Including Lateral Bipolar Transistor Structure Patents (Class 257/575)
  • Patent number: 7087979
    Abstract: The intrinsic base region of a bipolar transistor is formed to avoid a chemical interaction between the chemicals used in a chemical mechanical polishing step and the materials used to form the base region. The method includes the step of forming a trench in a layer of epitaxial material. After this, a base material that includes silicon and germanium is blanket deposited, followed by the blanket deposition of a layer of protective material. The layer of protective material protects the base material from the chemical mechanical polishing step.
    Type: Grant
    Filed: April 9, 2004
    Date of Patent: August 8, 2006
    Assignee: National Semiconductor Corporation
    Inventor: Abdalla Aly Naem
  • Patent number: 7067899
    Abstract: A semiconductor integrated circuit device according to the invention includes an N-type embedded diffusion region between a substrate and a first epitaxial layer in island regions serving as small signal section. The substrate and the first epitaxial layer are thus partitioned by the N-type embedded diffusion region having supply potential in the island regions serving as small signal section. This structure prevents the inflow of free carriers (electrons) generated from a power NPN transistor due to the back electromotive force of the motor into the small signal section, thus preventing the malfunction of the small signal section.
    Type: Grant
    Filed: September 27, 2004
    Date of Patent: June 27, 2006
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Ryo Kanda, Shigeaki Okawa, Kazuhiro Yoshitake
  • Patent number: 7064416
    Abstract: A semiconductor device and a method of fabricating a semiconductor device having multiple subcollectors which are formed in a common wafer, in order to provide multiple structures having different characteristic and frequency response are provided. The subcollectors may be provided using different doses or different material implants resulting in devices having different optimum unity current gain cutoff frequency (fT) and breakdown voltage (BVCEO and BVCBO) on a common wafer.
    Type: Grant
    Filed: November 16, 2001
    Date of Patent: June 20, 2006
    Assignee: International Business Machines Corporation
    Inventors: James S. Dunn, Louis D. Lanzerotti, Steven H. Voldman
  • Patent number: 7061074
    Abstract: The present invention is a modified darlington phototransistor wherein a phototransistor is coupled to a Bipolar Junction Transistor (BJT). This design provides a high sensitivity and a fast response and effectively increases the gain of the photocurrent. This circuit is particularly will suited for the readily available CMOS and Bipolar Complementary Metal Oxide Semiconductor (BiCMOS) processes prevalent today.
    Type: Grant
    Filed: October 7, 2004
    Date of Patent: June 13, 2006
    Assignee: The United States of America as represented by the Dept of the Army
    Inventors: Khoa V. Dang, Conrad W Terrill
  • Patent number: 7023053
    Abstract: A differential transistor pair comprises a plurality of transistor cells in a substrate. Each cell comprises first drain regions at the respective edge of the cell, and a second drain region in between. Source regions are located between the respective first drain region and the second drain region. First gate regions are located between the respective first drain region and the source regions, and second gate regions are located between the source regions and the second drain region. The first drain regions of all cells are interconnected to a common first drain terminal, and the second drain region of all cells are interconnected to a common second drain terminal. The first gate regions of all cells are interconnected to a common first gate terminal, and the second gate regions of all cells are interconnected to a common second gate terminal.
    Type: Grant
    Filed: May 19, 2004
    Date of Patent: April 4, 2006
    Assignee: Infineon Technologies AG
    Inventors: Johan Sjöström, Torkel Arnborg
  • Patent number: 6982473
    Abstract: At a surface region of an N?-type base region, surrounded by a P-type isolation region, a P+-type collector region, a P+-type emitter region, an N+-type base contact region, and an N-type rectifying region are formed. The N-type rectifying region straddles over the emitter region and the base contact region. The rectifying region has an impurity concentration higher than that of the base region, and lower than that of the base contact region. The forward voltage at the interface of the rectifying region and the emitter region is higher than the forward voltage at the interface of the base region and the emitter region. Therefore, the current from the emitter region flows to the collector region, and does not flow that much to the isolation region. By this, leakage current is small. Also, because the collector region does not surround the emitter region, the element size is small.
    Type: Grant
    Filed: August 9, 2004
    Date of Patent: January 3, 2006
    Assignee: Sanken Electric Co., Ltd.
    Inventors: Akio Iwabuchi, Shigeru Matsumoto
  • Patent number: 6977426
    Abstract: In a semiconductor device comprising a first bipolar transistor and a second bipolar transistor having different voltages formed on a semiconductor substrate made by forming an epitaxial layer on a silicon substrate, in an upper part of the silicon substrate the first bipolar transistor has an N+-type first embedded diffusion layer having an impurity concentration higher than that of the epitaxial layer and the second bipolar transistor has an N-type second embedded diffusion layer having a lower impurity concentration and a deeper diffusion layer depth than the first embedded diffusion layer, whereby a high speed bipolar transistor and a high voltage bipolar transistor are formed on the same substrate.
