Three Or More Electrode Device Patents (Class 257/39)
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Patent number: 11934916Abstract: An electronic device includes a pair of depletion gates, an accumulation gate, and a conductive resonator. The depletion gates are spaced apart from each other. The accumulation gate is over the depletion gates. The conductive resonator is over the depletion gates and the accumulation gate. The conductive resonator includes a first portion, a second portion, and a third portion. The first portion and the second portion are on opposite sides of the accumulation gate. The third portion interconnects the first and second portions of the conductive resonator and across the depletion gates. A bottom surface of the first portion of the conductive resonator is lower than a bottom surface of the accumulation gate.Type: GrantFiled: July 8, 2021Date of Patent: March 19, 2024Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Jiun-Yun Li, Shih-Yuan Chen, Yao-Chun Chang, Ian Huang, Chiung-Yu Chen
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Patent number: 11171224Abstract: A method for manufacturing a semiconductor device and a semiconductor device, the method including forming an active pattern on a substrate such that the active pattern includes sacrificial patterns and semiconductor patterns alternately and repeatedly stacked on the substrate; and forming first spacer patterns at both sides of each of the sacrificial patterns by performing an oxidation process, wherein the first spacer patterns correspond to oxidized portions of each of the sacrificial patterns, wherein the sacrificial patterns include a first semiconductor material containing impurities, wherein the semiconductor patterns include a second semiconductor material different from the first semiconductor material, and wherein the impurities include an element different from semiconductor elements of the first semiconductor material and the second semiconductor material.Type: GrantFiled: June 2, 2020Date of Patent: November 9, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Dong Chan Suh, Sangmoon Lee, Yihwan Kim, Woo Bin Song, Dongsuk Shin, Seung Ryul Lee
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Patent number: 11164960Abstract: Embodiments of the invention are directed to a method of performing fabrication operations to form a transistor. The fabrication operations include forming a nanosheet having a first nanosheet sidewall and a second nanosheet sidewall. The nanosheet is communicatively coupled to a source region at the first nanosheet sidewall. The nanosheet is communicatively coupled to a drain region at the second nanosheet sidewall. The nanosheet further includes a source-side nanosheet region that includes the first nanosheet sidewall. The nanosheet further includes a drain-side nanosheet region that includes the second nanosheet sidewall. Dopants are provided in the source-side nanosheet region using an in-situ doping process, wherein a doping concentration in the source-side nanosheet region is greater than a doping concentration of the drain-side nanosheet region.Type: GrantFiled: April 28, 2020Date of Patent: November 2, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Jingyun Zhang, Ruilong Xie, Alexander Reznicek
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Patent number: 11139372Abstract: Semiconductor devices and methods of forming the same include recessing sacrificial layers in a stack of alternating sacrificial layers and channel layers using a first etch to form curved recesses at sidewalls of each sacrificial layer in the stack, with tails of sacrificial material being present at a top and bottom of each curved recess. Dielectric plugs are formed that each partially fill a respective curved recess, leaving exposed at least a portion of each tail of sacrificial material. The tails of sacrificial material are etched back using a second etch to expand the recesses. Inner spacers are formed in the expanded recesses.Type: GrantFiled: August 7, 2019Date of Patent: October 5, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Andrew M. Greene, Yao Yao, Ruilong Xie, Veeraraghavan S. Basker
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Patent number: 11107891Abstract: Quantum dot devices, and related systems and methods, are disclosed herein. In some embodiments, a quantum dot device may include a quantum well stack; a plurality of first gates above the quantum well stack; and a plurality of second gates above the quantum well stack; wherein the plurality of first gates are arranged in electrically continuous first rows and the plurality of second gates are arranged in electrically continuous second rows parallel to the first rows. Quantum dot devices according to various embodiments of the present disclosure are based on arranging first and second gates in hexagonal/honeycomb arrays.Type: GrantFiled: December 23, 2017Date of Patent: August 31, 2021Assignee: Intel CorporationInventors: Ravi Pillarisetty, Hubert C. George, Nicole K. Thomas, Jeanette M. Roberts, Roman Caudillo, Zachary R. Yoscovits, Kanwaljit Singh, Roza Kotlyar, Patrick H. Keys, James S. Clarke
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Patent number: 11004678Abstract: A semiconductor device including a gate structure present on at least two suspended channel structures, and a composite spacer present on sidewalls of the gate structure. The composite spacer may include a cladding spacer present along a cap portion of the gate structure, and an inner spacer along the channel portion of the gate structure between adjacent channel semiconductor layers of the suspended channel structures. The inner spacer may include a crescent shape with a substantially central seam.Type: GrantFiled: October 30, 2019Date of Patent: May 11, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Bruce B. Doris, Michael A. Guillorn, Isaac Lauer, Xin Miao
