In Integrated Circuit Structure Patents (Class 257/334)
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Patent number: 9490178Abstract: A method of manufacturing a semiconductor device includes preparing a semiconductor substrate having a first and a second voltage device portion, each including a first and a second conductive type MOS region, forming a first gate insulating layer on the first and the second voltage device portion, removing the first gate insulating layer from the first conductive type MOS region of the first voltage device portion to expose a part of the semiconductor substrate, forming a first semiconductor layer on the first conductive type MOS region of the first voltage device portion, and removing the first gate insulating layer from the second conductive type MOS region of the first voltage device portion to expose a part of the semiconductor substrate.Type: GrantFiled: September 8, 2015Date of Patent: November 8, 2016Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventor: Joon-Hyung Lee
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Patent number: 9484410Abstract: A semiconductor component may include a semiconductor layer which has a front side and a back side, a first terminal electrode on the front side, a second terminal electrode on the back side, a first dopant region of a first conduction type on the front side, which is electrically connected to one of the terminal electrodes, a second dopant region of a second conduction type in the semiconductor layer, which is electrically connected to the other terminal electrode, a pn junction being formed between the first and second dopant regions, a dielectric layer on the back side between the semiconductor layer and the second terminal electrode, and the dielectric layer having an opening through which an electrical connection between the second terminal electrode and the first or second dopant region is passed.Type: GrantFiled: March 9, 2015Date of Patent: November 1, 2016Assignee: Infineon Technologies AGInventors: Oliver Haeberlen, Franz Hirler, Maximilian Roesch
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Patent number: 9472569Abstract: A semiconductor device may include a first source layer, a first insulating layer located over the first source layer, and a first stacked structure located over the first insulating layer. The semiconductor device may include first channel layers passing through the first stacked structure and the first insulating layer. The semiconductor device may include a second source layer including a first region interposed between the first source layer and the first insulating layer and a second region interposed between the first channel layers and the first insulating layer.Type: GrantFiled: November 18, 2015Date of Patent: October 18, 2016Assignee: SK HYNIX INC.Inventors: Ki Hong Lee, Seung Ho Pyi, Ji Yeon Baek
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Patent number: 9431496Abstract: A transistor includes: a source region and a drain region that are formed in a substrate to be spaced apart from each other; a trench formed in the substrate between the source region and the drain region; and a buried gate electrode inside the trench, wherein the buried gate electrode includes: a lower buried portion which includes a high work-function barrier layer including an aluminum-containing titanium nitride, and a first low-resistivity layer disposed over the high work-function barrier layer; and an upper buried portion which includes a low work-function barrier layer disposed over the lower buried portion and overlapping with the source region and the drain region, and a second low-resistivity layer disposed over the low work-function barrier layer.Type: GrantFiled: August 13, 2014Date of Patent: August 30, 2016Assignee: SK Hynix Inc.Inventor: Dong-Kyun Kang
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Patent number: 9425210Abstract: A semiconductor device may include a first source layer, a first insulating layer located over the first source layer, and a first stacked structure located over the first insulating layer. The semiconductor device may include first channel layers passing through the first stacked structure and the first insulating layer. The semiconductor device may include a second source layer including a first region interposed between the first source layer and the first insulating layer and second regions interposed between the first channel layers and the first insulating layer, wherein the second regions of the second source layer directly contact each other.Type: GrantFiled: November 18, 2015Date of Patent: August 23, 2016Assignee: SK HYNIX INC.Inventors: Ki Hong Lee, Seung Ho Pyi, Ji Yeon Baek
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Patent number: 9419123Abstract: In a method for fabricating a field effect power electronic device, an epi layer is formed on a substrate defined by a device isolation area and a device operation area. A mask pattern is formed which covers the epi layer in the device operation area and has openings positioned at a predetermined distance along a first direction. An inside of the epi layer having the mask pattern formed thereon is formed as an active area, and a non-active area is formed by implanting ions into an inside of the epi layer having the mask pattern not formed thereon. The mask pattern is removed. Source and drain electrodes are formed, in a second direction, on the epi layer in the device operation area with the non-active area interposed therebetween. A gate electrode is formed on the epi layer in the device operation area between the source electrode and the drain electrode.Type: GrantFiled: July 20, 2015Date of Patent: August 16, 2016Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEInventor: Jong Min Lee