    Type: Grant
    Filed: November 6, 1997
    Date of Patent: December 20, 2005
    Assignee: Sony Corporation
    Inventors: Takayuki Gomi, Hiroaki Ammo
  • Patent number: 6906419
    Abstract: In a semiconductor device, a wiring pattern groove is formed in a surface portion of a silicon oxide film provided above a semiconductor substrate. A wiring layer is buried into the wiring pattern groove with a barrier metal film interposed therebetween. The barrier metal film is selectively removed from each sidewall portion of the wiring pattern groove. In other words, the barrier metal film is left only on the bottom of the wiring pattern groove. Thus, a damascene wiring layer having a hollow section whose dielectric constant is low between each sidewall of the wiring pattern groove and each side of the wiring layer can be formed in the semiconductor device.
    Type: Grant
    Filed: June 19, 2001
    Date of Patent: June 14, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiroyuki Nitta, Yoshiaki Fukuzumi, Yusuke Kohyama
  • Patent number: 6897545
    Abstract: The transistor includes an emitter region 17 disposed in a first isolating well 11, 150 formed in a semiconductor bulk. An extrinsic collector region 16 is disposed in a second isolating well 3, 150 formed in the semiconductor bulk SB and separated laterally from the first well by a bulk separator area 20. An intrinsic collector region is situated in the bulk separator area 20 in contact with the extrinsic collector region. An intrinsic base region 100 is formed which is thinner laterally than vertically and in contact with the intrinsic collector region and in contact with the emitter region through bearing on a vertical flank of the first isolating well facing a vertical flank of the second isolating well. An extrinsic base region 60 is formed which is substantially perpendicular to the intrinsic base region in the top part of the bulk separator area, and contact terminals C, B, E respectively in contact with the extrinsic collector region, the extrinsic base region, and the emitter region.
    Type: Grant
    Filed: May 9, 2002
    Date of Patent: May 24, 2005
    Assignee: STMicroelectronics S.A.
    Inventors: Olivier Menut, Herve Jaouen
  • Patent number: 6867477
    Abstract: According to one exemplary embodiment, a bipolar transistor comprises a base having a top surface. The bipolar transistor might be a lateral PNP bipolar transistor and the base may comprise, for example, N type single crystal silicon. The bipolar transistor further comprises an emitter having a top surface, where the emitter is situated on the top surface of the base. The emitter may comprise P+ type single crystal silicon-germanium, for example. The bipolar transistor further comprises an electron barrier layer situated directly on the top surface of the emitter. The electron barrier layer will cause an increase in the gain, or beta, of the bipolar transistor. The electron barrier layer may be a dielectric such as, for example, silicon oxide. In another embodiment, a floating N+ region, instead of the electron barrier layer, is utilized to increase the gain of the bipolar transistor.
    Type: Grant
    Filed: November 7, 2002
    Date of Patent: March 15, 2005
    Assignee: Newport Fab, LLC
    Inventors: Jie Zheng, Peihua Ye, Marco Racanelli
  • Patent number: 6864538
    Abstract: An ESD protection device encompassing a vertical bipolar transistor that is connected as a diode and has an additional displaced base area. The assemblage has a space-saving configuration and a decreased difference between snapback voltage and breakdown voltage.
    Type: Grant
    Filed: April 14, 2001
    Date of Patent: March 8, 2005
    Assignee: Robert Bosch GmbH
    Inventors: Stephan Mettler, Wolfgang Wilkening
  • Publication number: 20040262715
    Abstract: A bipolar semiconductor device including a collector layer covered at a portion of an outer periphery thereof with an insulating film and having a shape extending in an upper direction and a horizontal direction, with a gap being formed between the collector layer and the insulating film, and further including a base layer and an emitter layer disposed over the collector layer, and a manufacturing method of the semiconductor device. Since the collector layer has a shape extending in a portion thereof in the upward direction and the horizontal direction, an external collector region can be deleted, and both the parasitic capacitance and the collector capacitance in the intrinsic portion attributable to the collector can be decreased and, accordingly, a bipolar transistor capable of high speed operation at a reduced consumption power can be constituted.
    Type: Application
    Filed: June 15, 2004
    Publication date: December 30, 2004
    Inventors: Makoto Miura, Katsuyoshi Washio, Hiromi Shimamoto
  • Publication number: 20040207046
    Abstract: High-voltage bipolar transistors (30, 60) in silicon-on-insulator (SOI) integrated circuits are disclosed. In one disclosed embodiment, an collector region (28) is formed in epitaxial silicon (24, 25) disposed over a buried insulator layer (22). A base region (32) and emitter (36) are disposed over the collector region (28). Buried collector region (31) are disposed in the epitaxial silicon (24) away from the base region (32). The transistor may be arranged in a rectangular fashion, as conventional, or alternatively by forming an annular buried collector region (31). According to another disclosed embodiment, a high voltage transistor (60) includes a central isolation structure (62), so that the base region (65) and emitter region (66) are ring-shaped to provide improved performance. A process for fabricating the high voltage transistor (30, 60) simultaneously with a high performance transistor (40) is also disclosed.
