Deposition On Insulating Or Meta Llic Substrate (epo) Patents (Class 257/E21.094)
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Patent number: 9590049Abstract: The present invention discloses a semiconductor composite film with a heterojunction and a manufacturing method thereof. The semiconductor composite film includes: a semiconductor substrate; and a semiconductor epitaxial layer, which is formed on the semiconductor substrate, and it has a first surface and a second surface opposite to each other, wherein the heterojunction is formed between the first surface and the semiconductor substrate, and wherein the semiconductor epitaxial layer further includes at least one recess, which is formed by etching the semiconductor epitaxial layer from the second surface toward the first surface. The recess is for mitigating a strain in the semiconductor composite film.Type: GrantFiled: December 11, 2015Date of Patent: March 7, 2017Assignee: Richtek Technology CorporationInventors: Hung-Der Su, Chien-Wei Chiu, Tsung-Yi Huang
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Patent number: 9012271Abstract: A method of manufacturing a substrate of a display device is disclosed. The method comprises forming a pixel electrode having a side edge that is under a patterned thermosetting insulating material layer. The method also comprises forming, from the patterned thermosetting insulating material, an insulating layer that covers the side edge of the pixel electrode by heat-treatment of the patterned thermosetting insulating material. As a result of the heat treatment of the patterned thermosetting insulating material, the patterned thermosetting insulating layer melts over the side edge of the pixel electrode.Type: GrantFiled: July 10, 2013Date of Patent: April 21, 2015Assignee: LG Display Co., Ltd.Inventor: Young-Seok Choi
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Patent number: 8900953Abstract: A crystal manufacturing apparatus capable of manufacturing a crystal in a desired position on a substrate is provided. A spring has one end fixed to a mount and the other end coupled to a magnetic body. The magnetic body has one end coupled to the spring and the other end coupled to a piston. A coil is wound around the magnetic body and electrically connected between a power supply circuit and a ground node (GND). The piston has a linear member inserted in a cylinder. The cylinder has a hollow columnar shape and a small hole at a bottom surface. The cylinder holds a silicon melt. A substrate is supported by an XY stage to be opposed to the small hole of the cylinder. The power supply circuit passes pulse shaped current through the coil to move the piston in an up-down direction (DR1). As a result, a droplet is discharged toward the substrate from the small hole at an initial speed of 1.02 m/s.Type: GrantFiled: August 28, 2009Date of Patent: December 2, 2014Assignee: Hiroshima UniversityInventors: Seiichiro Higashi, Naohiro Koba
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Patent number: 8697579Abstract: A method of forming an isolation structure includes forming a trench at an upper portion of a substrate, forming a first oxide layer on an inner wall of the trench, oxidizing a portion of the substrate adjacent to the trench to form a second oxide layer such that the portion of the substrate adjacent to the trench has the first oxide layer thereon, forming a nitride layer on the first oxide layer, and forming an insulation layer pattern on the nitride layer such that the insulation layer pattern fills a remaining portion of the trench.Type: GrantFiled: January 31, 2012Date of Patent: April 15, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Joo-Sung Park, Se-Myeong Jang, Gil-Sub Kim
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Patent number: 8658538Abstract: A method of fabricating a memory device includes forming a plurality of first insulative blocks and a plurality of second insulative blocks arranged in an alternating manner in a substrate, forming a plurality of wide trenches in the substrate to form a plurality of protruding blocks, forming a word line on each sidewall of the protruding blocks, isolating the word line on each sidewall of the protruding block, and forming an trench filler in the protruding block to form two mesa structures, wherein the first insulative block and the second insulative block have different depths, and the wide trenches are transverse to the first insulative blocks.Type: GrantFiled: March 7, 2013Date of Patent: February 25, 2014Assignee: Nanya Technology CorporationInventors: Ying Cheng Chuang, Ping Cheng Hsu, Sheng Wei Yang, Ming Cheng Chang, Hung Ming Tsai
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Patent number: 8659113Abstract: An embedded semiconductor die package is made by mounting a frame carrier to a temporary carrier with an adhesive. The frame carrier includes die mounting sites each including a leadframe interconnect structure around a cavity. A semiconductor die is disposed in each cavity. An encapsulant is deposited in the cavity over the die. A package interconnect structure is formed over the leadframe interconnect structure and encapsulant. The package interconnect structure and leadframe interconnect structure are electrically connected to the die. The frame carrier is singulated into individual embedded die packages. The semiconductor die can be vertically stacked or placed side-by-side within the cavity. The embedded die packages can be stacked and electrically interconnected through the leadframe interconnect structure. A semiconductor device can be mounted to the embedded die package and electrically connected to the die through the leadframe interconnect structure.Type: GrantFiled: April 13, 2012Date of Patent: February 25, 2014Assignee: STATS ChipPAC, Ltd.Inventors: Il Kwon Shim, Seng Guan Chow, Heap Hoe Kuan