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Patent number: 9397233Abstract: A semiconductor process and apparatus provide a high voltage deep trench capacitor structure (10) that is integrated in an integrated circuit, alone or in alignment with a fringe capacitor (5). The deep trench capacitor structure is constructed from a first capacitor plate (4) that is formed from a doped n-type SOI semiconductor layer (e.g., 4a-c). The second capacitor plate (3) is formed from a doped p-type polysilicon layer (3a) that is tied to the underlying substrate (1).Type: GrantFiled: June 2, 2010Date of Patent: July 19, 2016Assignee: North Star Innovations Inc.Inventors: Ronghua Zhu, Vishnu Khemka, Amitava Bose, Todd C. Roggenbauer
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Patent number: 9373783Abstract: A technique relates magnetoresistive random access memory (MRAM). A dielectric layer is disposed on a transistor, and the transistor is formed in a uniform crystalline substrate. A hole is formed through the dielectric layer to reach the transistor. A polycrystalline material is disposed in the hole by using selective epitaxial growth (SEG), and the polycrystalline material is annealed to create an epitaxial stud. A magnetic tunnel junction (MTJ) is disposed on the epitaxial stud (SEG).Type: GrantFiled: February 20, 2015Date of Patent: June 21, 2016Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: John K. DeBrosse, Janusz J. Nowak
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Patent number: 9368408Abstract: A semiconductor device includes a source zone of a first conductivity type formed in a first electrode fin that extends from a first surface into a semiconductor portion. A drain region of the first conductivity type is formed in a second electrode fin that extends from the first surface into the semiconductor portion. A channel/body zone is formed in a transistor fin that extends between the first and second electrode fins at a distance to the first surface. The first and second electrode fins extend along a first lateral direction. A width of first gate sections, which are arranged on opposing sides of the transistor fin, along a second lateral direction perpendicular to the first lateral direction is greater than a distance between the first and second electrode fins.Type: GrantFiled: December 27, 2013Date of Patent: June 14, 2016Assignee: Infineon Technologies Dresden GmbHInventors: Stefan Tegen, Marko Lemke, Rolf Weis
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Patent number: 9362352Abstract: A semiconductor device includes a first-conductivity-type semiconductor layer including an active region in which a transistor having impurity regions is formed and a marginal region surrounding the active region, a second-conductivity-type channel layer formed between the active region and the marginal region and forming a front surface of the semiconductor layer, at least one gate trench formed in the active region to extend from the front surface of the semiconductor layer through the channel layer, a gate insulation film formed on an inner surface of the gate trench, a gate electrode formed inside the gate insulation film in the gate trench, and at least one isolation trench arranged between the active region and the marginal region to surround the active region and extending from the front surface of the semiconductor layer through the channel layer, the isolation trench having a depth equal to that of the gate trench.Type: GrantFiled: September 4, 2015Date of Patent: June 7, 2016Assignee: ROHM CO., LTD.Inventor: Kenichi Yoshimochi
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Patent number: 9343528Abstract: An electronic device can include an electronic component and a termination region adjacent to the electronic component region. In an embodiment, the termination region can include an insulating region that extends a depth into a semiconductor layer, wherein the depth is less than 50% of the thickness of the semiconductor layer. In another embodiment, the termination region can include a first insulating region that extends a first depth into the semiconductor layer, and a second insulating region that extends a second depth into the semiconductor layer, wherein the second depth is less than the first depth. In another aspect, a process of forming an electronic device can include patterning a semiconductor layer to define a trench within termination region while another trench is being formed for an electronic component within an electronic component region.Type: GrantFiled: April 10, 2014Date of Patent: May 17, 2016Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Jaume Roig Guitart, Zia Hossain, Peter Moens, Gordon M. Grivna
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Patent number: 9337256Abstract: A method of manufacturing a semiconductor device having a VDMOSFET (Vertical Double-diffused Metal Oxide Semiconductor Field-Effect Transistor) and a planar gate MOSFET (Metal Oxide Semiconductor Field-Effect Transistor), including forming a semiconductor layer of a first conductivity type by epitaxy, forming a body region recess for forming a body region of the VDMOSFET on the semiconductor layer, and embedding a semiconductor material of a second conductivity type in the body region recess by epitaxy or CVD (Chemical Vapor Deposition).Type: GrantFiled: March 18, 2013Date of Patent: May 10, 2016Assignee: ROHM CO., LTD.Inventor: Naoki Izumi
