Abstract: Embodiments of the disclosure provide a method for manufacturing a semiconductor device. The method includes: providing a substrate having at least one trench; forming a first polysilicon layer in the trench, covering a sidewall and a bottom of the trench and not fully fills the trench; annealing the first polysilicon layer; and forming a second polysilicon layer at a region of the trench where the first polysilicon layer is not filled after annealing.

Abstract: Apparatuses, devices and systems associated with semiconductor packages with chiplet and memory device coupling are disclosed herein. In embodiments, a semiconductor package may include a first chiplet, a second chiplet, and a memory device. The semiconductor package may further include an interconnect structure that couples the first chiplet to a first memory channel of the memory device and the second chiplet to a second memory channel of the memory device. Other embodiments may be described and/or claimed.

Abstract: A semiconductor device includes a first insulating circuit board, a semiconductor element on the first insulating circuit board, and an encapsulating body. The first insulating circuit board includes a first insulating substrate, and a first inner conductor layer, and a first outer conductor layer. The first inner conductor layer is electrically connected to a first electrode of the semiconductor element inside of the encapsulating body. The first outer conductor layer is exposed from a surface of the encapsulating body. The first inner conductor layer has a first thin-wall portion a thickness of which reduces toward an outer side, along an outer peripheral edge of the first inner conductor layer with a first width. The first outer conductor layer (i) does not have or (ii) has a second thin-wall portion along the outer peripheral edge of the first outer conductor layer with a second width.

Abstract: A semiconductor device has a first substrate including an element region, a peripheral region that surrounds the element region, a first insulator with a first recess portion in the peripheral region, a first metal layer in the element region, and a first conductor in the peripheral region to surround the element region. A second substrate has an element region, a peripheral region that surrounds the element region, a second insulator with a second recess portion that faces the first recess portion, a second metal layer in contact with the first metal layer, and a second conductor that surrounds the element region of the second substrate.

Abstract: Provided is a semiconductor device capable of suppressing misalignment of a brazing material when bonding a metal terminal to a metal circuit pattern. The semiconductor device includes an insulating substrate with a metal circuit pattern formed in a surface thereof and a metal terminal bonded onto the metal circuit pattern via a hard brazing material, in which protrusions are provided on the metal circuit pattern, and the protrusions are in contact with the hard brazing material.

Abstract: A semiconductor interconnect and an electrode for semiconductor devices may include a thin film including a multielement compound represented by Formula 1 and having a thickness equal to or less than about 50 nm, a grain size (A) to thickness (B) ratio (A/B) equal to or greater than about 1.2, and a resistivity equal to or less than about 200 ??·cm: Mn+1AXn??Formula 1 In Formula 1, M, A, X, and n are as described in the specification.

Abstract: Metal nanowires, such as silver nanowires coated on a substrate were sintered together to form fused metal nanowire networks that have greatly improved conductivity while maintaining good transparency and low haze. The method of forming such a fused metal nanowire networks are disclosed that involves exposure of metal nanowires to various fusing agents on a short timescale. The resulting sintered network can have a core-shell structure in which metal halide forms the shell. Additionally, effective methods are described for forming patterned structure with areas of sintered metal nanowire network with high conductivity and areas of un-sintered metal nanowires with low conductivity. The corresponding patterned films are also described.

Abstract: Radio frequency (RF) packages containing substrates having coefficient of thermal expansion (CTE) matched mount pads are disclosed, as are methods for fabricating RF packages and substrates. In embodiments, the RF package contains a high thermal performance substrate including a metallic base structure, which has a frontside facing a first RF power die and a first die attach region on the frontside of the base structure. A first CTE matched mount pad is bonded to the metallic base structure and covers the first die attach region. The first CTE mount pad has a CTE greater than the CTE of RF power die and less than the CTE of the metallic base structure. An electrically-conductive bonding material attaches the RF power die to the first CTE matched mount pad, while RF circuitry integrated into first RF power die is electrically coupled to the metallic base structure through the mount pad.

Abstract: A package comprising a substrate, a first integrated device coupled to the substrate, a second integrated device coupled to the substrate, a first bridge and a second bridge. The first bridge is coupled to the first integrated device and the second integrated device. The first bridge is configured to provide at least one first electrical path between the first integrated device and the second integrated device. The first bridge is coupled to a top portion of the first integrated device and a top portion of the second integrated device. The second bridge is coupled to the first integrated device and the second integrated device. The second bridge is configured to provide at least one second electrical path between the first integrated device and the second integrated device.

