With Means (e.g., A Buried Channel Stop Layer) To Prevent Leakage Current Along The Interface Of The Semiconductor Layer And The Insulating Substrate Patents (Class 257/349)
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Patent number: 7064387Abstract: A silicon-on-insulator (SOI) substrate includes a silicon substrate including an active region defined by a field region that surrounds the active region for device isolation. The field region includes a first oxygen-ion-injected isolation region and a second oxygen-ion-injected isolation region. The first oxygen-ion-injected isolation region has a first thickness and is disposed under the active region, a center of the first oxygen-ion-injected isolation region being at a first depth from a top surface of the silicon substrate. The second oxygen-ion-injected isolation region has a second thickness that is greater than the first thickness, the second oxygen-ion-injected isolation region disposed at sides of the active region and formed from a ton surface of the silicon substrate, a center of the second oxygen-ion-injected region disposed at a second depth from the top surface of the silicon substrate.Type: GrantFiled: June 22, 2004Date of Patent: June 20, 2006Assignee: Samsung Electronics Co., Ltd.Inventor: Tae-Ho Jang
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Patent number: 7061049Abstract: A semiconductor device includes a semiconductor layer provided on a semiconductor substrate with an insulating film interposed therebetween. A gate electrode is provided on the semiconductor layer with a gate insulating film interposed therebetween, and a pair of source/drain regions are formed in the semiconductor layer so as to hold a body region under the gate electrode therebetween. A control section supplies voltages to the source/drain regions. The control section supplies the body region in an OFF state and ON state with a first voltage and a second voltage different from the first voltage, respectively. The second voltage is set such that a potential of the body region in the OFF state is substantially the same as a potential of the body region in the ON state.Type: GrantFiled: June 11, 2002Date of Patent: June 13, 2006Assignee: Kabushiki Kaisha ToshibaInventor: Shigeru Kawanaka
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Patent number: 7057234Abstract: According to an aspect of the invention, a device structure is provided where charging and discharging occur in a trapping region formed by a stack of films that is placed on the back of a thin silicon channel. Uncoupling the charging mechanisms that lead to the memory function from the front gate transistor operation allows efficient scaling of the front gate. But significantly more important is a unique character of these devices: these structures can be operated both as a transistor and as a memory. The thin active silicon channel and the thin front oxide provide the capability of scaling the structure to tens of nanometers, and the dual function of the device is obtained by using two voltage ranges that are clearly distinct. At small voltages the structure operates as a normal transistor, and at higher voltages the structure operates as a memory device.Type: GrantFiled: June 16, 2003Date of Patent: June 6, 2006Assignee: Cornell Research Foundation, Inc.Inventor: Sandip Tiwari
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Patent number: 7051454Abstract: A method for etching a metal layer on which an oxide-based ARC layer is coated in a semiconductor device comprises the step of performing a dry cleaning process by using a Cl2/CHF3 based gas, after dry cleaning the ARC layer by using the oxide-based gas. As a result, the etching rates of the center area and the edge area are substantially same.Type: GrantFiled: December 30, 2003Date of Patent: May 30, 2006Assignee: DongbuAnam Semiconductor Inc.Inventor: Sang Hun Oh
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Patent number: 7053451Abstract: In formation of a source/drain region of an NMOS transistor, a gate-directional extension region <41a> of an N+ block region <41> in an N+ block resist film <51> prevents a well region <11> located under the gate-directional extension region <41a> from implantation of an N-type impurity. A high resistance forming region, which is the well region <11> having a possibility for implantation of an N-type impurity on a longitudinal extension of a gate electrode <9>, can be formed as a high resistance forming region <A2> narrower than a conventional high resistance forming region <A1>. Thus, a semiconductor device having a partially isolated body fixed SOI structure capable of reducing body resistance and a method of manufacturing the same are obtained.Type: GrantFiled: November 20, 2001Date of Patent: May 30, 2006Assignee: Renesas Technology Corp.Inventors: Shigenobu Maeda, Toshiaki Iwamatsu, Takashi Ipposhi
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Patent number: 7049662Abstract: There is provided a method for fabricating a FinFET in which a self-limiting reaction is employed to produce a unique and useful structure that may be detectable with simple failure analysis techniques. The structure is an improved vertical fin with a gently sloping base portion that is sufficient to reduce or prevent the formation of an undercut area in the base of the vertical fin. The structure is formed via the self-limiting properties of the reaction so that the products of the reaction form both vertically on a surface of the vertical fin and horizontally on a surface of an insulating layer (e.g., buried oxide). The products preferentially accumulate faster at the base of the vertical fin where the products from both the horizontal and vertical surfaces overlap. This accumulation or build-up results from a volume expansion stemming from the reaction.Type: GrantFiled: November 26, 2003Date of Patent: May 23, 2006Assignee: International Business Machines CorporationInventors: Wesley Natzle, Bruce B. Doris
