to the first intermediate circuit rail and the second load terminal of the first power semiconductor switch is electrically conductively contacted to the AC potential rail.
    Type: Grant
    Filed: March 19, 2020
    Date of Patent: July 12, 2022
    Assignee: SEMIKRON ELEKTRONIK GMBH & CO. KG
    Inventors: Martin Kraus, Klaus Benkert
  • Patent number: 11380789
    Abstract: A vertical power device is disclosed, the device having a top side and a bottom side, and the device comprising (i) a substrate; (ii) a layered group III-Nitride based device stack formed atop the substrate; (iii) a first vertical group III-Nitride based device and a second vertical group III-Nitride based device formed in the group III-Nitride based device stack, wherein the first vertical group III-Nitride based device and the second vertical group III-Nitride based device are electrically connected; and (iv) a first vertical device isolation structure that isolates the first vertical group III-Nitride based device from the second vertical group III-Nitride based device. Also disclosed are a vertical power system integrating vertical power devices and a process for fabricating a vertical power device.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: July 5, 2022
    Assignee: IMEC VZW
    Inventors: Steve Stoffels, Stefaan Decoutere
  • Patent number: 11380787
    Abstract: An integrated circuit comprising an SGT MOSFET and a short channel SBR is disclosed. The SBR horizontally disposed in different areas to the SGT MOSFET on single chip creates a low potential barrier for majority carrier in MOS channel for switching loss reduction. Only one additional mask is required for integration of the short channel SBR having thinner gate oxide than the SGT MOSFET. Moreover, in some preferred embodiment, an MSO structure is applied to the shielded gate structure to further reduce the on-resistance.
    Type: Grant
    Filed: May 8, 2020
    Date of Patent: July 5, 2022
    Assignee: NAMI MOS CO, LTD
    Inventor: Fu-Yuan Hsieh
  • Patent number: 11342410
    Abstract: An apparatus comprising an insulated gate bipolar transistor and a super junction metal-oxide semiconductor field effect transistor wherein the insulated gate bipolar transistor and the super-junction metal-oxide semiconductor field effect transistor are electrically and optionally structurally coupled.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: May 24, 2022
    Assignee: ALPHA AND OMEGA SEMICONDUCTOR (CAYMAN) LTD.
    Inventors: Madhur Bobde, Lingpeng Guan, Karthik Padmanabhan, Bum-Seok Suh
  • Patent number: 11329155
    Abstract: A semiconductor power device having shielded gate structure in an active area and trench field plate termination surrounding the active area is disclosed. A Zener diode connected between drain metal and source metal or gate metal for functioning as a SD or GD clamp diode. Trench field plate termination surrounding active area wherein only cell array located will not cause BV degradation when SD or GD poly clamped diode integrated.
    Type: Grant
    Filed: February 26, 2020
    Date of Patent: May 10, 2022
    Assignee: NAMI MOS CO., LTD.
    Inventor: Fu-Yuan Hsieh
  • Patent number: 11322594
    Abstract: A semiconductor device, and methods of forming the same. In one example, the semiconductor device includes a trench in a substrate having a top surface, and a shield within the trench. The semiconductor device also includes a shield liner between a sidewall of the trench and the shield, and a lateral insulator over the shield contacting the shield liner. The semiconductor device also includes a gate dielectric layer on an exposed sidewall of the trench between the lateral insulator and the top surface. The lateral insulator may have a minimum thickness at least two times thicker than a maximum thickness of the gate dielectric layer.