Abstract: A semiconductor device includes a first dielectric layer disposed over a substrate and a conductive feature, a doped dielectric layer disposed over the first dielectric layer, a first metal portion disposed in the first dielectric layer and in contact with the conductive feature, and a doped metal portion disposed over the first metal portion. The first metal portion and the doped metal portion include a same noble metal material. The doped dielectric layer and the doped metal portion include same dopants. The dopants are bonded to the noble metal material.

Abstract: A semiconductor device includes an emitter, a base, and a collector. A portion of the collector is located below a trench in a substrate. A collector silicide is located on at least a portion of a bottom portion of the trench and on at least a portion of a sidewall of the trench. The collector silicide structure is electrically coupled to a collector contact structure.

Abstract: An integrated circuit package including a substrate configured to receive one or more high-bandwidth memory (HBM) stacks on the substrate, an interposer positioned on the substrate and configured to receive a logic die on the interposer, a plurality of interposer channels formed in the interposer and connecting the logic die to the one or more HBM stacks, and a plurality of substrate traces formed in the substrate and configured to interface the plurality of interposer channels to the one or more HBM stacks.

Abstract: A method of forming an interposer includes providing a first interposer substrate including a first bulk material having a plurality of first through silicon vias (TSVs) extending through the first bulk material. A second interposer substrate is provided and includes a second bulk material having a plurality of second TSVs extending through the second bulk material, and a wiring plane formed on the second bulk material such that the wiring plane is electrically connected to at least one of the second TSVs. The method further includes joining the first interposer substrate to the second interposer substrate such that the wiring plane is provided as an interface wiring plane between the first and second bulk materials which electrically connects at least one of the first TSVs to at least one of the second TSVs.

Abstract: A method of manufacturing a semiconductor structure includes the following steps: providing a first semiconductor wafer, wherein the first semiconductor wafer includes a first dielectric layer and at least one first top metallization structure embedded in the first dielectric layer, and a top surface of the first dielectric layer is higher than a top surface of the first top metallization structure by a first distance; providing a second semiconductor wafer, wherein the second semiconductor wafer includes a second dielectric layer and at least one second top metallization structure embedded in the second dielectric layer, and a top surface of the second top metallization structure is higher than a top surface second dielectric layer of the by a second distance; and hybrid-bonding the first semiconductor wafer and the second semiconductor wafer.

Abstract: Described herein are integrated circuit (IC) structures, devices, and methods associated with device layer interconnects. For example, an IC die may include a device layer including a transistor array along a semiconductor fin, and a device layer interconnect in the transistor array, wherein the device layer interconnect is in electrical contact with multiple different source/drain regions of the transistor array.

Abstract: Some embodiments include an integrated assembly having an interconnect over a first conductive structure and coupled with the first conductive structure. The interconnect includes a conductive core. The conductive core has a slender upper region and a wide lower region. The upper region joins to the lower region at a step. A liner laterally surrounds the lower region of the conductive core. The liner has an upper surface which is substantially coplanar with the step. An insulative collar is over and directly against both an upper surface of the step and the upper surface of the liner. The insulative collar laterally surrounds and directly contacts the slender upper region. A second conductive structure is over and directly against a region of the insulative collar, and is over and directly against an upper surface of the slender upper region. Some embodiments include methods of forming integrated assemblies.

Abstract: The present disclosure generally relates to stacked miniaturized electronic devices and methods of forming the same. More specifically, embodiments described herein relate to semiconductor device spacers and methods of forming the same. The semiconductor device spacers described herein may be utilized to form stacked semiconductor package assemblies, stacked PCB assemblies, and the like.

Abstract: A multilayer wiring board includes a first insulating layer, a second insulating layer stacked on the first insulating layer, a via conductor inside each of the first insulating layer and the second insulating layer, and a conductive bonding layer that bonds the via conductors to each other. The first insulating layer is directly bonded to the second insulating layer, and a relationship a1>b1 is satisfied, where a1 is a maximum diameter of the bonding layer and b1 is a maximum diameter of the via conductor at an interface with the bonding layer.