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Patent number: 7042052Abstract: The invention includes a non-volatile memory cell comprising a field effect transistor construction having a body region within a crystalline material. The body region includes a charge trapping region. The memory cell can be TFT-SOI based, and can be supported by a substrate selected from a diverse assortment of materials. The top portion of the substrate can be a conductive layer separated from the memory device by the SOI-oxide insulator film. The charge trapping region can be, for example, silicon enriched silicon nitride or silicon enriched silicon oxide. The crystalline material can include silicon and germanium. The transistor comprises first and second diffusion regions within the body region, and also comprises a channel region between the first and second diffusion regions. The entirety of the body region within the crystalline material can be within a single crystal of the material.Type: GrantFiled: February 10, 2003Date of Patent: May 9, 2006Assignee: Micron Technology, Inc.Inventor: Arup Bhattacharyya
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Patent number: 7034361Abstract: A semiconductor device includes a fin, a source region formed adjacent the fin and having a height greater than that of the fin, and a drain region formed adjacent the a second side of the fin and having a height greater than that of the fin. A metal gate region is formed at a top surface and at least one side surface of the fin. A width of the source and drain region may be greater than that of the fin. The semiconductor device may exhibit a reduced series resistance and an improved transistor drive current.Type: GrantFiled: September 3, 2003Date of Patent: April 25, 2006Assignee: Advanced Micro Devices, Inc.Inventors: Bin Yu, Shibly S. Ahmed, Haihong Wang
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Patent number: 7030446Abstract: A compact switching device for applications in integrated circuits is disclosed. The switching device comprises a P-type conductive channel and an N-type conductive channel, both formed on a very-thin semiconductor film. A lightly doped portion in each of said conductive channels is controlled by a single gate electrode formed on a dielectric layer above the channel regions. These lightly doped portions are designed to provide an enhanced conductive state by accumulating majority carriers at the surface, and a non-conductive state by fully depleting majority carriers from the entire thin-film thickness from the single gate electrode provided. Both gate electrodes are coupled to a common input, and both drain nodes are coupled to a common output. Design parameters are optimized to provide complementary devices side-by-side on a single geometry of the thin film, merged at the common drain node.Type: GrantFiled: August 6, 2004Date of Patent: April 18, 2006Assignee: Viciciv TechnologyInventor: Raminda Udaya Madurawe
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Field-shielded SOI-MOS structure free from floating body effects, and method of fabrication therefor
Patent number: 7019378Abstract: A silicon-on-insulator structure provides an effective drift field for holes, and simultaneously enhanced recombination centers for holes and electrons. The structure includes a silicon substrate, an oxide insulation layer disposed above the silicon substrate, a silicon body layer disposed above the oxide insulation layer, and a field shield gate disposed above the silicon body layer. The field shield gate includes a conductor portion, and an alumina insulation layer disposed beneath the conductor portion. The oxide insulation layer and the silicon body layer each include at least one channel stop region, and at least one recombination center for the recombination of positive- and negative-charge carriers. The effective drift field and enhanced recombination centers facilitate the rapid recombination of the charge carriers, leading to a very small recombination time constant, which overcomes the floating body effect associated with conventional silicon-on-insulator structures.Type: GrantFiled: June 3, 2004Date of Patent: March 28, 2006Assignee: Micron Technology, Inc.Inventor: Arup Bhattacharyya -
Patent number: 7019379Abstract: A semiconductor device includes a heavily doped layer 25 of p-type formed in the surface of an n-type well 21, an intermediately doped layer 26 of p-type formed to adjoin and surround the heavily p-doped layer 25, and an isolation region 22 formed to surround the heavily p-doped layer 25 and the intermediately p-doped layer 26. The heavily p-doped layer 25 has a higher dopant concentration than the well 21. The intermediately p-doped layer 26 has a higher dopant concentration than the well 21 and a lower dopant concentration than the heavily p-doped layer 25.Type: GrantFiled: November 12, 2003Date of Patent: March 28, 2006Assignee: Matsushita Electric Industrial Co., Ltd.Inventor: Hirotsugu Honda
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Patent number: 7015547Abstract: A double-gated transistor architecture provides a four terminal device for independent gate control, a floating body device, and a dynamic threshold device. The channel may have a U-shaped cross-sectional area to increase the channel length and gate control. First and second insulating spacers are disposed on opposing sides of the top gate such that the first spacer is between the source and the top gate and the second spacer is between the drain and the top gate. The source and drain include extensions that extend proximate to the spacers and couple to the channel. The spacers shield the channel from the field effect of the source and drain and further resist compression of the channel by the source and drain.Type: GrantFiled: July 3, 2003Date of Patent: March 21, 2006Assignee: American Semiconductor, Inc.Inventors: Douglas R. Hackler, Sr., Stephen A. Parke