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Patent number: 10903369Abstract: Embodiments of the present invention are directed to techniques for providing an novel field effect transistor (FET) architecture that includes a center fin region and one or more vertically stacked nanosheets. In a non-limiting embodiment of the invention, a non-planar channel region is formed having a first semiconductor layer, a second semiconductor layer, and a fin-shaped bridge layer between the first semiconductor layer and the second semiconductor layer. Forming the non-planar channel region can include forming a nanosheet stack over a substrate, forming a trench by removing a portion of the nanosheet stack, and forming a third semiconductor layer in the trench. Outer surfaces of the first semiconductor layer, the second semiconductor layer, and the fin-shaped bridge region define an effective channel width of the non-planar channel region.Type: GrantFiled: February 27, 2019Date of Patent: January 26, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Ruilong Xie, Julien Frougier, Chanro Park, Edward Nowak, Yi Qi, Kangguo Cheng, Nicolas Loubet
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Patent number: 10833168Abstract: A method of forming complementary metal-oxide-semiconductor (CMOS) nanosheet devices is provided. The method includes forming at least two adjacent trimmed stacks of sacrificial sheet segments and semiconductor nanosheet segments on a substrate, with a dummy gate structure and sidewall spacers on each of the at least two adjacent trimmed stacks. The method further includes forming a protective cap layer over the trimmed stacks, and forming a sacrificial fill layer on the protective cap layer. The method further includes forming a recess through the sacrificial fill layer and protective cap layer between the stacks, depositing a recess liner in the recess, and forming a dielectric fill layer in the recess on the recess liner. The method further includes forming a capping layer on one of the trimmed stacks, removing the sacrificial fill layer from another one of the trimmed stacks, and forming a source/drain on the semiconductor nanosheet segments.Type: GrantFiled: March 8, 2019Date of Patent: November 10, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Soon-Cheon Seo, Injo Ok, Choonghyun Lee
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Patent number: 10770461Abstract: A semiconductor structure containing a resistive random access memory device integrated with a gate-all-around nanosheet CMOS device is provided. In one embodiment, the semiconductor structure includes a gate-all-around nanosheet CMOS device includes a functional gate structure present on, and between, each semiconductor channel material nanosheet of a nanosheet stack of suspended semiconductor channel material nanosheets. The structure of the present application further includes a resistive memory device located laterally adjacent to the gate-all-around nanosheet CMOS device that includes a second functional gate structure present on, and between, each recessed semiconductor channel material layer portion of a material stack, wherein a recessed sacrificial semiconductor material layer portion is located above and below each recessed semiconductor channel material layer portion. A shared source/drain region is located between the gate-all-around nanosheet CMOS device and the resistive memory device.Type: GrantFiled: November 6, 2019Date of Patent: September 8, 2020Assignee: International Business Machines CorporationInventors: Pouya Hashemi, Takashi Ando, Alexander Reznicek
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Patent number: 10707401Abstract: A technique relates to forming a sidewall tunnel junction. A first conducting layer is formed using a first shadow mask evaporation. A second conducting layer is formed on a portion of the first conducting layer, where the second conducting layer is formed using a second shadow mask evaporation. An oxide layer is formed on the first conducting layer and the second conducting layer. A third conducting layer is formed on part of the oxide layer, such that the sidewall tunnel junction is positioned between the first conducting layer and the third conducting layer.Type: GrantFiled: April 17, 2019Date of Patent: July 7, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Markus Brink, Sami Rosenblatt
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Patent number: 10680061Abstract: Field effect transistors include a stack of nanosheets of vertically arranged channel layers. A gate stack is formed over, around, and between the vertically arranged channel layers. Spacers are formed, with at least one top pair of spacers being positioned above an uppermost channel layer. The top pair of spacers each has a curved lower portion with a curved surface in contact with the gate stack and a straight upper portion that extends vertically from the curved portion along a straight sidewall of the gate stack.Type: GrantFiled: April 4, 2019Date of Patent: June 9, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Josephine B. Chang, Michael A. Guillorn, Isaac Lauer, Xin Miao
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Patent number: 10644032Abstract: The present invention discloses a flexible display substrate including a first flexible substrate and a plurality of display elements disposed on a first side of the first flexible substrate, each of the display elements including a thin film transistor. The flexible display substrate further includes a plurality of protrusions each provided on a second side of the first flexible substrate opposite to the first side and corresponding to a respective thin film transistor in a thickness direction of the first flexible substrate. A projection area of each protrusion, in the thickness direction of the first flexible substrate, on the second side of the first flexible substrate at least partially overlaps with a projection area of the thin film transistor corresponding to the protrusion, in the thickness direction of the first flexible substrate, on the second side of the first flexible substrate.Type: GrantFiled: May 29, 2014Date of Patent: May 5, 2020Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Hongfei Cheng, Yuxin Zhang