    Type: Application
    Filed: May 12, 2004
    Publication date: October 21, 2004
    Inventors: Jeffrey A. Babcock, Gregory E. Howard, Angelo Pinto, Phillipp Steinmann, Scott G. Balster
  • Publication number: 20040195655
    Abstract: A bipolar transistor includes a Si single crystalline layer serving as a collector, a single crystalline Si/SiGeC layer and a polycrystalline Si/SiGeC layer which are formed on the Si single crystalline layer, an oxide film having an emitter opening portion, an emitter electrode, and an emitter layer. An intrinsic base layer is formed on the single crystalline Si/SiGeC layer, part of the single crystalline Si/SiGeC layer, the polycrystalline Si/SiGeC layer and the Co silicide layer together form an external base layer. The thickness of the emitter electrode is set so that boron ions implanted into the emitter electrode and diffused therein do not reach an emitter-base junction portion.
    Type: Application
    Filed: March 24, 2004
    Publication date: October 7, 2004
    Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
    Inventors: Teruhito Ohnishi, Koichiro Yuki, Tsuneichiro Sano, Tohru Saitoh, Ken Idota, Takahiro Kawashima, Shigeki Sawada
  • Patent number: 6798041
    Abstract: A power lateral PNP device is disclosed which includes an epitaxial layer; a first and second collector region embedded in the epitaxial layer, an emitter region between the first and second collector regions. Therefore slots are placed in each of the regions. Accordingly, in a first approach the standard process flow will be followed until reaching the point where contact openings and metal are to be processed. In this approach slots are etched that are preferably 5 to 6 &mgr;m deep and 5 to 6 &mgr;wide. These slots are then oxidized and will be subsequently metalized. When used for making metal contacts to the buried layer or for ground the oxide is removed from the bottom of the slots by an anisotropic etch. Subsequently when these slots receive metal they will provide contacts to the buried layer where this is desired and to the substrate when a ground is desired. In a second approach the above-identified process is completed up through the slot process without processing the lateral PNPs.
    Type: Grant
    Filed: June 19, 2002
    Date of Patent: September 28, 2004
    Assignee: Micrel, Inc.
    Inventor: John Durbin Husher
  • Patent number: 6798040
    Abstract: An IGBT structure includes successive regions whose conductivities have alternating signs. The structure is dimensioned for punch-through and is provided with two buffer layers. As a result, the component becomes symmetrically blocking and is suitable as a semiconductor switch, e.g., for converters.
    Type: Grant
    Filed: June 4, 2001
    Date of Patent: September 28, 2004
    Assignee: Infineon Technologies AG
    Inventor: Daniel Reznik
  • Patent number: 6784366
    Abstract: An electronic component (202), such as a power transistor, is formed of a molded plastic package having top (206), bottom (204) and side (208) surfaces and electrical contacts. A lead frame (210) attaches to one of the contacts and wraps about the component (202) so as to provide heat dissipation capability from the bottom and top surfaces of the molded plastic package.
    Type: Grant
    Filed: June 10, 2003
    Date of Patent: August 31, 2004
    Assignee: Motorola, Inc.
    Inventors: Edmund B. Boucher, Harold M. Cook, Jose N. Diaz
  • Patent number: 6737722
    Abstract: The lateral pnp transistor encompasses a p-type semiconductor substrate, an n-type first buried region disposed on the semiconductor substrate, an n-type uniform base region disposed on the first buried region, an n-type first plug region disposed in the uniform base region, a p-type first emitter region and a first collector region disposed in and at the top surface of the uniform base region, a graded base region disposed in the uniform base region and a first base contact region disposed in the first plug region. The graded base region encloses the bottom and the side of the first main electrode region. The doping profile in the graded base region intervening between the first emitter region and the first collector region is such that the impurity concentration is gradually decreases towards the second main electrode region from the first main electrode region.
    Type: Grant
    Filed: October 26, 2001
    Date of Patent: May 18, 2004
    Assignee: Sanken Electric Co., Ltd.
    Inventors: Makoto Yamamoto, Akio Iwabuchi
  • Patent number: 6570240
    Abstract: In order to form a semiconductor device including a lateral bipolar transistor which is a match in the device performance for a vertical bipolar transistor, an electrically conductive film which is formed by filling a trench reaching a buried oxide film in an SOI substrate with an electrically conductive film is utilized for an emitter and/or a collector, whereby a bipolar transistor is formed through a simple process.
    Type: Grant
    Filed: August 29, 2000
    Date of Patent: May 27, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Takasumi Ohyanagi, Atsuo Watanabe
  • Patent number: 6563193
    Abstract: A semiconductor device comprises a substrate the surface of which is formed of an insulation region, a high resistance active layer of a first conductivity type formed on the substrate, a first semiconductor region of the first conductivity type having an impurity concentration higher than that of the active layer and selectively formed on a surface of the active layer, an emitter region of the second conductivity type selectively formed on a surface of the semiconductor region, a collector region of the second conductivity type selectively formed on a surface of the active layer, and a base contact region of the first conductivity type selectively formed on a surface of the active layer in separation from the emitter region and the collector region, respectively.