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Patent number: 7009251Abstract: An SOI FET comprising a silicon substrate having silicon layer on top of a buried oxide layer having doped regions and an undoped region is disclosed. The doped region has a dielectric constant different from the dielectric constant of the doped regions. A body also in the silicon layer separates the source/drains in the silicon layer. The source/drains are aligned over the doped regions and the body is aligned over the undoped region. A gate dielectric is on top of the body and a gate conductor is on top of the gate dielectric.Type: GrantFiled: April 24, 2003Date of Patent: March 7, 2006Assignee: International Business Machines CorporationInventor: Toshiharu Furukawa
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Patent number: 7002213Abstract: A transistor structure fabricated on thin SOI is disclosed. The transistor on thin SOI has gated n+ and p+ junctions, which serve as switches turning on and off GIDL current on the surface of the junction. GIDL current will flow into the floating body and clamp its potential and can thus serve as an output node. The transistor can function as an inverter. The body (either n-well or p-well) is isolated from the n+ or P+ “GIDL switches” by a region of opposite doping type, i.e., p-base and n-base. The basic building blocks of logic circuits, e.g., NAND and NOR gates, are easily implemented with such transistors on thin SOI wafers. These new transistors on thin SOI only need contacts and metal line connections on the VCC and VSS. The connection of fan-outs (between the output and input) can be implemented by capacitor coupling. The transistor structure and operation is useful for high-performance, low-voltage, and low-power VLSI circuits on SOI wafers.Type: GrantFiled: August 15, 2003Date of Patent: February 21, 2006Assignee: Taiwan Semiconductor MFG Corp.Inventor: Min-hwa Chi
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Patent number: 6998682Abstract: A MOSFET device structure formed on a silicon on insulator layer, and a process sequence employed to fabricate said MOSFET device structure, has been developed. The process features insulator filled, shallow trench isolation (STI) regions formed in specific locations of the MOSFET device structure for purposes of reducing the risk of parasitic transistor formation underlying a gate structure junction. After formation of either a “T” shaped, or an “H” shaped gate structure, body contact regions of a first conductivity type are formed adjacent to both an STI region and to a component of the gate structure. Formation of a source/drain region of a second conductivity type located on the opposite side of the same STI region, and the same gate structure component, is next performed. Unwanted parasitic transistor formation, which can occur underlying the gate structure via the body contact region and the source/drain region, is prevented by the presence of the separating STI region.Type: GrantFiled: May 12, 2005Date of Patent: February 14, 2006Assignee: Chartered Semiconductor Manufacturing Ltd.Inventors: Yeen Tat Chan, Kheng Chok Tee, Yiang Aun Nga, Zhao Lun, Wang Ling Goh, Diing Shenp Ang
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Patent number: 6995430Abstract: The benefits of strained semiconductors are combined with silicon-on-insulator approaches to substrate and device fabrication.Type: GrantFiled: June 6, 2003Date of Patent: February 7, 2006Assignee: AmberWave Systems CorporationInventors: Thomas A. Langdo, Matthew T. Currie, Richard Hammond, Anthony J. Lochtefeld, Eugene A. Fitzgerald
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Patent number: 6992358Abstract: Disclosed is a semiconductor device comprising an underlying insulating film having a depression, a semiconductor structure which includes a first semiconductor portion having a portion formed on the underlying insulating film and a first overlap portion which overlaps the depression, a second semiconductor portion having a portion formed on the underlying insulating film and a second overlap portion which overlaps the depression, and a third semiconductor portion disposed between the first and second semiconductor portions and having a portion disposed above the depression, wherein overlap width of the first overlap portion and overlap width of the second overlap portion are equal to each other, a gate electrode including a first electrode portion covering upper and side surfaces of the third semiconductor portion and a second electrode portion formed in the depression, and a gate insulating film interposed between the semiconductor structure and the gate electrode.Type: GrantFiled: June 24, 2004Date of Patent: January 31, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Katsuhiko Hieda, Kazuya Matsuzawa, Daisuke Hagishima
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Patent number: 6992355Abstract: The invention encompasses a method of forming a semiconductor-on-insulator construction. A substrate is provided. The substrate includes a semiconductor-containing layer over an insulative mass. The insulative mass comprises silicon dioxide. A band of material is formed within the insulative mass. The material comprises one or more of nitrogen argon, fluorine, bromine, chlorine, iodine and germanium.Type: GrantFiled: September 2, 2003Date of Patent: January 31, 2006Assignee: Micron Technology, Inc.Inventor: Chandra Mouli
