Abstract: Systems and methods are provided for a gasket that allows for a single cooling cold plate to touch one or more devices. These devices may have precise but varying thermal interfaces and mounting pressure requirements; and height and co-planarity tolerances that need to be accommodated. The gasket may be sandwiched in between a top stiffener plate and a floating cold plate along an outer perimeter of the gasket; and a rigid, cold plate base and a bottom stiffener plate along an inner perimeter of the gasket. The resulting seal allows coolant to flow between the rigid and floating cold plates as these plates move (i.e., float) with respect to one another. Thus, the gasket aids in a cooling apparatus achieve an optimum thermal interface with each of the one or more devices simultaneously, while accounting for the individual tolerance variations across each device.

Abstract: An angular detection system including a magnet and sensors is disclosed. The magnet can be located on a rotating component and the sensors can be located on a stationary component, or vice versa. The magnet can generate a plurality of magnetic flux lines. The plurality of sensors can be located and spatially separated along the motion path of the magnet for detecting the magnetic flux densities. The strength of the magnetic flux lines sensed by a given sensor can be used to determine the location of the magnet along its motion path. The plurality of sensors can generate one or more signals indicative of the strength of the sensed magnetic field lines. Based on the strength of the magnetic flux lines, the location of the magnet, or both, the system can determine the angle of rotation of the device by using a polynomial function or a look-up table.

Abstract: A loop heat pipe includes a stacked structure formed by metal layers that are stacked, including an outermost metal layer arranged at one outermost surface of the loop heat pipe. The stacked structure forms an evaporator configured to vaporize a working fluid and generate vapor, a condenser configured to liquefy the vapor of the working fluid, a vapor pipe configured to connect the evaporator and the condenser, and a liquid pipe configured to connect the evaporator and the condenser, to form a loop-shaped passage. The outermost metal layer has an outer surface formed with grooves.

Abstract: The power module includes: an insulating substrate having an upper surface on which a semiconductor element is mounted; a base plate joined to a lower surface of the insulating substrate; a case member surrounding the insulating substrate and adhered to the base plate; a sealing resin provided in a region surrounded by the base plate and the case member, so as to seal the insulating substrate; and a holding plate projecting from an inner wall of the case member to above an outer peripheral portion of the insulating substrate, the holding plate being fixed to the inner wall, the holding plate being in contact with the sealing resin.

Abstract: Apparatuses and methods for semiconductor die heat dissipation are described. For example, an apparatus for semiconductor die heat dissipation may include a substrate and a heat spreader. The substrate may include a thermal interface layer disposed on a surface of the substrate, such as disposed between the substrate and the heat spreader. The heat spreader may include a plurality of substrate-facing protrusions in contact with the thermal interface layer, wherein the plurality of substrate-facing protrusions are disposed at least partially through the thermal interface layer.

Abstract: A semiconductor device includes a cooling jacket having an inlet for coolant and an outlet for the coolant, a base plate, a first semiconductor element provided on the base plate, a second semiconductor element provided on the base plate, a first fin provided directly under the first semiconductor element on a back surface of the base plate and placed within the cooling jacket, a second fin provided directly under the second semiconductor element on the back surface of the base plate and placed within the cooling jacket, and a separator provided within the cooling jacket to divide the coolant entering the cooling jacket through the inlet into portions respectively cooling the first fin and the second fin.

Abstract: Apparatus for controlling the thermal uniformity of a substrate can control the thermal uniformity of the substrate to be more uniform or to be non-uniform. In some embodiments, an apparatus for controlling the thermal uniformity of a substrate includes: a substrate support having a support surface to support a substrate thereon. A flow path is disposed within the substrate support to flow a heat transfer fluid beneath the support surface. The flow path comprises a first portion and a second portion, each portion having a substantially equivalent axial length. The first portion is spaced about 2 mm to about 10 mm from the second portion. The first portion provides a flow of heat transfer fluid in a direction opposite a flow of heat transfer fluid of the second portion.

Abstract: An electronic device, immersed in a coolant filled in a cooling apparatus, and directly cooled, is configured to be housed in housing parts of the cooling apparatus, and includes a metal board held with board retainers disposed in the housing part, and substrate groups attached to a first surface of the metal board and a second surface opposite the first surface. The substrate group includes first circuit boards, each including sockets for mounting processors and main memories on one surface of a substrate, and a component for interconnecting the processors, a second circuit board including a mother board component which includes a chipset for controlling the main memory, and a flow channel formed in a gap between a surface opposite the one surface of the first circuit boards, and one surface of the second circuit board, which faces the surface opposite the one surface of the first circuit boards.