Abstract: The present invention aims to provide a conductive layered body having excellent solvent resistance and scratch resistance as well as a low haze value and a significantly high light transmittance. The present invention relates to a conductive layered body including, as an outermost layer thereof, a conductive layer containing a conductive fibrous filler, wherein the conductive layered body has a Martens hardness of 150 to 3,000 N/mm2 as measured at an indentation depth of 100 nm from a surface, and a ratio, in atomic percentage, of a conductive material element constituting the conductive fibrous filler on an outermost surface-side surface of the conductive layer is 0.15 to 5.00 at %.

Abstract: Multi-period thin-film structures exhibiting giant magnetoresistance (GMR) are described. Techniques are also described by which narrow spacing and/or feature size may be achieved for such structures and other thin-film structures having an arbitrary number of periods.

Abstract: A method limits lateral epitaxy growth at an N-P boundary area using an inner spacer. The method may include forming inner spacers on inner sidewalls of the inner active regions of a first polarity region (e.g., n-type) and an adjacent second polarity region (e.g., p-type) that are taller than any outer spacers on an outer sidewall of the inner active regions. During forming of semiconductor layers over the active regions (e.g., via epitaxy), the inner spacers abut and limit lateral forming of the semiconductor layers. The method generates larger semiconductor layers than possible with conventional approaches, and prevents electrical shorts between the semiconductor layers in an N-P boundary area. A structure includes the semiconductor epitaxy layers separated from one another, and abutting respective inner spacers. Any outer spacer on the inner active region is shorter than a respective inner spacer.

Abstract: A chip on film package including a flexible film, a first patterned circuit layer, one or more first chips, a second patterned circuit layer, and one or more second chips. The flexible film includes a first surface and a second surface opposite to the first surface. The first patterned circuit layer is disposed on the first surface. The one or more first chips are mounted on the first surface and electrically connected to the first patterned circuit layer. The second patterned circuit layer is disposed on the second surface. The one or more second chips are mounted on the second surface and electrically connected to the second patterned circuit layer.

Abstract: A method of generating a layout diagram including a first level of metallization (M_1st level) including: identifying, in the layout diagram, a filler cell and a first functional cell substantially abutting the filler cell; the first functional cell including first and second side boundaries, first wiring patterns in the M_1st level, and representing corresponding first conductors in the first functional cell region; and first and second groups of cut patterns overlying corresponding portions of the first wiring patterns and being substantially aligned with the corresponding first and second side boundaries; adjusting one or more locations of corresponding one or more selected cut patterns of the second group thereby correspondingly elongating one or more selected ones of the first wiring patterns so as to be corresponding first elongated wiring patterns which extend across the second boundary of the first functional cell into the filler cell.

Abstract: Apparatus, systems, and methods for processing workpieces are provided. In one example implementation, a fluorine and oxygen plasma-based process can be used to smooth a roughened surface of a silicon and/or a silicon containing structure. The process can include generating species from a process gas using an inductive coupling element in a first chamber. The process can include introducing a fluorine containing gas and an oxygen containing gas with the species to create a mixture. The process can further include exposing the silicon and/or the silicon containing structure to the mixture such that the mixture at least partially etches a roughened portion to leave a smoother surface of the silicon and/or the silicon containing structure.

Abstract: A semiconductor package includes a base wafer including a first substrate and at least one first through via electrode extending through the first substrate, and a first semiconductor chip provided on the base wafer. The first semiconductor chip includes a second substrate; and at least one second through via electrode extending through the second substrate. The at least one second through via electrode is provided on the at least one first through via electrode to be electrically connected to the at least one first through via electrode. A first diameter of the at least one first through via electrode in a first direction is greater than a second diameter of the at least one second through via electrode in the first direction.

Abstract: A display panel including a fan-out wire, an electrostatic discharge device, a signal wire, and a first conductive via structure is provided. The electrostatic discharge device has a first electrode and a second electrode. The first conductive via structure is electrically connected to the fan-out wire, the first electrode of the electrostatic discharge device, and the signal wire.

Abstract: An integrated circuit (IC) chip includes a via contact plug extending inside a through hole passing through a substrate and a device layer, a via contact liner surrounding the via contact plug, a connection pad liner extending along a bottom surface of the substrate, a dummy bump structure integrally connected to the via contact plug, and a bump structure connected to the connection pad liner. A method of manufacturing an IC chip includes forming an under bump metallurgy (UBM) layer inside and outside the through hole and forming a first connection metal layer, a second connection metal layer, and a third connection metal layer. The first connection metal layer covers the UBM layer inside the through hole, the second connection metal layer is integrally connected to the first connection metal layer, and the third connection metal layer covers the UBM layer on the connection pad liner.