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Patent number: 6984847Abstract: An organic electroluminescent device includes first and second substrates facing and spaced apart from each other; a gate line on an inner surface of the first substrate; a semiconductor layer over the gate line, the semiconductor layer overlying a surface of the first substrate; a data line crossing the gate line; a data ohmic contact layer under the data line, the data ohmic contact layer having the same shape as the data line; a power line parallel to, or substantially parallel to, and spaced apart from the data line, the power line including the same material as the gate line; a switching thin film transistor connected to the gate line and the data line, the switching thin film transistor using the semiconductor layer as a switching active layer; a driving thin film transistor connected to the switching thin film transistor and the power line, the driving thin film transistor using the semiconductor layer as a driving active layer; a connection pattern connected to the driving thin film transistor, the coType: GrantFiled: December 22, 2003Date of Patent: January 10, 2006Assignee: LG.Philips LCD Co., Ltd.Inventors: Jae-Yong Park, Kwang-Jo Hwang
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Patent number: 6979866Abstract: In the SOI region of a semiconductor substrate, a BOX layer is formed underneath with backgate electrodes to control the threshold voltages of MOS transistors formed in the SOI region.Type: GrantFiled: September 3, 2003Date of Patent: December 27, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Atsushi Azuma, Yusuke Kohyama, Kaori Umezawa
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Patent number: 6977413Abstract: The bar-type field effect transistor consists of a substrate, a bar placed above a substrate and a gate and spacer placed above part of the bar.Type: GrantFiled: March 8, 2001Date of Patent: December 20, 2005Assignee: Infineon Technologies AGInventors: Franz Hofmann, Wolfgang Rosner, Richard Johannes Luyken
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Patent number: 6969871Abstract: In a film semiconductor device according to the present invention, a continuous oscillating light beam from a solid laser or the like is modulated on time axis and spatially, thereby realizing crystal growth that is nearly optimum for a crystal structure and growth speed of crystals in a Si thin film. Crystal grains with a large diameter, flatness with no projections at their grain boundaries, and controlled surface orientations are thereby formed. By forming channels with these crystal grains, high mobility semiconductor devices and an image display device using these semiconductor devices are realized.Type: GrantFiled: May 16, 2003Date of Patent: November 29, 2005Assignee: Hitachi, Ltd.Inventors: Shinya Yamaguchi, Mutsuko Hatano, Mitsuharu Tai, Sedng-Kee Park, Takeo Shiba
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Patent number: 6965147Abstract: A semiconductor device includes a substrate, a semiconductor layer of a first conductivity type having a single-crystal structure, and a plurality of transistors each including a first gate electrode provided above the semiconductor layer with a first gate insulation film laid therebetween, a pair of impurity regions of a second conductivity type being provided in the semiconductor layer and each becoming a source or drain region, and a channel body of the first conductivity type provided in the semiconductor layer at a portion between these impurity regions.Type: GrantFiled: January 30, 2004Date of Patent: November 15, 2005Assignee: Kabushiki Kaisha ToshibaInventor: Tomoaki Shino
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Patent number: 6965149Abstract: An epitaxial semiconductor wafer having a wafer substrate made of semiconductor single crystal, an epitaxial layer deposited on a top surface of said wafer substrate and a polysilicon layer deposited on a back surface of said wafer substrate. The semiconductor single crystal is exposed in a region defined within a distance of at least 50 ?m from a ridge line as a center, which is defined as an intersection line between said back surface and a bevel face interconnecting said top surface and said back surface of said wafer substrate. The polysilicon layer is 1.0 to 2.0 ?m thick. The epitaxial layer is 1.0 to 20 ?m thick. The wafer substrate is a silicon single crystal.Type: GrantFiled: July 8, 2002Date of Patent: November 15, 2005Assignee: Sumitomo Mitsubishi Silicon CorporationInventors: Shigenori Sugihara, Shigeru Nagafuchi
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Patent number: 6965148Abstract: In this semiconductor memory device, a potential clamping region having no insulation layer formed therein is provided in an insulation layer. More specifically, the potential clamping region is formed under a body portion at a position near a first impurity region, and extends to a first semiconductor layer. A body fixing portion is formed in a boundary region between the body portion and the potential clamping region. This structure enables improvement in operation performance without increasing the layout area in the case where a DRAM cell is formed in a SOI (Silicon On Insulator) structure.Type: GrantFiled: August 21, 2002Date of Patent: November 15, 2005Assignee: Renesas Technology Corp.Inventors: Masakazu Hirose, Fukashi Morishita