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Patent number: 10600957Abstract: Described is a method comprising: forming a magnet on a substrate or a template, the magnet having an interface; and forming a first layer of non-magnet conductive material on the interface of the magnet such that the magnet and the layer of non-magnet conductive material are formed in-situ. Described is an apparatus comprising: a magnet formed on a substrate or a template, the magnet being formed under crystallographic, electromagnetic, or thermodynamic conditions, the magnet having an interface; and a first layer of non-magnet conductive material formed on the interface of the magnet such that the magnet and the layer of non-magnet conductive material are formed in-situ.Type: GrantFiled: December 18, 2014Date of Patent: March 24, 2020Assignee: Intel CorporationInventors: David Michalak, Sasikanth Manipatruni, James Clarke, Dmitri Nikonov, Ian Young
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Patent number: 10591620Abstract: A system for measuring a particle beam includes a central and peripheral part and a front and back panel. The central part includes a system for producing a space charge zone to be passed through by a beam to be measured, charge carriers of a first and second type being generated by the beam when the latter passes through the space charge zone. The peripheral part includes a system for collecting at least one type of charge carrier from among the first or second type. The peripheral part surrounds the central part such that a particle beam can pass through the central part without passing through the peripheral part, an orifice being provided in back panel, in a region of the central part such that the thickness of the region, along a normal axis to the front panel is less than that of the peripheral part along the normal axis.Type: GrantFiled: May 15, 2017Date of Patent: March 17, 2020Assignees: UNIVERSITÉ D'AIX MARSEILLE, CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)Inventors: Wilfried Vivian Roland Vervisch, Laurent Ottaviani, Stéphane Biondo, Vanessa Laurence Jill Hurtado Ep Vervisch
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Patent number: 10573800Abstract: The various embodiments described herein include methods, devices, and systems for fabricating and operating superconducting switch devices. In one aspect, an electrical circuit includes: (1) a switch device configured to switch between an on state and an off state in response to a first voltage, the switch device comprising: (a) a superconductor layer adapted to transition from a superconducting state to an insulating state in response to a first strain; and (b) a piezoelectric layer positioned adjacent to the superconductor layer, the piezoelectric layer configured to apply the first strain to the superconductor layer in response to the first voltage; (2) a voltage source electrically coupled to the piezoelectric layer of the switch device and configured to supply the first voltage; and (3) an output component coupled to the superconductor layer of the switch device.Type: GrantFiled: August 21, 2018Date of Patent: February 25, 2020Assignee: PSIQUANTUM CORP.Inventor: Faraz Najafi
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Patent number: 10566251Abstract: Techniques for reducing work function metal variability along the channel of VFET devices are provided. In one aspect, a method of forming a VTFET device includes: patterning fins in a wafer; forming bottom source/drains at a base of the fins and bottom spacers on the bottom source/drains; forming gate stacks over the fins including a gate conductor having a combination of work function metals including an outer layer and at least one inner layer of the work function metals; isotropically etching the work function metals which recesses the gate stacks with an outwardly downward sloping profile; isotropically etching the at least one inner layer while covering the outer layer of the work function metals to eliminate the outwardly downward sloping profile of the gate stacks; forming top spacers above the gate stacks; and forming top source and drains at tops of the fins. A VTFET device is also provided.Type: GrantFiled: July 17, 2018Date of Patent: February 18, 2020Assignee: International Business Machines CorporationInventors: Choonghyun Lee, Kangguo Cheng, Juntao Li
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Patent number: 10535674Abstract: A semiconductor device structure includes a hybrid substrate having a semiconductor-on-insulator (SOI) region that includes an active semiconductor layer, a substrate material and a buried insulating material interposed between the active semiconductor layer and the substrate material, and a bulk semiconductor region that includes the substrate material. An insulating structure is positioned in the hybrid substrate, wherein the insulating structure separates the bulk region from the SOI region, and a gate electrode is positioned above the substrate material in the bulk region, wherein the insulating structure is in contact with two opposing sidewalls of the gate electrode.Type: GrantFiled: July 19, 2017Date of Patent: January 14, 2020Assignee: GLOBALFOUNDRIES Inc.Inventors: Juergen Faul, Frank Jakubowski
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Patent number: 10504900Abstract: A semiconductor structure containing a resistive random access memory device integrated with a gate-all-around nanosheet CMOS device is provided. In one embodiment, the semiconductor structure includes a gate-all-around nanosheet CMOS device includes a functional gate structure present on, and between, each semiconductor channel material nanosheet of a nanosheet stack of suspended semiconductor channel material nanosheets. The structure of the present application further includes a resistive memory device located laterally adjacent to the gate-all-around nanosheet CMOS device that includes a second functional gate structure present on, and between, each recessed semiconductor channel material layer portion of a material stack, wherein a recessed sacrificial semiconductor material layer portion is located above and below each recessed semiconductor channel material layer portion. A shared source/drain region is located between the gate-all-around nanosheet CMOS device and the resistive memory device.Type: GrantFiled: April 23, 2018Date of Patent: December 10, 2019Assignee: International Business Machines CorporationInventors: Pouya Hashemi, Takashi Ando, Alexander Reznicek