Abstract: A method for forming a semiconductor device structure is provided. The method includes forming an epitaxial structure over a semiconductor substrate. The method also includes generating and applying plasma on an entire exposed surface of the epitaxial structure to form a modified region in the epitaxial structure. The plasma is directly applied on the source/drain structure without being filtered out, and the plasma includes ions with different charges. The method further includes forming a metal layer on the modified region and heating the metal layer and the modified region to form a metal-semiconductor compound region.

Abstract: The present disclosure, in some embodiments, relates to a multi-dimensional integrated chip structure. The structure includes a first interconnect layer within a first dielectric structure on a first substrate, and a second interconnect layer within a second dielectric structure on a second substrate. A bonding structure is between the first dielectric structure and the second substrate. An inter-tier interconnect structure extends through the second substrate and between a top of the first interconnect layer and a bottom of the second interconnect layer. The inter-tier interconnect structure includes a first region having substantially vertical sidewalls extending through the second substrate and a second region below the first region and having tapered sidewalls surrounded by the bonding structure.

Abstract: A cell circuit includes a first power rail, having a first line length, in a first layer. The first power rail is configured to receive a first voltage for the cell circuit. The cell circuit includes multiple lines in a second layer and a shunt in a third layer. The shunt is electrically coupled to the first power rail and a first set of lines of the multiple lines. The shunt has a second line length shorter than the first line length. The cell circuit includes another shunt in t the third layer. The other shunt is also parallel to the first power rail. The other shunt is electrically coupled to the first power rail and a second set of lines of the multiple lines. The other shunt has a third line length shorter than the first line length.

Abstract: A semiconductor device having one or more tiered pillars and methods of manufacturing such a semiconductor device are disclosed. The semiconductor device may include redistribution layers, a semiconductor die, and a plurality of interconnection structures that operatively couple a bottom surface of the semiconductor die to the redistribution layers. The semiconductor device may further include one or more conductive pillars about a periphery of the semiconductor die. The one or more conductive pillars may be electrically connected to the redistribution layers and may each comprise a plurality of stacked tiers.

Abstract: A solar cell includes elements, a connecting portion, and a transparent portion. The elements include first and second elements arrayed in a first direction. The transparent portion is located between the connecting portion and the second element. Each of the elements includes first and second electrode layers and a semiconductor layer interposed between the first and second electrode layers. Between the first element and the second element, their first electrode layers sandwich a first gap and their second electrode layers sandwich a second gap shifted in the first direction from the first gap. The connecting portion electrically connects the second electrode layer of the first element to the first electrode layer of the second element. The transparent portion is located between the second electrode layer of the first element and the first electrode layer of the second element at a position shifted in the first direction from the connecting portion.

Abstract: A semiconductor laser diode is disclosed. In an embodiment a semiconductor laser diode includes a semiconductor layer sequence including an active layer having a main extension plane, configured to generate light in an active region during operation and configured to radiate the light via a light-outcoupling surface, wherein the active region extends from a rear surface opposite the light-outcoupling surface to the light-outcoupling surface along a longitudinal direction in the main extension plane and a continuous contact structure directly disposed on a surface of the semiconductor layer sequence, wherein the contact structure comprises in at least a first contact region a first electrical contact material in direct contact with the surface region and in at least a second contact region a second electrical contact material in direct contact with the surface region, and wherein the first and second contact regions adjoin one another.

Abstract: Provided are a composition for a semiconductor process, which comprises a first component comprising an inorganic acid or an organic acid; and a second component comprising a silicon compound represented by Formula 1, and a semiconductor process, which comprises selectively cleaning and/or removing an organic substance or an inorganic substance using the composition.

Abstract: A resistive memory device including a substrate, an isolation structure, a word line, a source line, a bit line and a resistive memory is provided. The substrate includes a body region, and first, second and third doped regions, the first and second doped regions are spaced apart from each other by the body region. The isolation structure is disposed in the substrate, and the second doped region and the third doped region are spaced apart from each other by the isolation structure. The word line is disposed on the substrate, the first and second doped regions are located at opposite sides of the word line, and the first and third doped regions are located at the opposite sides of the word line. The source line is disposed on the substrate and electrically connected with the first doped region. The bit line and the resistive memory are disposed on the substrate, and the third doped region is electrically connected with the bit line via the resistive memory.