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Patent number: 9324862Abstract: To prevent a current leak in an impurity region surrounding a transistor, in a region where a portion, of a second conductivity type region, extending from a first circuit region side toward a second circuit region side and an element separation film overlap each other in plan view, a field plate and conductive films are provided alternately from the first circuit region side toward the second circuit region side in plan view. Further, in this region, there is a decrease in the potential of the field plate and the potentials of the conductive films from the first circuit region toward the second circuit region. Further, at least one of the conductive films has a potential lower than the potential of the field plate adjacent to the conductive film on the second circuit region side in plan view. Further, this conductive film covers at least a part of the second conductivity type region without space in the extension direction of the second conductivity type region.Type: GrantFiled: March 4, 2015Date of Patent: April 26, 2016Assignee: Renesas Electronics CorporationInventors: Yoshinori Kaya, Yasushi Nakahara, Ryo Kanda, Tetsu Toda
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Patent number: 9324858Abstract: In a trench-gated MIS device contact is made to the gate within the trench, thereby eliminating the need to have the gate material, typically polysilicon, extend outside of the trench. This avoids the problem of stress at the upper corners of the trench. Contact between the gate metal and the polysilicon is normally made in a gate metal region that is outside the active region of the device. Various configurations for making the contact between the gate metal and the polysilicon are described, including embodiments wherein the trench is widened in the area of contact. Since the polysilicon is etched back below the top surface of the silicon throughout the device, there is normally no need for a polysilicon mask, thereby saving fabrication costs.Type: GrantFiled: November 1, 2010Date of Patent: April 26, 2016Assignee: Vishay-SiliconixInventors: Anup Bhalla, Dorman Pitzer, Jacek Korec, Xiaorong Shi, Sik Lui
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Patent number: 9318493Abstract: Some embodiments include memory arrays. The memory arrays may have digit lines under vertically-oriented transistors, with the digit lines interconnecting transistors along columns of the array. Each individual transistor may be directly over only a single digit line, with the single digit line being entirely composed of one or more metal-containing materials. The digit lines can be over a deck, and electrically insulative regions can be directly between the digit lines and the deck. Some embodiments include methods of forming memory arrays. A plurality of linear segments of silicon-containing material may be formed to extend upwardly from a base of the silicon-containing material. The base may be etched to form silicon-containing footings under the linear segments, and the footings may be converted into metal silicide. The linear segments may be patterned into a plurality of vertically-oriented transistor pedestals that extend upwardly from the metal silicide footings.Type: GrantFiled: September 30, 2014Date of Patent: April 19, 2016Assignee: Micron Technology, Inc.Inventors: Lars P. Heineck, Shyam Surthi, Jaydip Guha
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Patent number: 9306056Abstract: A semiconductor device (e.g., a flip chip) includes a substrate layer that is separated from a drain contact by an intervening layer. Trench-like feed-through elements that pass through the intervening layer are used to electrically connect the drain contact and the substrate layer when the device is operated.Type: GrantFiled: October 30, 2009Date of Patent: April 5, 2016Assignee: Vishay-SiliconixInventors: Deva Pattanayak, King Owyang, Mohammed Kasem, Kyle Terrill, Reuven Katraro, Kuo-In Chen, Calvin Choi, Qufei Chen, Ronald Wong, Kam Hong Lui, Robert Xu
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Patent number: 9306022Abstract: A semiconductor device includes a body including a first junction region; a pillar positioned over the body, and including a vertical channel region and a second junction region over the vertical channel region; a gate trench exposing side surfaces of the pillar; a gate dielectric layer covering the gate trench; and a gate electrode embedded in the gate trench, with the gate dielectric layer interposed therebetween. The gate electrode includes a first work function liner overlapping with the vertical channel region, and including an aluminum-containing metal nitride; a second work function liner overlapping with the second junction region, and including a silicon-containing non-metal material; and an air gap positioned between the second work function liner and the second junction region.Type: GrantFiled: June 15, 2015Date of Patent: April 5, 2016Assignee: SK Hynix Inc.Inventor: Tae-Kyung Oh
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Patent number: 9306062Abstract: A semiconductor device has a body layer disposed in a semiconductor substrate, cell regions arranged around a surface layer part of the body layer, and trenches arranged in a grid pattern for separating the cell regions from each other. A gate insulating film covers inner walls of the first trenches and an inner wall of the second trench, and a gate electrode is filled in the first trenches and the second trench covered by the gate insulating film. A cell circumferential region is disposed to surround an outer side of the second trench. An interlayer insulating film is disposed on the cell regions, the first trenches, and the second trench. A gate contact hole is disposed in the interlayer insulating film at an intersection of the first trenches arranged in the grid pattern. A gate wiring is connected to the gate electrode via the gate contact hole.Type: GrantFiled: September 23, 2013Date of Patent: April 5, 2016Assignee: SEIKO INSTRUMENTS INC.Inventor: Naoto Kobayashi