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Patent number: 8507359Abstract: A wire (24) and a pixel electrode (25) are formed on a surface of a flat supporting substrate (21) which surface is opposite to a surface on which a TFT (16) is formed. Accordingly, it is possible to provide an active matrix substrate (2) which makes it possible to suppress a decline in yield.Type: GrantFiled: October 19, 2010Date of Patent: August 13, 2013Assignee: Sharp Kabushiki KaishaInventor: Katsuyuki Suga
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Patent number: 8445339Abstract: A method for forming a conductor structure is provided. The method comprises: (1) providing a substrate; (2) forming a patterned dielectric layer with a first opening which exposes a portion of the substrate; forming a patterned organic material layer on the dielectric layer with a second opening which corresponds to the first opening and expose the exposed portion of the substrate; (3) forming a first barrier layer on the organic material layer and the exposed portion of the substrate; (4) forming a metal layer on the first barrier layer; and (5) removing the organic material layer, the first barrier layer thereon and the metal layer thereon.Type: GrantFiled: December 2, 2011Date of Patent: May 21, 2013Assignee: AU Optronics Corp.Inventors: Hantu Lin, Chienhung Chen
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Patent number: 8426295Abstract: To provide a manufacturing method of a microcrystalline silicon film having both high crystallinity and high film density. In the manufacturing method of a microcrystalline silicon film according to the present invention, a first microcrystalline silicon film that includes mixed phase grains is formed over an insulating film under a first condition, and a second microcrystalline silicon film is formed thereover under a second condition. The first condition and the second condition are a condition in which a deposition gas containing silicon and a gas containing hydrogen are used as a first source gas and a second source gas. The first source gas is supplied under the first condition in such a manner that supply of a first gas and supply of a second gas are alternately performed.Type: GrantFiled: October 6, 2011Date of Patent: April 23, 2013Assignees: Semiconductor Energy Laboratory Co., Ltd., Sharp Kabushiki KaishaInventors: Ryu Komatsu, Yasuhiro Jinbo, Hidekazu Miyairi, Yoshitaka Yamamoto
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Patent number: 8426925Abstract: A memory device includes a plurality of isolations and trench fillers arranged in an alternating manner in a direction, a plurality of mesa structures between the isolations and trench fillers, and a plurality of word lines each overlying a side surface of the respective mesa. In one embodiment of the present invention, the width measured in the direction of the trench filler is smaller than that of the isolation, each mesa structure includes at least one paired source/drain regions and at least one channel base region corresponding to the paired source/drain regions, and each of the word lines is on a side surface of the mesa structure, adjacent the respective isolation, and is arranged adjacent the channel base region.Type: GrantFiled: November 12, 2010Date of Patent: April 23, 2013Assignee: Nanya Technology Corp.Inventors: Ying Cheng Chuang, Ping Cheng Hsu, Sheng Wei Yang, Ming Cheng Chang, Hung Ming Tsai
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Patent number: 8421135Abstract: In a display device such as a liquid crystal display device, a large-sized display screen is realized under low power consumption. A surface of a source wiring line of a pixel portion employed in an active matrix type liquid crystal display device is processed by way of a plating process operation so as to lower a resistance value of this source wiring line. The source wiring line of the pixel portion is manufactured at a step different from a step for manufacturing a source wiring line of a drive circuit portion. Further, electrodes of a terminal portion are processed by a plating process operation so as to reduce a resistance value thereof.Type: GrantFiled: November 26, 2008Date of Patent: April 16, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama, Hideaki Kuwabara, Saishi Fujikawa
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Patent number: 8299466Abstract: Embodiments of the present invention generally relate to a TFT and a method for its fabrication. The TFT disclosed herein is a silicon based TFT in which the active channel comprises amorphous silicon. Over the amorphous silicon, multiple layers of doped silicon are deposited in which the resistivity of the doped silicon layers is higher at the interface with the amorphous silicon layer as compared to the interface with the source and drain electrodes. Alternatively, a single doped silicon layer is deposited over the amorphous silicon in which the properties of the single doped layer change throughout the thickness. It is better to have a lower resistivity at the interface with the source and drain electrodes, but lower resistivity usually means less substrate throughput. By utilizing multiple or graded layers, low resistivity can be achieved. The embodiments disclosed herein include low resistivity without sacrificing substrate throughput.Type: GrantFiled: October 28, 2010Date of Patent: October 30, 2012Assignee: Applied Materials, Inc.Inventors: Gaku Furuta, Soo Young Choi, Omori Kenji
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Patent number: 8222717Abstract: An embedded semiconductor die package is made by mounting a frame carrier to a temporary carrier with an adhesive. The frame carrier includes die mounting sites each having a leadframe interconnect structure around a cavity. A semiconductor die is disposed in each cavity. An encapsulant is deposited in the cavity over the die. A package interconnect structure is formed over the leadframe interconnect structure and encapsulant. The package interconnect structure and leadframe interconnect structure are electrically connected to the die. The frame carrier is singulated into individual embedded die packages. The semiconductor die can be vertically stacked or placed side-by-side within the cavity. The embedded die packages can be stacked and electrically interconnected through the leadframe interconnect structure. A semiconductor device can be mounted to the embedded die package and electrically connected to the die through the leadframe interconnect structure.Type: GrantFiled: October 26, 2010Date of Patent: July 17, 2012Assignee: STATS ChipPAC, Ltd.Inventors: Il Kwon Shim, Seng Guan Chow, Heap Hoe Kuan