    Type: Grant
    Filed: December 28, 2020
    Date of Patent: May 3, 2022
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Fei Ma, Ya ping Chen, Yunlong Liu, Hong Yang, Shengpin Yang, Baoqiang Niu, Rui Liu, Zhi Peng Feng, Seetharaman Sridhar, Sunglyong Kim
  • Patent number: 11296217
    Abstract: A semiconductor device includes an active region configured by a first MOS structure region and a second MOS structure region, a gate ring region surrounding a periphery of the active region, a first ring region surrounding a periphery of the gate ring region, a second ring region surrounding a periphery of the first ring region, and a termination region surrounding a periphery of the second ring region. The semiconductor device has first first-electrodes in the first MOS structure region, second first-electrodes in the second MOS structure region, a third first-electrode in the first ring region, and a fourth first-electrode in the second ring region. The third first-electrode has a potential equal to that of the second first-electrodes, and the fourth first-electrode has a potential equal to that of the first first-electrodes.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: April 5, 2022
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Yasuyuki Hoshi
  • Patent number: 11282929
    Abstract: A trench MOSFET with first and second electrodes and having first and second semiconductor layers of a first conductivity type, a semiconductor layer of the second conductivity type and a first and second semiconductor region of the first and second conductivity type respectively. A first insulating film and a second insulating film provided between a position of 40% of a height of the second electrode from a lower end of the second electrode and a position of an upper end of the second electrode. The second insulating film has a material with higher dielectric constant than a first insulating material of the first insulating film. The first insulating film disposed in the trench below 40% of the height of the second electrode only contains the first insulating material. A third electrode and interlayer insulating film provided on the second electrode, and a fourth electrode above the interlayer insulating film.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: March 22, 2022
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventor: Yuhki Fujino
  • Patent number: 11276574
    Abstract: A method for producing a semiconductor power device includes forming a gate trench from a surface of the semiconductor layer toward an inside thereof. A first insulation film is formed on the inner surface of the gate trench. The method also includes removing a part on a bottom surface of the gate trench in the first insulation film. A second insulation film having a dielectric constant higher than SiO2 is formed in such a way as to cover the bottom surface of the gate trench exposed by removing the first insulation film.
    Type: Grant
    Filed: October 13, 2020
    Date of Patent: March 15, 2022
    Assignee: ROHM CO., LTD.
    Inventor: Yuki Nakano
  • Patent number: 11257817
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip (IC) having a device section and a pick-up section. The IC includes a semiconductor substrate. A first fin of the semiconductor substrate is disposed in the device section. A second fin of the semiconductor substrate is disposed in the pick-up section and laterally spaced from the first fin in a first direction. A gate structure is disposed in the device section and laterally spaced from the second fin in the first direction. The gate structure extends laterally over the semiconductor substrate and the first fin in a second direction perpendicular to the first direction. A pick-up region is disposed on the second fin. The pick-up region continuously extends from a first sidewall of the second fin to a second sidewall of the second fin. The first sidewall is laterally spaced from the second sidewall in the first direction.
    Type: Grant
    Filed: March 4, 2020
    Date of Patent: February 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsin-Wen Su, Lien Jung Hung, Ping-Wei Wang, Wen-Chun Keng, Chih-Chuan Yang, Shih-Hao Lin
  • Patent number: 11227935
    Abstract: A method and structure providing a high-voltage transistor (HVT) including a gate dielectric, where at least part of the gate dielectric is provided within a trench disposed within a substrate. In some aspects, a gate oxide thickness may be controlled by way of a trench depth. By providing the HVT with a gate dielectric formed within a trench, embodiments of the present disclosure provide for the top gate stack surface of the HVT and the top gate stack surface of a low-voltage transistor (LVT), formed on the same substrate, to be substantially co-planar with each other, while providing a thick gate oxide for the HVTs. Further, because the top gate stack surface of HVT and the top gate stack surface of the LVT are substantially co-planar with each other, over polishing of the HVT gate stack can be avoided.
    Type: Grant
    Filed: September 29, 2019
    Date of Patent: January 18, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Anhao Cheng, Fang-Ting Kuo
  • Patent number: 11201238
    Abstract: A semiconductor device according to an embodiment includes: a silicon carbide layer having a first plane, a second plane facing the first plane, a first trench, a second trench, an n-type first silicon carbide region, a p-type second silicon carbide region between the first silicon carbide region and the first plane, an n-type third silicon carbide region between the second silicon carbide region and the first plane, and a p-type fourth silicon carbide region between the second trench and the first silicon carbide region; a gate electrode being located in the first trench; a gate insulating layer; a first electrode, a portion of the first electrode being located in the second trench; a second electrode; and an interlayer insulating layer being located between the gate electrode and the first electrode, in which an interface between the first electrode and the interlayer insulating layer is located in the first trench.
    Type: Grant
    Filed: February 21, 2020
    Date of Patent: December 14, 2021
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Shinichi Kimoto, Katsuhisa Tanaka, Shinya Kyogoku, Ryosuke Iijima
  • Patent number: 11183419
    Abstract: Embodiments of the present invention are directed to fabrication methods and resulting semiconductor structures having a bulb-shaped buried interconnect positioned below a shallow trench isolation region. In a non-limiting embodiment of the invention, a cavity is formed below a surface of a substrate. The cavity extends under a portion of a semiconductor fin. The cavity is filled with a sacrificial material and a shallow trench isolation region is formed on the sacrificial material in the cavity. A portion of the shallow trench isolation region is removed to expose a surface of the sacrificial material in the cavity. The sacrificial material is removed from the cavity and replaced with a buried interconnect.
