Depletion Mode Field Effect Transistor Patents (Class 257/348)
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Patent number: 8963249Abstract: A field effect transistor having a source, drain, and a gate can include a semiconductor substrate, a buried insulator layer positioned on the semiconductor substrate, and a semiconductor overlayer positioned on the buried insulator layer; a low dopant channel region positioned below the gate and between the source and the drain and in an upper portion of the semiconductor overlayer; and a plurality of doped regions having a predetermined dopant concentration profile, including a screening region positioned in the semiconductor overlayer below the low dopant channel region, the screening region extending toward the buried insulator layer, and a threshold voltage set region positioned between the screening region and the low dopant channel, the screening region and the threshold voltage set region having each a peak dopant concentration, the threshold voltage region peak dopant concentration being between 1/50 and ½ of the peak dopant concentration of the screening region.Type: GrantFiled: May 30, 2014Date of Patent: February 24, 2015Assignee: Suvolta, Inc.Inventors: Lucian Shifren, Pushkar Ranade
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Patent number: 8963295Abstract: A semiconductor structure with beryllium oxide is provided. The semiconductor structure comprises: a semiconductor substrate (100); and a plurality of insulation oxide layers (201, 202 . . . 20x) and a plurality of single crystal semiconductor layers (301, 302 . . . 30x) alternately stacked on the semiconductor substrate (100). A material of the insulation oxide layer (201) contacted with the semiconductor substrate (100) is any one of beryllium oxide, SiO2, SiOxNy and a combination thereof, a material of other insulation oxide layers (202 . . . 20x) is single crystal beryllium oxide.Type: GrantFiled: December 18, 2012Date of Patent: February 24, 2015Assignee: Tsinghua UniversityInventors: Jing Wang, Renrong Liang, Lei Guo, Jun Xu
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Patent number: 8963294Abstract: A method, structure and alignment procedure, for forming a finFET. The method including, defining a first fin of the finFET with a first mask and defining a second fin of the finFET with a second mask. The structure including integral first and second fins of single-crystal semiconductor material and longitudinal axes of the first and second fins aligned in the same crystal direction but offset from each other. The alignment procedure including simultaneously aligning alignment marks on a gate mask to alignment targets formed separately by a first masked used to define the first fin and a second mask used to define the second fin.Type: GrantFiled: September 19, 2007Date of Patent: February 24, 2015Assignee: International Business Machines CorporationInventors: Jochen Beintner, Thomas Ludwig, Edward Joseph Nowak
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Patent number: 8952455Abstract: In the case of using an analog buffer circuit, an input voltage is required to be added a voltage equal to a voltage between the gate and source of a polycrystalline silicon TFT; therefore, a power supply voltage is increased, thus a power consumption is increased with heat. In view of the foregoing problem, the invention provides a depletion mode polycrystalline silicon TFT as a polycrystalline silicon TFT used in an analog buffer circuit such as a source follower circuit. The depletion mode polycrystalline silicon TFT has a threshold voltage on its negative voltage side; therefore, an input voltage does not have to be increased as described above. As a result, a power supply voltage requires no increase, thus a low power consumption of a liquid crystal display device in particular can be realized.Type: GrantFiled: September 26, 2011Date of Patent: February 10, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Jun Koyama
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Patent number: 8941180Abstract: Disclosed is an integrated circuit having an asymmetric FET as a power gate for an electronic circuit, which has at least two stacked symmetric field effect transistors. The asymmetric FET has an asymmetric halo configuration (i.e., a single source-side halo or a source-side halo with a higher dopant concentration than a drain-side halo) and an asymmetric source/drain extension configuration (i.e., the source extension can be overlapped to a greater extent by the gate structure than the drain extension and/or the source extension can have a higher dopant concentration than the drain extension). As a result, the asymmetric FET has a low off current. In operation, the asymmetric FET is turned off when the electronic circuit is placed in a standby state and, due to the low off current (Ioff), effectively reduces standby leakage current from the electronic circuit.Type: GrantFiled: March 10, 2011Date of Patent: January 27, 2015Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, Edward J. Nowak
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Patent number: 8937354Abstract: The present invention discloses a PD SOI device with a body contact structure. The active region of the PD SOI device includes: a body region; a gate region, which is inverted-L shaped, formed on the body region; a N-type source region and a N-type drain region, formed respectively at the two opposite sides of the anterior part the body region; a body contact region, formed at one side of the posterior part of the body region, which is side-by-side with the N-type source region; and a first silicide layer, formed on the body contact region and the N-type source region, which is contact to both of the body contact region and the N-type source region. The body contact region of the device is formed on the border of the source region and the leading-out terminal of the gate electrode.Type: GrantFiled: September 8, 2010Date of Patent: January 20, 2015Assignee: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of SciencesInventors: Jing Chen, Qingqing Wu, Jiexin Luo, Xiaolu Huang, Xi Wang