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Patent number: 8173494Abstract: A thin film transistor array and method of manufacturing the same include a pixel electrode formed of a transparent conductive layer on a substrate, a gate line formed of the transparent conductive layer and an opaque conductive layer on the substrate, a gate electrode connected to the gate line and formed of the transparent conductive layer and an opaque conductive layer on the substrate, a gate insulating layer which covers the gate line and the gate electrode, a semiconductor layer formed on the gate insulating layer to overlap the gate electrode, a data line which intersects the gate line, a source electrode connected to the data line to overlap a part of the semiconductor layer, and a drain electrode connected to the pixel electrode to overlap a part of the semiconductor layer.Type: GrantFiled: September 24, 2010Date of Patent: May 8, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Jong-Hyun Choung, Hong-Sick Park, Joo-Ae Youn, Sun-Young Hong, Bong-Kyun Kim, Won-Suk Shin, Byeong-Jin Lee
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Patent number: 8173492Abstract: Provided are a wire structure, a method of forming a wire, a thin film transistor (TFT) substrate, and a method of manufacturing the TFT substrate. The wire structure includes a barrier layer disposed on a lower structure, a copper conductive layer comprising copper or copper alloy disposed on the barrier layer, an intermediate layer comprising copper nitride disposed on the copper conductive layer, and a capping layer disposed on the intermediate layer.Type: GrantFiled: July 24, 2009Date of Patent: May 8, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Je-hun Lee, Chang-oh Jeong, Beom-seok Cho, Yang-ho Bae
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Patent number: 8106397Abstract: A thin film transistor (“TFT”) includes a poly silicon layer formed on a flexible substrate and including a source region, a drain region, and a channel region, and a gate stack formed on the channel region of the poly silicon layer, wherein the gate stack includes first and second gate stacks, and a region of the poly silicon layer between the first and second gate stacks is an off-set region. A method of manufacturing the TFT is also provided.Type: GrantFiled: June 1, 2007Date of Patent: January 31, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Jang-yeon Kwon, Sang-yoon Lee, Jong-man Kim, Kyung-bae Park, Ji-sim Jung
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Patent number: 8105927Abstract: A method for manufacturing an ion implantation mask is disclosed which includes the steps of: forming an oxide film as a protective film over the entire surface of a semiconductor substrate; forming a thin metal film over the oxide film; and forming an ion-inhibiting layer composed of an ion-inhibiting metal over the thin metal film. The obtained ion implantation mask is used to form a deeper selectively electroconductive region.Type: GrantFiled: March 3, 2010Date of Patent: January 31, 2012Assignees: Honda Motor Co., Ltd., Shindengen Electric Manufacturing Co., Ltd.Inventors: Ken-ichi Nonaka, Hideki Hashimoto, Seiichi Yokoyama, Hiroaki Iwakuro, Koichi Nishikawa, Masaaki Shimizu, Yusuke Fukuda
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Thin-film transistor substrate having oxide active layer patterns and method of fabricating the same
Patent number: 8035110Abstract: A thin-film transistor (TFT) substrate has improved electrical properties and reduced appearance defects and a method of fabricating the TFT substrate, are provided. The TFT substrate includes: gate wiring which is formed on a surface of an insulating substrate; oxide active layer patterns which are formed on the gate wiring and include an oxide of a first material; buffer layer patterns which are disposed on the oxide active layer patterns to directly contact the oxide active layer patterns and include a second material; and data wiring which is formed on the buffer layer patterns to insulatedly cross the gate wiring, wherein a Gibbs free energy of the oxide of the first material is lower than a Gibbs free energy of an oxide of the second material.Type: GrantFiled: July 7, 2009Date of Patent: October 11, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Do-Hyun Kim, Pil-Sang Yun, Ki-Won Kim, Dong-Hoon Lee, Chang-Oh Jeong -
Patent number: 8030169Abstract: An object is to provide an SOI substrate provided with a semiconductor layer which can be used practically even when a glass substrate is used as a base substrate. Another object is to provide a semiconductor device having high reliability using such an SOI substrate. An altered layer is formed on at least one surface of a glass substrate used as a base substrate of an SOI substrate to form the SOI substrate. The altered layer is formed on at least the one surface of the glass substrate by cleaning the glass substrate with solution including hydrochloric acid, sulfuric acid or nitric acid. The altered layer has a higher proportion of silicon oxide in its composition and a lower density than the glass substrate.Type: GrantFiled: July 6, 2009Date of Patent: October 4, 2011Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Tetsuya Kakehata, Hideto Ohnuma, Yoshiaki Yamamoto, Kenichiro Makino