Abstract: A sputter target assembly particularly useful for a large panel plasma sputter reactor having a target assembly sealed both to the main processing chamber and a vacuum pumped chamber housing a moving magnetron. The target assembly to which target tiles are bonded includes an integral plate with parallel cooling holes drilled parallel to the principal faces. The ends of the holes may be sealed and vertically extending slots arranged in two staggered groups on each side and machined down to respective pairs of cooling holes on opposite sides of the backing plate in pairs. Four manifolds tubes are sealed to the four groups of slots and provide counter-flowing coolant paths.

Abstract: Provided is a laser light source device which has a plurality of semiconductor laser elements arranged in an array and is provided with: a heat sink; a sub-mount substrate which is placed on one end edge of the heat sink, which has a power feed path, and on which the semiconductor laser array is mounted; an insulation plate placed in an area other than the sub-mount substrate on the heat sink; a first electrode plate mounted on the insulation plate; a second electrode plate mounted on the insulation plate separately from the first electrode plate; metal wires electrically connecting respectively between the first electrode plate and the sub-mount substrate and between the second electrode plate and the semiconductor laser array; and a cooling block on which the heat sink is mounted and which has a cooling water flow channel inside of the cooling block.

Abstract: The present invention relates to a modular cooling apparatus for a high-voltage direct-current transmission system. A sub-module (10) according to the present invention comprises a power unit (12) in the front and a capacitor unit (13) in the rear, and a heat sink (30) for discharging heat generated from the interior is provided in an interior space (14?) of a power unit housing (14) forming the exterior of the power unit (12). A coolant path (31) is provided in the interior of the heat sink (30). The entrance and exit of the coolant path (31) are located adjacent to the bottom surface of the interior space (14?). Connecting couplers (20) for supplying coolant to the interior space (14?) are provided on the sloped surface (16) on the bottom end of the front surface (15) of the power unit housing (14). The sloped surface (16) is formed so as to face the ground at an angle.

Abstract: The present application discloses a liquid immersion tank capable of withstanding, though made of a resin, a load of coolants and keeping dimensional accuracy. The liquid immersion tank including: a tank body being receivable of an electronic equipment and filled with a fluorine-series insulating coolant; and a fixing portion being provided on an inner wall surface of the tank body and receiving fixation of the electronic equipment, the tank body being equal to or smaller than 2% in modulus of volume change when immersed in the fluorine-series insulating coolant, and being composed of a resin material being equal to or smaller than 15×10?5/K in coefficient of linear expansion.

Abstract: An electric power converter includes a switching device that performs electric-power conversion through switching, an insulated substrate having a first side and a second side that are opposite to each other, a first circuit with which the switching device is electrically connected and that is bonded to the first side of the insulated substrate, a second circuit that is formed in a shape the same as that of the first circuit and is bonded to the second side of the insulated substrate, and a base to which the second circuit is bonded through the intermediary of a bonding layer; each of corner portions in the respective planar shapes of the first circuit and the second circuit has a stress relaxation portion that is formed in such a way as to have a smaller thickness than the other portion.

Abstract: A blower motor of a heating, ventilating and air conditioning (HVAC) system for a vehicle includes: a base including an introduction path to introduce air into the base and a substrate having a plurality of elements attached to the substrate, and a heat sink formed to have a plate shape in surface contact with one surface of the substrate and having a contact surface contacting the air introduced through the introduction path and configured to guide the introduced air to heat generation parts formed on the contact surface.

Abstract: A heat-dissipating device for expansion card is provided. The expansion card has a printed circuit card. The printed circuit card has an inserting-type connecter at one end thereof and a securing hole formed at the other end thereof. The heat-dissipating device includes a base plate, a plurality of cooling fins protruded from the base plate, a screwing portion, and at least one hooking part. The base plate has a flat bottom surface, a first side and a second side opposite to the first side. The screwing portion is formed at the first side of the base plate. The position of the screwing portion is corresponding to that of the securing hole of the expansion card. The at least one hooking part is disposed at the second side of the base plate and is hooked with one side of the printed circuit card.