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Patent number: 8933512Abstract: The present application discloses a MOSFET and a method for manufacturing the same.Type: GrantFiled: August 12, 2011Date of Patent: January 13, 2015Assignee: Institute of Microelectronics, Chinese Academy of ScienceInventors: Huilong Zhu, Miao Xu, Qingqing Liang
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Patent number: 8878239Abstract: On a main surface of a semiconductor substrate, an N? semiconductor layer is formed with a dielectric portion including relatively thin and thick portions interposed therebetween. In a predetermined region of the N? semiconductor layer, an N-type impurity region and a P-type impurity region are formed. A gate electrode is formed on a surface of a portion of the P-type impurity region located between the N-type impurity region and the N? semiconductor layer. In a predetermined region of the N? semiconductor layer located at a distance from the P-type impurity region, another P-type impurity region is formed. As a depletion layer block portion, another N-type impurity region higher in impurity concentration than the N? semiconductor layer is formed from the surface of the N? semiconductor layer to the dielectric portion.Type: GrantFiled: May 3, 2013Date of Patent: November 4, 2014Assignee: Mitsubishi Electric CorporationInventor: Tomohide Terashima
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Patent number: 8872243Abstract: A semiconductor device manufacturing method includes providing a mask on a semiconductor member. The method further includes providing a dummy element to cover a portion of the mask that overlaps a first portion of the semiconductor member and to cover a second portion of the semiconductor member. The method further includes removing a third portion of the semiconductor member, which has not been covered by the mask or the dummy element. The method further includes providing a silicon compound that contacts the first portion of the semiconductor member. The method further includes removing the dummy element to expose and to remove the second portion of the semiconductor member. The method further includes forming a gate structure that overlaps the first portion of the semiconductor member. The first portion of the semiconductor member is used as a channel region and is supported by the silicon compound.Type: GrantFiled: September 14, 2012Date of Patent: October 28, 2014Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventor: Fumitake Mieno
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Publication number: 20140312422Abstract: A method and apparatus for use in improving linearity sensitivity of MOSFET devices having an accumulated charge sink (ACS) are disclosed. The method and apparatus are adapted to address degradation in second- and third-order intermodulation harmonic distortion at a desired range of operating voltage in devices employing an accumulated charge sink.Type: ApplicationFiled: March 5, 2014Publication date: October 23, 2014Applicant: PEREGRINE SEMICONDUCTOR CORPORATIONInventors: Christopher N. Brindle, Jie Deng, Alper Genc, Chieh-Kai Yang
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Publication number: 20140299936Abstract: Integrated circuit devices and fabrication techniques. A semiconductor device fabrication method may include doping, in a same processing step, first and second portions of a substrate of an integrated circuit. The first portion corresponds to a doped region of a semiconductor device. The second portion corresponds to a via contact. The method may further include, after the doping, forming the gate of the semiconductor device.Type: ApplicationFiled: April 4, 2013Publication date: October 9, 2014Applicant: STMicroelectronics, Inc.Inventor: John H. Zhang
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Patent number: 8853782Abstract: A semiconductor device has a so-called SOI structure in which an element is constituted by a semiconductor layer on an insulating surface, and the semiconductor layer is extremely thin as 5 nm to 30 nm. The semiconductor device is provided with a field effect transistor that includes in addition to such a semiconductor layer, a gate insulating layer with a thickness of 2 nm to 20 nm and a gate electrode, and a channel length is ten times or more and less than 40 times the thickness of the semiconductor layer. When the semiconductor layer is formed to be thin, the semiconductor device operates so as not to be easily influenced by a concentration of impurity imparting one conductivity type added to a channel formation region.Type: GrantFiled: November 28, 2007Date of Patent: October 7, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Yasuyuki Arai
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Publication number: 20140291763Abstract: Techniques for providing a semiconductor memory device are disclosed. In one embodiment, the techniques may be realized as a semiconductor memory device including a plurality of memory cells arranged in an array of rows and columns. Each memory cell may include a first region connected to a source line extending in a first orientation, a second region connected to a bit line extending a second orientation, and a body region spaced apart from and capacitively coupled to a word line, wherein the body region is electrically floating and disposed between the first region and the second region. The semiconductor device may also include a first barrier wall extending in the first orientation of the array and a second barrier wall extending in the second orientation of the array and intersecting with the first barrier wall to form a trench region configured to accommodate each of the plurality of memory cells.Type: ApplicationFiled: June 9, 2014Publication date: October 2, 2014Applicant: MICRON TECHNOLOGY, INC.Inventors: Michael A. VAN BUSKIRK, Christian CAILLAT, Viktor I. KOLDIAEV, Jungtae KWON, Pierre C. FAZAN
