With Schottky Gate (epo) Patents (Class 257/E21.458)
  • Patent number: 8962461
    Abstract: Consistent with an example embodiment, a GaN heterojunction structure has a three-layer dielectric structure. The lowermost and middle portions of the gate electrode together define the gate foot, and this is associated with two dielectric layers. A thinner first dielectric layer is adjacent the gate edge at the bottom of the gate electrode. The second dielectriclayer corresponds to the layer in the conventional structure, and it is level with the main portion of the gate foot.
    Type: Grant
    Filed: December 16, 2013
    Date of Patent: February 24, 2015
    Assignee: NXP B.V.
    Inventors: Godefridus Adrianus Maria Hurkx, Jeroen Antoon Croon, Johannes Josephus Theodorus Marinus Donkers, Stephan Heil, Jan Sonsky
  • Patent number: 8865543
    Abstract: The embodiments of the present invention provide a Ge-based NMOS device structure and a method for fabricating the same. By using the method, double dielectric layers of germanium oxide (GeO2) and metal oxide are deposited between the source/drain region and the substrate. The present invention not only reduces the electron Schottky barrier height of metal/Ge contact, but also improves the current switching ratio of the Ge-based Schottky and therefore, it will improve the performance of the Ge-based Schottky NMOS transistor. In addition, the fabrication process is very easy and completely compatible with the silicon CMOS process. As compared with conventional fabrication method, the Ge-based NMOS device structure and the fabrication method in the present invention can easily and effectively improve the performance of the Ge-based Schottky NMOS transistor.
    Type: Grant
    Filed: February 21, 2012
    Date of Patent: October 21, 2014
    Assignee: Peking University
    Inventors: Ru Huang, Zhiqiang Li, Xia An, Yue Guo, Xing Zhang
  • Patent number: 8778747
    Abstract: Embodiments include but are not limited to apparatuses and systems including a buffer layer, a group III-V layer over the buffer layer, a source contact and a drain contact on the group III-V layer, and a regrown Schottky layer over the group III-V layer, and between the source and drain contacts. The embodiments further include methods for making the apparatuses and systems. Other embodiments may be described and claimed.
    Type: Grant
    Filed: May 25, 2011
    Date of Patent: July 15, 2014
    Assignee: TriQuint Semiconductor, Inc.
    Inventor: Edward A. Beam, III
  • Patent number: 8278131
    Abstract: A method and apparatus for operating an imager pixel that includes the act of applying a relatively small first polarity voltage and a plurality of pulses of a second polarity voltage on the gate of a transfer transistor during a charge integration period.
    Type: Grant
    Filed: August 12, 2011
    Date of Patent: October 2, 2012
    Assignee: Micron Technology, Inc.
    Inventor: John Ladd
  • Patent number: 8183103
    Abstract: A method for manufacturing an integrated circuit structure is disclosed. First, a dielectric layer is formed on a substrate, the substrate has a transistor region and a diode region. Next, a contact hole and an opening are formed in the dielectric layer, a size of the opening being larger than that of the contact hole. Next, a first metal layer is formed on the dielectric layer and filled into the contact hole and the opening. Next, a portion of the first metal layer is removed to form a contact plug above the transistor region and form a metal spacer on a sidewall of the opening. Next, an ion implantation process is performed to form a lightly doped region in the substrate at a bottom of the opening. Finally, a contact metal layer is formed on the lightly doped region.
    Type: Grant
    Filed: March 4, 2010
    Date of Patent: May 22, 2012
    Assignee: United Microelectronics Corp.
    Inventor: Yan-Hsiu Liu
  • Patent number: 8148217
    Abstract: A method of manufacturing a semiconductor device includes forming a mask layer on a first-conductivity-type semiconductor substrate, etching the semiconductor substrate using the mask layer as a mask, thereby forming a projecting semiconductor layer, forming a first insulating layer on the semiconductor substrate to cover a lower portion of the projecting semiconductor layer, doping a first-conductivity-type impurity into the first insulating layer, thereby forming a high-impurity-concentration layer in the lower portion of the projecting semiconductor layer, forming gate insulating films on side surfaces of the projecting semiconductor layer which upwardly extend from an upper surface of the first insulating layer, and forming a gate electrode on the gate insulating films and on the first insulating film.
    Type: Grant
    Filed: May 3, 2011
    Date of Patent: April 3, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Izumida, Sanae Ito, Takahisa Kanemura
  • Patent number: 8114696
    Abstract: Provided is a CMOS image sensor with an asymmetric well structure of a source follower. The CMOS image sensor includes: a well disposed in an active region of a substrate; a drive transistor having one terminal connected to a power voltage and a first gate electrode disposed to cross the well; and a select transistor having a drain-source junction between another terminal of the drive transistor and an output node, and a second gate electrode disposed in parallel to the drive transistor. A drain region of the drive transistor and a source region of the select transistor are asymmetrically arranged.