Abstract: A liquid-ejection head including: a substrate on or above which a plurality of actuators are formed, the plurality of actuators generating energy for ejecting a liquid; and a flow-passage-forming member on or above the substrate, the flow-passage-forming member defining ejection ports through which the liquid is ejected and a plurality of liquid chambers each having a corresponding one of the plurality of actuators, the flow-passage-forming member including an orifice plate defining the ejection ports and liquid-chamber side walls defining side walls of the plurality of liquid chambers, the flow-passage-forming member being formed of an inorganic material and having a depressed portion between the liquid chambers, and the depressed portion being filled with a photosensitive resin.

Abstract: A power module includes a base plate, first, second, and third semiconductor chips. At least one of a third edge or fourth edge of the first semiconductor chip is disposed adjacent to a side end of the base plate. Among a half of a distance from a first edge of the first semiconductor chip to one edge of the second semiconductor chip, a half of a distance from a second edge of the first semiconductor chip to one edge of the third semiconductor chip, and a distance from the third edge or fourth edge of the first semiconductor chip disposed adjacent to the side end of the base plate to the side end of the base plate, a length of a solder fillet formed on the edge of the first semiconductor chip at the shortest distance is formed in the shortest length.

Abstract: An electric power converter includes a semiconductor module with a built-in switching element, a cooler that cools the semiconductor module, and a metallic case provided with an internal space that accommodates the semiconductor module and the cooler. The case is formed by combining a first case member and a second case member. The case includes an outer fixing portion for connecting and fixing the first case member and the second case member on an outside of the internal space, an inner fixing portion for connecting and fixing the first case member and the second case member on an inside of the internal space. The case includes a partition wall that is formed continuously from the inner fixing portion and partitions the internal space. A heat-generating component disposed along a wall surface of the partition wall is accommodated in the internal space.

Abstract: In various embodiments, a package may be provided. The package may include a chip carrier. The package may further include a chip arranged over the chip carrier. The package may also include encapsulation material encapsulating the chip and partially the chip carrier. A coolant receiving recess may be provided over the chip in the encapsulation material, wherein the coolant receiving recess is configured to receive coolant.

Abstract: A semiconductor device including: a semiconductor element, a substrate having a first surface on which the semiconductor element is provided, and a second surface located opposite the first surface, a metal species provided on the second surface, and a plated metal portion provided at least in part on the second surface on the metal species. The semiconductor device further includes a first region where the plated metal portion is provided and a second region where the plated metal portion is not provided are alternately arranged at a peripheral portion of the second surface.

Abstract: An assembly includes a chip including an integrated circuit, a casing including an integrated circuit and including an upper portion formed on a side of the chip, a lower portion formed on another side of the chip, and a cooling inlet and a cooling outlet for transferring a coolant, provided in an upper surface of the casing, and forming outer sidewalls of the upper portion and inner sidewalls of the lower portion, plural through-wafer vias (TWVs) for electrically connecting the integrated circuit of the chip and the integrated circuit of the casing, and a card connected to the casing for electrically connecting the casing to a system board. The card includes an upper card connected to the upper portion of the casing, and a lower card connected to the lower portion of the casing.

Abstract: An assembly includes a chip including an integrated circuit, a casing including an integrated circuit including plural active elements and including an upper portion formed on a side of the chip, a lower portion formed on another side of the chip, and a cooling inlet and a cooling outlet for transferring a coolant, provided in an upper surface of the casing, and forming outer sidewalls of the upper portion and inner sidewalls of the lower portion, plural through-wafer vias (TWVs) for electrically connecting the integrated circuit of the chip and the integrated circuit of the casing, and a card connected to the casing for electrically connecting the casing to a system board.

Abstract: In an upper phase module 2, a second electrode terminal 24V is located at a center C1 of the upper phase module 2, and a first electrode terminal 24U and a third electrode terminal 24W, and a first P terminal 25P and a second P terminal 26P are located so as to be symmetric with respect to the second electrode terminal 24V in an X-direction. The first electrode terminal 24U, the second electrode terminal 24V, the third electrode terminal 24W, the first P terminal 25P and the second P terminal 26P of the upper phase module 2 are located at the same positions as those of a fourth electrode terminal 34U, a fifth electrode terminal 34V, a sixth electrode terminal 34W, a first N terminal 35N and a second N terminal 36N of a lower phase module 3, respectively, in the X-direction.

Abstract: An electrostatic chuck includes a chuck base and cooling pipes. The chuck base has at least four cooling zones, in which the cooling zones viewed at a direction normal to the chuck base are fan-shaped. The cooling pipes are respectively disposed in the cooling zones of the chuck base. Therefore, the cooling pipes disposed in the different cooling zones can be controlled individually.