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Patent number: 8847276Abstract: In a semiconductor device including an IGBT and a freewheeling diode (FWD), W1, W2, and W3 satisfy predetermined formulas. W1 denotes a distance from a boundary between a cathode region and a collector region to a position, where a peripheral-region-side end of the well layer is projected, on a back side of the drift layer. W2 denotes a distance from a boundary between the IGBT and the FWD in a base region to the peripheral-region-side end of the well layer. W3 denotes a distance from the boundary between the cathode region and the collector region to a position, where a boundary between the base region and the well layer is projected, on the back side.Type: GrantFiled: June 29, 2011Date of Patent: September 30, 2014Assignee: DENSO CORPORATIONInventors: Hiromitsu Tanabe, Kenji Kouno, Yukio Tsuzuki
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Patent number: 8841190Abstract: This invention relates to a MOS device for making the source/drain region closer to the channel region and a method of manufacturing the same, comprising: providing an initial structure, which includes a substrate, an active region, and a gate stack; performing ion implantation in the active region on both sides of the gate stack, such that part of the substrate material undergoes pre-amorphization to form an amorphous material layer; forming a first spacer; with the first spacer as a mask, performing dry etching, thereby forming a recess, with the amorphous material layer below the first spacer kept; performing wet etching using an etchant solution that is isotropic to the amorphous material layer and whose etch rate to the amorphous material layer is greater than or substantially equal to the etch rate to the {100} and {110} surfaces of the substrate material but is far greater than the etch rate to the {111} surface of the substrate material, thus removing the amorphous material layer below the first spaceType: GrantFiled: April 10, 2012Date of Patent: September 23, 2014Assignee: The Institute of Microelectronics Chinese Academy of ScienceInventors: Changliang Qin, Huaxiang Yin
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Publication number: 20140264605Abstract: In one aspect, a method for forming an electronic device includes the following steps. An ETSOI layer of an ETSOI wafer is patterned into one or more ETSOI segments each of the ETSOI segments having a width of from about 3 nm to about 20 nm. A gate electrode is formed over a portion of the one or more ETSOI segments which serves as a channel region of a transistor, wherein portions of the one or more ETSOI segments extending out from under the gate electrode serve as source and drain regions of the transistor. At least one TSV is formed in the ETSOI wafer adjacent to the transistor. An electronic device is also provided.Type: ApplicationFiled: August 7, 2013Publication date: September 18, 2014Applicant: International Business Machines CorporationInventors: Chung-Hsun Lin, Yu-Shiang Lin, Shih-Hsien Lo, Joel A. Silberman
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Publication number: 20140269047Abstract: An apparatus is disclosed for a memory cell having a floating body. A memory cell may include a transistor over an insulation layer, the transistor including a source, and a drain. The memory cell may also include a floating body including a first region positioned between the source and the drain, a second region positioned remote from each of the source and drain, and a passage extending through the insulation layer and coupling the first region to the second region. Additionally, the memory cell may include a bias gate at least partially surrounding the second region and configured for operably coupling to a bias voltage. Furthermore, the memory cell may include a plurality of dielectric layers, wherein each outer vertical surface of the second region has a dielectric layer of the plurality adjacent thereto.Type: ApplicationFiled: May 28, 2014Publication date: September 18, 2014Applicant: Micron Technology, Inc.Inventors: Sanh D. Tang, Mike N. Nguyen
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Patent number: 8836032Abstract: According to one exemplary embodiment, a fin-based adjustable resistor includes a fin channel of a first conductivity type, and a gate surrounding the fin channel. The fin-based adjustable resistor also includes first and second terminals of the first conductivity type being contiguous with the fin channel, and being situated on opposite sides of the fin channel. The fin channel is lower doped relative to the first and second terminals. The resistance of the fin channel between the first and second terminals is adjusted by varying a voltage applied to the gate so as to achieve the fin-based adjustable resistor. The gate can be on at least two sides of the fin channel. Upon application of a depletion voltage, the fin channel can be depleted before an inversion is formed in the fin channel.Type: GrantFiled: October 20, 2011Date of Patent: September 16, 2014Assignee: Broadcom CorporationInventors: Wei Xia, Xiangdong Chen
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Patent number: 8829967Abstract: Embodiments include an apparatus, system, and method related to a body-contacted partially depleted silicon on insulator (PDSOI) transistor that may be used in a switch circuit. In some embodiments, the switch circuit may include a discharge transistor to provide a discharge path for a body of a switch transistor. Other embodiments may be described and claimed.Type: GrantFiled: June 27, 2012Date of Patent: September 9, 2014Assignee: TriQuint Semiconductor, Inc.Inventor: George Nohra