    Type: Grant
    Filed: December 16, 2010
    Date of Patent: February 14, 2012
    Assignee: Intellectual Ventures II LLC
    Inventor: Hee-Jeong Hong
  • Patent number: 8043904
    Abstract: A method of manufacturing a semiconductor device includes forming a mask layer on a first-conductivity-type semiconductor substrate, etching the semiconductor substrate using the mask layer as a mask, thereby forming a projecting semiconductor layer, forming a first insulating layer on the semiconductor substrate to cover a lower portion of the projecting semiconductor layer, doping a first-conductivity-type impurity into the first insulating layer, thereby forming a high-impurity-concentration layer in the lower portion of the projecting semiconductor layer, forming gate insulating films on side surfaces of the projecting semiconductor layer which upwardly extend from an upper surface of the first insulating layer, and forming a gate electrode on the gate insulating films and on the first insulating film.
    Type: Grant
    Filed: November 5, 2009
    Date of Patent: October 25, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Izumida, Sanae Ito, Takahisa Kanemura
  • Patent number: 8035141
    Abstract: A semiconductor structure including a bi-layer nFET embedded stressor element is disclosed. The bi-layer nFET embedded stressor element can be integrated into any CMOS process flow. The bi-layer nFET embedded stressor element includes an implant damaged free first layer of a first epitaxy semiconductor material having a lattice constant that is different from a lattice constant of a semiconductor substrate and imparts a tensile strain in a device channel of an nFET gate stack. Typically, and when the semiconductor is composed of silicon, the first layer of the bi-layer nFET embedded stressor element is composed of Si:C. The bi-layer nFET embedded stressor element further includes a second layer of a second epitaxy semiconductor material that has a lower resistance to dopant diffusion than the first epitaxy semiconductor material. Typically, and when the semiconductor is composed of silicon, the second layer of the bi-layer nFET embedded stressor element is composed of silicon.
    Type: Grant
    Filed: October 28, 2009
    Date of Patent: October 11, 2011
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Abhishek Dube, Jinghong Li, Viorel Ontalus, Zhengmao Zhu
  • Patent number: 8021908
    Abstract: A method and apparatus for operating an imager pixel that includes the act of applying a relatively small first polarity voltage and a plurality of pulses of a second polarity voltage on the gate of a transfer transistor during a charge integration period.
    Type: Grant
    Filed: November 10, 2010
    Date of Patent: September 20, 2011
    Assignee: Micron Technology, Inc.
    Inventor: John Ladd
  • Patent number: 7928480
    Abstract: A semiconductor device has a semiconductor layer, and a first electrode (Schottky electrode or MIS electrode) and a second electrode (ohmic electrode) which are formed on the semiconductor layer apart from each other. The first electrode has a cross section in the shape of a polygon. A second electrode-side corner of the polygon has an interior angle of which an outward extension line of a bisector crosses the semiconductor layer or the second electrode. The interior angle of such a second electrode-side corner is larger than 90°.
    Type: Grant
    Filed: November 30, 2006
    Date of Patent: April 19, 2011
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Masaharu Yamashita, John Kevin Twynam
  • Patent number: 7915713
    Abstract: An integrated circuit includes a first field effect transistor of a first carrier type and a second field effect transistor of a second, different carrier type. In a conductive state, a first channel of the first field effect transistor is oriented to one of a first set of equivalent crystal planes of a semiconductor substrate and a second channel of the second field effect transistor is oriented to at least one of a second, different set of equivalent crystal planes. The first set of equivalent crystal planes is parallel to a main surface of the semiconductor substrate and the second set of equivalent crystal planes is perpendicular to the main surface.
    Type: Grant
    Filed: July 30, 2008
    Date of Patent: March 29, 2011
    Assignee: Qimonda AG
    Inventors: Juergen Faul, Juergen Holz
  • Patent number: 7875915
    Abstract: An integrated circuit includes at least one photodiode associated with a read transistor. The photodiode is formed from a stack of three semiconductor layers comprising a buried layer, an floating substrate layer and an upper layer. The drain region and/or the source region of the transistor are incorporated within the upper layer. The buried layer is electrically isolated from the upper layer so as to allow the buried layer to be biased independently of the upper layer.
    Type: Grant
    Filed: May 10, 2006
    Date of Patent: January 25, 2011
    Assignee: STMicroelectronics S.A.
    Inventors: François Roy, Arnaud Tournier
  • Patent number: 7851798
    Abstract: A method and apparatus for operating an imager pixel that includes the act of applying a relatively small first polarity voltage and a plurality of pulses of a second polarity voltage on the gate of a transfer transistor during a charge integration period.
    Type: Grant
    Filed: May 4, 2005
    Date of Patent: December 14, 2010
    Assignee: Micron Technology, Inc.
    Inventor: John Ladd
  • Patent number: 7692222
    Abstract: A semiconductor structure and method wherein a recess is disposed in a surface portion of a semiconductor structure and a dielectric film is disposed on and in contract with the semiconductor. The dielectric film has an aperture therein. Portions of the dielectric film are disposed adjacent to the aperture and overhang underlying portions of the recess. An electric contact has first portions thereof disposed on said adjacent portions of the dielectric film, second portions disposed on said underlying portions of the recess, with portions of the dielectric film being disposed between said first portion of the electric contact and the second portions of the electric contact, and third portions of the electric contact being disposed on and in contact with a bottom portion of the recess in the semiconductor structure. The electric contact is formed by atomic layer deposition of an electrically conductive material over the dielectric film and through the aperture in such dielectric film.