Abstract: An integrated circuit structure includes a die including a semiconductor substrate, dielectric layers over the semiconductor substrate, an interconnect structure including metal lines and vias in the dielectric layers, a plurality of channels extending from inside the semiconductor substrate to inside the dielectric layers, and a dielectric film over the interconnect structure and sealing portions of the plurality of channels. The plurality of channels is configured to allow a fluid to flow through.

Abstract: This disclosure generally relates to high-speed fiber optic networks that use light signals to transmit data over a network. The disclosed subject matter includes devices and methods relating to header subassemblies and/or optoelectronic subassemblies. In some aspects, the disclosed devices and methods may relate to a header subassembly that can include: a substrate with a substrate top and a substrate bottom; at least one optoelectronic transducer on the substrate top; at least one top electrical component on the substrate top, the electrical component can be operably coupled with the optoelectronic transducer; and at least one bottom electrical component on the substrate bottom, the bottom electrical component can be operably coupled with the optoelectronic transducer.

Abstract: A reusable phase-change thermal interface structure having a metal based foam and a fusible metal based alloy is provided. In a solid phase of the fusible metal based alloy the fusible metal based alloy is disposed at least in a portion of the metal based foam. Further, in a liquid phase of the fusible metal based alloy the fusible metal based alloy is disposed at least on a portion of one or more outer surfaces of the metal based foam.

Abstract: A laser diode package includes a heat pipe having a fluid chamber enclosed in part by a heat exchange wall for containing a fluid. Wicking channels in the fluid chamber is adapted to wick a liquid phase of the fluid from a condensing section of the heat pipe to an evaporating section of the heat exchanger, and a laser diode is connected to the heat exchange wall at the evaporating section of the heat exchanger so that heat produced by the laser diode is removed isothermally from the evaporating section to the condensing section by a liquid-to-vapor phase change of the fluid.

Abstract: An electronic device includes a housing body, a dividing member that divides the housing body into a first compartment and a second compartment, a sealing member that divides the first compartment into a liquid-stopper region and an exterior communication region, one or more heat emitting components disposed in the liquid-stopper region, a fan disposed in the exterior communication region, and a ventilation pathway through which an airflow passes through the dividing member to the second compartment due to driving the fan.

Abstract: A cooling structure for large electronic boards with closely-spaced heterogeneous die and packages is disclosed. The assembly includes a frame having a plurality of openings. The assembly further includes a cold plate mounted to the frame. The cold plate includes at least one inlet and at least one outlet and fluid channels in communication with the at least one inlet and the at least one outlet. The assembly further includes a heat sink mounted within each of the plurality of openings which in combination with sidewalls of the openings of the frame and the cold plate form individual compartments each of which are in fluid communication with the fluid channels.

Abstract: The subject disclosure is directed towards a datacenter or partial datacenter (e.g., a datacenter module) contained in a sealed container. The container may be filled with a cooling fluid, such as a dielectric fluid, to help cool the datacenter components. The container and its internal datacenter or datacenter portion may be submerged in water, in which event the fluid also helps to equalize the external water pressure.

Abstract: A semiconductor device in which the electrical connection is established using conductive pins and a printed wiring board, wherein the printed wiring board is mounted parallel to an insulated circuit board to prevent poor bonding of the conductive pins. A third-type conductive pin is arranged in such a manner as to be connected to a first metal layer at a position farther than a first-type conductive pin arranged at a position farthest from a side that is in contact with a gap between island regions. Similarly, another third-type conductive pin is arranged in such a manner as to be connected to another first metal layer at a position farther than another first-type conductive pin arranged at a position farthest from another side that is in contact with the gap between the island regions.

Abstract: An electronic chip package including a base defining a fluid inlet opening for receiving pressurized fluid from a fluid source and a fluid outlet opening. A dielectric body is arranged on the base and configured to support an electronic device. The dielectric body comprises a coolant flow chamber formed in a first surface thereof, and a plurality of impingement openings formed within the coolant flow chamber. The plurality of impingement openings are in communication with the fluid inlet opening of the base for generating a plurality of fluid streams to be expelled into the coolant flow chamber. The body further comprises a coolant return port formed within the coolant flow chamber and in communication with the fluid outlet opening of the base.