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Patent number: 6960810Abstract: A silicon-on-insulator (SOI) device structure 100 formed using a self-aligned body tie (SABT) process. The SABT process connects the silicon body of a partially depleted (PD) structure to a bias terminal. In addition, the SABT process creates a self-aligned area of silicon around the edge of the active areas, as defined by the standard transistor active area mask, providing an area efficient device layout. By reducing the overall gate area, the speed and yield of the device may be increased. In addition, the process flow minimizes the sensitivity of critical device parameters due to misalignment and critical dimension control. The SABT process also suppresses the parasitic gate capacitance created with standard body tie techniques.Type: GrantFiled: May 30, 2002Date of Patent: November 1, 2005Assignee: Honeywell International Inc.Inventor: Paul Fechner
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Patent number: 6960807Abstract: A drain-extended metal-oxide-semiconductor transistor (40) with improved robustness in breakdown characteristics is disclosed. Field oxide isolation structures (29c) are disposed between the source region (30) and drain contact regions (32a, 32b, 32c) to break the channel region of the transistor into parallel sections. The gate electrode (35) extends over the multiple channel regions, and the underlying well (26) and thus the drift region (DFT) of the transistor extends along the full channel width. Channel stop doped regions (33) underlie the field oxide isolation structures (29c), and provide conductive paths for carriers during breakdown. Parasitic bipolar conduction, and damage due to that conduction, is therefore avoided.Type: GrantFiled: November 25, 2003Date of Patent: November 1, 2005Assignee: Texas Instruments IncorporatedInventor: Sameer P. Pendharkar
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Patent number: 6958516Abstract: A selective SOI structure having body contacts for all the devices while excluding the buried oxide that is directly underneath diffusions of DC nodes such as applied voltage Vdd, ground GND, reference voltage Vref, and other like DC nodes is provided. The selective SOI structure of the present invention can be used in ICs to enhance the performance of the circuit. The selective SOI structure of the present invention includes a silicon-on-insulator (SOI) substrate material comprising a top Si-containing layer having a plurality of SOI devices located thereon. The SOI devices are in contact with an underlying Si-containing substrate via a body contact region. A DC node diffusion region not containing an underlying buried oxide region is adjacent to one of the SOI devices.Type: GrantFiled: January 8, 2004Date of Patent: October 25, 2005Assignee: International Business Machines CorporationInventor: Robert C. Wong
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Patent number: 6952039Abstract: In a self protection I/O, a multiple gate NMOS structure is designed to shift the avalanche multiplication region away from the edge of the gate nearest the drain. This is achieved by providing a lightly doped region between the edge of the gate and the ballast region of the drain.Type: GrantFiled: September 4, 2003Date of Patent: October 4, 2005Assignee: National Semiconductor CorporationInventors: Vladislav Vashchenko, Ann Concannon, Peter J. Hopper, Marcel ter Beek
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Patent number: 6943411Abstract: A semiconductor device can include a low resistance wiring layer (13) formed in, and extending along a base material. A number of element regions (14) are formed separate from one another, each in contact with wiring layer (13). A circuit element can be formed in each element region (14). A metal is preferably used for wiring layer (13). In the above arrangement, metal-oxide-semiconductor (MOS) type transistors can be provided in a silicon-on-insulator (SOI) substrate that can have different potentials applied to a source/drain region with respect to a channel region.Type: GrantFiled: September 9, 2003Date of Patent: September 13, 2005Assignee: NEC Electronics CorporationInventor: Toshikazu Kato
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Patent number: 6940138Abstract: A structure is provided which suppresses a parasitic bipolar effect without decreasing the breakdown voltage at the junctions between the excessive carrier extracting region and source/drain regions of a MOS transistor for a voltage of approximately 15 volts in a semiconductor device formed on a semiconductor layer on an insulating layer. In the MOS transistor having a source tied body structure, a semiconductor regions having a low impurity concentration is formed between a regions for extracting excessive carriers and source/drain regions. Thus, the breakdown voltage at the junctions between the extracting regions and the source/drain regions is increased and a parasitic bipolar effect is suppressed without breakdown between the extracting regions and the source/drain regions.Type: GrantFiled: December 4, 2002Date of Patent: September 6, 2005Assignee: Seiko Epson CorporationInventor: Yasushi Yamazaki
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Patent number: 6936898Abstract: Diagonal deep well region for routing the body-bias voltage for MOSFETS in surface well regions is provided and described.Type: GrantFiled: December 31, 2002Date of Patent: August 30, 2005Assignee: Transmeta CorporationInventors: Mike Pelham, James B. Burr