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Patent number: 9281196Abstract: The present disclosure relates to a method of forming a transistor device. In this method, first and second well regions are formed within a semiconductor substrate. The first and second well regions have first and second etch rates, respectively, which are different from one another. Dopants are selectively implanted into the first well region to alter the first etch rate to make the first etch rate substantially equal to the second etch rate. The first, selectively implanted well region and the second well region are etched to form channel recesses having equal recess depths. An epitaxial growth process is performed to form one or more epitaxial layers within the channel recesses.Type: GrantFiled: February 7, 2014Date of Patent: March 8, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tsan-Chun Wang, Ziwei Fang, Chii-Horng Li, Tze-Liang Lee, Chao-Cheng Chen, Syun-Ming Jang
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Patent number: 9281416Abstract: A Schottky diode includes first and second trenches formed in a semiconductor layer where the first and second trenches are lined with a thin dielectric layer and filled partially with a trench conductor layer with the remaining portion being filled with a first dielectric layer. Well regions are formed spaced-apart in a top portion of the semiconductor layer between the first and second trenches. A Schottky metal layer is formed on a top surface of the semiconductor layer between the first and second trenches. The Schottky diode is formed with the Schottky metal layer as the anode and the semiconductor layer between the first and second trenches as the cathode. The trench conductor layer in the first and second trenches is electrically connected to the anode of the Schottky diode. In one embodiment, the Schottky diode is formed integrated with a trench field effect transistor on the same semiconductor substrate.Type: GrantFiled: September 15, 2014Date of Patent: March 8, 2016Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Daniel Calafut, Yi Su, Jongoh Kim, Hong Chang, Hamza Yilmaz, Daniel S. Ng
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Patent number: 9281368Abstract: A plurality of gate trenches is formed into a semiconductor substrate in an active cell region. One or more other trenches are formed in a different region. Each gate trench has a first conductive material in lower portions and a second conductive material in upper portions. In the gate trenches, a first insulating layer separates the first conductive material from the substrate, a second insulating layer separates the second conductive material from the substrate and a third insulating material separates the first and second conductive materials. The other trenches contain part of the first conductive material in a half-U shape in lower portions and part of the second conductive material in upper portions. In the other trenches, the third insulating layer separates the first and second conductive materials. The first insulating layer is thicker than the third insulating layer, and the third insulating layer is thicker than the second.Type: GrantFiled: December 12, 2014Date of Patent: March 8, 2016Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Yeeheng Lee, Lingpeng Guan, Hongyong Xue, Yiming Gu, Yang Xiang, Terence Huang, Sekar Ramamoorthy, Wenjun Li, Hong Chang, Madhur Bobde, Paul Thorup, Hamza Yilmaz
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Patent number: 9252264Abstract: Aspects of the present disclosure describe a high density trench-based power MOSFETs with self-aligned source contacts and methods for making such devices. The source contacts are self-aligned with spacers and the active devices may have a two-step gate oxide. A lower portion may have a thickness that is larger than the thickness of an upper portion of the gate oxide. The MOSFETS also may include a depletable shield in a lower portion of the substrate. The depletable shield may be configured such that during a high drain bias the shield substantially depletes. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: GrantFiled: December 10, 2014Date of Patent: February 2, 2016Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Madhur Bobde, Hamza Yilmaz, Sik Lui, Daniel Ng
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Patent number: 9230851Abstract: A method of fabricating a semiconductor device includes forming at least one trench from a top side of a semiconductor layer, wherein the trench is lined with a trench dielectric liner and filled by a first polysilicon layer. The surface of the trench dielectric liner is etched, wherein dips in the trench dielectric liner are formed relative to a top surface of the first polysilicon layer which results in forming a protrusion including the first polysilicon layer. The first polysilicon layer is etched to remove at least a portion of the protrusion. A second dielectric layer is formed over at least the trench after etching the first polysilicon layer. A second polysilicon layer is deposited. The second polysilicon layer is etched to remove it over the trench and provide a patterned second polysilicon layer on the top side of the semiconductor layer.Type: GrantFiled: February 7, 2014Date of Patent: January 5, 2016Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Simon John Molloy, Christopher Boguslaw Kocon, John Manning Savidge Neilson, Hong Yang, Seetharaman Sridhar, Hideaki Kawahara
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Patent number: 9224752Abstract: A semiconductor device may include a first source layer, a first insulating layer located over the first source layer, and a first stacked structure located over the first insulating layer. The semiconductor device may include first channel layers passing through the first stacked structure and the first insulating layer. The semiconductor device may include a second source layer including a first region interposed between the first source layer and the first insulating layer and a second region interposed between the first channel layers and the first insulating layer.Type: GrantFiled: January 9, 2015Date of Patent: December 29, 2015Assignee: SK Hynix Inc.Inventors: Ki Hong Lee, Seung Ho Pyi, Ji Yeon Baek