Abstract: A semiconductor assembly for use with forced liquid and gas cooling. A relatively rigid nano-structure (for example, array of elongated nanowires) extends from an interior surface of a cap toward a top surface of a semiconductor chip, but, because of the rigidness and structural integrity of the nano-structure built into the cap, and of the cap itself, the nano-structure is reliably spaced apart from the top surface of the chip, which helps allow for appropriate cooling fluid flows. The cap piece and nano-structures built into the cap may be made of silicon or silicon compounds.

Abstract: Various embodiments herein relate to methods and apparatus for performing anisotropic ion beam etching to form arrays of channels. The channels may be formed in semiconductor material, and may be used in a gate-all-around device. Generally speaking, a patterned mask layer is provided over a layer of semiconductor material. Ions are directed toward the substrate while the substrate is positioned in two particular orientations with respect to the ion trajectory. The substrate switches between these orientations such that ions impinge upon the substrate from two opposite angles. The patterned mask layer shadows/protects the underlying semiconductor material such that the channels are formed in intersecting shadowed regions.

Abstract: Methods of fabricating cooling apparatus are provided which facilitate cooling a multi-component assembly, such as a hub module assembly. The cooling apparatus includes a first liquid-cooled heat sink configured to facilitate removal of heat generated by one or more first electronic components of the multi-component assembly, and a second liquid-cooled heat sink configured to facilitate removal of heat generated by one or more second electronic components of the multi-component assembly. The first liquid-cooled heat sink is separably coupled to the multi-component assembly, and the second liquid-cooled heat sink is fixedly secured to the multi-component assembly. Fluid couplers fluidically couple the first and second liquid-cooled heat sinks to facilitate liquid coolant flow through the fixedly-secured, second liquid-cooled heat sink from the separably-coupled, first liquid-cooled heat sink.

Abstract: The present subject matter is directed to apparatus and methods for producing a variable frequency output waveform from a power converter for use in a power generation system, such as a wind turbine power generation system. A voltage divider is employed to provide plural voltage levels to which a multi-level bridge circuit employing selectively activated switches in pairs of switches is coupled. The switches are operated in such a fashion as to produce a generally sinusoidal waveform that may be easily filtered by low cost filters due to the plural voltage levels to produce a generally smooth sine wave from the converter. Such converters may be used in various environments including in pairs in multi-phase power converters.

Abstract: An optical module is disclosed. The optical module includes: a package substrate; an optical device disposed on the package substrate; a clear mold disposed on the package substrate and the optical device; an light blocking mold disposed on the package substrate, surrounding an optical device on the package substrate, and having an opening above the optical device; and a flexible buffer layer disposed on the light blocking mold. The light blocking mold and the flexible buffer layer are integrally formed of light blocking materials different from each other. An optical module including a plurality of optical devices is also disclosed.

Abstract: A semiconductor device is disclosed in which an implant board and a semiconductor element of a semiconductor mounting board are bonded and electrically connected through implant pins and which can be manufactured with high productivity. Implant pins are bonded to a semiconductor element and/or a circuit pattern of a semiconductor mounting board through cylindrical terminals press-fitted into the other ends of the implant pins. Press-fitting depth L2 of each of the implant pins into corresponding cylindrical terminals is adjustable, so that total length of the implant pin and cylindrical terminal which are press-fitted to each other matches up with the distance between the semiconductor element and/or the circuit pattern on the semiconductor mounting board and an implant board.

Abstract: A method includes forming a first oxide layer on a surface of an integrated heat spreader, and forming a second oxide layer on top surfaces of fins, wherein the fins are parts of a heat sink. The integrated heat spreader is bonded to the heat sink through the bonding of the first oxide layer to the second oxide layer.

Abstract: The cooling device comprises a heat exchange unit provided in a cooling water flow path. The heat exchange unit has a plate part in the form of a plate and multiple fins erected on the plate face of the plate part, and provided in the manner that the plate face of the plate part extends along the cooling water flow path and the cooling water runs through the space between the fins. The multiple fins are each in the form of a rhombic column and provided on the plate part in a lattice pattern in the manner that the longer diagonal of the rhombic column extends along the cooling water flow path.

Abstract: An integrated circuit (IC) stack device for thermal management is disclosed. The IC stack device can include a primary IC having a first set of cores with a ratio of first enabled cores and first disabled cores. The IC stack device can also have a supplementary IC interfaced with the primary IC, and having a second set of cores with a second ratio of second enabled cores and second disabled cores, with the second ratio being less than the first ratio. The integrated circuit stack device can also include a cooling element located such that the primary integrated circuit is between the cooling element and the supplementary integrated circuit. The cooling element can be designed to facilitate heat dissipation of the first and second enabled cores of the primary integrated circuit and the supplementary integrated circuit.