    Type: Grant
    Filed: September 27, 2000
    Date of Patent: May 13, 2003
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yusuke Kawaguchi, Kazutoshi Nakamura, Tomoko Matsudai, Hirofumi Nagano, Akio Nakagawa
  • Patent number: 6551869
    Abstract: A lateral PNP is disclosed in which a substrate of a first conductivity type is used. On top of the substrate a buried region of a second conductivity type is formed. A lightly doped collector region is located above the buried region. The lateral PNP also includes a base region of a second conductivity type formed by a graded channel implant and a well region of a second conductivity type, the well region contacting the base region, the buried region and a base contact. Additionally, there are collector contacts and emitter contacts of a first conductivity type. The lightly doped collector region results in a large Early voltage and the base region provides for a high current gain.
    Type: Grant
    Filed: June 9, 2000
    Date of Patent: April 22, 2003
    Assignee: Motorola, Inc.
    Inventors: Francis K. Chai, Vida Ilderem Burger, Carl S. Kyono, Sharanda L. Bigelow, Rainer Thoma
  • Patent number: 6489665
    Abstract: A substantially concentric lateral bipolar transistor and the method of forming same. A base region is disposed about a periphery of an emitter region, and a collector region is disposed about a periphery of the base region to form the concentric lateral bipolar transistor of the invention. A gate overlies the substrate and at least a portion of the base region. At least one electrical contact is formed connecting the base and the gate, although a plurality of contacts may be formed. A further bipolar transistor is formed according to the following method of the invention. A base region is formed in a substrate and a gate region is formed overlying at least a portion of the base region. Emitter and collector terminals are formed on opposed sides of the base region. The gate is used as a mask during first and second ion implants.
    Type: Grant
    Filed: December 20, 2000
    Date of Patent: December 3, 2002
    Assignee: Micron Technology, Inc.
    Inventors: Kirk D. Prall, Mike P. Violette
  • Patent number: 6462397
    Abstract: The present invention is related to a bipolar transistor in which the in-situ doped epitaxial Si or SiGe base layer is used instead of using an ion-implanted Si base, in order to achieve higher cutoff frequency. The SiGe base having the narrower energy bandgap than the Si emitter allows to enhance the current gain, the cutoff frequency(fT), and the maximum oscillation frequency (fmax). The narrow bandgap SiGe base also allows to have higher base doping concentration. As a result, the intrinsic base resistance is lowered and the noise figure is thus lowered. Parasitic base resistance is also minimized by using a metallic silicide base ohmic electrode. The present invention is focused on low cost, high repeatability and reliability by simplifying the manufacturing process step.
    Type: Grant
    Filed: October 22, 2001
    Date of Patent: October 8, 2002
    Assignee: ASB, Inc.
    Inventors: Byung Ryul Ryum, Tae Hyeon Han, Soo Min Lee, Deok Ho Cho
  • Patent number: 6437421
    Abstract: A semiconductor process is disclosed which forms openings in a dielectric layer through which the base region of both high-voltage and high-gain bipolar transistors are formed. In one embodiment of the invention, the openings for the high-gain transistors are first protected by a photoresist layer that is patterned to expose the openings for the high-voltage transistors. A first base implant is performed through the exposed windows in the dielectric layer and into the exposed substrate or epitaxial layer therebelow, and then diffused to a suitable depth. The patterned photoresist is then removed to additionally expose the openings for the high-gain devices, and a second base implant is performed, this time into both base regions, and then diffused to a suitable depth. Emitter regions are then formed within the base regions of both transistor types by traditional implantation and contact techniques.
    Type: Grant
    Filed: May 17, 2000
    Date of Patent: August 20, 2002
    Assignee: Legerity, Inc.
    Inventors: Frank L. Thiel, William E. Moore, Philip S. Shiota
  • Publication number: 20020096741
    Abstract: A lateral semiconductor device includes an n-type buffer layer (15) selectively formed in the surface of an n-type base layer (14), a p-type drain layer (16) selectively formed in the surface of the n-type buffer layer (15), a p-type base layer (17) formed in the surface of the n-type base layer (14) so as to surround the n-type buffer layer (15), an n+-type source layer (18) selectively formed in the surface of the p-type base layer (17), a source electrode (24) in contact with the p-type base layer (17) and the n+-type source layer (18), a drain electrode (22) in contact with the p-type drain layer (16), and a gate electrode (20) formed via a gate insulating film (19) on the surface of the p-type base layer (17) sandwiched between the n+-type source layer (18) and the n-type base layer (14). The p-type drain layer (16) has an annular structure or horseshoe-shaped structure, or is divided into a plurality of portions. This realizes a high breakdown voltage with a low ON voltage.
    Type: Application
    Filed: January 24, 2002
    Publication date: July 25, 2002
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yoshihiro Yamaguchi, Hideaki Ninomiya, Tomoki Inoue
  • Patent number: 6414370
    Abstract: A semiconductor circuit or a semiconductor device has the current-voltage characteristic that, in a blocking-state of the semiconductor circuit or the semiconductor device, a current gently flows for values of a voltage equal to or greater than a first voltage value but equal to or smaller than a second voltage value, whereas a current abruptly flows for values of a voltage greater than the second voltage value. Due to the current-voltage characteristic, energy accumulated in an inductance provided within the circuit is consumed by a differential resistance of the semiconductor circuit or a semiconductor, thereby preventing the occurrence of the electromagnetic noise and an excessively large voltage.