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Patent number: 10490727Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a first gate and an adjacent second gate above the quantum well stack; and a gate wall between the first gate and the second gate, wherein the gate wall includes a first dielectric material and a second dielectric material different from the first dielectric material.Type: GrantFiled: February 20, 2018Date of Patent: November 26, 2019Assignee: Intel CorporationInventors: Nicole K. Thomas, James S. Clarke, Willy Rachmady, Ravi Pillarisetty, Hubert C. George, Kanwaljit Singh, Jeanette M. Roberts, David J. Michalak, Roman Caudillo, Zachary R. Yoscovits, Lester Lampert
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Patent number: 10475912Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a layer of gate dielectric above the quantum well stack; a first gate metal and a second gate metal above the layer of gate dielectric; and a gate wall between the first gate metal and the second gate metal, wherein the gate wall is above the layer of gate dielectric, and the gate wall includes a first dielectric material and a second dielectric material different from the first dielectric material.Type: GrantFiled: February 20, 2018Date of Patent: November 12, 2019Assignee: Intel CorporationInventors: Nicole K. Thomas, Ravi Pillarisetty, Kanwaljit Singh, Hubert C. George, Jeanette M. Roberts, David J. Michalak, Roman Caudillo, Zachary R. Yoscovits, Lester Lampert, James S. Clarke, Willy Rachmady
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Patent number: 10361292Abstract: Antiferromagnetic magneto-electric spin-orbit read (AFSOR) logic devices are presented. The devices include a voltage-controlled magnetoelectric (ME) layer that switches polarization in response to an electric field from the applied voltage and a narrow channel conductor of a spin-orbit coupling (SOC) material on the ME layer. One or more sources and one or more drains, each optionally formed of ferromagnetic material, are provided on the SOC material.Type: GrantFiled: February 17, 2018Date of Patent: July 23, 2019Assignees: INTEL CORPORATION, THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK, BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA, THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Dmitri E. Nikonov, Christian Binek, Xia Hong, Jonathan P. Bird, Kang L. Wang, Peter A. Dowben
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Patent number: 10283611Abstract: An electronic device may include a topological insulating layer including first and second surfaces facing each other and a transition metal oxide layer provided on the first surface of the topological insulating layer. The topological insulating layer may have a thickness ranging from 1 nm to 10 nm.Type: GrantFiled: July 25, 2017Date of Patent: May 7, 2019Assignee: Industry-Academic Cooperation Foundation, Yonsei UniversityInventors: MannHo Cho, KwangSik Jeong, DaeHong Ko, DongHyeok Lim, TaeHyeon Kim
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Patent number: 10249744Abstract: A tunnel field-effect transistor and a method for manufacturing a tunnel field-effect transistor is disclosed. Source regions are located on two sides of an oxide structure, an epitaxial layer is located on a surface on a side that is of the source region and that is away from the oxide structure, and a gate structure is located on a surface on a side that is of the epitaxial layer and that is away from the source region, so that a gate electric field direction of the tunnel field-effect transistor is the same as an electron tunneling direction, and carriers on a valence band of the source region tunnel to a conduction band of the epitaxial layer at relatively high tunneling efficiency, thereby generating a steep subthreshold swing and enabling a subthreshold swing value of the tunnel field-effect transistor to be lower than 60 mV/dec to consume relatively low power.Type: GrantFiled: May 11, 2018Date of Patent: April 2, 2019Assignee: HUAWEI TECHNOLOGIES CO., LTD.Inventors: Jing Zhao, Chen-Xiong Zhang
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Patent number: 10243054Abstract: Embodiments of the invention are directed to fabrication operations for co-integrating standard-gate (SG) and extended-gate (EG) nanosheet/nanowire transistors on the same substrate. The SG and EG nanosheet/nanowire transistors share certain fabrication operations for certain features. For example, the processes to form the bottommost channel nanosheet, the bottommost sacrificial nanosheet, and the topmost channel nanosheet are the same for SG nanosheet transistors and the EG nanosheet transistors. Because the thickness of the sacrificial nanosheet needs to be thicker for EG nanosheet transistors, a thickness of the bottommost sacrificial nanosheet is selected to accommodate the design parameters of the EG nanosheet transistor. Because the thickness of the SG and the EG channel nanosheets do not need to be different, a thickness of the bottommost channel nanosheet and the topmost channel nanosheet can be selected to accommodate the design parameters of both the SG and the EG nanosheet transistors.Type: GrantFiled: April 3, 2018Date of Patent: March 26, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Juntao Li, Geng Wang, Qintao Zhang