Abstract: A semiconductor assembly for use with forced liquid and gas cooling. A relatively rigid nano-structure (for example, array of elongated nanowires) extends from an interior surface of a cap toward a top surface of a semiconductor chip, but, because of the rigidness and structural integrity of the nano-structure built into the cap, and of the cap itself, the nano-structure is reliably spaced apart from the top surface of the chip, which helps allow for appropriate cooling fluid flows. The cap piece and nano-structures built into the cap may be made of silicon or silicon compounds.

Abstract: A semiconductor device is a resin package structure including a semiconductor element T1 molded with a first resin 6. The first resin 6 contains a filler 7 including an electrical insulating capsule enclosed with a phase-change-material that absorbs ambient heat and phase-changes so as to increase a dielectric-strength. The effect of the filler 7 achieves a structure with satisfactory heat dissipation and a high withstand voltage.

Abstract: A cooling structure for cooling a heat generating element allows cooling fluid to circulate around the heat generating element or a base material with the heat generating element disposed thereon. The cooling structure is provided with a vortex-flow generating portion which extends in a direction intersecting a circulation direction of the cooling fluid, and which generates a vortex flow depending on the flow rate of cooling fluid.

Abstract: A semiconductor module cooler includes a fin which is a heat sink, which is thermally connected to a semiconductor element, and which has one or more notches in an edge at one or more arbitrary positions in a longitudinal direction and one or more convex ribs which are formed on a bottom of a water jacket having a cooling flow path and which fit into the one or more notches at one or more arbitrary positions. By doing so, the efficiency of transferring heat generated by the semiconductor element by a coolant is improved and cooling performance is improved.

Abstract: Cooling apparatuses are provided which facilitate cooling a multi-component assembly, such as a hub module assembly. The cooling apparatus includes a first liquid-cooled heat sink configured to facilitate removal of heat generated by one or more first electronic components of the multi-component assembly, and a second liquid-cooled heat sink configured to facilitate removal of heat generated by one or more second electronic components of the multi-component assembly. The first liquid-cooled heat sink is separably coupled to the multi-component assembly, and the second liquid-cooled heat sink is fixedly secured to the multi-component assembly. Fluid couplers fluidically couple the first and second liquid-cooled heat sinks to facilitate liquid coolant flow through the fixedly-secured, second liquid-cooled heat sink from the separably-coupled, first liquid-cooled heat sink.

Abstract: Disclosed herein is a battery module including a plurality of plate-shaped battery cells mounted in a module case in a state in which the plate-shaped battery cells are sequentially stacked, wherein each of the plate-shaped battery cells includes an electrode assembly of a cathode/separator/anode structure mounted in a battery case formed of a laminate sheet including a resin layer and a metal layer, and a plurality of heat dissipation members are disposed in two or more interfaces between the respective plate-shaped battery cells such that heat generated from the plate-shaped battery cells during charge and discharge of the plate-shaped battery cells is removed by thermal conduction through the heat dissipation members.

Abstract: An upper rotation body is rotatably attached on a lower travelling body. A storage battery module is loaded onto the upper rotation body. The storage battery module has a plurality of plate-shaped storage battery cells that are stacked in z direction when an xyz rectangular coordinate system is defined. At least one heat transfer plate is arranged between the storage battery cells. Pressing plates, which are arranged at both ends of the stack structure of the storage battery cells, apply a compressive force in the stacking direction to the storage battery cells. A first wall plate and a second wall plate pinch the stacked body in the y-direction and are fixed to the pressing plates. The positions of the heat transfer plates are restricted with respect to the first wall plate and the second wall plate.

Abstract: Methods for cooling process chamber components are provided herein. In some embodiments, a method of cooling a process chamber component may include reducing a power provided to a heater disposed proximate a surface of the process chamber component to reduce an amount of heat provided to the component by the heater; providing a coolant to coolant channels disposed within the process chamber component using a pulsed flow having a duty cycle until the process chamber component reaches a temperature that is less than or equal to a predetermined magnitude above a temperature of the coolant; and after the process chamber component reaches the temperature less than or equal to the predetermined magnitude above a temperature of the coolant, reducing the duty cycle of the pulsed flow of the coolant to zero.