    Type: Grant
    Filed: August 17, 2000
    Date of Patent: July 2, 2002
    Assignee: Hitachi, Ltd.
    Inventors: Masahiro Nagasu, Hideo Kobayashi, Hideki Miyazaki, Shin Kimura, Junichi Sakano, Mutsuhiro Mori
  • Patent number: 6399999
    Abstract: In a lateral bipolar transistor, a control wiring layer is laid down under an emitter electrode wiring layer, and a voltage according to a reverse bias voltage applied to the collector diffusion layer is applied to the control wiring layer, thereby preventing the occurrence of a leakage current from the emitter diffusion and further the flow of the leakage current to the device isolation region, even under a situation that a certain reverse bias voltage is applied to the collector of the transistor.
    Type: Grant
    Filed: January 17, 2001
    Date of Patent: June 4, 2002
    Assignees: Mitsubishi Denki Kabushiki Kaisha, Mitsubishi Electric Engineering Company Limited
    Inventor: Masaharu Hoashi
  • Publication number: 20020043699
    Abstract: Provided is a DAD that improves resistance to latch-up and stabilizes breakdown voltage characteristic. Specifically, a first gate electrode (10) and a second drain electrode (13) are linear electrodes having a length not exceeding the length of a source electrode (9). An isolation region (20) is disposed on both end portions of these electrodes. The region surrounded by two isolation regions (20) and the source electrode (9) becomes a P channel MOS region (PR) where a P channel MOS transistor is to be formed. The isolation region (20) has a multi-trench structure that a plurality of trenches (21) are provided in a P type impurity region disposed so as to be rectangle as viewed in plan configuration. Each trench (21) is filled with a conductor such as polysilicon, and the filled conductor is disposed so that it makes no electrical contact with any specific part.
    Type: Application
    Filed: April 17, 2001
    Publication date: April 18, 2002
    Applicant: MITSUBISHI DENKI KABUSHIKI KAISHA
    Inventor: Hajime Akiyama
  • Publication number: 20020024113
    Abstract: The invention relates to a semiconductor device comprising a preferably discrete bipolar transistor with a collector region (1), a base region (2), and an emitter region (3) which are provided with connection conductors (6, 7, 8). A known means of preventing a saturation of the transistor is that the latter is provided with a Schottky clamping diode. The latter is formed in that case in that the connection conductor (7) of the base region (2) is also put into contact with the collector region (1).
    Type: Application
    Filed: May 11, 2001
    Publication date: February 28, 2002
    Applicant: U.S. PHILIPS CORPORATION
    Inventors: Godefridus A.M. Hurkx, Holger Schligtenhorst, Bernd Sievers
  • Publication number: 20020008303
    Abstract: In a lateral bipolar transistor, a control wiring layer is laid down under an emitter electrode wiring layer, and a voltage according to a reverse bias voltage applied to the collector diffusion layer is applied to the control wiring layer, thereby preventing the occurrence of a leakage current from the emitter diffusion and further the flow of the leakage current to the device isolation region, even under a situation that a certain reverse bias voltage is applied to the collector of the transistor.
    Type: Application
    Filed: January 17, 2001
    Publication date: January 24, 2002
    Inventor: Masaharu Hoashi
  • Patent number: 6326674
    Abstract: A complementary bipolar transistor having a lateral npn bipolar transistor, a vertical and a lateral pnp bipolar transistor, an integrated injection logic, a diffusion capacitor, a polysilicon capacitor and polysilicon resistors are disclosed. The lateral pnp bipolar transistor has an emitter region and a collector region which includes high-density regions and low-density regions, and the emitter region is formed in an n type tub region. In the integrated injection logic circuit, collector regions are surrounded by a high-density p type region, and low-density p type regions are formed under the collector regions. The diffusion capacitor and the polysilicon capacitor are formed in one substrate. The diffusion regions except the regions formed by diffusing the impurities in the polysilicon resistors into the epitaxial layer are formed before forming the polysilicon resistors, and polysilicon electrodes are formed along with the polysilicon resistors.
    Type: Grant
    Filed: November 30, 1999
    Date of Patent: December 4, 2001
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-Hwan Kim, Tae-Hoon Kwon, Cheol-Joong Kim, Suk-Kyun Lee
  • Patent number: 6242793
    Abstract: A method and a related circuit structure are described for improving the effectiveness of ESD protection in circuit structures realized in a semiconductor substrate overlaid with an epitaxial layer and including at least one ESD protection lateral bipolar transistor realized in the surface of the epitaxial layer. The method consists of forming under the transistor an isolating well that isolates the transistor from the substrate. Advantageously, the transistor can be fully isolated from the substrate by first and second N wells which extend from the surface of the epitaxial layer down to and in contact with the buried well.
    Type: Grant
    Filed: December 30, 1998
    Date of Patent: June 5, 2001
    Assignee: STMicroelectronics S.r.l.
