To Control Carrier Lifetime, I.e., Deep Level Dopant (epo) Patents (Class 257/E21.137)
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Patent number: 10249747Abstract: The present application relates to a turn-off power semiconductor device having a wafer with an active region and a termination region surrounding the active region, a rubber ring as an edge passivation for the wafer and a gate ring placed on a ring-shaped gate contact on the termination region for contacting the gate electrodes of a thyristor cell formed in the active region of the wafer. In the turn-off power semiconductor device, the outer circumferential surface of the gate ring is in contact with the rubber ring to define the inner border of the rubber ring. The area consumed by the ring-shaped gate contact on the termination or edge region can be minimized. The upper surface of the gate ring and the upper surface of the rubber ring form a continuous surface extending in a plane parallel to the first main side of the wafer.Type: GrantFiled: October 11, 2016Date of Patent: April 2, 2019Assignee: ABB Schweiz AGInventors: Hendrik Ravener, Tobias Wikström, Hermann Amstutz, Norbert Meier
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Patent number: 9985090Abstract: In a semiconductor device including a low lifetime region of a depth within a range on both sides sandwiching a p-n junction of a p-type semiconductor region bottom portion, the low lifetime region includes a central region that has a portion coinciding with the semiconductor region as seen from one main surface side and is selectively formed as far as the position of a contact end portion of a region of the coinciding portion with which the semiconductor region and a metal electrode are in contact, a peripheral region wherein the central region extends as far as the position of an outer peripheral end of the semiconductor region, and an expanded end portion region wherein the peripheral region extends as far as an outer peripheral end of the innermost of guard rings. Because of this, it is possible to reduce leakage current while maintaining high reverse recovery current resistance.Type: GrantFiled: December 11, 2013Date of Patent: May 29, 2018Assignee: FUJI ELECTRIC CO., LTD.Inventor: Mitsuhiro Kakefu
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Patent number: 8415239Abstract: An exemplary method is disclosed for manufacturing a power semiconductor device which has a first electrical contact on a first main side and a second electrical contact on a second main side opposite the first main side and at least a two-layer structure with layers of different conductivity types, and includes providing an n-doped wafer and creating a surface layer of palladium particles on the first main side. The wafer is irradiated on the first main side with ions. Afterwards, the palladium particles are diffused into the wafer at a temperature of not more than 750° C., by which diffusion a first p-doped layer is created. Then, the first and second electrical contacts are created. At least the irradiation with ions is performed through a mask.Type: GrantFiled: March 25, 2010Date of Patent: April 9, 2013Assignee: ABB Technology AGInventors: Jan Vobecky, Munaf Rahimo
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Patent number: 8106429Abstract: Disclosed is an image sensor. The image sensor includes a semiconductor substrate including a lower interconnection, a plurality of upper interconnection sections protruding upward from the semiconductor substrate, a first trench disposed between the upper interconnection sections such that the upper interconnection sections are spaced apart from each other, a bottom electrode disposed on an outer peripheral surfaces of the upper interconnection sections, a first conductive layer disposed on an outer peripheral surface of the bottom electrode, an intrinsic layer disposed on the semiconductor substrate including the first conductive layer and the first trench, and having a second trench on the first trench, a second conductive layer disposed on the intrinsic layer and having a third trench on the second trench, a light blocking part disposed in the third trench, and a top electrode disposed on the light blocking part and the second conductive layer.Type: GrantFiled: August 27, 2008Date of Patent: January 31, 2012Assignee: Dongbu HiTek Co., Ltd.Inventor: Tae Gyu Kim
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Patent number: 8053867Abstract: Phosphorous-comprising dopants, methods for forming phosphorous-doped regions in a semiconductor material, and methods for fabricating phosphorous-comprising dopants are provided. In one embodiment, a phosphorous-comprising dopant comprises a phosphorous source comprising a phosphorous-comprising salt, a phosphorous-comprising acid, phosphorous-comprising anions, or a combination thereof, an alkaline material, cations from an alkaline material, or a combination thereof, and a liquid medium.Type: GrantFiled: August 20, 2008Date of Patent: November 8, 2011Assignee: Honeywell International Inc.Inventors: Hong Min Huang, Carol Gao, Zhe Ding, Albert Peng, Ya Qun Liu
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Publication number: 20110165763Abstract: A semiconductor device has a semiconductor body with a semiconductor device structure including at least a first electrode and a second electrode. Between the two electrodes, a drift region is arranged, the drift region including charge compensation zones and drift zones arranged substantially parallel to one another. At least one charge carrier storage region which is at least partially free of charge compensation zones is arranged in the semiconductor body.Type: ApplicationFiled: March 15, 2011Publication date: July 7, 2011Applicant: Infineon Technologies Austria AGInventors: Anton Mauder, Giulliano Aloise
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Patent number: 7687385Abstract: The invention provides a semiconductor device exhibiting a stable and high breakdown voltage, which is manufactured at a low manufacturing cost. The semiconductor device of the invention includes an n-type silicon substrate; a p-type base region in the surface portion of substrate; an n-type drain region in the surface portion of n-type substrate; a p-type offset region in the surface portion of n-type substrate; an n-type source region in the surface portion of p-type base region; a p-type contact region in the surface portion of p-type base region; a gate electrode above the extended portion of p-type base region extending between n-type source region and n-type substrate (or p-type offset region), with a gate insulation film interposed therebetween; an insulation film on gate electrode and p-type offset region; a source electrode on n-type source region; and a drain electrode on n-type drain region.Type: GrantFiled: March 2, 2007Date of Patent: March 30, 2010Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Kazuo Matsuzaki, Naoto Fujishima, Akio Kitamura, Gen Tada, Masaru Saito