    Type: Grant
    Filed: March 17, 2020
    Date of Patent: November 23, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventor: Effendi Leobandung
  • Patent number: 11177360
    Abstract: A semiconductor device having, in a main non-operating region that is free of unit cells of a main semiconductor element, a gate insulating film and a gate electrode of a current sensing portion extending on a front surface of a semiconductor substrate, to thereby form a planar gate structure. A gate capacitance of the planar gate structure is a gate capacitance of the current sensing portion. Directly beneath the planar gate structure, at the front surface of the semiconductor substrate, a structure is provided in which, from a front side of the semiconductor substrate, a p-type region, an n-type region, and a p-type region are stacked, whereby electric field is not applied to the extended portions of the gate insulating film.
    Type: Grant
    Filed: April 23, 2020
    Date of Patent: November 16, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Yasuyuki Hoshi
  • Patent number: 11145716
    Abstract: A structure comprises a substrate and a first gate structure and a second gate structure in a dielectric layer over the substrate. The first and second gate structures having a width, the width of the first gate structure is shorter than the width of the second gate structure. The first gate structure comprises a first gate conductor layer and the second gate structure comprises a second gate conductor layer. The first gate conductor layer is made of a different metal from the second gate conductor layer.
    Type: Grant
    Filed: May 19, 2020
    Date of Patent: October 12, 2021
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Rinus Tek Po Lee, Jiehui Shu
  • Patent number: 11133303
    Abstract: An embodiment of a semiconductor device includes a plurality of transistor sections separated from each other and a plurality of diode sections separated from each other. Each transistor section includes an emitter electrode and a collector electrode. Each diode section includes an anode electrode and a cathode electrode. Each transistor section is electrically coupled to a common gate pad. A ratio between an active transistor part and an active diode part of the semiconductor device is adjustable by activating a first number of the transistor sections by selectively contacting the emitter electrodes and the collector electrodes of the first number of transistor sections, and by activating a second number of the diode sections by selectively contacting the anode electrodes and the cathode electrodes of the second number of diode sections.
    Type: Grant
    Filed: June 4, 2020
    Date of Patent: September 28, 2021
    Assignee: Infineon Technologies AG
    Inventors: Christian Robert Mueller, Stefan Buschhorn, Johannes Georg Laven
  • Patent number: 11133378
    Abstract: A semiconductor device is proposed. A trench gate structure extends from a first surface into a silicon carbide semiconductor body along a vertical direction. A trench contact structure extends from the first surface into the silicon carbide semiconductor body along the vertical direction. A source region of a first conductivity type and a body region of a second conductivity type adjoin a first sidewall of the trench gate structure. A diode region of the second conductivity type adjoins a second sidewall of the trench gate structure opposite to the first sidewall. A shielding region of the second conductivity type adjoins a bottom of the trench contact structure, the shielding region being arranged at a lateral distance to the trench gate structure.
    Type: Grant
    Filed: July 15, 2020
    Date of Patent: September 28, 2021
    Assignee: Infineon Technologies AG
    Inventors: Ralf Siemieniec, Wolfgang Bergner
  • Patent number: 11127853
    Abstract: A transistor device is disclosed. The transistor device includes: a semiconductor body; a source conductor on top of the semiconductor body; a source clip on top of the source conductor and electrically connected to the source conductor; a first active device region arranged in the semiconductor body, covered by the source conductor and the source clip, and including at least one device cell; and a second active device region arranged in the semiconductor body, covered by regions of the source conductor that are not covered by the source clip, and including at least one device cell. The first active device region has a first area specific on-resistance and the second active device region has a second area specific on-resistance, the second area specific on-resistance being greater than the first area specific on-resistance.
    Type: Grant
    Filed: June 6, 2019
    Date of Patent: September 21, 2021
    Assignee: Infineon Technologies AG
    Inventors: Cristian Mihai Boianceanu, Liu Chen, Sebastian Sosin, Andrew Christopher Graeme Wood
  • Patent number: 11121250
    Abstract: In an element region and a non-element region, a silicon carbide semiconductor device includes a drift layer having a first conductivity type provided on a silicon carbide semiconductor substrate. In the element region, the silicon carbide semiconductor device includes a first trench that reaches the drift layer, and a gate electrode provided in the first trench through a gate insulation film and electrically connected to a gate pad electrode. In the non-element region, the silicon carbide semiconductor device includes a second trench whose bottom surface reaches the drift layer, a second relaxation region having a second conductivity type disposed below the second trench, an inner-surface insulation film provided on a side surface and on the bottom surface of the second trench, and a low-resistance region provided in the second trench through the inner-surface insulation film and electrically insulated from the gate pad electrode.