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Patent number: 8815660Abstract: The present invention generally relates to a semiconductor structure and method, and more specifically, to a structure and method for reducing floating body effect of silicon on insulator (SOI) metal oxide semiconductor field effect transistors (MOSFETs). An integrated circuit (IC) structure includes a SOI substrate and at least one MOSFET formed on the SOI substrate. Additionally, the IC structure includes an asymmetrical source-drain junction in the at least one MOSFET by damaging a pn junction to reduce floating body effects of the at least one MOSFET.Type: GrantFiled: February 5, 2010Date of Patent: August 26, 2014Assignee: International Business Machines CorporationInventors: Qingqing Liang, Huilong Zhu, Zhijiong Luo, Haizhou Yin
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Patent number: 8809954Abstract: Disclosed are embodiments of a field effect transistor with a gate-to-body tunnel current region (GTBTCR) and a method. In one embodiment, a gate, having adjacent sections with different conductivity types, traverses the center portion of a semiconductor layer to create, within the center portion, a channel region and a GTBTCR below the adjacent sections having the different conductivity types, respectively. In another embodiment, a semiconductor layer has a center portion with a channel region and a GTBTCR. The GTBTCR comprises: a first implant region adjacent to and doped with a higher concentration of the same first conductivity type dopant as the channel region; a second implant region, having a second conductivity type, adjacent to the first implant region; and an enhanced generation and recombination region between the implant regions. A gate with the second conductivity type traverses the center portion.Type: GrantFiled: January 3, 2014Date of Patent: August 19, 2014Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, Jiale Liang, Edward J. Nowak
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Patent number: 8803233Abstract: A transistor includes a semiconductor layer, and a gate dielectric is formed on the semiconductor layer. A gate conductor is formed on the gate dielectric and an active area is located in the semiconductor layer underneath the gate dielectric. The active area includes a graded dopant region that has a higher doping concentration near a top surface of the semiconductor layer and a lower doping concentration near a bottom surface of the semiconductor layer. This graded dopant region has a gradual decrease in the doping concentration. The transistor also includes source and drain regions that are adjacent to the active region. The source and drain regions and the active area have the same conductivity type.Type: GrantFiled: September 23, 2011Date of Patent: August 12, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Pranita Kulkarni, Tak H. Ning
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Patent number: 8803246Abstract: An electronic component includes a high-voltage depletion-mode transistor and a low-voltage enhancement-mode transistor. A source electrode of the high-voltage depletion-mode transistor is electrically connected to a drain electrode of the low-voltage enhancement-mode transistor, and a gate electrode of the high-voltage depletion-mode transistor is electrically coupled to the source electrode of the low-voltage enhancement-mode transistor. The on-resistance of the enhancement-mode transistor is less than the on-resistance of the depletion-mode transistor, and the maximum current level of the enhancement-mode transistor is smaller than the maximum current level of the depletion-mode transistor.Type: GrantFiled: July 16, 2012Date of Patent: August 12, 2014Assignee: Transphorm Inc.Inventors: Yifeng Wu, Umesh Mishra, Srabanti Chowdhury
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Patent number: 8779511Abstract: Thin semiconductor regions and thick semiconductor regions are formed oven an insulator layer. Thick semiconductor regions include at least one semiconductor fin. A gate conductor layer is patterned to form disposable planar gate electrodes over ETSOI regions and disposable side gate electrodes on sidewalls of semiconductor fins. End portions of the semiconductor fins are vertically recessed to provide thinned fin portions adjacent to an unthinned fin center portion. After appropriate masking by dielectric layers, selective epitaxy is performed on planar source and drain regions of ETSOI field effect transistors (FETs) to form raised source and drain regions. Further, fin source and drain regions are grown on the thinned fin portions. Source and drain regions, fins, and the disposable gate electrodes are planarized. The disposable gate electrodes are replaced with metal gate electrodes. FinFETs and ETSOI FETs are provided on the same semiconductor substrate.Type: GrantFiled: June 22, 2012Date of Patent: July 15, 2014Assignee: International Business Machines CorporationInventors: Narasimhulu Kanike, Kangguo Cheng, Ramachandra Divakaruni, Carl J. Radens
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Patent number: 8779514Abstract: The invention relates to a transistor and a method for manufacturing the transistor. The transistor according to an embodiment of the invention may comprise: a substrate which comprises at least a back gate of the transistor, an insulating layer and a semiconductor layer stacked sequentially, wherein the back gate of the transistor is used for adjusting the threshold voltage of the transistor; a gate stack formed on the semiconductor layer, wherein the gate stack comprises a gate dielectric and a gate electrode formed on the gate dielectric; a spacer formed on sidewalls of the gate stack; and a source region and a drain region located on both sides of the gate stack, respectively, wherein the height of the gate stack is lower than the height of the spacer. The transistor enables the height of the gate stack to be reduced and therefore the performance of the transistor is improved.Type: GrantFiled: February 25, 2011Date of Patent: July 15, 2014Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Qingqing Liang, Huicai Zhong, Huilong Zhu