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Patent number: 10229971Abstract: A method is presented for integrating a first nanosheet transistor and a second nanosheet transistor on a chip. The method includes constructing the first nanosheet transistor by forming a first nanosheet stack including alternating layers of a first material and a second material over a substrate, forming a dummy gate and first spacers over the first nanosheet stack, selectively etching the alternating layers of the first material to define gaps between the alternating layers of the second material, filling the gaps with second spacers, removing the dummy gate, removing a portion of the first nanosheet stack including layers of the first and second materials, and selectively removing remaining layers of the second material such that a single layer of the first material remains intact to define a single nanosheet channel. The method includes constructing the second nanosheet transistor by forming a second nanosheet stack having multiple layers of nanosheet channels.Type: GrantFiled: November 16, 2017Date of Patent: March 12, 2019Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
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Patent number: 10204903Abstract: Devices and methods for forming a device are disclosed. A substrate is provided. A plurality of fin structures are formed in the substrate. The fin structures include an upper part and a lower part. An isolation layer is formed on the substrate. The lower part of the plurality of fin structures is embedded in the isolation layer. A source including a first source portion and a second source portion is formed in a first side of the substrate. The first source portion partially occupies the fin structures along a length direction. The second source portion is formed over the first source portion. The second source portion elevates the fin structures. A drain is formed in a second side of the substrate. A distance between the source to the drain defines a channel region. A gate having a gate dielectric and a metal gate electrode is formed over the substrate. The gate wraps around the elevated fin structures and channel region.Type: GrantFiled: December 1, 2016Date of Patent: February 12, 2019Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Ping Zheng, Eng Huat Toh
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Patent number: 10170548Abstract: A semiconductor device and process of making the same generally includes simultaneously forming nanosheet capacitors with nanosheet FET devices on the same substrate. The nanosheets in the capacitor have a width and are coupled to one another by sacrificial layers, wherein the sacrificial layers have a width smaller than the nanosheet width, and wherein the nanosheets and the sacrificial layers are conductively coupled to the substrate. The nanosheets in the FET devices are spaced apart and free of sacrificial layers. The nanosheets in the FET device have a width less than half the width of the nanosheets in the capacitor region.Type: GrantFiled: March 21, 2018Date of Patent: January 1, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, James J. Demarest, John G. Gaudiello, Juntao Li
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Patent number: 10157935Abstract: Embodiments are directed to a method of forming a semiconductor device and resulting structures having a nanosheet capacitor by forming a first nanosheet stack over a substrate. The first nanosheet stack includes a first nanosheet vertically stacked over a second nanosheet. A second nanosheet stack is formed over the substrate adjacent to the first nanosheet stack. The second nanosheet stack includes a first nanosheet vertically stacked over a second nanosheet. Exposed portions of the first and second nanosheets of the second nanosheet stack are doped and gates are formed over channel regions of the first and second nanosheet stacks.Type: GrantFiled: February 22, 2017Date of Patent: December 18, 2018Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Juntao Li, Geng Wang, Qintao Zhang
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Patent number: 10141528Abstract: Embodiments of the invention are directed to methods and resulting structures for enhancing drive current and increasing device yield in n-type carbon nanotube field effect transistors (CNT FETs) with scaled contacts using a wetting layer. In some embodiments of the invention, a nanotube is formed over a surface of a substrate. An insulating layer is formed over the nanotube such that end portions of the nanotube are exposed. A low work function metal is formed over the end portions of the nanotube and a wetting layer is formed between the low work function metal and the nanotube.Type: GrantFiled: May 23, 2017Date of Patent: November 27, 2018Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Damon B. Farmer, Shu-Jen Han, Jianshi Tang, John J. Yurkas
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Patent number: 10014390Abstract: Structures for a nanosheet field-effect transistor and methods for forming a structure for a nanosheet field-effect transistor. A body feature is formed that includes a first nanosheet channel layer, a second nanosheet channel layer, and first, second, and third sacrificial layers that are vertically arranged between the first and second nanosheet channel layers. The first, second, and third sacrificial layers are laterally recessed relative to the first and second nanosheet channel layers to form a cavity indented into a sidewall of the first body feature. The second sacrificial layer is laterally recessed to a lesser extent than the first sacrificial layer or the third sacrificial layer such that an end of the second sacrificial layer projects into the cavity between the first and third sacrificial layers. A dielectric spacer is formed in the first and second portions of cavity between the first and second nanosheet channel layers.Type: GrantFiled: October 10, 2017Date of Patent: July 3, 2018Assignee: GLOBALFOUNDRIES Inc.Inventors: Guillaume Bouche, Julien Frougier, Ruilong Xie