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Patent number: 9202866Abstract: A semiconductor device and methods of formation are provided herein. A semiconductor device includes a conductor concentrically surrounding an insulator, and the insulator concentrically surrounding a column. The conductor, the insulator and the conductor are alternately configured to be a transistor, a resistor, or a capacitor. The column also functions as a via to send signals from a first layer to a second layer of the semiconductor device. The combination of via and at least one of a transistor, a capacitor, or a resistor in a semiconductor device decreases an area penalty as compared to a semiconductor device that has vias formed separately from at least one of a transistor, a capacitor, or resistor.Type: GrantFiled: January 8, 2014Date of Patent: December 1, 2015Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Cheng-Wei Luo, Hsiao-Tsung Yen
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Patent number: 9190260Abstract: A method of forming a self-aligned MTJ without using a photolithography mask and the resulting device are provided. Embodiments include forming a first electrode over a metal layer, the metal layer recessed in a low-k dielectric layer; forming a MTJ layer over the first electrode; forming a second electrode over the MTJ layer; removing portions of the second electrode, the MTJ layer, and the first electrode down to the low-k dielectric layer; forming a silicon nitride-based layer over the second electrode and the low-k dielectric layer; and planarizing the silicon nitride-based layer down to the second electrode.Type: GrantFiled: November 13, 2014Date of Patent: November 17, 2015Assignee: GLOBALFOUNDRIES INC.Inventors: Xunyuan Zhang, Ruilong Xie, Xiuyu Cai, Seowoo Nam, Hyun-Jin Cho
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Patent number: 9171621Abstract: A nonvolatile memory and a method of manufacturing a nonvolatile memory are disclosed. A nonvolatile memory according to an exemplary embodiment may include a deep well formed on a substrate, a first well formed within the deep well, a second well formed separately from the first well within the deep well, a first metal-oxide-semiconductor field-effect transistor (MOSFET) formed on the first well, and a second MOSFET formed on the second well. According to a method of manufacturing a nonvolatile memory according to an exemplary embodiment, a well region of a control MOSFET of a memory cell may be shared with a control MOSFET of an adjacent memory cell, or a well region of a tunneling MOSFET of a memory cell may be shared with a tunneling MOSFET of an adjacent memory cell, thereby reducing an area of the memory cells.Type: GrantFiled: April 26, 2013Date of Patent: October 27, 2015Assignee: Electronics and Telecommunications Research InstituteInventors: Kun Sik Park, Kyu Ha Baek
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Patent number: 9171921Abstract: The present disclosure relates to a trench MOSFET and a method for fabricating the same. The method comprises: providing a substrate with an epitaxy layer; forming a trench in the epitaxy layer; forming a first insulating layer, a first gate, a second insulating layer, and a second gate successively in the trench by deposition and etching; forming a well and a source region at both sides of the trench by ion implantation, and forming a trench-type contact and a metal plug. By forming the first gate and the second gate which are separated from each other, the first insulating layer between a lower portion of the first gate and the epitaxy layer has a thickness larger than that of the second insulating layer between the second gate and the well and the source region. The two separate gates are connected with each other by the metal plug. The resultant MOSFET has an increased breakdown voltage and stable performance while its manufacturer cost is lowered because the manufacturer process is simplified.Type: GrantFiled: August 27, 2014Date of Patent: October 27, 2015Assignee: Silergy Semiconductor Technology (Hangzhou) Ltd.Inventor: Liang Tong
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Patent number: 9147641Abstract: According to one embodiment, a semiconductor device includes: a semiconductor layer of a first conductivity type, the semiconductor layer having a first surface and a second surface on an opposite side to the first surface; a plurality of conductive layers extending in a direction from the first surface side toward the second surface side of the semiconductor layer; a first semiconductor region of a second conductivity type surrounding part of each of the plurality of conductive layers on the second surface side of the semiconductor layer, a portion other than a front surface of the first semiconductor region being surrounded by the semiconductor layer; and an insulating film provided between each of the plurality of conductive layers and the semiconductor layer and between each of the plurality of conductive layers and the first semiconductor region.Type: GrantFiled: September 4, 2013Date of Patent: September 29, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Norihisa Arai, Tsutomu Takahashi, Kazuo Hatakeyama, Kazuki Uchino
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Patent number: 9136370Abstract: A trench formed in a body layer and epitaxial layer of a substrate is lined with a dielectric layer. A shield electrode formed within a lower portion of the trench is insulated by the dielectric layer. A gate electrode formed in the trench above the shield electrode is insulated from the shield electrode by another dielectric layer. One or more source regions formed within the body layer is adjacent a sidewall of the trench. A source pad formed above the body layer is electrically connected to the source regions and insulated from the gate electrode and shield electrode. The source pad provides an external contact to the source region. A gate pad provides an external contact to the gate electrode. A shield electrode pad provides an external contact to the shield electrode. A resistive element is electrically connected between the shield electrode pad and a source lead.Type: GrantFiled: June 3, 2014Date of Patent: September 15, 2015Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Sik Lui, Yi Su, Daniel Ng, Daniel Calafut, Anup Bhalla