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Patent number: 8779527Abstract: A method and circuit in which the drive strength of a FinFET transistor can be selectively modified, and in particular can be selectively reduced, by omitting the LDD extension formation in the source and/or in the drain of the FinFET. One application of this approach is to enable differentiation of the drive strengths of transistors in an integrated circuit by applying the technique to some, but not all, of the transistors in the integrated circuit. In particular in a SRAM cell formed from FinFET transistors the application of the technique to the pass-gate transistors, which leads to a reduction of the drive strength of the pass-gate transistors relative to the drive strength of the pull-up and pull-down transistors, results in improved SRAM cell performance.Type: GrantFiled: October 8, 2012Date of Patent: July 15, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Thomas Merelle, Gerben Doornbos, Robert James Pascoe Lander
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Publication number: 20140183618Abstract: A semiconductor device comprising: at least one strained semiconductor layer to change the probability of an electron tunnelling from a first area to a second area.Type: ApplicationFiled: August 5, 2011Publication date: July 3, 2014Applicant: X-FAB SEMICONDUCTOR FOUNDRIES AGInventor: Eng Gek Hee
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Patent number: 8766410Abstract: Integrated circuits having combined memory and logic functions are provided. In one aspect, an integrated circuit is provided. The integrated circuit comprises: a substrate comprising a silicon layer over a BOX layer, wherein a select region of the silicon layer has a thickness of between about three nanometers and about 20 nanometers; at least one eDRAM cell comprising: at least one pass transistor having a pass transistor source region, a pass transistor drain region and a pass transistor channel region formed in the select region of the silicon layer; and a capacitor electrically connected to the pass transistor.Type: GrantFiled: June 6, 2011Date of Patent: July 1, 2014Assignee: International Business Machines CorporationInventors: Jin Cai, Josephine Chang, Leland Chang, Brian L. Ji, Steven John Koester, Amlan Majumdar
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Publication number: 20140159156Abstract: An integrated circuit including a link or string of semiconductor memory cells, wherein each memory cell includes a floating body region for storing data. The link or string includes at least one contact configured to electrically connect the memory cells to at least one control line, and the number of contacts in the string or link is the same as or less than the number of memory cells in the string or link.Type: ApplicationFiled: February 11, 2014Publication date: June 12, 2014Inventor: Yuniarto Widjaja
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Patent number: 8748986Abstract: Structures and methods of fabrication thereof related to an improved semiconductor on insulator (SOI) transistor formed on an SOI substrate. The improved SOI transistor includes a substantially undoped channel extending between the source and the drain, an optional threshold voltage set region positioned below the substantially undoped channel, and a screening region positioned below the threshold voltage set region. The threshold voltage of the improved SOI transistor can be adjusted without halo implants or threshold voltage implants into the channel, using the position and/or dopant concentration of the screening region and/or the threshold voltage set region.Type: GrantFiled: July 26, 2012Date of Patent: June 10, 2014Assignee: Suvolta, Inc.Inventors: Lucian Shifren, Pushkar Ranade
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Publication number: 20140151807Abstract: A device includes a plurality of trenches and fins defined in a substantially un-doped layer of semiconducting material, a gate insulation layer positioned on the fins and on the bottom of the trenches, a gate electrode and a device isolation structure. One method disclosed herein involves identifying a top width of each of a plurality of fins and a depth of a plurality of trenches to be formed in a substantially un-doped layer of semiconducting material, wherein, during operation, the device is adapted to operate in at least three distinguishable conditions depending upon a voltage applied to the device, performing at least one process operation to define the trenches and fins in the layer of semiconducting material, forming a gate insulation layer on the fins and on a bottom of the trenches and forming a gate electrode above the gate insulation layer.Type: ApplicationFiled: December 5, 2012Publication date: June 5, 2014Applicant: GLOBALFOUNDRIES INC.Inventors: Min-hwa Chi, Werner Juengling
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Patent number: 8742504Abstract: A semiconductor device and a method of fabricating a semiconductor device. The semiconductor device includes a semiconductor substrate, an insulating layer, a first semiconductor layer, a dielectric layer, a second semiconductor layer, a source and drain junction, a gate, and a spacer. The method includes the steps of forming a semiconductor substrate, forming a shallow trench isolation layer, growing a first epitaxial layer, growing a second epitaxial layer, forming a gate, forming a spacer, performing a reactive ion etching, removing a portion of the first epitaxial layer, filling the void with a dielectric, etching back a portion of the dielectric, growing a silicon layer, implanting a source and drain junction, and forming an extension.Type: GrantFiled: May 10, 2013Date of Patent: June 3, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Pranita Kerber, Ghavam G. Shahidi