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Patent number: 6936894Abstract: A wafer bonding method of forming silicon-on-insulator comprising integrated circuitry includes nitridizing at least a portion of an outer surface of silicon of a device wafer. After the nitridizing, the device wafer is joined with a handle wafer. A method of forming silicon-on-insulator comprising integrated circuitry includes nitridizing an interface of the silicon comprising layer of silicon-on-insulator circuitry with the insulator layer of the silicon-on-insulator circuitry. After the nitridizing, a field effect transistor gate is formed operably proximate the silicon comprising layer. Other methods are disclosed. Integrated circuitry is contemplated regardless of the method of fabrication.Type: GrantFiled: December 17, 2004Date of Patent: August 30, 2005Assignee: Micron Technology, Inc.Inventor: Zhongze Wang
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Patent number: 6933569Abstract: A semiconductor device includes a semiconductor layer formed on an insulator, a gate insulating film formed on the semiconductor layer, a gate electrode formed on the gate insulating film and extending in a first direction, source/drain regions formed in the semiconductor layer on both sides of the gate electrode, a body contact region in the semiconductor layer, a partial isolating region in which a field insulating film thicker than the gate insulating film intervenes between the semiconductor layer and an extending portion of the gate electrode, and a full isolating region in which the semiconductor layer on the insulator is removed. The full isolating region is formed to be in contact with at least a part of a side parallel to the first direction of the source/drain regions.Type: GrantFiled: September 24, 2003Date of Patent: August 23, 2005Assignee: NEC CorporationInventors: Risho Koh, Shigeharu Yamagami, Jong-wook Lee, Hitoshi Wakabayashi, Yukishige Saito, Atsushi Ogura, Mitsuru Narihiro, Kohichi Arai, Hisashi Takemura, Tohru Mogami, Toyoji Yamamoto, Yukinori Ochiai
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Patent number: 6933572Abstract: A silicon-on-insulator structure provides an effective drift field for holes, and simultaneously enhanced recombination centers for holes and electrons. The structure includes a silicon substrate, an oxide insulation layer disposed above the silicon substrate, a silicon body layer disposed above the oxide insulation layer, and a field shield gate disposed above the silicon body layer. The field shield gate includes a conductor portion, and an alumina insulation layer disposed beneath the conductor portion. The oxide insulation layer and the silicon body layer each include at least one channel stop region, and at least one recombination center for the recombination of positive- and negative-charge carriers. The effective drift field and enhanced recombination centers facilitate the rapid recombination of the charge carriers, leading to a very small recombination time constant, which overcomes the floating body effect associated with conventional silicon-on-insulator structures.Type: GrantFiled: October 31, 2001Date of Patent: August 23, 2005Assignee: Micron Technology, Inc.Inventor: Arup Bhattacharyya
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Patent number: 6930357Abstract: A silicon on insulator shaped structure formed to reduce floating body effect comprises a T-shaped active structure and a body contact for back bias. Etching a T-shape through two layers of oxide will form the T-shaped active areas. A back bias is formed when a metal line is dropped through the SOI structure and reaches a contact plug. This contact plug is doped with N+ or P+ dopant and is embedded in a Si substrate. The T-active shaped structure is used to reduce the short channel effects and junction capacitance that normally hinder the effectiveness of bulk transistors. The back bias is used as a conduit for generated holes to leave the SOI transistor area thus greatly reducing the floating effects generally associated with SOI structures.Type: GrantFiled: June 16, 2003Date of Patent: August 16, 2005Assignee: Infineon Technologies AGInventor: Woo-Tag Kang
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Patent number: 6930328Abstract: To obtain a semiconductor device and a method of manufacturing the same which can reduce influence of fluctuation in characteristic among transistors due to fluctuation in laser light irradiation number and laser light intensity on a semiconductor. There is provided a semiconductor device with plural pixels having transistors forming a matrix pattern, in which: the transistors have semiconductors crystallized by laser light irradiation; the semiconductors stretch over at least two pixels; the length of each of the semiconductors is longer than the pixel pitch of the pixels; and when the scan pitch of the laser light is given as M and the pixel pitch of the pixels is given as N, the semiconductors are irradiated with the laser light N/M times or more.Type: GrantFiled: April 10, 2003Date of Patent: August 16, 2005Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hajime Kimura, Aya Anzai, Shunpei Yamazaki
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Patent number: 6930359Abstract: In a semiconductor device having a semiconductor element having a plurality of SOI-Si layers, the height of element isolation regions from the surface of the semiconductor substrate are substantially equal to each other. Alternatively, the element isolation regions are formed at the equal height on the semiconductor substrate and then a plurality of SOI-Si layers appropriately different in thickness are formed. In this manner, it is possible to obtain element isolation regions having substantially the same height from the semiconductor substrate and desired element regions having SOI-Si layers different in height. The thickness of a single crystalline silicon film (SOI-Si layer) may be appropriately changed by another method which includes depositing an amorphous silicon film and applying a heat processing to form an epi layer, and removing an unnecessary portion.Type: GrantFiled: March 24, 2004Date of Patent: August 16, 2005Assignee: Kabushiki Kaisha ToshibaInventor: Yukihiro Ushiku