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Patent number: 9985097Abstract: A semiconductor device and process of making the same generally includes simultaneously forming nanosheet capacitors with nanosheet FET devices on the same substrate. The nanosheets in the capacitor have a width and are coupled to one another by sacrificial layers, wherein the sacrificial layers have a width smaller than the nanosheet width, and wherein the nanosheets and the sacrificial layers are conductively coupled to the substrate. The nanosheets in the FET devices are spaced apart and free of sacrificial layers. The nanosheets in the FET device have a width less than half the width of the nanosheets in the capacitor region.Type: GrantFiled: June 30, 2016Date of Patent: May 29, 2018Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, James J. Demarest, John G. Gaudiello, Juntao Li
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Patent number: 9978787Abstract: An image sensor includes a substrate including a photoelectric conversion element; a transfer gate formed over the photoelectric conversion element; and a channel layer controlled by the transfer gate, wherein the channel layer includes a first region which is in contacts with the photoelectric conversion element and a second region which is separated from the photoelectric conversion element, and the first region and the second region have different crystalline states from each other.Type: GrantFiled: August 8, 2017Date of Patent: May 22, 2018Assignee: SK Hynix Inc.Inventor: Sung-Kun Park
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Patent number: 9935189Abstract: The present invention provides a transistor and a fabrication method thereof. By a silicon nanowire as a core region being serially wrapped by a germanium channel, a gate insulating film and a gate, the present invention enables to form a potential well for storing holes as a carrier of HHMT in the germanium channel by a valance band energy offset between the silicon core region and the germanium channel, to gain maximum gate controllability to the germanium channel, and to simplify a fabricating process by simultaneously forming the germanium channel and the gate insulating film in one process.Type: GrantFiled: November 8, 2016Date of Patent: April 3, 2018Assignee: GACHON UNIVERSITY OF INDUSTRY—ACADEMIC COOPERATION FOUNDATIONInventors: Seongjae Cho, Mina Yun
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Patent number: 9865380Abstract: The present invention relates to a material comprising reduced graphene oxide, wherein the degree of reduction of the graphene oxide exhibits a spatial variation so that the material exhibits a gradient in the electric conductivity and/or permittivity. The material can for example be used in an electric device for purposes of field grading and/or dissipation of charges. Examples of electric devices wherein the material is beneficial includes cable accessories, bushings, power cables, microelectronics, switchgear, etc. The invention further relates to a method of producing a material for electrical applications. The method comprises treating different parts of a graphene oxide element differently, so as to achieve a different degree of reduction of the graphene oxide within the element, resulting in a sample having a gradient in the electrical conductivity and/or permittivity.Type: GrantFiled: June 24, 2013Date of Patent: January 9, 2018Assignee: ABB SCHWEIZ AGInventors: Emmanuel Logakis, Alex Skordos, Panagiota Chatzi
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Patent number: 9735233Abstract: Provided are electronic devices and methods of manufacturing same. An electronic device includes an energy barrier forming layer on a substrate, an upper channel material layer on the substrate, and a gate electrode that covers the upper channel material layer and the energy barrier forming layer. The gate electrode includes a side gate electrode portion that faces a side surface of the energy barrier forming layer. The side gate electrode may be configured to cause an electric field to be applied directly on the energy barrier forming layer via the side surface of the energy barrier forming layer, thereby enabling adjustment of the energy barrier between the energy barrier forming layer and the upper channel material layer. The electronic device may further include a lower channel material layer that is provided on the substrate and does not contact the upper channel material layer.Type: GrantFiled: November 4, 2015Date of Patent: August 15, 2017Assignee: Samsung Electronics Co., Ltd.Inventors: Jinseong Heo, Kiyoung Lee, Jaeho Lee, Seongjun Park
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Patent number: 9698373Abstract: A barrier film layer, a photoelectric device comprising the barrier film layer and a manufacturing method of the photoelectric device are provided. A material forming the barrier film layer includes a topological insulator, and the barrier film layer is formed on a surface of an base plate which is patterned. In this way, a better package of the photoelectric device can be achieved.Type: GrantFiled: December 12, 2014Date of Patent: July 4, 2017Assignee: BOE Technology Group Co., Ltd.Inventors: Yongchun Lu, Yong Qiao, Hongfei Cheng, Jianbo Xian
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Patent number: 9548394Abstract: A two-dimensional thin film transistor and a method for manufacturing a two-dimensional thin film transistor includes layering a semiconducting channel material on a substrate, providing a first electrode material on top of the semiconducting channel material, patterning a source metal electrode and a drain metal electrode at opposite ends of the semiconducting channel material from the first electrode material, opening a window between the source metal electrode and the drain metal electrode, removing the first electrode material from the window located above the semiconducting channel material providing a gate dielectric above the semiconducting channel material, and providing a top gate above the gate dielectric, the top gate formed from a second electrode material. The semiconducting channel material is made of tungsten diselenide, the first electrode material and the second electrode material are made of graphene, and the gate dielectric is made of hexagonal boron nitride.Type: GrantFiled: April 21, 2015Date of Patent: January 17, 2017Assignee: UChicago Argonne, LLCInventors: Saptarshi Das, Anirudha V. Sumant, Andreas Roelofs