    Type: Grant
    Filed: November 7, 2006
    Date of Patent: April 6, 2010
    Assignee: Raytheon Company
    Inventors: Kamal Tabatabaie, Robert B. Hallock
  • Patent number: 7662679
    Abstract: A method of manufacturing a semiconductor device includes forming a mask layer on a first-conductivity-type semiconductor substrate, etching the semiconductor substrate using the mask layer as a mask, thereby forming a projecting semiconductor layer, forming a first insulating layer on the semiconductor substrate to cover a lower portion of the projecting semiconductor layer, doping a first-conductivity-type impurity into the first insulating layer, thereby forming a high-impurity-concentration layer in the lower portion of the projecting semiconductor layer, forming gate insulating films on side surfaces of the projecting semiconductor layer which upwardly extend from an upper surface of the first insulating layer, and forming a gate electrode on the gate insulating films and on the first insulating film.
    Type: Grant
    Filed: August 15, 2005
    Date of Patent: February 16, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Izumida, Sanae Ito, Takahisa Kanemura
  • Patent number: 7586150
    Abstract: A method of manufacturing a local recess channel transistor in a semiconductor device. A hard mask layer is formed on a semiconductor substrate that exposes a portion of the substrate. The exposed portion of the substrate is etched using the hard mask layer as an etch mask to form a recess trench. A trench spacer is formed on the substrate along a portion of sidewalls of the recess trench. The substrate along a lower portion of the recess trench is exposed after the trench spacer is formed. The exposed portion of the substrate along the lower portion of the recess trench is doped with a channel impurity to form a local channel impurity doped region surrounding the lower portion of the recess trench. A portion of the local channel impurity doped region surrounding the lower portion of the recess trench is doped with a Vth adjusting impurity to form a Vth adjusting impurity doped region inside the local channel impurity doped region. The width of the lower portion of the recess trench is expanded.
    Type: Grant
    Filed: August 25, 2005
    Date of Patent: September 8, 2009
    Assignee: Samsung Electronic Co., Ltd.
    Inventors: Se-myeong Jang, Yong-chul Oh, Makoto Yoshida
  • Patent number: 7338883
    Abstract: The invention relates to a process for producing an electronic structure that includes a thin layer of strained semiconductor material from a donor wafer. The donor wafer has a lattice parameter matching layer that includes an upper layer of a semiconductor material having a first lattice parameter and a film of semiconductor material having a second, nominal, lattice parameter that is substantially different from the first lattice parameter and that is strained by the matching layer. This process includes transfer of the film to a receiving substrate. The invention also relates to the semiconductor structures that can be produced by the process.
    Type: Grant
    Filed: June 24, 2005
    Date of Patent: March 4, 2008
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Bruno Ghyselen, Daniel Bensahel, Thomas Skotnicki
  • Publication number: 20070284569
    Abstract: A charge coupled device (CCD) is disclosed which has a semiconductor body (20) comprising polymer or oligomer semiconductor material in place of the conventional silicon. A back electrode (22) of the device is electrically coupled to the semi-conductor body through a Schottky junction, reducing the availability of holes in the semiconductor body. Shift electrodes forming a shift register are driven by negative electrical potentials and accumulations of holes in p type semiconductor material represent data.
    Type: Application
    Filed: December 16, 2004
    Publication date: December 13, 2007
    Inventor: William Eccleston
  • Patent number: 7125740
    Abstract: A method of fabricating a solid-state image pickup device comprising forming mask patterns corresponding to patterns of first and third transfer electrodes, which are to be alternately arranged in each vertical transfer register formation region and which are to extend in parallel to each other between light receiving portions adjacent to each other in the vertical direction, on a first electrode material layer. The method also includes forming side walls on each of the mask patterns. The method further includes patterning the first electrode material layer via the mask patterns having the side walls, to form first and third transfer electrodes formed by the first layer.
    Type: Grant
    Filed: July 12, 2004
    Date of Patent: October 24, 2006
    Assignee: Sony Corporation
    Inventors: Junji Yamane, Kunihiko Hikichi
  • Patent number: 7084061
    Abstract: Methods of fabricating a semiconductor device having a MOS transistor with a strained channel are provided. The method includes forming a MOS transistor at a portion of a semiconductor substrate. The MOS transistor is formed to have source/drain regions spaced apart from each other and a gate electrode located over a channel region between the source/drain regions. A stress layer is formed on the semiconductor substrate having the MOS transistor. The stress layer is then annealed to convert a physical stress of the stress layer into a tensile stress or increase a tensile stress of the stress layer.
    Type: Grant
    Filed: March 12, 2004
    Date of Patent: August 1, 2006
    Assignee: Samsung Electronics, Co., Ltd.
    Inventors: Min-Chul Sun, Ja-Hum Ku, Sug-Woo Jung, Sun-Pil Youn, Min-Joo Kim, Kwan-Jong Roh