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Patent number: 8017527Abstract: Apparatuses and methods for diverting a flow of a liquid precursor during flow stabilization and plasma stabilization stages during PECVD processes are effective at eliminating particle defects in PECVD films deposited using a liquid precursor.Type: GrantFiled: December 16, 2008Date of Patent: September 13, 2011Assignee: Novellus Systems, Inc.Inventors: Arul N. Dhas, Ming Li, Joseph Bradley Laird
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Patent number: 7977133Abstract: A method of fabricating a vertical structure opto-electronic device includes fabricating a plurality of vertical structure opto-electronic devices on a crystal substrate, and then removing the substrate using a laser lift-off process. The method then fabricates a metal support structure in place of the substrate. In one aspects the step of fabricating a metal support structure in place of the substrate includes the step of plating the metal support structure using at least one of electroplating and electro-less plating. In one aspect, the vertical structure is a GaN-based vertical structure, the crystal substrate includes sapphire and the metal support structure includes copper. Advantages of the invention include fabricating vertical structure LEDs suitable for mass production with high reliability and high yield.Type: GrantFiled: March 2, 2006Date of Patent: July 12, 2011Assignee: Verticle, Inc.Inventor: Myung Cheol Yoo
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Patent number: 7968388Abstract: A method for manufacturing a thin-film device includes forming a separation layer on a substrate, forming a base insulating layer on the separation layer, forming a thin-film device layer on the base insulating layer, bonding a transfer layer including the base insulating layer and the thin-film device layer to a transfer body with an adhesive, causing intralayer delamination or interfacial delamination in the separation layer, and removing the transfer layer from the substrate. The thin-film device layer includes a first wiring sublayer which is located at the bottom of the thin-film device layer and which is in contact with the base insulating layer, a dielectric sublayer which is in contact with a surface of the first wiring sublayer, a semiconductor sublayer electrically insulated from the first wiring sublayer with the dielectric sublayer, and a second wiring sublayer formed subsequently to the semiconductor sublayer.Type: GrantFiled: July 29, 2008Date of Patent: June 28, 2011Assignee: Seiko Epson CorporationInventor: Yuko Komatsu
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Patent number: 7952104Abstract: A process for manufacturing a thin-film transistor device includes forming a dielectric insulation layer on a substrate, forming an amorphous silicon layer on the dielectric insulation layer, crystallizing the amorphous silicon layer, so as to obtain polycrystalline silicon, forming gate structures on the polycrystalline silicon, and forming first doped regions within the polycrystalline silicon laterally with respect to the gate structures. The crystallizing step includes forming first capping dielectric regions on the amorphous silicon layer, and then irradiating the amorphous silicon layer using a laser so as to form active areas of polycrystalline silicon separated by separation portions of amorphous silicon underlying the first capping dielectric regions.Type: GrantFiled: September 22, 2009Date of Patent: May 31, 2011Assignee: STMicroelectronics, S.r.l.Inventors: Salvatore Leonardi, Claudia Caligiore
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Patent number: 7868327Abstract: A thin film transistor (TFT) and a method of manufacturing the same, and more particularly, a TFT for reducing leakage current and a method of manufacturing the same are provided. The TFT includes a flexible substrate, a diffusion preventing layer formed on the flexible substrate, a buffer layer formed of at least two insulated materials on the diffusion preventing layer, a semiconductor layer formed on a region of the buffer layer to include a channel layer and a source and drain region, a gate insulating layer formed on the buffer layer including the semiconductor layer, a gate electrode formed on the gate insulating layer in a region corresponding to the channel layer, an interlayer insulating layer formed on the gate insulating layer including the gate electrode, and source and drain electrodes formed in the interlayer insulating layer to include a predetermined contact hole that exposes at least a region of the source and drain region and to be connected to the source and drain region.Type: GrantFiled: August 22, 2006Date of Patent: January 11, 2011Assignee: Samsung Mobile Display Co., Ltd.Inventors: Jae Kyeong Jeong, Hyun Soo Shin, Se Yeoul Kwon, Yeon Gon Mo
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Patent number: 7855121Abstract: Provided are a method of forming an organic semiconductor thin film and a method of manufacturing a semiconductor device using the. According to example embodiments, a method of forming an organic semiconductor thin film at least may include exposing a lower substrate coated with an organic semiconductor solution using a method of generating a shearing stress to the portion of the lower substrate coated with the organic semiconductor solution. A guide structure may be formed adjacent to the organic semiconductor solution.Type: GrantFiled: March 27, 2009Date of Patent: December 21, 2010Assignees: Samsung Electronics Co., Ltd., The Board of Trustees of the Laland Stanford Junior UniversityInventors: Do Hwan Kim, Sangyoon Lee, Hector Alejandro Becerril Garcia, Mark Roberts, Zhenan Bao, Zihong Liu