    Inventors: Paolo Colombo, Emilio Camerlenghi
  • Publication number: 20010002063
    Abstract: A substantially concentric lateral bipolar transistor and the method of forming same. A base region is disposed about a periphery of an emitter region, and a collector region is disposed about a periphery of the base region to form the concentric lateral bipolar transistor of the invention. A gate overlies the substrate and at least a portion of the base region. At least one electrical contact is formed connecting the base and the gate, although a plurality of contacts may be formed. A further bipolar transistor is formed according to the following method of the invention. A base region is formed in a substrate and a gate region is formed overlying at least a portion of the base region. Emitter and collector terminals are formed on opposed sides of the base region. The gate is used as a mask during first and second ion implants.
    Type: Application
    Filed: December 20, 2000
    Publication date: May 31, 2001
    Applicant: Micron Technology, Inc.
    Inventors: Kirk D. Prall, Mike P. Violette
  • Patent number: 6225679
    Abstract: A structure for the protection of a high-voltage pad includes a lateral bipolar transistor, an N-type diffusion of which, connected to the pad to be protected, is made in an N-type tub with a zone that extends laterally outside the tub in the base. A P-type implantation is made on the entire substrate outside the N-type tub except in the region in which the zone extends.
    Type: Grant
    Filed: July 21, 1999
    Date of Patent: May 1, 2001
    Assignee: SGS-Thomson Microelectronics S.A.
    Inventors: Richard Fournel, Fabrice Marinet
  • Publication number: 20010000413
    Abstract: A lateral PNP bipolar electronic device integrated monolithically on a semiconductor substrate together with other NPN bipolar devices capable of being operated at high frequencies. The PNP device is incorporated to an electrically insulated multilayer structure which comprises a semiconductor substrate, doped for conductivity of the P-type, a first buried layer, doped for conductivity of the N-type to provide a base region, and a second layer, overlying the first and having conductivity of the N-type, to provide an active area distinguishable by a P-doped emitter region within the active area being located peripherally and oppositely from a P-doped collector region. The lateral PNP device can be operated at high frequencies with suitable collector current values and good amplification, to provide a superior figure of merit compared to that typical of conventional lateral PNP devices.
    Type: Application
    Filed: December 11, 2000
    Publication date: April 26, 2001
    Inventors: Angelo Pinto, Carlo Alemanni
  • Patent number: 6218725
    Abstract: A bipolar transistor and a method of fabricating the same are provided which are adapted to reduce chip size and production costs. To produce the transistor, a second conductive type well region is formed in a first conductive type semiconductor substrate and isolation trenches are formed at both sides of the well region. A high density second conductive type buried layer is formed in the semiconductor substrate which is formed at the bottom of the isolation trench. The buried layer is formed in two regions surrounding respective bottoms of two adjacent isolation trenches. The two regions are electrically connected with each other and in direct contact with the well region. An extrinsic base region and a device isolation region are formed sequentially onto the semiconductor substrate using a nitration layer pattern as a mask, wherein the nitration layer pattern is formed on the surface of semiconductor substrate.
    Type: Grant
    Filed: August 10, 1999
    Date of Patent: April 17, 2001
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Chang-ki Jeon
  • Patent number: 6198154
    Abstract: A lateral PNP bipolar electronic device integrated monolithically on a semiconductor substrate together with other NPN bipolar devices capable of being operated at high frequencies. The PNP device is incorporated to an electrically insulated multilayer structure which comprises a semiconductor substrate, doped for conductivity of the P-type, a first buried layer, doped for conductivity of the N-type to provide a base region, and a second layer, overlying the first and having conductivity of the N-type, to provide an active area distinguishable by a P-doped emitter region within the active area being located peripherally and oppositely from a P-doped collector region. The lateral PNP device can be operated at high frequencies with suitable collector current values and good amplification, to provide a superior figure of merit compared to that typical of conventional lateral PNP devices.
    Type: Grant
    Filed: May 29, 1998
    Date of Patent: March 6, 2001
    Assignee: STMicroelectronics, S.r.l.
    Inventors: Angelo Pinto, Carlo Alemanni
  • Patent number: 6166426
    Abstract: A substantially concentric lateral bipolar transistor and the method of forming same. A base region is disposed about a periphery of an emitter region, and a collector region is disposed about a periphery of the base region to form the concentric lateral bipolar transistor of the invention. A gate overlies the substrate and at least a portion of the base region. At least one electrical contact is formed connecting the base and the gate, although a plurality of contacts may be formed. A further bipolar transistor is formed according to the following method of the invention. A base region is formed in a substrate and a gate region is formed overlying at least a portion of the base region. Emitter and collector terminals are formed on opposed sides of the base region. The gage is used as a mask during first and second ion implants.
    Type: Grant
    Filed: January 20, 1999
    Date of Patent: December 26, 2000
    Assignee: Micron Technology, Inc.
    Inventors: Kirk D. Prall, Mike P. Violette
  • Patent number: 6140694
    Abstract: An integrated injection logic device is provided in which each collector of an I2L gate is isolated by a field oxide ("FOX"), or by other suitable isolation such as, for example, an isolation trench. The connection of the base to the collectors, between the base contact region and the bottom of the collectors, is made underneath the field oxide using a buried p type layer (TN3 in the Figures illustrating the invention). Because both silicide and heavy implant p+ implant is present at the base contact point only, the recombination current is reduced. This reduces the current loss when compared to the current loss of the known device. Additionally, current gain is also improved by placing a deep base implant close to the emitter of the upside down NPN transistor in the integrated logic device. The area of the base and the area of the collectors is decoupled, i.e.