Abstract: Semiconductor dies including ultra-thin wafer backmetal systems, microelectronic devices containing such semiconductor dies, and associated fabrication methods are disclosed. In one embodiment, a method for processing a device wafer includes obtaining a device wafer having a wafer frontside and a wafer backside opposite the wafer frontside. A wafer-level gold-based ohmic bond layer, which has a first average grain size and which is predominately composed of gold, by weight, is sputter deposited onto the wafer backside. An electroplating process is utilized to deposit a wafer-level silicon ingress-resistant plated layer over the wafer-level Au-based ohmic bond layer, while imparting the plated layer with a second average grain size exceeding the first average grain size. The device wafer is singulated to separate the device wafer into a plurality of semiconductor die each having a die frontside, an Au-based ohmic bond layer, and a silicon ingress-resistant plated layer.

Abstract: Apparatuses and methods to provide a fully self-aligned via are described. Some embodiments of the disclosure provide an electronic device having a bridging via between a first metallization and a third metallization layer, the bridging via not contacting a second metallization layers. Methods of providing self-aligned bridging vias are also described.

Abstract: Connector structures and methods of forming the same are provided. A method includes forming a first patterned passivation layer on a workpiece, the first patterned passivation layer having a first opening exposing a conductive feature of the workpiece. A seed layer is formed over the first patterned passivation layer and in the first opening. A patterned mask layer is formed over the seed layer, the patterned mask layer having a second opening exposing the seed layer, the second opening overlapping with the first opening. A connector is formed in the second opening. The patterned mask layer is partially removed, an unremoved portion of the patterned mask layer remaining in the first opening. The seed layer is patterned using the unremoved portion of the patterned mask layer as a mask.

Abstract: Field effect transistor and methods of forming the same are disclosed. The field effect transistor includes a gate electrode, a contact etch stop layer (CESL), an inter layer dielectric (ILD) and a protection layer. The CESL includes SiCON and is disposed on a sidewall of the gate electrode. The IDL is laterally adjacent to the gate electrode. The protection layer covers the CESL and is disposed between the CESL and the ILD.

Abstract: A method for manufacturing a super-junction MOSFET entails forming a recessed shield electrode in a trench in a semiconductor layer of a substrate, the trench being lined with a first oxide layer. When the electrically conductive material forming the shield electrode is removed to recess the shield electrode, the first oxide layer on sidewalls of the trench is exposed. Removal of the first oxide layer from the sidewalls and from shield sidewalls of the electrode produces openings at a top part of the shield sidewalls. A second oxide layer is formed over the shield electrode and fills the openings. Part of the second oxide layer is removed to expose a top surface of the shield electrode. A gate dielectric is formed over the top surface of the shield electrode and conductive material is deposited over the gate dielectric in the trench to form a gate electrode of the MOSFET.

Abstract: The present disclosure includes methods of forming, and semiconductor structures for, integrated computing structures formed on silicon. An example method includes forming, on a silicon semiconductor material, an integrated computing structure by forming a number of complementary metal-oxide-semiconductor (CMOS) devices including a plurality of materials, forming a non-volatile memory (NVM) device including a plurality of materials, and forming the plurality of materials of the CMOS devices and the plurality of materials of the NVM device from a plurality of same materials shared at a corresponding plurality of positions within the structure. A particular function is provided by each of the plurality of same materials at the corresponding plurality of positions.

Abstract: A semiconductor device having one or more tiered pillars and methods of manufacturing such a semiconductor device are disclosed. The semiconductor device may include redistribution layers, a semiconductor die, and a plurality of interconnection structures that operatively couple a bottom surface of the semiconductor die to the redistribution layers. The semiconductor device may further include one or more conductive pillars about a periphery of the semiconductor die. The one or more conductive pillars may be electrically connected to the redistribution layers and may each comprise a plurality of stacked tiers.