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Patent number: 7842542Abstract: An embedded semiconductor die package is made by mounting a frame carrier to a temporary carrier with an adhesive. The frame carrier includes die mounting sites each having a lead frame interconnect structure around a cavity. A semiconductor die is disposed in each cavity. An encapsulant is deposited in the cavity over the die. A package interconnect structure is formed over the lead frame interconnect structure and encapsulant. The package interconnect structure and lead frame interconnect structure are electrically connected to the die. The frame carrier is singulated into individual embedded die packages. The semiconductor die can be vertically stacked or placed side-by-side within the cavity. The embedded die packages can be stacked and electrically interconnected through the lead frame interconnect structure. A semiconductor device can be mounted to the embedded die package and electrically connected to the die through the lead frame interconnect structure.Type: GrantFiled: November 6, 2008Date of Patent: November 30, 2010Assignee: STATS ChipPAC, Ltd.Inventors: Il Kwon Shim, Seng Guan Chow, Heap Hoe Kuan
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Patent number: 7825413Abstract: A liquid crystal display device includes a gate line and a data line crossing each other to define a pixel region on a substrate, a gate electrode connected to the gate line, a gate insulating layer on the gate electrode, an active layer on the gate insulating layer, source and drain electrodes on the active layer, spaced apart from each other and each having inner sides that face each other, wherein the source electrode is connected to the data line, ohmic contact layers between the active layer and each of the source and drain electrodes, a shielding pattern over the active layer and having outer sides, wherein at least one of the outer sides faces at least one of the inner sides of the source and drain electrodes, and a pixel electrode in the pixel region and connected to the drain electrode.Type: GrantFiled: July 21, 2009Date of Patent: November 2, 2010Assignee: LG Display Co., Ltd.Inventors: Hyo-Uk Kim, Byoung-Ho Lim
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Publication number: 20100221494Abstract: A method for forming a semiconductor layer includes following steps. First, an epitaxial substrate having at least a first growth region and at least a second growth region is provided. An area ratio of C plane to R plane in the first growth region is greater than 52/48. An epitaxial process is then performed on the epitaxial substrate to form a semiconductor layer. During the epitaxial process, a semiconductor material is selectively grown on the first growth region, and then the semiconductor material is laterally overgrown on the second growth region and covers the same.Type: ApplicationFiled: May 14, 2009Publication date: September 2, 2010Applicant: LEXTAR ELECTRONICS CORP.Inventors: Chang-Ming Lu, Chih-Wei Chao, Te-Chung Wang, Kuo-Lung Fang, Chun-Jong Chang
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Patent number: 7781775Abstract: To provide a method for producing a high-performance semiconductor device by a simple and low-temperature process. The method for producing a semiconductor device, in accordance with the present invention, is a production method of a semiconductor device including a first insulating film, a semiconductor layer, and a second insulating film in this order on a substrate, the method including the steps of: forming a first insulating film including a hydrogen barrier layer; forming a semiconductor layer on a region where the hydrogen barrier layer of the first insulating film is formed; injecting hydrogen into the semiconductor layer; forming a second insulating film, the second insulating film including a hydrogen barrier layer on at least a region where the semiconductor layer is formed; and subjecting the semiconductor layer to hydrogenation annealing.Type: GrantFiled: September 6, 2006Date of Patent: August 24, 2010Assignee: Sharp Kabushiki KaishaInventor: Takuto Yasumatsu
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Patent number: 7745269Abstract: An object is to provide an element structure of a semiconductor device for increasing an etching margin for various etching steps and a method for manufacturing the semiconductor device having the element structure. An island-shaped semiconductor layer is provided over an insulator having openings. The island-shaped semiconductor layer includes embedded semiconductor layers and a thin film semiconductor layer. The embedded semiconductor layers have a larger thickness than that of the thin film semiconductor layer.Type: GrantFiled: July 9, 2009Date of Patent: June 29, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Hideki Matsukura
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Patent number: 7709862Abstract: A method for manufacturing an ion implantation mask is disclosed which includes the steps of: forming an oxide film as a protective film over the entire surface of a semiconductor substrate; forming a thin metal film over the oxide film; and forming an ion-inhibiting layer composed of an ion-inhibiting metal over the thin metal film. The obtained ion implantation mask is used to form a deeper selectively electroconductive region.Type: GrantFiled: August 1, 2006Date of Patent: May 4, 2010Assignees: Honda Motor Co., Ltd., Shindengen Electric Manufacturing Co., Ltd.Inventors: Ken-ichi Nonaka, Hideki Hashimoto, Seiichi Yokoyama, Hiroaki Iwakuro, Koichi Nishikawa, Masaaki Shimizu, Yusuke Fukuda
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Patent number: 7704898Abstract: Disclosed is an apparatus and a method for reducing flash in an injection mold (532 or 542,543) which molds a molded article between a first mold surface and a second mold surface. The apparatus includes an active material actuator (530 or 533a and 533b or 561a and 561b) configured to, in response to application or removal of an electrical actuation signal thereto, change dimension and urge the first mold surface relative to the second mold surface to reduce flash therebetween. The apparatus also includes a transmission structure (533) configured to provide in use, the electrical actuation signal to said active material actuator (530 or 533a and 533b or 561a and 561b) includes a set of active material actuators stacked one against the other to provide a varying sealing force to urge the first mold surface relative to the second mold surface.Type: GrantFiled: October 28, 2004Date of Patent: April 27, 2010Assignee: Mattson Technology, Inc.Inventors: Zsolt Nenyei, Steffen Frigge, Patrick Schmid, Thorsten Hülsmann, Thomas Theiler