    Type: Grant
    Filed: February 19, 2018
    Date of Patent: September 14, 2021
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Takaaki Tominaga
  • Patent number: 11114558
    Abstract: An integrated circuit comprising a surrounding gate transistor (SGT) MOSFET and a super barrier rectifier (SBR) is disclosed. The SBR horizontally disposed in different areas to the SGT MOSFET on single chip creates a low potential barrier for majority carrier in MOS channel, therefore has lower forward voltage and reverse leakage current than conventional Schottky Barrier Rectifier. Moreover, in some preferred embodiment, a multiple stepped oxide (MSO) structure is applied to the shielded gate structure to further reduce the on-resistance.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: September 7, 2021
    Assignee: NAMI MOS CO., LTD.
    Inventor: Fu-Yuan Hsieh
  • Patent number: 11101346
    Abstract: This invention discloses a semiconductor power device formed on a semiconductor substrate comprises an active cell area and a termination area disposed near edges of the semiconductor substrate. The termination area comprises a plurality of duplicated units wherein each unit includes at least two trenches filled with a conductive trench material having a mesa area between adjacent trenches wherein the trenches and the mesa areas within each of the duplicated units are electrically shunt together. In the termination area each of the trenches in the duplicated units has a buried guard ring dopant region disposed below a bottom surface of the trenches.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: August 24, 2021
    Assignee: HUNTECH SEMICONDUCTOR (SHANGHAI) CO. LTD
    Inventors: Jun Hu, Zhiyun Luo, Fei Wang
  • Patent number: 11101187
    Abstract: A semiconductor device includes a semiconductor layer of first-conductivity-type that has a main surface and that includes a boundary region set in a region between an active region and a current detection region at the main surface, a first body region of second-conductivity-type formed in a surface layer portion of the main surface at the active region, a first trench gate structure formed in the main surface at the active region, a second body region of the second-conductivity-type formed in the surface layer portion of the main surface at the current detection region, a second trench gate structure formed in the main surface at the current detection region, a well region of the second-conductivity-type formed in the surface layer portion of the main surface at the boundary region, and a dummy trench gate structure formed in an electrically floating state in the main surface at the boundary region.
    Type: Grant
    Filed: October 4, 2019
    Date of Patent: August 24, 2021
    Assignee: ROHM CO., LTD.
    Inventor: Jun Takaoka
  • Patent number: 11088142
    Abstract: Some embodiments include an integrated assembly with a semiconductor-material-structure having a first source/drain region, a second source/drain region, and a channel region between the first and second source/drain regions. The semiconductor-material-structure has a first side and an opposing second side. A first conductive structure is adjacent to the first side and is operatively proximate the channel region to gatedly control coupling of the first and second source/drain regions through the channel region. A second conductive structure is adjacent to the second side and is spaced from the second side by an intervening region which includes a void. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: December 26, 2019
    Date of Patent: August 10, 2021
    Assignee: Micron Technology, Inc.
    Inventor: Sanh D. Tang
  • Patent number: 11075274
    Abstract: A method of forming a conductive line construction comprises forming a structure comprising polysilicon-comprising material. Elemental titanium is directly against the polysilicon of the polysilicon-comprising material. Silicon nitride is directly against the elemental titanium. Elemental tungsten is directly against the silicon nitride. The structure is annealed to form a conductive line construction comprising the polysilicon-comprising material, titanium silicide directly against the polysilicon-comprising material, elemental tungsten, TiSixNy between the elemental tungsten and the titanium silicide, and one of (a) or (b), with (a) being the TiSixNy is directly against the titanium silicide, and (b) being titanium nitride is between the TiSixNy and the titanium silicide, with the TiSixNy being directly against the titanium nitride and the titanium nitride being directly against the titanium silicide. Structure independent of method is disclosed.
    Type: Grant
    Filed: January 18, 2019
    Date of Patent: July 27, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Kenichi Kusumoto, Yasutaka Iuchi, Akie Shimamura
  • Patent number: 11063146
    Abstract: Back-to-back power field-effect transistors with associated current sensors are disclosed. An example apparatus includes a first power field-effect transistor (FET) having a first source, and a second power FET having a second source. The first and second power FETs share a common drain. The first and second sources positioned on a first side of a substrate and the common drain positioned on a second side of the substrate opposite the first side. The example apparatus includes a current sensing FET positioned between a first portion of the first source of the first power FET and a second portion of the first source of the first power FET. The current sensing FET senses a current passing through the first and second power FETs.