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Publication number: 20140117450Abstract: Disclosed are embodiments of a field effect transistor with a gate-to-body tunnel current region (GTBTCR) and a method. In one embodiment, a gate, having adjacent sections with different conductivity types, traverses the center portion of a semiconductor layer to create, within the center portion, a channel region and a GTBTCR below the adjacent sections having the different conductivity types, respectively. In another embodiment, a semiconductor layer has a center portion with a channel region and a GTBTCR. The GTBTCR comprises: a first implant region adjacent to and doped with a higher concentration of the same first conductivity type dopant as the channel region; a second implant region, having a second conductivity type, adjacent to the first implant region; and an enhanced generation and recombination region between the implant regions. A gate with the second conductivity type traverses the center portion.Type: ApplicationFiled: January 3, 2014Publication date: May 1, 2014Applicant: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, Jiale Liang, Edward J. Nowak
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Patent number: 8703567Abstract: The present invention discloses a method for manufacturing a semiconductor device, comprising: forming an insulating isolation layer on a substrate; forming an insulating isolation layer trench in the insulating isolation layer; forming an active region layer in the insulating isolation layer trench; forming a semiconductor device structure in and above the active region layer; characterized in that the carrier mobility of the active region layer is higher than that of the substrate. Said active region is formed of a material different from that of the substrate, the carrier mobility in the channel region is enhanced, thereby the device response speed is improved and the device performance is enhanced. Unlike the existing STI manufacturing process, for the present invention, an STI is formed first, and then filling is performed to form an active region, thus avoiding the problem of generation of holes in STI, and improving the device reliability.Type: GrantFiled: November 29, 2011Date of Patent: April 22, 2014Assignee: The Institute of Microelectronics Chinese Academy of ScienceInventors: Guilei Wang, Chunlong Li, Chao Zhao
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Publication number: 20140084372Abstract: A shallow trench is formed to extend into a handle substrate of a semiconductor-on-insulator (SOI) layer. A dielectric liner stack of a dielectric metal oxide layer and a silicon nitride layer is formed in the shallow trench, followed by deposition of a shallow trench isolation fill portion. The dielectric liner stack is removed from above a top surface of a top semiconductor portion, followed by removal of a silicon nitride pad layer and an upper vertical portion of the dielectric metal oxide layer. A divot laterally surrounding a stack of a top semiconductor portion and a buried insulator portion is filled with a silicon nitride portion. Gate structures and source/drain structures are subsequently formed. The silicon nitride portion or the dielectric metal oxide layer functions as a stopping layer during formation of source/drain contact via holes, thereby preventing electrical shorts between source/drain contact via structures and the handle substrate.Type: ApplicationFiled: December 4, 2013Publication date: March 27, 2014Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, STMICROELECTRONICS, INC.Inventors: Bruce B. Doris, Shom Ponoth, Prasanna Khare, Qing Liu, Nicolas Loubet, Maud Vinet
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Patent number: 8680609Abstract: A manufacturing method of a depletion mode trench semiconductor device includes following steps. Firstly, a substrate including a drift epitaxial layer disposed thereon is provided. A trench is disposed in the drift epitaxial layer. A gate dielectric layer is formed on an inner sidewall of the trench and an upper surface of the drift epitaxial layer. A base doped region is formed in the drift epitaxial layer and adjacent to a side of the trench. A thin doped region is formed and conformally contacts the gate dielectric layer. A gate material layer is formed to fill the trench. A source doped region is formed in the base doped region, and the source doped region overlaps the thin doped region at a side of the trench. Finally, a contact doped region is formed to overlap the thin doped region, and the contact doped region is adjacent to the source doped region.Type: GrantFiled: April 21, 2011Date of Patent: March 25, 2014Assignee: Sinopower Semiconductor Inc.Inventors: Wei-Chieh Lin, Jia-Fu Lin
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Publication number: 20140064006Abstract: A junctionless semiconductor device having a buried gate, a module and system each having the same, and a method for forming the semiconductor device are disclosed. A source, a drain, and a body of a semiconductor device having a buried gate are doped with the same type of impurities, so that the junctionless semiconductor device does not include a PN junction between the source and the body or between the body and the drain. As a result, a leakage current caused by GIDL is reduced so that operation characteristics of the semiconductor device are improved and the size of a current-flowing region is increased, resulting in an increased operation current.Type: ApplicationFiled: December 20, 2012Publication date: March 6, 2014Applicant: SK hynix Inc.Inventors: Kyung Kyu MIN, Min Soo YOO, Il Woong KWON