    Type: Grant
    Filed: December 30, 1998
    Date of Patent: October 31, 2000
    Assignee: Philips Electronics North America Corporation
    Inventors: Chun-Yu Chen, Gilles Marcel Ferru, Serge Bardy
  • Patent number: 6127723
    Abstract: An integrated device in an emitter-switching configuration comprises a first bipolar transistor having a base region, an emitter region, and a collector region, a second transistor having a charge-collection terminal connected to an emitter terminal of the first transistor, and a quenching element having a terminal connected to a base terminal of the first transistor. The quenching element is formed within the base region or the emitter region of the first transistor.
    Type: Grant
    Filed: January 30, 1998
    Date of Patent: October 3, 2000
    Assignee: SGS-Thomson Microelectronics, S.r.l.
    Inventors: Natale Aiello, Atanasio La Barbera, Stefano Sueri, Sergio Spampinato
  • Patent number: 6075272
    Abstract: An improved structure and method for gated lateral bipolar transistors is provided. The present invention capitalizes on opposing sidewall structures and adjacent conductive sidewall members to conserve available surface space on the semiconductor chips. The conserved surface space allows a higher density of structures per chip. The conductive sidewall members couple to the gate of the gated lateral bipolar transistor and, additionally, to a retrograded, more highly doped bottom layer. The improved structure provides for both metal-oxide semiconductor (MOS) type conduction and bipolar junction transistor (BJT) type conduction beneath the gate of the gated lateral bipolar transistor.
    Type: Grant
    Filed: March 30, 1998
    Date of Patent: June 13, 2000
    Assignee: Micron Technology, Inc.
    Inventors: Leonard Forbes, Wendell P. Noble
  • Patent number: 6049131
    Abstract: A method and the device produced by the method of selective refractory metal growth/deposition on exposed silicon, but not on the field oxide is disclosed. The method includes preconditioning a wafer in a DHF dip followed by the steps of 1) selectively depositing a refractory metal on the exposed surfaces of the silicon substrate by reacting a refractory metal halide with the exposed surfaces of said silicon substrate; 2) limiting silicon substrate consumption by reacting the refractory metal halide with a silicon containing gas; and 3) further increasing the refractory metal thickness by reacting the refractory metal halide with hydrogen. Through an adequate pretreatment and selection of the parameters of 1) temperature; 2) pressure; 3) time; 4) flow and 5) flow ratio during each of the deposition steps, this invention adequately addresses the difficulties of uneven n+ versus p+ (source/drain) growth, deep consumption/encroachment by the refractory metal into silicon regions (e.g.
    Type: Grant
    Filed: July 3, 1997
    Date of Patent: April 11, 2000
    Assignee: International Business Machines Corporation
    Inventors: Stephen Bruce Brodsky, Richard Anthony Conti, Seshadri Subbanna
  • Patent number: 6049119
    Abstract: A semiconductor device having a substrate with a first conductivity type. The substrate has a top substrate region that also has the first conductivity type. A first doped region, a second doped region and a third doped region are located in the top substrate region where the first and second doped regions have a second conductivity type opposite the first conductivity type while the third doped region has the first conductivity type and where the third doped region is between the first and second doped regions. A doped well region is also in the top substrate region and has the second conductivity type and has the second doped region and at least a portion of the third doped region located therein. A method of forming the device is also provided herein.
    Type: Grant
    Filed: May 1, 1998
    Date of Patent: April 11, 2000
    Assignee: Motorola, Inc.
    Inventor: Jeremy C. Smith
  • Patent number: 6034413
    Abstract: A circuit and method for implementing a MOSFET gate driver. Two bipolar NPN transistors (Q1, Q2), constructed to achieve rail-to-rail swings when driving a capacitive load (23) by overlapping their respective emitter regions (13) over their contained contact regions (19) to prolong internal device saturation and resulting turn-off delays, alternately connect the gate drive terminal (31) to either a supply terminal (HVDC) or an output terminal (29). Predrive circuitry for these transistors comprises NMOS transistors (M9, M18, M12 and M13). The NPN transistors are supplemented by a CMOS inverter (PMOS transistor M6 and NMOS transistor M17). A PMOS transistor (M7) provides additional base drive for transistor Q1 when the gate drive node is approaching the supply node. A diode (D2) protects transistor Q1 against base-emitter avalanche and protects transistor M7 from excessive drain-to-source voltages.
    Type: Grant
    Filed: November 4, 1998
    Date of Patent: March 7, 2000
    Assignee: Texas Instruments Incorporated
    Inventors: Roy A. Hastings, Nicolas Salamina
  • Patent number: 6020623
    Abstract: An integrated structure is made in a chip of semiconductor material inside an insulated N type region extending from a surface of the chip. The structure comprises a Zener diode formed by a P type first region extending from the surface inside the insulated region and by a second region of type N extending from the surface inside the first region. These regions form between themselves a buried junction, in which the structure further includes a lateral bipolar transistor having an emitter region provided by the first region.