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Patent number: 9123548Abstract: Provided is a semiconductor device. The semiconductor device includes: a first semiconductor layer having a first region with a first device and a second region with a second device; a device isolation pattern provided in the first semiconductor layer and electrically separating the first device and the second device from each other; a drain provided on a lower surface of the first region of the first semiconductor layer; and a second semiconductor layer provided on a lower surface of the second region of the first semiconductor layer.Type: GrantFiled: July 31, 2014Date of Patent: September 1, 2015Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEInventors: Jin-Gun Koo, Jong Il Won, Hyun-cheol Bae, Sang Gi Kim, Yil Suk Yang
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Patent number: 9117528Abstract: A semiconductor device has a smaller area. That is, in a row selection decoder including MOS transistors, which selectively connect a plurality of selection signal lines to row selection lines of NAND flash memories having an SGT structure, the MOS transistors are formed on a planar silicon layer that is formed on a substrate, and each have a structure such that a drain, a gate, and a source are disposed in the vertical direction and the gate surrounds a silicon pillar. The planar silicon layer is formed of a first activation region of a first conductivity type and a second activation region of a second conductivity type, and the first and second activation regions are connected with each other via a silicide layer formed on the surface of the planar silicon layer.Type: GrantFiled: January 16, 2015Date of Patent: August 25, 2015Assignee: Unisantis Electronics Singapore Pte. Ltd.Inventors: Fujio Masuoka, Masamichi Asano
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Patent number: 9099554Abstract: A semiconductor device and a fabricating method thereof are provided. The semiconductor device include: a trench disposed within a substrate, the trench comprising an upper trench part that is wider than a lower trench part in width; a gate disposed in the trench; an interlayer insulating layer pattern disposed above the gate in the trench; a source region disposed within the substrate and contacting a sidewall of the upper trench part; a body region disposed below the source region in the substrate; and a contact trench disposed above the body region and filled with a conductive material.Type: GrantFiled: November 14, 2013Date of Patent: August 4, 2015Assignee: MagnaChip Semiconductor, Ltd.Inventors: SooChang Kang, YoungJae Kim
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Patent number: 9087769Abstract: A magnetic memory device is provided. The magnetic memory device may include a plurality of word lines extending along a direction crossing a plurality of active regions and at least one source line connected to a plurality of first active regions arranged on a level that is lower than the upper surface of a substrate. A plurality of contact pads may be connected to a plurality of second active regions and a plurality of buried contact plugs may be connected to the plurality of second active regions via the plurality of contact pads. Said buried contact pads may further be arranged in a hexagonal array structure. A plurality of variable resistance structures may be connected to the plurality of second active regions and arranged in a hexagonal array structure.Type: GrantFiled: July 22, 2014Date of Patent: July 21, 2015Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Yong-kwan Kim, Dae-eun Jeong, Shin-hee Han
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Patent number: 9064952Abstract: A semiconductor device 10 includes an element domain 40 and a termination domain 50 that surrounds the element domain 40. The element domain 40 and the termination domain 50 respectively include a second conductive type drift region 18. A gate trench 38 may be provided in the element domain 40. The termination domain 50 may be provided with a termination trench 22 surrounding the element domain. A first conductive type floating region surrounded by the drift region 18 is not provided at a bottom of the gate trench 38, and a first conductive type floating region 20 surrounded by the drift region 18 is provided at a bottom of the termination trench 22.Type: GrantFiled: March 8, 2011Date of Patent: June 23, 2015Assignee: Toyota Jidosha Kabushiki KaishaInventor: Hidefumi Takaya
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Patent number: 9064957Abstract: Semiconductor devices and methods of forming the same may be provided. The semiconductor devices may include a trench in a substrate. The semiconductor devices may also include a bulk electrode within opposing sidewalls of the trench. The semiconductor devices may further include a liner electrode between the bulk electrode and the opposing sidewalls of the trench. The liner electrode may include a sidewall portion between a sidewall of the bulk electrode and one of the opposing sidewalls of the trench.Type: GrantFiled: January 14, 2014Date of Patent: June 23, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Heedon Hwang, Ji-Young Min, Jongchul Park, Insang Jeon, Woogwan Shim