    Type: Grant
    Filed: March 28, 2019
    Date of Patent: July 13, 2021
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventor: Indumini Ranmuthu
  • Patent number: 11038050
    Abstract: A wide band gap semiconductor device includes a semiconductor layer, a trench formed in the semiconductor layer, first, second, and third regions having particular conductivity types and defining sides of the trench, and a first electrode embedded inside an insulating film in the trench. The second region integrally includes a first portion arranged closer to a first surface of the semiconductor layer than to a bottom surface of the trench, and a second portion projecting from the first portion toward a second surface of the semiconductor layer to a depth below a bottom surface of the trench. The second portion of the second region defines a boundary surface with the third region, the boundary region being at an incline with respect to the first surface of the semiconductor layer.
    Type: Grant
    Filed: August 11, 2020
    Date of Patent: June 15, 2021
    Assignee: ROHM CO., LTD.
    Inventor: Kengo Omori
  • Patent number: 11018244
    Abstract: A method of manufacturing a semiconductor device includes: forming a trench in a first side of a semiconductor layer, the semiconductor layer including a drift zone of a first conductivity; forming a drain region of the first conductivity type in the first side of the semiconductor layer and laterally adjoining the drift zone; forming a body region of a second conductivity type opposite the first conductivity type and laterally adjoining the drift zone at a side of the drift zone opposite the drain region; and forming source regions of the first conductivity type and body contact regions of the second conductivity type in a sidewall of the trench and arranged in an alternating manner along a length of the trench, using a dopant diffusion process which includes diffusing dopants of both conductivity types from oppositely-doped dopant source layers which are in contact with different regions of the sidewall.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: May 25, 2021
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Andreas Meiser, Till Schloesser
  • Patent number: 10985242
    Abstract: In one embodiment, a power semiconductor device may include a semiconductor substrate, wherein the semiconductor substrate comprises an active device region and a junction termination region. The power semiconductor device may also include a polysilicon layer, disposed over the semiconductor substrate. The polysilicon layer may include an active device portion, disposed over the active device region, and defining at least one semiconductor device; and a junction termination portion, disposed over the junction termination region, the junction termination portion defining a ring structure.
    Type: Grant
    Filed: March 6, 2019
    Date of Patent: April 20, 2021
    Assignee: Littelfuse, Inc.
    Inventor: Kyoung Wook Seok
  • Patent number: 10950606
    Abstract: Dual fin endcaps for self-aligned gate edge architectures, and methods of fabricating dual fin endcaps for self-aligned gate edge architectures, are described. In an example, a semiconductor structure includes an I/O device having a first plurality of semiconductor fins disposed above a substrate and protruding through an uppermost surface of a trench isolation layer. A logic device having a second plurality of semiconductor fins is disposed above the substrate and protrudes through the uppermost surface of the trench isolation layer. A gate edge isolation structure is disposed between the I/O device and the logic device. A semiconductor fin of the first plurality of semiconductor fins closest to the gate edge isolation structure is spaced farther from the gate edge isolation structure than a semiconductor fin of the second plurality of semiconductor fins closest to the gate edge isolation structure.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: March 16, 2021
    Assignee: Intel Corporation
    Inventors: Walid M. Hafez, Roman W. Olac-Vaw, Chia-Hong Jan
  • Patent number: 10943896
    Abstract: Power MOS device, in which a power MOS transistor has a drain terminal that is coupled to a power supply node, a gate terminal that is coupled to a drive node and a source terminal that is coupled to a load node. A detection MOS transistor has a drain terminal that is coupled to a detection node, a gate terminal that is coupled to the drive node and a source terminal that is coupled to the load node. A detection resistor has a first terminal coupled to the power supply node and a second terminal coupled to the detection node.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: March 9, 2021
    Assignee: STMicroelectronics S.r.l.
    Inventor: Davide Giuseppe Patti
  • Patent number: 10944012
    Abstract: An inverter that includes an n-type field effect transistor (nFET) and a p-type field effect transistor (pFET) vertically stacked one atop the other and containing a buried metal semiconductor alloy strap that connects a drain region of the nFET to a drain region of the pFET is provided. Also, provided is a cross-coupled inverter pair with nFETs and pFETs stacked vertically.
    Type: Grant
    Filed: January 2, 2019
    Date of Patent: March 9, 2021
    Assignee: International Business Machines Corporation
    Inventors: Alexander Reznicek, Kangguo Cheng, Karthik Balakrishnan, Pouya Hashemi