Abstract: Described are example microelectronic devices including structures, such as build-up layers, formed of a non-homogeneous photoimageable dielectric material. The non-homogeneous photoimageable dielectric material includes two regions forming opposite surfaces of the material. A first region includes a first carbon content, and a second region located above the first region includes a second carbon content which is greater than that of the first region. The second region of the photoimageable dielectric material provides enhanced adhesion with metal that may be deposited above the material, such as a sputtered metal seed layer to facilitate subsequent deposition of an electroless metal over the non-homogeneous photoimageable dielectric material.

Abstract: A thermal bonding sheet includes a layer, in which hardness of the layer after being heated at a heating rate of 1.5° C./sec from 80° C. to 300° C. under pressure of 10 MPa, and then held at 300° C. for 2.5 minutes is in a range of 1.5 GPa to 10 GPa in measurement using a nanoindenter.

Abstract: The present invention provides a bonding method (S1) which is capable of achieving a high adhesive force without carrying out any special treatment on the second member (14), even in a case where the first member (11) has a surface on which a gold thin film (12) is formed. The first member (11) is made of a material other than gold and has a surface on which the gold thin film (12) is formed. The bonding method (S1) includes the steps of: (S11) irradiating, with laser light, at least part of a specific region (12a) of the surface of the first member (11), so that a base of the thin film (12) is exposed in the at least part of the specific region (12a); and (S12) bonding the second member (14) to the specific region (12a) by use of an adhesive (13).

Abstract: The present invention relates to a flexible transparent display sheet, and an image display apparatus including the same. The flexible transparent display sheet according to an embodiment of the present disclosure includes: a base disposed in a display area and a connection area; a metal layer formed on the base; an anti-oxide layer formed on a portion of the metal layer; a plurality of solders formed on a portion of the anti-oxide layer; a plurality of light emitters, each of which is connected to each of the plurality of solders; and an insulation layer disposed in the connection area and formed on the anti-oxide layer. Accordingly, a flexible transparent display sheet having an integrally formed power connector may be provided.

Abstract: Structures and formation methods of a semiconductor device structure are provided. The method includes forming a fin structure over a semiconductor substrate and forming a gate stack over the fin structure. The method also includes forming an epitaxial structure over the fin structure. The method further includes forming a dielectric layer over the epitaxial structure and forming an opening in the dielectric layer to expose the epitaxial structure. In addition, the method includes forming a modified region in the epitaxial structure. The modified region has lower crystallinity than an inner portion of the epitaxial structure and extends along an entirety of an exposed surface of the epitaxial structure. The method also includes forming a semiconductor-metal compound region on the epitaxial structure. All or some of the modified region is transformed into the semiconductor-metal compound region.

Abstract: The present disclosure provides methods for forming conductive features in a dielectric layer without using adhesion layers or barrier layers and devices formed thereby. In some embodiments, a structure comprising a dielectric layer over a substrate, and a conductive feature disposed through the dielectric layer. The dielectric layer has a lower surface near the substrate and a top surface distal from the substrate. The conductive feature is in direct contact with the dielectric layer, and the dielectric layer comprises an implant species. A concentration of the implant species in the dielectric layer has a peak concentration proximate the top surface of the dielectric layer, and the concentration of the implant species decreases from the peak concentration in a direction towards the lower surface of the dielectric layer.

Abstract: Embodiments of the present disclosure may provide a method of forming an integrated circuit (IC) structure, the method including: forming a doped metal layer within a contact opening in an inter-level dielectric (ILD) material on a conductive region, such that the doped metal layer overlies the conductive region, the doped metal layer including a first metal doped with a second metal; and forming a contact to the conductive region within the contact opening of the ILD material by annealing the doped metal layer such that the second metal diffuses into the ILD material to form an interface liner directly between the annealed doped metal layer and the ILD material, the interface liner formed only on sidewalls of the contact opening and in direct contact with the ILD material and only at an interface of the doped metal layer and the ILD material.

Abstract: A via structure, a MRAM device using the via structure and a method for fabricating the MRAM device are provided. In the method for fabricating the MRAM device, at first, a first dielectric layer is deposited over a transistor. Then, a contact is formed in the first dielectric layer and electrically connected to the transistor. Thereafter, a metal nitride layer is deposited over the first dielectric layer and the contact. Then, an etch stop layer is deposited over the metal nitride layer. Thereafter, a second dielectric layer is deposited over the etch stop layer. Then, a via structure is formed in the second dielectric layer, the etch stop layer, and the metal nitride layer and landing on the contact. Thereafter, a memory stack is formed over the via structure.