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Patent number: 9484428Abstract: A semiconductor device includes a first gate electrode defined on a base layer. A first plurality of layers is disposed on a first sidewall of the first gate electrode. The first plurality of layers includes a first dielectric layer formed on the first sidewall, a first ballistic conductor layer formed above the first dielectric layer, an intermediate layer formed above the first ballistic conductor layer, a second ballistic conductor layer formed above the intermediate layer, and a second dielectric layer formed above the second ballistic conductor layer. A second gate electrode contacts the second dielectric layer.Type: GrantFiled: January 29, 2015Date of Patent: November 1, 2016Assignee: GLOBALFOUNDRIES Inc.Inventor: Ajey Poovannummoottil Jacob
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Patent number: 9385195Abstract: A vertical tunneling FET (TFET) provides low-power, high-speed switching performance for transistors having critical dimensions below 7 nm. The vertical TFET uses a gate-all-around (GAA) device architecture having a cylindrical structure that extends above the surface of a doped well formed in a silicon substrate. The cylindrical structure includes a lower drain region, a channel, and an upper source region, which are grown epitaxially from the doped well. The channel is made of intrinsic silicon, while the source and drain regions are doped in-situ. An annular gate surrounds the channel, capacitively controlling current flow through the channel from all sides. The source is electrically accessible via a front side contact, while the drain is accessed via a backside contact that provides low contact resistance and also serves as a heat sink. Reliability of vertical TFET integrated circuits is enhanced by coupling the vertical TFETs to electrostatic discharge (ESD) diodes.Type: GrantFiled: March 31, 2015Date of Patent: July 5, 2016Assignee: STMicroelectronics, Inc.Inventor: John H. Zhang
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Patent number: 9318556Abstract: Provided are graphene transistors having a tunable barrier. The graphene transistor includes a semiconductor substrate, an insulating thin film disposed on the semiconductor substrate, a graphene layer on the insulating thin film, a first electrode connected to an end of the graphene layer, a second electrode that is separate from an other end of the graphene layer and contacts the semiconductor substrate, a gate insulating layer covering the graphene layer, and a gate electrode on the gate insulating layer, wherein an energy barrier is formed between the semiconductor substrate and the graphene layer.Type: GrantFiled: July 10, 2014Date of Patent: April 19, 2016Assignees: Samsung Electronics Co., Ltd., Research & Business Foundation Sungkyunkwan UniversityInventors: Jin-hong Park, Jae-woo Shim, Hyung-youl Park, Jae-ho Lee
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Patent number: 9312760Abstract: A power converter is described that includes components arranged within a first die and a second die of a single package. The first die includes one or more first switches coupled to a switching node of a power stage. The second die includes one or more second switches coupled to the switching node of the power stage, a feedback control unit configured to detect a current level at the one or more second switches of the power stage, and a controller unit configured to control the one or more first switches and the one or more second switches of the power stage based at least in part on the current level detected by the feedback control unit.Type: GrantFiled: December 16, 2013Date of Patent: April 12, 2016Assignee: Infineon Technologies Austria AGInventors: Christoph Sandner, Roman Riederer, Josef Höglauer, Stephan Auer
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Patent number: 9214596Abstract: According to the present invention, a method for manufacturing a compound semiconductor comprises: forming a graphene-derived material layer on either a first selected substrate or a first selected compound semiconductor layer; forming a second compound semiconductor layer of at least one layer on at least said graphene-derived material layer, and changing the graphene-derived material layer so as to separate said second compound semiconductor layer of at least one layer.Type: GrantFiled: October 26, 2011Date of Patent: December 15, 2015Assignees: LG Siltron Inc., Kumoh National Institute of Technology Industry-Academic Cooperation FoundationInventors: Sung-Jin An, Dong-Gun Lee, Seok-Han Kim
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Patent number: 9126829Abstract: The present invention is to provide a graphene valley singlet-triplet qubit device. The device includes a substrate, and a graphene layer formed on the substrate. An energy gap is created between the valence band and the conduction band of the graphene layer. At least one electrical gate is configured on the graphene layer and/or on two sides of the graphene layer. The graphene layer is located in a magnetic field and a voltage is applied to at least one electrical gate, thereby creating a valley singlet-triplet qubit.Type: GrantFiled: January 13, 2012Date of Patent: September 8, 2015Assignee: National Tsing Hua UniversityInventor: Yu-Shu Wu
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Patent number: 9105556Abstract: According to example embodiments, a tunneling field-effect transistor (TFET) includes a first electrode on a substrate, a semiconductor layer on a portion of the first electrode, a graphene channel on the semiconductor layer, a second electrode on the graphene channel, a gate insulating layer on the graphene channel, and a gate electrode on the gate insulating layer. The first electrode may include a portion that is adjacent to the first area of the substrate. The semiconductor layer may be between the graphene channel and the portion of the first electrode. The graphene channel may extend beyond an edge of at least one of the semiconductor layer and the portion of the first electrode to over the first area of the substrate.Type: GrantFiled: May 31, 2013Date of Patent: August 11, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Jin-seong Heo, Seong-jun Park, Kyung-eun Byun, David Seo, Hyun-jae Song, Jae-ho Lee, Hyun-jong Chung