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Publication number: 20150145030Abstract: A semiconductor device in a semiconductor substrate includes a first drain region and a second drain region, a first drift zone and a second drift zone, at least two gate electrodes in the semiconductor substrate, and a channel region between the gate electrodes. The first drift zone is arranged between the channel region and the first drain region, and the second drift zone is arranged between the channel region and the second drain region. The second drain region is disposed on a side of the gate electrode, the side of the gate electrode being remote from the side of the first drain region.Type: ApplicationFiled: November 27, 2013Publication date: May 28, 2015Inventors: Andreas Meiser, Franz Hirler, Peter Irsigler
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Publication number: 20150145031Abstract: A semiconductor apparatus includes a semiconductor substrate including first and second regions, an inactive region formed in the semiconductor substrate of the second region and from a surface thereof, one or more first pillars vertically extending from the semiconductor substrate of the first region, one or more second pillars vertically extending from the inactive region, a gate conductive layer formed on the semiconductor substrate and surrounding the first and second pillars, and a gate contact formed on at least one of the second pillars to be coupled to the gate conductive layer, wherein the at least one of the second pillars has a height lower than the gate conductive layer.Type: ApplicationFiled: February 20, 2014Publication date: May 28, 2015Applicant: SK hynix Inc.Inventors: Dong Yean OH, Kang Sik CHOI
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Patent number: 9041085Abstract: A semiconductor device may include, but is not limited to, a semiconductor substrate having a first gate groove; a first fin structure underneath the first gate groove; a first diffusion region in the semiconductor substrate, the first diffusion region covering an upper portion of a first side of the first gate groove; and a second diffusion region in the semiconductor substrate. The second diffusion region covers a second side of the first gate groove. The second diffusion region has a bottom which is deeper than a top of the first fin structure.Type: GrantFiled: April 27, 2012Date of Patent: May 26, 2015Assignee: PS4 LUXCO S.A.R.L.Inventors: Kiyonori Oyu, Koji Taniguchi, Koji Hamada, Hiroaki Taketani
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Patent number: 9041099Abstract: The present invention provides a single-sided access device including an active fin structure comprising a source region and a drain region; an insulating layer interposed between the source region and the drain region; a trench isolation structure disposed at one side of the active fin structure; a single-sided sidewall gate electrode disposed on the other side of the active fin structure opposite to the trench isolation structure so that the active fin structure is sandwiched by trench isolation structure and the single-sided sidewall gate electrode; and a gate protrusion laterally and electrically extended from the single-sided sidewall gate electrode and embedded between the source region and the drain region under the insulating layer.Type: GrantFiled: April 11, 2011Date of Patent: May 26, 2015Assignee: NANYA TECHNOLOGY CORP.Inventors: Shyam Surthi, Sheng-Wei Yang
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Publication number: 20150137226Abstract: A semiconductor device includes a semiconductor substrate having first regions of a first conductivity type and body regions of the first conductivity type, which are arranged in a manner adjoining the first region and overlap the latter in each case on a side of the first region which faces a first surface of the semiconductor substrate, and having a multiplicity of drift zone regions arranged between the first regions and composed of a semiconductor material of a second conductivity type, which is different than the first conductivity type. The first regions and the drift zone regions are arranged alternately and form a superjunction structure. The semiconductor device further includes a gate electrode formed in a trench in the semiconductor substrate.Type: ApplicationFiled: November 20, 2014Publication date: May 21, 2015Inventors: Till Schloesser, Andreas Meiser
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Publication number: 20150137227Abstract: Aspects of the present disclosure describe a high density trench-based power MOSFETs with self-aligned source contacts and methods for making such devices. The source contacts are self-aligned with spacers and the active devices may have a two-step gate oxide. A lower portion may have a thickness that is larger than the thickness of an upper portion of the gate oxide. The MOSFETS also may include a depletable shield in a lower portion of the substrate. The depletable shield may be configured such that during a high drain bias the shield substantially depletes. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: ApplicationFiled: December 10, 2014Publication date: May 21, 2015Inventors: Madhur Bobde, Hamza Yilmaz, Sik Lui, Daniel Ng
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Patent number: 9035378Abstract: A trench power MOSFET structure and fabrication method thereof is provided. The fabrication method comprises following process. First, form an isolating trench. Then, form at least two doped regions around the isolating trench. The doped regions are adjacent and the doping concentrations of two doped regions are different. Form an isolating structure in the isolating trench. Wherein, the junction profiles of the two doped regions are made by on implantation method for moderate the electric field distribution and decreasing the conduction loss.Type: GrantFiled: April 21, 2014Date of Patent: May 19, 2015Assignee: SUPER GROUP SEMICONDUCTOR CO., LTD.Inventors: Hsiu-Wen Hsu, Chun-Ying Yeh, Yuan-Ming Lee