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Patent number: 7531905Abstract: A stacked semiconductor device includes an interposer substrate having external power supply terminals, and semiconductor chips stacked on the interposer substrate. A power supply wiring arranged in the semiconductor chip located in the bottom layer is connected to the external power supply terminal via a bump electrode, the power supply wiring arranged in the semiconductor chip located in the top layer is connected to the external power supply terminal via a bonding wire, and the power supply wirings each arranged in adjacent semiconductor chips are mutually connected via the through electrode. Such a loop structure can solve a problem such that the higher the semiconductor chip, the larger its voltage drop.Type: GrantFiled: January 10, 2007Date of Patent: May 12, 2009Assignee: Elpida Memory, Inc.Inventors: Masakzau Ishino, Hiroaki Ikeda, Junji Yamada
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Patent number: 7514318Abstract: A method for fabricating non-volatile memory cells is provided. The method includes providing a substrate, forming a first dopant region in the substrate, forming a second dopant region in the first dopant region, growing a first isolation region over a first portion of the substrate, the first dopant region, and the second dopant region, growing a second isolation region over a second portion of the substrate, the first dopant region, and the second dopant region, defining a contact region in the second dopant region, the contact region extending between the first isolation region and the second isolation region, depositing a gate oxide layer to form a first gate dielectric atop the first isolation region and a portion of the contact region, and overlaying a gate conductive layer on top of the gate oxide layer to form a first gate conductor atop the first gate dielectric.Type: GrantFiled: January 18, 2008Date of Patent: April 7, 2009Assignee: Micrel, Inc.Inventor: Paul M. Moore
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Patent number: 7303967Abstract: Disclosed is a method for fabricating a transistor of a semiconductor device, the method comprising the steps of: providing a semiconductor; forming a gate electrode; performing a low-density ion implantation process with respect to the substrate, thereby forming an LDD ion implantation layer; forming an insulation spacer on a sidewall of the gate electrode; forming a diffusion barrier; performing a high-density ion implantation process with respect to the substrate, thereby forming a source/drain; performing a first thermal treatment process with respect to a resultant structure, so as to activate impurities in the source/drain, and simultaneously causing a diffusion velocity of the impurities in the source/drain to be reduced by the diffusion barrier; and forming a salicide layer.Type: GrantFiled: June 23, 2004Date of Patent: December 4, 2007Assignee: Hynix Semiconductor Inc.Inventor: Seung Hoon Sa
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Patent number: 7229886Abstract: A method of forming an integrated circuit configured to accommodate higher voltage and low voltage devices. In one embodiment, the method of forming the integrated circuit includes forming a switch on a semiconductor substrate, and forming a driver switch of a driver embodied in a transistor. The method of forming the transistor includes forming a gate over the semiconductor substrate. The method of forming the transistor also includes forming a source/drain by forming a lightly doped region adjacent a channel region recessed into the semiconductor substrate, and forming a heavily doped region adjacent the lightly doped region. The method of forming the transistor further includes forming an oppositely doped well under and within the channel region. The method of forming the transistor still further includes forming a doped region with a doping concentration profile less than the heavily doped region between the heavily doped region and the oppositely doped well.Type: GrantFiled: August 23, 2004Date of Patent: June 12, 2007Assignee: Enpirion, Inc.Inventors: Ashraf W. Lotfi, Jian Tan
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Patent number: 7217977Abstract: A technique for and structures for camouflaging an integrated circuit structure. The technique includes the use of a light density dopant (LDD) region of opposite type from the active regions resulting in a transistor that is always off when standard voltages are applied to the device.Type: GrantFiled: April 19, 2004Date of Patent: May 15, 2007Assignee: HRL Laboratories, LLCInventors: Lap-Wai Chow, William M. Clark, Jr., James P. Baukus
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Patent number: 7195981Abstract: A method of forming an integrated circuit employable with a power converter. In one embodiment, the method of forming the integrated circuit includes forming a power switch of a power train of the power converter on a semiconductor substrate, and forming a driver switch of a driver configured to provide a drive signal to the power switch and embodied in a transistor. The method of forming the transistor includes forming a gate over the semiconductor substrate, and forming a source/drain by forming a lightly doped region adjacent a channel region recessed into the semiconductor substrate and forming a heavily doped region adjacent the lightly doped region. The method of forming the transistor further includes forming an oppositely doped well within the channel region, and forming a doped region with a doping concentration profile less than the heavily doped region between the heavily doped region and the oppositely doped well.Type: GrantFiled: August 23, 2004Date of Patent: March 27, 2007Assignee: Enpirion, Inc.Inventors: Ashraf W. Lotfi, Jian Tan