Platinum Group Metal Or Silicide Thereof Patents (Class 257/769)
  • Patent number: 5396095
    Abstract: A semiconductor device in which a capacitor (2) is provided on a surface (10) of a semiconductor body (3) with a semiconductor element (1) in which a lower electrode (11), an oxidic ferroelectric dielectric (12) and an upper electrode (13) are provided in that order, the upper electrode not covering an edge of the dielectric, after which an insulating layer (14) with superimposed metal conductor tracks is provided. According to the invention, the edge of the dielectric (12) not covered by the upper electrode (13) is coated with a coating layer (14, 20, or 30) practically imperviable to hydrogen, after which the device is heated in a hydrogen-containing atmosphere. Heating in a hydrogen atmosphere neutralizes dangling bonds which arise during deposition of the conductor tracks on the insulating layer, while the coating layer protects the dielectric from attacks by hydrogen. The semiconductor device then has a shorter access time.
    Type: Grant
    Filed: March 4, 1994
    Date of Patent: March 7, 1995
    Assignee: U.S. Philips Corporation
    Inventors: Robertus A. M. Wolters, Poul K. Larsen, Mathieu J. E. Ulenaers
  • Patent number: 5369299
    Abstract: A tamper resistant structure has a pattern which covers portions of an IC but exposes other portions of the IC so that etching away the tamper resistant structure destroys the exposed portions. The IC can not be easily disassembled and reverse engineered because the tamper resistant structure hides active circuitry and removing the tamper resistant structure destroys active circuitry. One embodiment of the tamper resistant structure includes a metal layer and a cap layer. The cap layer typically includes material that is difficult to remove, such as silicon carbide, silicon nitride, or aluminum nitride. The metal layer typically includes a chemically resistant material such as gold or platinum. A bonding layer of nickel-vanadium alloy, titanium-tungsten alloy, chromium, or molybdenum, may be used to provide stronger bonds between layers. Some embodiments provide an anti-corrosion seals for bonding pads in addition to the tamper residant structure.
    Type: Grant
    Filed: July 22, 1993
    Date of Patent: November 29, 1994
    Assignee: National Semiconductor Corporation
    Inventor: Robert C. Byrne
  • Patent number: 5323022
    Abstract: A method and resulting ohmic contact structure between a high work function metal and a wide bandgap semiconductor for which the work function of the metal would ordinarily be insufficient to form an ohmic contact between the metal and the semiconductor. The structure can withstand annealing while retaining ohmic characteristics. The ohmic contact structure comprises a portion of single crystal wide bandgap semiconductor material; a contact formed of a high work function metal on the semiconductor portion; and a layer of doped p-type semiconductor material between the single crystal portion and the metal contact. The doped layer has a sufficient concentration of p-type dopant to provide ohmic behavior between the metal and the semiconductor material.
    Type: Grant
    Filed: September 10, 1992
    Date of Patent: June 21, 1994
    Assignee: North Carolina State University
    Inventors: Robert C. Glass, John W. Palmour, Robert F. Davis, Lisa S. Porter
  • Patent number: 5293075
    Abstract: A semiconductor device comprising an oxide film, an electrode and a PZT or PLZT film formed in this order on a substrate, the electrode being a deposit of platinum containing lead.
    Type: Grant
    Filed: May 29, 1992
    Date of Patent: March 8, 1994
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Shigeo Onishi, Kazuya Ishihara, Keizo Sakiyama
  • Patent number: 5281841
    Abstract: A semiconductor device (1) includes a circuit having at least one transistor Tr1 and first and second electrodes (30) and (32). A protection element (20) having a device region (21) forming a pn junction (23) within the semiconductor body (10) and covered by an electrode layer (21c) is connected via an electrode (27) to one (30) of the first and second electrodes for providing a conductive path between the first and second electrodes (30) and (32) when a voltage above a threshold voltage is applied to the first electrode (30). The electrode layer (21c) forms with at least part (21a) of the device region (21) a potential barrier (B) for causing the conductive path provided by the protection element (20) to pass from the electrode (27) to the pn junction (23) at least partly via the device region (21) of the protection element (20) thereby increasing the resistance of the path to the pn junction (23).
    Type: Grant
    Filed: August 21, 1992
    Date of Patent: January 25, 1994
    Assignee: U.S. Philips Corporation
    Inventors: Leonardus J. Van Roozendaal, Rene G. M. Penning de Vries
  • Patent number: 5278450
    Abstract: A semiconductor device with a monocrystalline silicon body (1) is provided with a dielectric layer (2) with contact holes (3) through which the silicon body (1) is contacted with an aluminum metallization. To avoid undesirable separation of silicon, a discontinuous nucleus layer (5) of a metal nobler than silicon is formed on the silicon body (1) in the contact holes (3) preceding the provision of the metallization (4). Metals such as palladium and copper may be used to form the discontinuous layer.
    Type: Grant
    Filed: January 8, 1992
    Date of Patent: January 11, 1994
    Assignee: U.S. Philips Corporation
    Inventors: Robertus A. M. Wolters, Edwin T. Swart, Andreas M. T. P. Van Der Putten
  • Patent number: 5260603
    Abstract: A semiconductor device having a GaAs substrate and an ohmic electrode. An electrode pad is on part of the ohmic electrode and on part of the GaAs substrate outside the ohmic electrode. The electrode pad includes a first platinum film, a titanium film, a second platinum film, and a gold film which are sequentially deposited on one another. The first platinum film is thinner than each of the titanium film, second platinum film and gold film.