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Publication number: 20150129958Abstract: According to one embodiment, a semiconductor apparatus divides each of a first area in which a first transistor is formed and a second area in which a second transistor is formed into two or more areas, and alternately arranges the divided areas of the first area and the second area. Further, the semiconductor apparatus according to one embodiment configures the second area to have a total area larger than that of the first area or to have the number of divisions greater than that of the first area. Furthermore, in the semiconductor apparatus according to one embodiment, a gate pad of the first transistor and a gate pad of the second transistor are provided in the second area.Type: ApplicationFiled: October 7, 2014Publication date: May 14, 2015Inventors: Junichi Nita, Kazutaka Suzuki, Takahiro Korenari, Yoshimasa Uchinuma
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Patent number: 9029941Abstract: A vertical transistor component includes a semiconductor body with first and second surfaces, a drift region, and a source region and body region arranged between the drift region and the first surface. The body region is also arranged between the source region and the drift region. The vertical transistor component further includes a gate electrode arranged adjacent to the body zone, a gate dielectric arranged between the gate electrode and the body region, and a drain region arranged between the drift region and the second surface. A source electrode electrically contacts the source region, is electrically insulated from the gate electrode and arranged on the first surface. A drain electrode electrically contacts the drain region and is arranged on the second surface. A gate contact electrode is electrically insulated from the semiconductor body, extends in the semiconductor body to the second surface, and is electrically connected with the gate electrode.Type: GrantFiled: July 24, 2013Date of Patent: May 12, 2015Assignee: Infineon Technologies AGInventors: Andreas Meiser, Markus Zundel, Christoph Kadow
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Patent number: 9029930Abstract: A FinFET device includes a substrate, a fin, and isolation regions on either side of the fin. The device also includes sidewall spacers above the isolation regions and formed along the fin structure. A recessing trench is formed by the sidewall spacers and the fin, and an epitaxially-grown semiconductor material is formed in and above the recessing trench, forming an epitaxial structure.Type: GrantFiled: March 21, 2014Date of Patent: May 12, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Andrew Joseph Kelly, Po-Ruwe Tzng, Pei-Shan Chien, Wei-Hsiung Tseng
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Publication number: 20150123196Abstract: Provided are data storage devices and methods of manufacturing the same. The device may include a plurality of cell selection parts formed in a substrate, a plate conductive pattern covering the cell selection parts and electrically connected to first terminals of the cell selection parts, a plurality of through-pillars penetrating the plate conductive pattern and insulated from the plate conductive pattern, and a plurality of data storage parts directly connected to the plurality of through-pillars, respectively. The data storage parts may be electrically connected to second terminals of the cell selection parts, respectively.Type: ApplicationFiled: January 16, 2015Publication date: May 7, 2015Inventors: JUNGWOO SONG, JAEKYU LEE
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Patent number: 9024379Abstract: Methods and systems for power semiconductor devices integrating multiple trench transistors on a single chip. Multiple power transistors (or active regions) are paralleled, but one transistor has a lower threshold voltage. This reduces the voltage drop when the transistor is forward-biased. In an alternative embodiment, the power device with lower threshold voltage is simply connected as a depletion diode, to thereby shunt the body diodes of the active transistors, without affecting turn-on and ON-state behavior.Type: GrantFiled: February 4, 2013Date of Patent: May 5, 2015Assignee: MaxPower Semiconductor Inc.Inventors: Mohamed N. Darwish, Jun Zeng, Richard A. Blanchard
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Publication number: 20150115358Abstract: The present disclosure provides a semiconductor device, including a compensation area that includes p-regions and n-regions, a plurality of transistor cells including gate electrodes on the compensation area, and one or more interconnections for electrically connecting gate electrodes. The gate electrodes may have a width smaller than ½ of a pitch of the cells.Type: ApplicationFiled: October 28, 2014Publication date: April 30, 2015Inventors: Anton Mauder, Winfried Kaindl, Uwe Wahl
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Publication number: 20150115359Abstract: In a semiconductor device, a lightly doped second semiconductor layer of a first conductive type is joined with a heavily doped first semiconductor layer of the first conductive type. A power transistor having a first conductive type channel and a transistor are formed in surface regions of the second semiconductor layer, respectively. A first diffusion layer of a second conductive type is formed in a surface region of the second semiconductor layer to provide a boundary between the power transistor and the transistor. The first semiconductor layer functions as a drain of the power transistor. The first diffusion layer region is set to the same voltage as that of the drain.Type: ApplicationFiled: October 28, 2014Publication date: April 30, 2015Applicant: RENESAS ELECTRONICS CORPORATIONInventors: Akio TAMAGAWA, Makoto TANAKA