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Patent number: 7666765Abstract: Semiconductor process technology and devices are provided, including a method for forming a high quality group III nitride layer on a silicon substrate and to a device obtainable therefrom. According to the method, a pre-dosing step is applied to a silicon substrate, wherein the substrate is exposed to at least 0.01 ?mol/cm2 of one or more organometallic compounds containing Al, in a flow of less than 5 ?mol/min. The preferred embodiments are equally related to the semiconductor structure obtained by the method, and to a device comprising said structure.Type: GrantFiled: March 23, 2007Date of Patent: February 23, 2010Assignees: IMEC, Katholieke Universiteit Leuven (KUL)Inventors: Kai Cheng, Maarten Leys, Stefan Degroote
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Patent number: 7659185Abstract: Disclosed are a method for forming a silicon thin-film on a substrate, and more particularly a method for forming a polycrystalline silicon thin-film of good quality on a flexible metal substrate. A metal substrate (110) is prepared and a surface of the metal substrate (110) is flattened. An insulation film (120) is formed on the metal substrate (110). An amorphous silicon layer (130) is formed on the insulation film (120). A metal layer (140) is formed on the amorphous silicon layer (130). A sample on the metal substrate (110) is heated and crystallized.Type: GrantFiled: September 2, 2004Date of Patent: February 9, 2010Assignee: Kyunghee University Industrial & Academic Collaboration FoundationInventors: Jin Jang, Jong-Hyun Choi, Seung-Soo Kim, Jae-Hwan Oh, Jun-Hyuk Chon
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Patent number: 7652294Abstract: A display device having a gate wiring including a first conductive material, an insulating film over the gate wiring, a semiconductor film over the insulating film, a source electrode and a drain electrode including a second conductive material formed over a source region and a drain region, and a pixel electrode including a transparent conductive film. The device includes a first terminal portion electrically connected to the gate wiring and having a first layer including a same material as the first conductive material and a second layer including a same material as the transparent conductive film. The device further includes a second terminal portion electrically connected to the source wiring and having a first layer including a same material as the second conductive material and a second layer including a same material as the transparent conductive film. An IC chip may be electrically connected to at least one of the first and second terminal portions.Type: GrantFiled: September 15, 2008Date of Patent: January 26, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Hideaki Kuwabara, Yasuyuki Arai
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Patent number: 7645648Abstract: A thin film transistor array substrate including an insulating substrate, a first metallic pattern formed on the insulating substrate, and an insulating film provided on the first metallic pattern. A semiconductor pattern is provided on the insulating film, and a second metallic pattern is provided on the semiconductor pattern. The second metallic pattern is surrounded by the semiconductor pattern.Type: GrantFiled: May 27, 2008Date of Patent: January 12, 2010Assignee: Mitsubishi Electric CorporationInventors: Kazuhiro Kobayashi, Ken Nakashima, Nobuhiro Nakamura
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Patent number: 7638371Abstract: A method for manufacturing a thin film transistor (“TFT”) array includes providing a substrate, a patterned first metal layer on the substrate including a plurality of first conductive lines and a plurality of second conductive lines disposed orthogonal to the first conductive lines, an insulating layer over the patterned first metal layer, a patterned silicon layer, a patterned passivation layer over the patterned silicon layer, and a patterned doped silicon layer and a patterned second metal layer over the patterned passivation layer, filling exposed portions of the patterned silicon layer and exposed portions of the first conductive lines and the second conductive lines, where the patterned second metal layer includes a plurality of third conductive lines and a plurality of fourth conductive lines, each of which corresponding respectively to one of the plurality of first conductive lines and the plurality of second conductive lines.Type: GrantFiled: March 7, 2006Date of Patent: December 29, 2009Assignee: Industrial Technology Research InstituteInventors: Yu-Cheng Chen, Hung-Tse Chen
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Patent number: 7611933Abstract: A process for manufacturing a thin-film transistor device includes forming a dielectric insulation layer on a substrate, forming an amorphous silicon layer on the dielectric insulation layer, crystallizing the amorphous silicon layer, so as to obtain polycrystalline silicon, forming gate structures on the polycrystalline silicon, and forming first doped regions within the polycrystalline silicon laterally with respect to the gate structures. The crystallizing step includes forming first capping dielectric regions on the amorphous silicon layer, and then irradiating the amorphous silicon layer using a laser so as to form active areas of polycrystalline silicon separated by separation portions of amorphous silicon underlying the first capping dielectric regions.Type: GrantFiled: June 28, 2006Date of Patent: November 3, 2009Assignee: STMicroelectronics, S.r.l.Inventors: Salvatore Leonardi, Claudia Caligiore