    Type: Grant
    Filed: December 4, 1997
    Date of Patent: February 1, 2000
    Assignee: SGS-Thomson Microelectronics S.r.L
    Inventor: Giorgio Chiozzi
  • Patent number: 6013941
    Abstract: A semiconductor device provided with a planar bipolar transistor and a built-in ingredient acting as an element to protect the bipolar transistor from an external surge voltage e.g. an electrostatic surge voltage and the like, is provided with a planar bipolar transistor further provided with a doped region having a conductivity opposite to that of a semiconductor substrate in which the foregoing planar bipolar transistor is produced, the doped region being produced along the top surface of the semiconductor substrate at a location close to the bipolar transistor, and the emitter of the bipolar transistor being connected the doped region and a fixed potential (V.sub.EE) or the ground potential, whereby the operation speed of a circuit including the transistor is not reduced by potential parasitic capacitors which otherwise accompany the built-in ingredients produced to protect the transistor from an external surge voltage e.g. an electrostatic surge voltage and the like.
    Type: Grant
    Filed: October 1, 1997
    Date of Patent: January 11, 2000
    Assignee: Oki Electric Industry Co., Ltd.
    Inventor: Takayuki Shimizu
  • Patent number: 6008524
    Abstract: A logic circuit is formed of an I.sup.2 L cell structure in which a difference of switching speeds at every collector in a multi-collector structure is small. In a semiconductor device in which an integrated injection logic cell including a constant current source transistor and a switch transistor is formed on a common semiconductor substrate, a first semiconductor layer (13) doped with a first conductivity type impurity and a second semiconductor layer (19) doped with a second conductivity impurity are electrically isolated from each other on a semiconductor substrate. A plurality of collector electrodes of the switch transistor and a plurality of collector regions (20) based on diffusion of impurity are formed by the second semiconductor layer (19). The first semiconductor layer (13) includes a base electrode deriving portion, and a direct contact portion which directly contacts with the semiconductor substrate between a plurality of collector regions (20).
    Type: Grant
    Filed: May 15, 1996
    Date of Patent: December 28, 1999
    Assignee: Sony Corporation
    Inventor: Takayuki Gomi
  • Patent number: 6005283
    Abstract: A complementary bipolar transistor having a lateral npn bipolar trasistor, a vertical and a lateral pnp bipolar transistor, an integrated injection logic, a diffusion capacitor, a polysilicon capacitor and polysilicon resistors are disclosed. The lateral pnp bipolar transistor has an emitter region and a collector region which includes high-density regions and low-density regions, and the emitter region is formed in an n type tub region. In the integrated injection logic circuit, collector regions are surrounded by a high-density p type region, and low-density p type regions are formed under the collector regions. The diffusion capacitor and the polysilicon capacitor are formed in one substrate. The diffusion regions except the regions formed by diffusing the impurities in the polysilicon resistors into the epitaxial layer are formed before forming the polysilicon resistors, and polysilicon electrodes are formed along with the polysilicon resistors.
    Type: Grant
    Filed: October 10, 1997
    Date of Patent: December 21, 1999
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-Hwan Kim, Tae-Hoon Kwon, Cheol-Joong Kim, Suk-Kyun Lee
  • Patent number: 6005282
    Abstract: Process for making an integrated-circuit (IC) chip with junction-isolated complementary bipolar transistors. In this process an N-well is formed in a P-type substrate. P-type dopant is implanted in the N-well to become a sub-collector for a pnp transistor. N-type dopant is implanted in the substrate in a location laterally displaced from the N-well to become a sub-collector for an npn transistor. N-type material is implanted in the N-well to begin the formation of an isolation wall for the pnp transistor. A P-type epitaxial (epi) layer then is grown over the P-type substrate. N-type material is implanted in the epi layer to complete the isolation wall for the pnp transistor, and to complete the collector for the npn transistor. P-type and N-type material also is implanted in the P-type epi layer to form the bases and emitters for the npn and pnp transistors.
    Type: Grant
    Filed: January 18, 1995
    Date of Patent: December 21, 1999
    Assignee: Analog Devices, Inc.
    Inventors: Jerome F. Lapham, Brad W. Scharf
  • Patent number: 5939759
    Abstract: In a semiconductor device including a silicon substrate, an insulating layer on the silicon substrate, a silicon layer on the insulating layer, the silicon layer being weakly doped with impurities of a first conduction type, a base region extending into the silicon layer from the free surface thereof, the base region being doped with impurities of a second conduction type, an emitter region extending into the base region from the free surface thereof, the emitter region being heavily doped with impurities of the first conduction type, and at least one collector region extending into the silicon layer from the free surface thereof at a lateral distance from the base region, the collector region being doped with impurities of the first conduction type, a floating collector region is provided in the silicon layer between the insulating layer and the base region at a distance from the base region.
    Type: Grant
    Filed: June 21, 1997
    Date of Patent: August 17, 1999
    Assignee: Telefonaktiebolaget LM Ericsson
    Inventor: Torkel Bengt Arnborg