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Patent number: 6921982Abstract: A channel 16 of a FinFET 10 has a channel core 24 and a channel envelope 32, each made from a semiconductor material defining a different lattice structure to exploit strained silicon properties. A gate is coupled to the channel envelope through a gate dielectric. Exemplary materials are Si and SixGe1-x, wherein 78<x<92. The channel core 24 has a top surface 26 of width wc and an upstanding surface 28, 30 of height hc, preferably oriented 90° to one another. The channel envelope 32 is in contact with the top 26 and upstanding surfaces 28, 30 so that the area of interface is increased as compared to contact only along the top surface 26, improving electrical conductivity and gate 18 control over the channel 16. The height hc can be tailored to enable a smaller scale FET 10 within a stabilized SRAM. Various methods of making the channel 16 are disclosed, including a mask and etch method, a handle wafer/carrier wafer method, and a shallow trench method.Type: GrantFiled: July 21, 2003Date of Patent: July 26, 2005Assignee: International Business Machines CorporationInventors: Rajiv V Joshi, Richard Q Williams
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Patent number: 6917077Abstract: A semiconductor arrangement including: a substrate having a substrate layer (13) with an upper and lower surface, the substrate layer (13) being of a first conductivity type; a first buried layer (12) in the substrate, extending along said lower surface below a first portion of said upper surface of said substrate layer (13), and a second buried layer (12) in the substrate, extending along said lower surface below a second portion of said upper surface of said substrate layer (13); a first diffusion (26) in said first portion of said substrate layer (13), being of a second conductivity type opposite to said first conductivity type and having a first distance to said first buried layer (12) for defining a first breakdown voltage between said first diffusion (26) and said first buried layer (12); a second diffusion (45) in said second portion of said substrate layer (13), being of said second conductivity type and having a second distance to said second buried layer (12) for defining a second breakdown voltaType: GrantFiled: October 5, 2001Date of Patent: July 12, 2005Assignee: Koninklijke Philips Electronics N.V.Inventors: Petrus Hubertus Cornelis Magnee, Freerk Van Rijs, Hendrik Gezienus Albert Huizing
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Patent number: 6914300Abstract: In a potential interconnection layer, when viewed from a plane, a plurality of power supply potential regions and ground potential regions are alternately provided, with an interlayer insulation layer lying therebetween. A contact plug penetrating a second insulation layer is provided to electrically connect a source/drain (S/D) region on one side of a selected field effect transistor with a selected power supply potential region. Similarly, a contact plug penetrating the second insulation layer is provided to electrically connect a source/drain (S/D) region on the other side of another selected field effect transistor with a selected ground potential region. By employing this structure, a semiconductor device having a plurality of semiconductor circuits in which a power supply potential and a ground potential can be stabilized regardless of the cross-sectional structure of the semiconductor device is provided.Type: GrantFiled: September 3, 2003Date of Patent: July 5, 2005Assignee: Renesas Technology Corp.Inventors: Masakazu Hirose, Fukashi Morishita
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Patent number: 6903420Abstract: A wafer bonding method of forming silicon-on-insulator comprising integrated circuitry includes nitridizing at least a portion of an outer surface of silicon of a device wafer. After the nitridizing, the device wafer is joined with a handle wafer. A method of forming silicon-on-insulator comprising integrated circuitry includes nitridizing an interface of the silicon comprising layer of silicon-on-insulator circuitry with the insulator layer of the silicon-on-insulator circuitry. After the nitridizing, a field effect transistor gate is formed operably proximate the silicon comprising layer. Other methods are disclosed. Integrated circuitry is contemplated regardless of the method of fabrication.Type: GrantFiled: December 30, 2003Date of Patent: June 7, 2005Assignee: Micron Technology, Inc.Inventor: Zhongze Wang
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Patent number: 6903419Abstract: A semiconductor integrated circuit according to the present invention, comprising: a buried insulation film formed in a substrate; a first metal layer formed on a top face of the buried insulation film; a vertical transistor having a channel body formed above the first metal layer and in a vertical direction of the substrate; and a gate formed by sandwiching the channel body from both sides in a horizontal direction of the substrate, or surrounding periphery of the channel body.Type: GrantFiled: October 14, 2003Date of Patent: June 7, 2005Assignee: Kabushiki Kaisha ToshibaInventor: Takashi Ohsawa