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Patent number: 7611929Abstract: An exemplary method for fabricating a thin film transistor (TFT) array substrate includes: providing an insulating substrate; forming a plurality of gate electrodes and a plurality of reflective patterns on the insulating substrate using a first photo-mask process; forming a gate insulating layer, an amorphous silicon layer, a doped amorphous silicon layer, and a source/drain metal layer on the insulating substrate having the gate electrodes and the reflective patterns; forming a plurality of source electrodes and a plurality of drain electrodes on the doped amorphous silicon layer; depositing a passivation layer on the source electrodes, the drain electrodes and the gate insulating layer; and forming a pixel electrode on the passivation layer.Type: GrantFiled: December 18, 2006Date of Patent: November 3, 2009Assignee: Innolux Display Corp.Inventors: Tzu-Min Yan, Chien-Ting Lai
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Patent number: 7608494Abstract: A thin film transistor array panel includes an insulating substrate, a gate wire formed on the insulating substrate. A gate insulating layer covers the gate wire. A semiconductor pattern is formed on the gate insulating layer. A data wire having source electrodes, drain electrodes and data lines is formed on the gate insulating layer and the semiconductor pattern. A protective layer is formed on the data wire. Pixel electrodes connected to the drain electrode via contact holes are formed on the protective layer. The gate wire and the data wire are made of Ag alloy containing Ag and an additive including at least one selected from Zn, In, Sn and Cr.Type: GrantFiled: April 30, 2008Date of Patent: October 27, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Jae-Gab Lee, Bong-Joo Kang, Beom-Seok Cho, Chang-Oh Jeong
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Patent number: 7601552Abstract: A semiconductor structure of a liquid crystal display and the manufacturing method thereof are described. The manufacturing method includes the following steps. A patterned polysilicon layer and a first dielectric layer are formed on a substrate. A first patterned metal layer is formed to construct a gate electrode and a capacitor electrode. An ion implantation is conducted on the polysilicon layer to form drain and source electrodes. A second dielectric layer and a second patterned metal layer are formed thereon. Sequentially, a third dielectric layer is formed thereon. A plurality of via openings are formed by a patterned photoresist layer, and a third metal layer is formed thereon and filled into the via openings. The patterned photoresist layer and the redundant third metal layer are stripped from the substrate to form via plugs in the via openings. A patterned transparent conductive layer is formed thereon to connect the via plugs.Type: GrantFiled: January 21, 2008Date of Patent: October 13, 2009Assignee: AU Optronics CorporationInventors: Yi-Sheng Cheng, Ta-Wei Chiu
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Patent number: 7579201Abstract: A liquid crystal display device includes a gate line and a data line crossing each other to define a pixel region on a substrate, a gate electrode connected to the gate line, a gate insulating layer on the gate electrode, an active layer on the gate insulating layer, source and drain electrodes on the active layer, spaced apart from each other and each having inner sides that face each other, wherein the source electrode is connected to the data line, ohmic contact layers between the active layer and each of the source and drain electrodes, a shielding pattern over the active layer and having outer sides, wherein at least one of the outer sides faces at least one of the inner sides of the source and drain electrodes, and a pixel electrode in the pixel region and connected to the drain electrode.Type: GrantFiled: December 21, 2006Date of Patent: August 25, 2009Assignee: LG Display Co., Ltd.Inventors: Hyo-Uk Kim, Byoung-Ho Lim
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Patent number: 7557019Abstract: A plasma is produced in a treatment space (58) by diffusing a plasma gas at atmospheric pressure and subjecting it to an electric field created by two metallic electrodes (54,56) separated by a dielectric material (64), and a precursor material is introduced into the treatment space to coat a substrate film or web (14) by vapor deposition or atomized spraying at atmospheric pressure. The deposited precursor exposed to an electromagnetic field (AC, DC, or plasma) and then it is cured by electron-beam, infrared-light, visible-light, or ultraviolet-light radiation, as most appropriate for the particular material being deposited. Additional plasma post-treatment may be used to enhance the properties of the resulting coated products.Type: GrantFiled: December 5, 2006Date of Patent: July 7, 2009Assignee: Sigma Laboratories of Arizona, LLCInventors: Michael G. Mikhael, Angelo Yializis, Richard E. Ellwanger
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Patent number: 7541226Abstract: A manufacturing process of a thin film transistor, includes: forming a silicon film of a preset thickness, in which film stress becomes under 2.0×109 dyne/cm2 in absolute value, on one surface of a transparent substrate; and forming a thin film transistor on other surface of the transparent substrate on which the silicon film is not formed.Type: GrantFiled: February 15, 2006Date of Patent: June 2, 2009Assignee: Seiko Epson CorporationInventor: Hiroyuki Shimada