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Publication number: 20150137079Abstract: Among other things, one or more techniques for forming a vertical tunnel field effect transistor (FET), and a resulting vertical tunnel FET are provided herein. In an embodiment, the vertical tunnel FET is formed by forming a core over a first type substrate region, forming a second type channel shell around a circumference greater than a core circumference, forming a gate dielectric around a circumference greater than the core circumference, forming a gate electrode around a circumference greater than the core circumference, and forming a second type region over a portion of the second type channel shell, where the second type has a doping opposite a doping of the first type. In this manner, line tunneling is enabled, thus providing enhanced tunneling efficiency for a vertical tunnel FET.Type: ApplicationFiled: December 22, 2014Publication date: May 21, 2015Inventors: Krishna Kumar Bhuwalka, Gerben Doornbos, Matthias Passlack
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Patent number: 9018617Abstract: A topological insulator structure includes an insulating substrate and a magnetically doped TI quantum well film located on the insulating substrate. A material of the magnetically doped TI quantum well film is represented by a chemical formula of Cry(BixSb1-x)2-yTe3. 0<x<1, 0<y<2. Values of x and y satisfies that an amount of a hole type charge carriers introduced by a doping with Cr is substantially equal to an amount of an electron type charge carriers introduced by a doping with Bi. The magnetically doped TI quantum well film is in 3 QL to 5 QL.Type: GrantFiled: October 16, 2013Date of Patent: April 28, 2015Assignees: Tsinghua University, Institute of Physics, Chinese Academy of SciencesInventors: Qi-Kun Xue, Ke He, Xu-Cun Ma, Xi Chen, Li-Li Wang, Cui-Zu Chang, Xiao Feng, Yao-Yi Li, Jin-Feng Jia
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Publication number: 20150102289Abstract: A gate tunable diode is provided. The gate tunable diode includes a gate dielectric formed on a gate electrode and a graphene electrode formed on the gate dielectric. Also, the gate tunable diode includes a tunnel dielectric formed on the graphene electrode and a tunnel electrode formed on the tunnel dielectric.Type: ApplicationFiled: December 18, 2014Publication date: April 16, 2015Inventors: Ali Afzali-Ardakani, Damon Farmer
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Patent number: 8994006Abstract: Semiconductor nanoparticles are deposited on a top surface of a first insulator layer of a substrate. A second insulator layer is deposited over the semiconductor nanoparticles and the first insulator layer. A semiconductor layer is then bonded to the second insulator layer to provide a semiconductor-on-insulator substrate, which includes a buried insulator layer including the first and second insulator layers and embedded semiconductor nanoparticles therein. Back gate electrodes are formed underneath the buried insulator layer, and shallow trench isolation structures are formed to isolate the back gate electrodes. Field effect transistors are formed in a memory device region and a logic device region employing same processing steps. The embedded nanoparticles can be employed as a charge storage element of non-volatile memory devices, in which charge carriers tunnel through the second insulator layer into or out of the semiconductor nanoparticles during writing and erasing.Type: GrantFiled: October 2, 2012Date of Patent: March 31, 2015Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Robert H. Dennard, Hemanth Jagannathan, Ali Khakifirooz, Tak H. Ning, Ghavam G. Shahidi
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Patent number: 8975095Abstract: A technique is provided for base recognition in an integrated device is provided. A target molecule is driven into a nanopore of the integrated device. The integrated device includes a nanowire separated into a left nanowire part and a right nanowire part to form a nanogap in between, a source pad connected to the right nanowire part, a drain pad connected to the left nanowire part, and the nanopore. The source pad, the drain pad, the right nanowire part, the left nanowire part, and the nanogap together form a transistor. The nanogap is part of the nanopore. A transistor current is measured while a single base of the target molecule is in the nanogap of the nanopore, and the single base affects the transistor current. An identity of the single base is determined according to a change in the transistor current.Type: GrantFiled: May 29, 2013Date of Patent: March 10, 2015Assignee: International Business Machines CorporationInventors: Shu-Jen Han, Ajay K. Royyuru, Gustavo A. Stolovitzky, Deqiang Wang
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Patent number: 8975123Abstract: Device structures, fabrication methods, and design structures for tunnel field-effect transistors. A drain comprised of a first semiconductor material having a first band gap and a source comprised of a second semiconductor material having a second band gap are formed. A tunnel barrier is formed between the source and the drain. The second semiconductor material exhibits a broken-gap energy band alignment with the first semiconductor material. The tunnel barrier is comprised of a third semiconductor material with a third band gap larger than the first band gap and larger than the second band gap. The third band gap is configured to bend under an external bias to assist in aligning a first energy band of the first semiconductor material with a second energy band of the second semiconductor material.Type: GrantFiled: July 9, 2013Date of Patent: March 10, 2015Assignee: International Business Machines CorporationInventors: Douglas M. Daley, Hung H. Tran, Wayne H. Woods, Ze Zhang