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Patent number: 6900143Abstract: The thermal conductivity of strained silicon MOSFETs and strained silicon SOI MOSFETs is improved by providing a silicon germanium carbide thermal dissipation layer beneath a silicon germanium layer on which strained silicon is grown. The silicon germanium carbide thermal dissipation layer has a higher thermal conductivity than silicon germanium, thus providing more efficient removal of thermal energy generated in active regions.Type: GrantFiled: September 9, 2003Date of Patent: May 31, 2005Assignee: Advanced Micro Devices, Inc.Inventors: James N. Pan, Jung-Suk Goo, Qi Xiang
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Patent number: 6897527Abstract: A semiconductor device includes a fin and a layer formed on at least a portion of the fin. The fin includes a first crystalline material. The layer includes a second crystalline material, where the first crystalline material has a larger lattice constant than the second crystalline material to induce tensile strain within the layer.Type: GrantFiled: April 28, 2004Date of Patent: May 24, 2005Assignee: Advanced Micro Devices, Inc.Inventors: Srikanteswara Dakshina-Murthy, Judy Xilin An, Zoran Krivokapic, Haihong Wang, Bin Yu
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Patent number: 6897111Abstract: A method for manufacturing an integrated circuit structure includes providing a semiconductor substrate and forming a horizontal semiconductor fin on top of the semiconductor substrate. An access transistor gate and a thyristor gate are then formed on top of the semiconductor substrate and in contact with the horizontal semiconductor fin. An access transistor is formed from at least a portion of the horizontal semiconductor fin and the access transistor gate. A thyristor is formed from at least a portion of the horizontal semiconductor fin and the thyristor gate, the access transistor being in contact with the thyristor.Type: GrantFiled: July 28, 2003Date of Patent: May 24, 2005Assignee: Chartered Semiconductor Manufacturing Ltd.Inventors: Elgin Quek, Jia Zhen Zheng, Pradeep R. Yelehanka, Weining Li
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Patent number: 6894324Abstract: A silicon-on-insulator (SOI) gated diode and non-gated junction diode are provided. The SOI gated diode has a PN junction at the middle region under the gate, and which has more junction area than a normal diode. The SOI non-gated junction diode has a PN junction at the middle region thereof, and then also has more junction area than a normal diode. The SOI diodes of the present invention improve the protection level offered for electrical overstress (EOS)/electrostatic discharge (ESD) due to the low power density and heating for providing more junction area than normal ones. The I/O ESD protection circuits, which comprise primary diodes, a first plurality of diodes, and a second plurality of diodes, all of which are formed of the present SOI diodes, could effectively discharge the current when there is an ESD event. And, the ESD protection circuits, which comprise more primary diodes, could effectively reduce the parasitic input capacitance, so that they can be used in the RF circuits or HF circuits.Type: GrantFiled: February 15, 2001Date of Patent: May 17, 2005Assignee: United Microelectronics Corp.Inventors: Ming-Dou Ker, Kei-Kang Hung, Tien-Hao Tang
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Patent number: 6888200Abstract: One aspect of the present subject matter relates to a memory cell, or more specifically, to a one-transistor SOI non-volatile memory cell. In various embodiments, the memory cell includes a substrate, a buried insulator layer formed on the substrate, and a transistor formed on the buried insulator layer. The transistor includes a floating body region that includes a charge trapping material. A memory state of the memory cell is determined by trapped charges or neutralized charges in the charge trapping material. The transistor further includes a first diffusion region and a second diffusion region to provide a channel region in the body region between the first diffusion region and the second diffusion region. The transistor further includes a gate insulator layer formed over the channel region, and a gate formed over the gate insulator layer. Other aspects are provided herein.Type: GrantFiled: April 29, 2003Date of Patent: May 3, 2005Assignee: Micron Technology Inc.Inventor: Arup Bhattacharyya
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Patent number: 6888198Abstract: A straddled gate device, and a method of producing such device, formed on a semiconductor-on-insulator (SOI) substrate having active regions defined by isolation regions and an insulator layer. The device includes a first gate defining a first channel region interposed between a source and a drain formed within the active region of the SOI substrate. Additionally, the device includes a second gate straddling the first gate defining second channel regions interposed between the first channel region and the source and the drain. Further still, the device includes a contact connecting the first gate with the second gate wherein when the device is in the off state (Ioff) the first channel region and second channel regions define a long channel and when the device is in the on state (Ion) the first channel region defines a short channel.Type: GrantFiled: June 4, 2001Date of Patent: May 3, 2005Assignee: Advanced Micro Devices, Inc.Inventor: Zoran Krivokapic
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Patent number: 6885066Abstract: A buried insulating film is formed in an LDD region between a source region and a drain region, and a non-doped silicon film is formed in the SOI layer above the buried insulating film. The SOI layer lying under the buried insulating film has a body concentration of 1018 cm?3.Type: GrantFiled: December 9, 2003Date of Patent: April 26, 2005Assignee: Oki Electric Industry Co., Ltd.Inventor: Noriyuki Miura