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Patent number: 8664722Abstract: In a method for manufacturing a semiconductor device, a semiconductor film formed over an insulator is doped with an impurity element to a depth less than the thickness of the semiconductor film, thereby forming an impurity doped layer; a metal silicide layer is formed on the impurity doped layer; the metal silicide layer and the semiconductor film are etched to form a recessed portion; and a layer which is not doped with the impurity element and is located at the bottom of the recessed portion of the semiconductor film is thinned to make a channel formation region. Further, a gate electrode is formed in the recessed portion over the thinned non impurity doped layer, with an insulating film interposed therebetween.Type: GrantFiled: November 4, 2011Date of Patent: March 4, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Takashi Shingu, Daisuke Ohgarane, Yurika Sato
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Publication number: 20140027853Abstract: The structure, and fabrication method thereof, implements a fully depleted silicon-on-insulator (SOI) transistor using a “Channel Last” procedure in which the active channel is a low-temperature epitaxial layer in an etched recess in the SOI silicon film. An optional ?-layer of extremely high doping allows its threshold voltage to be set to a desired value. Based on high-K metal gate last technology, this transistor has reduced threshold uncertainty and superior source and drain conductance. The use of epitaxial layer improves the thickness control of the active channel and reduces the process induced variations. The utilization of active silicon layer that is two or more times thicker than those used in conventional fully depleted SOI devices, reduces the access resistance and improves the on-current of the SOI transistor.Type: ApplicationFiled: July 25, 2013Publication date: January 30, 2014Applicant: GOLD STANDARD SIMULATIONS LTD.Inventor: Asen Asenov
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Publication number: 20140027854Abstract: The structure, and fabrication method thereof, implements a fully depleted silicon-on-insulator (SOI) transistor using a “Channel Last” procedure in which the active channel is a low-temperature epitaxial layer in an etched recess in the SOI silicon film. A highly localized ion implantation is used to set the threshold voltage of the transistor and to improve the short channel behavior of the final device. Based on high-K metal gate technology, this transistor has reduced threshold uncertainty and superior source and drain conductance.Type: ApplicationFiled: July 25, 2013Publication date: January 30, 2014Applicant: Gold Standard Simulations Ltd.Inventor: Asen Asenov
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Publication number: 20140021549Abstract: An exemplary semiconductor memory cell is provided to include: a floating body region configured to be charged to a level indicative of a state of the memory cell; a first region in electrical contact with the floating body region; a second region in electrical contact with the floating body region and spaced apart from the first region; a gate positioned between the first and second regions; a buried layer region in electrical contact with the floating body region, below the first and second regions, spaced apart from the first and second regions; and a substrate region configured to inject charge into the floating body region to maintain the state of the memory cell; wherein an amount of charge injected into the floating body region is a function of a charge stored in the floating body region.Type: ApplicationFiled: September 10, 2013Publication date: January 23, 2014Inventor: Yuniarto Widjaja
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Publication number: 20140021550Abstract: This invention includes a capacitorless one transistor DRAM cell that includes a pair of spaced source/drain regions received within semiconductive material. An electrically floating body region is disposed between the source/drain regions within the semiconductive material. A first gate spaced is apart from and capacitively coupled to the body region between the source/drain regions. A pair of opposing conductively interconnected second gates are spaced from and received laterally outward of the first gate. The second gates are spaced from and capacitively coupled to the body region laterally outward of the first gate and between the pair of source/drain regions. Methods of forming lines of capacitorless one transistor DRAM cells are disclosed.Type: ApplicationFiled: September 20, 2013Publication date: January 23, 2014Applicant: Micron Technology, Inc.Inventor: Fernando Gonzalez
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Publication number: 20140015052Abstract: An integrated circuit includes an UTBOX insulating layer under and plumb with first and second electronic components, and corresponding ground planes and oppositely-doped wells made plumb with them. The wells contact with corresponding ground planes. A pair of oppositely doped bias electrodes, suitable for connecting corresponding bias voltages, contacts respective wells and ground planes. A third electrode contacts the first well. A first trench isolates one bias electrode from the third electrode and extends through the layer and into the first well. A second trench isolates the first bias electrode from one component. This trench has an extent that falls short of reaching an interface between the first ground plane and the first well.Type: ApplicationFiled: July 1, 2013Publication date: January 16, 2014Inventors: Claire Fenouillet-Beranger, Pascal Fonteneau
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Patent number: 8629503Abstract: Embodiments of the invention provide an asymmetrical transistor device comprising a semiconductor substrate, a source region, a drain region and a channel region. The channel region is provided between the source and drain regions, the source, drain and channel regions being provided in the substrate. The device has a layer of a buried insulating medium provided below the source region and not below the drain region thereby forming an asymmetrical structure. The layer of buried insulating medium is provided in abutment with a lower surface of the source region.Type: GrantFiled: February 6, 2012Date of Patent: January 14, 2014Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Chung Foong Tan, Eng Huat Toh, Jae Gon Lee, Sanford Chu