    Type: Grant
    Filed: September 8, 1992
    Date of Patent: November 9, 1993
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Mayumi Kamura, Souichi Imamura, Tatsuo Akiyama
  • Patent number: 5241216
    Abstract: A hermetic seal is provided for a conductive feedthrough through a thin ceramic component by a platinum or palladium lead by sealing the gap between the lead and the ceramic with a copper-copper oxide eutectic. The lead may have a copper coating on it prior to and subsequent to formation of the copper-copper oxide eutectic.
    Type: Grant
    Filed: December 21, 1989
    Date of Patent: August 31, 1993
    Assignee: General Electric Company
    Inventor: Harold F. Webster
  • Patent number: 5235210
    Abstract: An SB FET comprising source and drain regions formed in the surface of a gallium arsenide (GaAs) substrate, and a channel region formed between the source and drain regions. The gate electrode of the SB FET is formed on the channel region in Schottky contact therewith. The SB FET further comprises source and drain electrodes which are mounted on the source and drain regions in ohmic contact therewith, while being separated from each other at a greater distance than the length of the channel region.
    Type: Grant
    Filed: January 23, 1989
    Date of Patent: August 10, 1993
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Kazuhiko Inoue
  • Patent number: 5227361
    Abstract: A superconducting device comprises a substrate having an electric connecting section and a copper oxide superconducting material thereon, and an electric interconnecting means for the electric connecting section and the superconducting material formed from a first member selected from the group of copper, gold, platinum and materials including copper, gold, and platinum as a main component and tightly attached to the superconducting material, and/or a second member selected from the group of a heat resistant metal material and its compound with the first member and the substrate material and tightly attached to the first member and the substrate.
    Type: Grant
    Filed: April 29, 1988
    Date of Patent: July 13, 1993
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 5216264
    Abstract: A silicon carbide field-effect transistor is disclosed which includes an MOS structure composed successively of a silicon carbide layer, a gate insulator film, and a gate electrode. The field-effect transistor has source and drain regions formed in the silicon carbide layer, between which the MOS structure is disposed, wherein at least one of the source and drain regions is formed by the use of a Schottky contact on the silicon carbide layer.
    Type: Grant
    Filed: September 16, 1991
    Date of Patent: June 1, 1993
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Yoshihisa Fujii, Akira Suzuki, Katsuki Furukawa, Mitsuhiro Shigeta
  • Patent number: 5212150
    Abstract: A superconducting device comprises a substrate having an electric connecting section and a copper oxide superconducting material thereon, and an electric interconnecting means for the electric connecting section and the superconducting material formed from a first member selected from the group of copper, gold, platinum and materials including copper, gold, and platinum as a main component and tightly attached to the superconducting material, and/or a second member selected from the group of a heat resistant metal material and its compound with the first member and the substrate material and tightly attached to the first member and the substrate.
    Type: Grant
    Filed: February 16, 1990
    Date of Patent: May 18, 1993
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 5210431
    Abstract: In an ohmic contact electrode for the p-type semiconductor diamond, the electrode is formed of metals or metallic compounds containing boron on a p-type semiconductor diamond, so as to obtain a decreased contact resistance.
    Type: Grant
    Filed: February 7, 1992
    Date of Patent: May 11, 1993
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Tunenobu Kimoto, Tadashi Tomikawa, Shoji Nakagama, Masayuki Ishii, Nobuhiko Fujita
  • Patent number: 5196916
    Abstract: This is a highly purified metal comprising one metal selected from the group consisted of titanium, zirconium and hafnium. The highly purified metal has an Al content of not more than 10 ppm. It also has an oxygen content of not more than 250 ppm, each of Fe, Ni and Cr contents not more than 10 ppm and each of Na and K contents not more than 0.1 ppm. The highly purified metal is obtained by either purifying crude metal by the iodide process or surface treating crude metal to remove a contaminated layer existing on the surface thereof and then melting the surface treated material with electron beam in a high vacuum.
    Type: Grant
    Filed: February 15, 1991
    Date of Patent: March 23, 1993
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Ishigami, Minoru Obata, Mituo Kawai, Michio Satou, Takashi Yamanobe, Toshihiro Maki, Noriaki Yagi, Shigeru Ando
  • Patent number: 5164808
    Abstract: An improved ferroelectric structure and the method for making the same is disclosed. The improved structure reduces the fatigue problems encountered in ferroelectric capacitors while providing avoiding problems in depositing the ferroelectric material which have prevented other solutions to the fatigue problem from being effective. The improved ferroelectric structure also provides improved adhesion to the underlying substrate. The ferroelectric structure has a bottom electrode comprising a layer of PtO.sub.2 which is generated by depositing a layer of Platinum on a suitable substrate and then exposing the Platinum layer to an Oxygen plasma. The ferroelectric material is then deposited on the PtO.sub.2 layer.
    Type: Grant
    Filed: August 9, 1991
    Date of Patent: November 17, 1992
    Assignee: Radiant Technologies
    Inventors: Joseph T. Evans, Jr., Jeff A. Bullington, Carl E. Montross, Jr.