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Patent number: 7488654Abstract: Disclosed are methods for forming FinFETs using a first hard mask pattern to define active regions and a second hard mask to protect portions of the insulating regions between active regions. The resulting field insulating structure has three distinct regions distinguished by the vertical offset from a reference plane defined by the surface of the active regions. These three regions will include a lower surface found in the recessed openings resulting from the damascene etch, an intermediate surface and an upper surface on the remaining portions of the lateral field insulating regions. The general correspondence between the reference plane and the intermediate surface will tend to suppress or eliminate residual gate electrode materials from this region during formation of the gate electrodes, thereby improving the electrical isolation between adjacent active regions and improving the performance of the resulting semiconductor devices.Type: GrantFiled: August 24, 2006Date of Patent: February 10, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Yong-Sung Kim, Tae-Young Chung
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Patent number: 7479416Abstract: A method of manufacturing a thin film transistor array panel is provided, which includes: forming a thin film transistor including a gate electrode, a drain electrode, a source electrode and a semiconductor on a substrate; forming a first passivation layer on the drain and the source electrodes; forming a transparent conductive layer on the first passivation layer; etching the transparent conductive layer using a photoresist as an etch mask to expose the portion of the first passivation layer and to form a pixel electrode connected the drain electrode; ashing the first passivation layer and the photoresist; and removing the photoresist.Type: GrantFiled: January 10, 2006Date of Patent: January 20, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Kyung-Min Park, Jin-Goo Jung, Chun-Gi You
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Patent number: 7470571Abstract: A method of producing a thin film transistor array substrate which includes an insulating substrate, a display pixel having a pixel electrode connected to a drain electrode, a gate wiring, and a source wiring perpendicular to the gate wiring, comprising forming a first thin metal multi-layer film an upper layer of which includes aluminum, and spreading a photo-resist, forming the photo-resist to a thickness less in an area connected to a second thin metal film than other area, patterning the first thin metal film, reducing a thickness of the photo-resist layer and removing the photo-resist in the area, removing the upper layer in the area to expose a lower layer, forming an interlayer insulating film and patterning it to expose the lower layer in the area, and patterning the second thin metal film to include the area, to connect the lower layer to the second thin metal film.Type: GrantFiled: December 6, 2007Date of Patent: December 30, 2008Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Nobuaki Ishiga, Takuji Yoshida, Yuichi Masutani, Shingo Nagano
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Publication number: 20080311761Abstract: Disclosed is an apparatus and a method for reducing flash in an injection mold (532 or 542, 543) which molds a molded article between a first mold surface and a second mold surface. The apparatus includes an active material actuator (530 or 533a and 533b or 561a and 561b) configured to, in response to application or removal of an electrical actuation signal thereto, change dimension and urge the first mold surface relative to the second mold surface to reduce flash therebetween. The apparatus also includes a transmission structure (533) configured to provide in use, the electrical acutation signal to said active material actuator (530 or 533a and 533b or 561a and 561b) includes a set of active material actuators stacked one against the other to provide a varying sealing force to urge the first mold surface relative to the second mold surface.Type: ApplicationFiled: October 28, 2004Publication date: December 18, 2008Inventors: Zsolt Nenyei, Steffen Frigge, Patrick Schmid, Thorsten Hulsmann, Thomas Theiler
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Patent number: 7442587Abstract: A non-linear element is formed on a flexible substrate by securing the substrate to a rigid carrier, forming the non-linear element, and then separating the flexible substrate from the carrier. The process allows flexible substrates to be processed in a conventional fab intended to process rigid substrates. In a second method, a transistor is formed on a insulating substrate by forming gate electrodes, depositing a dielectric layer, a semiconductor layer and a conductive layer, patterning the conductive layer to form source, drain and pixel electrodes, covering the channel region of the resultant transistor with an etch-resistant material and etching using the etch-resistant material and the conductive layer as a mask, the etching extending substantially through the semiconductor layer between adjacent transistors.Type: GrantFiled: June 15, 2006Date of Patent: October 28, 2008Assignee: E Ink CorporationInventors: Karl R. Amundson, Guy M. Danner, Gregg M. Duthaler, Peter T. Kazlas, Yu Chen, Kevin L. Denis, Nathan R. Kane, Andrew P. Ritenour
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Patent number: 7435633Abstract: An organic electroluminescence device including: a substrate having conductivity on at least one side; a first insulation film, formed on one side of the substrate, while having an aperture which partially exposes the same side of the substrate; a semiconductor film, formed on the first insulation film, while covering a part of the first insulation film; a second insulation film formed on the first insulation film, while covering the semiconductor film and contacting the same side of the substrate via the aperture; a capacitor electrode, formed on the aperture, while sandwiching the second insulation film so as to face the substrate; a gate electrode formed on the semiconductor film, so as to sandwich the second insulation film; and an organic electroluminescence element, formed on the second insulation film, electrically connected to the semiconductor film.Type: GrantFiled: March 1, 2007Date of Patent: October 14, 2008Assignee: Seiko Epson CorporationInventors: Masayoshi Todorokihara, Kazuyuki Miyashita