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Publication number: 20140002171Abstract: Embodiments include an apparatus, system, and method related to a body-contacted partially depleted silicon on insulator (PDSOI) transistor that may be used in a switch circuit. In some embodiments, the switch circuit may include a discharge transistor to provide a discharge path for a body of a switch transistor. Other embodiments may be described and claimed.Type: ApplicationFiled: June 27, 2012Publication date: January 2, 2014Applicant: TRIQUINT SEMICONDUCTOR, INC.Inventor: George Nohra
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Patent number: 8598663Abstract: A semiconductor structure which includes a semiconductor on insulator (SOI) substrate. The SOI substrate includes a base semiconductor layer; a buried oxide (BOX) layer in contact with the base semiconductor layer; and an SOI layer in contact with the BOX layer. The semiconductor structure further includes a circuit formed with respect to the SOI layer, the circuit including an N type field effect transistor (NFET) having source and drain extensions in the SOI layer and a gate; and a P type field effect transistor (PFET) having source and drain extensions in the SOI layer and a gate. There may also be a well under each of the NFET and PFET. There is a nonzero electrical bias being applied to the SOI substrate. One of the NFET extensions and PFET extensions may be underlapped with respect to the NFET gate or PFET gate, respectively.Type: GrantFiled: May 16, 2011Date of Patent: December 3, 2013Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Balasubramanian S. Haran, Ali Khakifirooz, Pranita Kulkarni, Ghavam G. Shahidi
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Patent number: 8569834Abstract: A gated microelectronic device is provided that has a source with a source ohmic contact with the source characterized by a source dopant type and concentration. A drain with a drain ohmic contact with the drain characterized by a drain dopant type and concentration. An intermediate channel portion characterized by a channel portion dopant type and concentration. An insulative dielectric is in contact with the channel portion and overlaid in turn by a gate. A gate contact applies a gate voltage bias to control charge carrier accumulation and depletion in the underlying channel portion. This channel portion has a dimension normal to the gate which is fully depleted in the off-state. The dopant type is the same across the source, drain and the channel portion of the device. The device on-state current is determined by the doping and, unlike a MOSFET, is not directly proportional to device capacitance.Type: GrantFiled: April 14, 2008Date of Patent: October 29, 2013Assignee: The Penn State Research FoundationInventors: Stephen J. Fonash, Yinghui Shan, Somasundaram Ashok
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Patent number: 8546907Abstract: An integrated circuit structure includes a semiconductor substrate of a first conductivity type; a depletion region in the semiconductor substrate; and a deep well region substantially enclosed by the depletion region. The deep well region is of a second conductivity type opposite the first conductivity type, and includes a first portion directly over the deep well region and a second portion directly under the deep well region. A transmission line is directly over the depletion region.Type: GrantFiled: February 1, 2010Date of Patent: October 1, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chewn-Pu Jou, Ho-Hsiang Chen
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Publication number: 20130240993Abstract: A semiconductor device and a method of fabricating a semiconductor device. The semiconductor device includes a semiconductor substrate, an insulating layer, a first semiconductor layer, a dielectric layer, a second semiconductor layer, a source and drain junction, a gate, and a spacer. The method includes the steps of forming a semiconductor substrate, forming a shallow trench isolation layer, growing a first epitaxial layer, growing a second epitaxial layer, forming a gate, forming a spacer, performing a reactive ion etching, removing a portion of the first epitaxial layer, filling the void with a dielectric, etching back a portion of the dielectric, growing a silicon layer, implanting a source and drain junction, and forming an extension.Type: ApplicationFiled: May 10, 2013Publication date: September 19, 2013Applicant: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Pranita Kerber, Ghavam G. Shahidi
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Patent number: 8536651Abstract: A multi-gate transistor having a plurality of sidewall contacts and a fabrication method that includes forming a semiconductor fin on a semiconductor substrate and etching a trench within the semiconductor fin, depositing an oxide material within the etched trench, and etching the oxide material to form a dummy oxide layer along exposed walls within the etched trench; and forming a spacer dielectric layer along vertical sidewalls of the dummy oxide layer. The method further includes removing exposed dummy oxide layer in a channel region in the semiconductor fin and beneath the spacer dielectric layer, forming a high-k material liner along sidewalls of the channel region in the semiconductor fin, forming a metal gate stack within the etched trench, and forming a plurality of sidewall contacts within the semiconductor fin along adjacent sidewalls of the dummy oxide layer.Type: GrantFiled: September 5, 2012Date of Patent: September 17, 2013Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Dechao Guo, Shu-Jen Han, Chung-Hsun Lin